Production of porous materials utilizing self-assembly of magnetic particles​

Fabrication of electro static vacuum sensors using combined process​

Fabrication of tactile display changing reaction force​

Development of surgery simulator using photoelasticity materials​

Light management substrate fabricated by nanoimprint for solar cell​

Microsystems utilizing unique properties of magnetic nanoparticles​

オリンパス株式会社   研究員

1994.4 - 1997.5

IEEE

日本機械学会　第95期機械材料・材料加工部門 ICM&Pワーキング   委員  

2017.4 - 2018.3   

日本機械学会 第95期マイクロ・ナノ工学部門 運営委員会   委員  

2017.4 - 2018.3   

日本機械学会 第95期機械材料・材料加工部門 ICM&Pワーキング   委員  

2017.4 - 2018.3   

精密工学会東海支部   幹事  

2017.3 - 2018.3   

精密工学会東海支部   幹事  

2017.3 - 2018.3   

電気学会　E部門編修委員会   副委員長  

2012.4   

日本機械学会　マイクロ・ナノ工学部門技術委員会   委員長  

2012.4   

日本機械学会　機械材料・材料加工部門　第４技術委員会（国際交流関係）   委員長  

2012.4 - 2013.3   

電気学会 E部門編修委員会   副委員長  

2012.4 - 2013.3   

日本機械学会 機械材料・材料加工部門 第４技術委員会（国際交流関係）   委員長  

2012.4 - 2013.3   

日本機械学会 マイクロ・ナノ工学部門技術委員会   委員長  

2012.4 - 2013.3   

電気学会　E部門役員会   委員  

2011.4   

精密工学会　会誌編集委員会   委員  

2011.4   

日本機械学会　マイクロ・ナノ工学専門会議   副委員長  

2011.4 - 2012.3   

日本機械学会 マイクロ・ナノ工学専門会議   副委員長  

2011.4 - 2012.3   

電気学会 E部門役員会   委員  

2011.4 - 2012.3   

精密工学会 会誌編集委員会   委員  

2011.4 - 2012.3   

日本機械学会　第88期機械材料・材料加工部門　第１技術委員会（年次大会担当）   委員長  

2010.4 - 2011.3   

日本機械学会　産学連携センター技術ロードマップ委員会   委員  

2007.6   

日本機械学会　機械材料・材料加工部門一般表彰（優秀講演論文部門）

2009.9   日本機械学会  

平成１８年度東工大挑戦的研究賞

2006.12   東京工業大学  

平成１６年度財団法人ファナックＦＡロボット財団論文賞（特別賞）

2005.12   財団法人ファナックＦＡロボット財団  

平成１５年度精密工学会論文賞

2004.3   精密工学会  

平成１３年度（第３６回）日本塑性加工学会論文賞

2001.2   日本塑性加工学会  

Combinatorial search for Ti-Ni-Hf high formable shape memory alloys Reviewed

Inoue Shin, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Sakurai Junpei

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( 6 )   2022.6

Effect of structural relaxation at bellow crystallization temperature on internal stress of Ni-Nb-Zr thin film amorphous alloys diaphragm for micro electromechanical systems sensors Reviewed

Haga Fuyuki, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Hoshino Yuto, Sakurai Junpei

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( SD )   2022.6

Stress-Driven Magnetic Barkhausen Noise Generation in FeCo Magnetostrictive Alloy Reviewed

Yamazaki Takahiro, Furuya Yasubumi, Hata Seiichi, Nakao Wataru

IEEE TRANSACTIONS ON MAGNETICS   Vol. 58 ( 1 )   2022.1

New Long Life Fast Atom Beam Source for Surface Activated Bonding Reviewed

Morisaki R., Sakurai J., Oka C., Yamazaki T., Akao T., Takahashi T., Tsuji H., Ohno N., Hata S.

2021 7TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)     page： 8 - 8   2021.10

FABRICATION AND EVALUATION OF A NOVEL ACTUATOR FOR REACTION FORCE VARIABLE PASSIVE-TYPE TACTILE DISPLAYS Reviewed

Murase Masanori, Nambara Keita, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Sakurai Junpei

2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)     page： 663 - 666   2021.6

Fabrication of textured substrates for dye-sensitized solar cells using polydimethylsiloxane nanoimprint lithography

Yang Na, Oka Chiemi, Hata Seiichi, Sakurai Junpei

ADVANCED OPTICAL TECHNOLOGIES   Vol. 8 ( 6 ) page： 491 - 497   2019.12

FABRICATION AND EVALUATION OF TACTILE PINS FOR PASSIVE TYPE TACTILE DISPLAYS USING HIGH FORMABILITY SHAPE MEMORY ALLOYS

Nambara Keita, Iki Keiichirou, Oka Chiemi, Hata Seiichi, Sakurai Junpei

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)     page： 1854 - 1857   2019

Effect of Heat Accumulation on Femtosecond Laser Reductive Sintering of Mixed CuO/NiO Nanoparticles Reviewed

Mizoshiri Mizue, Nishitani Kenta, Hata Seiichi

MICROMACHINES   Vol. 9 ( 6 )   2018.6

Selective fabrication of p-type and n-type thermoelectric micropatterns by the reduction of CuO/NiO mixed nanoparticles using femtosecond laser pulses Reviewed

Mizoshiri Mizue, Hata Seiichi

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING   Vol. 124 ( 1 )   2018.1

FABRICATION OF A NOVEL NANOPOROUS FILM BY CHEMICAL DEALLOYING OF CU-CR AND ITS APPLICATION FOR A SENSOR Reviewed

Yoshii Yusuke, Sakurai Junpei, Mizoshiri Mizue, Hata Seiichi

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)     page： 1104-1107   2018

Fabrication of Novel Nanoporous Films in Moisture in-Oil Sensors via Chemical Dealloying of Cu-Cr using Combinatorial Search of Cu Cr Alloy Compositions Reviewed

Yoshii Yusuke, Sakurai Junpei, Mizoshiri Mizue, Hata Seiichi

MRS ADVANCES   Vol. 3 ( 4 ) page： 225-232   2018

FABRICATION OF FLEXIBLE THE OELECTRIC GENE A TORS WITH A LENS ARRAY FOR NEAR-INFRARED SOLAR LIGHT HARVESTING Reviewed

Shimizu Y., Mizoshiri M., Mikami M., Ito Y., Sakurai J., Hata S.

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)     page： 604-607   2018

Basic research on micro processing characteristics of reverse lift-off process

Nakagawa Yuki, Yamada Kyohei, Mizoshiri Mizue, Oka Chiemi, Sakurai Junpei, Hata Seiichi

2018 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS)     2018

Direct writing of three-dimensional Cu-based sensors using femtosecond laser reduction of CuO nanoparticles

Mizoshiri Mizue, Hata Seiichi

LASER-BASED MICRO- AND NANOPROCESSING XII   Vol. 10520   2018

Femtosecond laser direct writing of Cu-based fine patterns using Cu2O nanospheres

Kondo Yukinari, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

LASER-BASED MICRO- AND NANOPROCESSING XII   Vol. 10520   2018

Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass

Uejima S., Oka C., Hata S., Sakurai J.

2018 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS)     2018

FABRICATION OF COPPER/COPPER-NICKEL THIN-FILM THERMOELECTRIC GENERATORS WITH ENERGY STORAGE DEVICES

Shimizu Y., Mizoshiri M., Mikami M., Sakurai J., Hata S.

17TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2017)   Vol. 1052   2018

Fabrication of thin-film thermoelectric generators with ball lenses for conversion of near-infrared solar light Reviewed

Ito Yoshitaka, Mizoshiri Mizue, Mikami Masashi, Kondo Tasuku, Sakurai Junpei, Hata Seiichi

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 56 ( 6 )   2017.6

Ni-based composite microstructures fabricated by femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles Reviewed

Tamura Kenki, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 56 ( 6 )   2017.6

Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles Reviewed

Arakane S., Mizoshiri M., Sakurai J., Hata S.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING   Vol. 27 ( 5 )   2017.5

Three-dimensional Cu microfabrication using femtosecond laser-induced CuO nanoparticle reduction Reviewed

Shun Arakane, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

Applied Physics Express   Vol. 10   page： 017201   2017.4

Three-dimensional Cu microfabrication using femtosecond laser-induced reduction of CuO nanoparticles Reviewed

Arakane Shun, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

APPLIED PHYSICS EXPRESS   Vol. 10 ( 1 )   2017.1

Polymer-based blood vessel models with micro-temperature sensors in EVE Reviewed

Mizoshiri Mizue, Ito Yasuaki, Hayakawa Takeshi, Maruyama Hisataka, Sakurai Junpei, Ikeda Seiichi, Arai Fumihito, Hata Seiichi

NANOSENSORS, BIOSENSORS, INFO-TECH SENSORS AND 3D SYSTEMS 2017   Vol. 10167   2017

Direct-writing of copper-based micropatterns on polymer substrates using femtosecond laser reduction of copper (II) oxide nanoparticles Reviewed

Mizoshiri Mizue, Ito Yasuaki, Sakurai Junpei, Hata Seiichi

NANOSENSORS, BIOSENSORS, INFO-TECH SENSORS AND 3D SYSTEMS 2017   Vol. 10167   2017

MICRO FOLDING STRUCTURE USING TI-NI-ZR HIGH FORMABLE SHAPE MEMORY ALLOYS

Watanabe H., Mizoshiri M., Hata S., Sakurai J.

2017 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS)     2017

Effect of different solvents on Cu micropatterns formed via femtosecond laser reduction patterning Reviewed

Mizue Mizoshiri, Shun Arakane, Junpei Sakurai, Seiichi Hata

International Journal of Automation Technology   Vol. 10   page： 934-940   2016.11

Direct Writing of Cu-based Micro-temperature Sensors onto Glass and Poly(dimethylsiloxane) Substrates Using Femtosecond Laser Reductive Patterning of CuO Nanoparticles

Mizue Mizoshiri, Seiichi Hata

Research & Reviews: Journal of Material Sciences   Vol. 4 ( 4 ) page： 47-54   2016.10

Fabrication of a Cr Nanoporous Thin Film via Sputter Deposition and Investigation of Its Applicability as a Water-oil Separation Electrode in a MEMS Moisture Sensor Reviewed

Yusuke Yoshii, Yuuki Fukagawa, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

IEEJ Transactions on Sensors and Micromachines   Vol. 137 ( 1 ) page： 15-22   2016.10

Fabrication of CuO-based anti-reflection structures using self-arranged submicron SiO2 spheres for thermoelectric solar generation Reviewed

Tasuku Kondou, Mizue Mizoshiri, Masashi Mikami, Junpei Sakurai, Seiichi Hata

Japanese Journal of Applied Physics   Vol. 55 ( 6S1 )   2016.5

Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning Reviewed

Mizue Mizoshiri, Yasuaki Ito, Shun Arakane Junpei Sakurai, Seiichi Hata

Japanese Journal of Applied Physics   Vol. 55   page： 06GP05   2016.5

金属酸化物ナノ粒子を用いたフェムト秒レーザー還元直接描画法

溝尻瑞枝，秦誠一

OPTRONICS   Vol. 35 ( 413 ) page： 145-151   2016.5

6. 機械材料・材料加工(<小特集>技術ロードマップから見る2030年の社会) Invited Reviewed

秦 誠一, 大塚 年久, 古川 英光, 中尾 航

日本機械学会誌   Vol. 119 ( 1170 ) page： 300 - 302   2016

6・2・6 特殊加工(6・2 材料加工,6.機械材料・材料加工,<特集>機械工学年鑑) Invited

秦 誠一

日本機械学会誌   Vol. 118 ( 1161 ) page： 468   2015

Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method Reviewed

Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, and Seiichi Hata

Applied Physics Express   Vol. 7   page： 057101   2014.4

Ni-Nb-Zr-Ti amorphous alloys for glass lens molding die materials Reviewed

Jiang S., Abe M., Ando M., Aono Y., Sakurai J., Hata S.

Journal of Microelectronic Engineering   Vol. 116   page： 6-10   2014.3

Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks Reviewed

Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Seiichi Hata

Proceedings of 24th 2013 International Symposium on Micro-NanoMechatronics and Human Science     page： 100-106   2013.11

Novel Combinatorial Method for Evaluation of Machinability for Glass Lens Mold Material Reviewed

Shengxian Jiang, Junpei Sakurai, Yuko Aono and Seiichi Hata

Proceedings of 24th 2013 International Symposium on Micro-NanoMechatronics and Human Science     page： 100-106   2013.11

センサ用磁歪材料のコンビナトリアル探索 Reviewed

前谷卓也，中光　豊，桜井淳平，中川茂樹，秦　誠一

電気学会論文誌E   Vol. 133 ( 8 ) page： 342-347   2013.8

High-Throughput Characterization of Thin Film Shape Memory Alloys Reviewed

IEEJ Transactions on Sensors and Micromachines   Vol. 133 ( 8 ) page： 348-353   2013.8

PVDF Actuator for High-Frequency Fatigue Test of Thin-Film Metals Reviewed

Nastaran Tamjidia, Kohei Sato, Junpei Sakurai, and Seiichi Hata

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   Vol. 8 ( 2 ) page： 199-205   2013.1

研究室だより：名古屋大学大学院工学研究科マイクロ・ナノシステム工学専攻集積機械デバイス講座マイクロ・ナノプロセス工学グループ Invited

秦 誠一

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）   Vol. 133 ( 6 ) page： NL6_2 - NL6_2   2013

6・2・6 特殊加工(6・2 材料加工,6.機械材料・材料加工,<特集>機械工学年鑑) Invited

秦 誠一

日本機械学会誌   Vol. 116 ( 1137 ) page： 534   2013

High-frequency fatigue test of sputtered metallic thin film using PVDF microactuator Reviewed

Tamjidi N., Suzaki R., Sato K., Nakamitsu Y., Sakurai J., Hata S.

IEICE Electronics Express   Vol. 9 ( 5 ) page： 403-409   2012

Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization Reviewed

Sakurai J., Hata S.

Materials Science and Engineering: A   ( 541 ) page： 8–13   2012

電鋳Niパイプを用いた円筒形超音波リニアマイクロアクチュエータ Reviewed

高垣輝多, 孫　東明, 汪　盛, 桜井淳平, 秦　誠一

日本機械学会論文集C編   Vol. 77 ( 783 ) page： 4136-4143   2011.11

Searching for noble Ni-Nb-Zr thin film amorphous alloys for optical glass device molding die materials Reviewed

Junpei Sakurai, Mitsuhiro Abe, Masahiro Ando, Yuko Aono and Seiichi Hata

Precision Engineering   Vol. 35 ( 4 ) page： 537-546   2011.10

Novel Thermographic Method for Characterizing Transformation Temperatures of Thin Film Shape Memory Alloys Aimed at Combinatorial Approach Reviewed

Yuko Aono, Junpei Sakurai, Akira Shimokohbe, and Seiichi Hata

Japanese Journal of Applied Physics   Vol. 50 ( 066601 ) page： 5   2011.2

CORROSION RESISTANCE CONSOLIDATION OF A DIAPHRAGM TYPE VACUUM SENSOR Reviewed

H. Kozako, J. Sakurai, N. Mukai, Y. Ohnuma, T. Takahashii, and S. Hata

Technical Digest of The 24th IEEE International Conference on MEMS     page： 400-403   2011.1

Driving mechanism, design, fabrication process and experiments of a cylindrical ultrasonic linear microactuator Reviewed

Sheng Wang, Dongming Sun, Keebong Choi. Seiichi Hata and Akira Shimokohbe

IEEE Transactions on UFFC   Vol. 58 ( 1 ) page： 168-77   2011.1

Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials Reviewed

Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Shengxian Jiang, Akira Shimokohbe, Seiichi Hata

Journal Solid Mechanics and Materials Engineering   Vol. 4 ( 12 ) page： 1742-1753   2010.12

Combinatorial Technology on Searching for Novel Amorphous Alloys Reviewed

Seiichi Hata, Junpei Sakurai, Y. Aono, N. Tamujidi, Y. Matsumoto and A. Shimokohbe

The 6th International Workshop on Combinatorial Materials Science and Technology     page： CDROM   2010.10

Temperature gradient heating system for high-throughput method for determining time-temperature-transformation diagram using thin film samples Reviewed

Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe and Seiichi Hata

The 6th International Workshop on Combinatorial Materials Science and Technology     page： CD-ROM   2010.10

Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials Reviewed

Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando and Seiichi Hata

Key Eng. Mater.   Vol. 447-448   page： 661-665   2010.9

Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting a Shape Memory Effect after Crystallization Reviewed

Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata

Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing     page： 78   2010.8

High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples Reviewed

Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata

Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing, 90 (2010.8, Cairns, Australia)     page： 90   2010.8

Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Optical Glass Lenses Molding Materials Reviewed

Junpei Sakurai, Seiichi Hata, Ryusuke Yamuchi, Mitsuhiro Abe, and Akira Shimokohbe

Precision Engineering   Vol. 34 ( 3 ) page： 431-439   2010.7

A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel Reviewed

Kee-Bong Choi, Jae Jong Lee, Seiichi Hata

Sensors and Actuators A   Vol. 161 ( 1-2 ) page： 173-181   2010.6

High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples Reviewed

Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata

Materials Science Forum   Vol. 654-656   page： 2426-2429   2010.6

Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting Shape Memory Effect After Crystallization Reviewed

Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata

Materials Science Forum   Vol. 654-656   page： 1066-1069   2010.6

Evaluation of the validity of crystallization temperature measurements using thermograpy with different sample configurations Reviewed

Yuko Aono, Junpei Sakurai, Akira Shimokohbe, and Seiichi Hata

Jpn. J. Appl. Phys   Vol. 49 ( 7 ) page： 076601-076601-7   2010

Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials Reviewed

Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Shengxian Jiang, Akira Shimokohbe, Seiichi Hata,

Journal Solid Mechanics and Materials Engineering   Vol. 4 ( 12 ) page： 1742-1753   2010

High-Throughput Measurement Method for Time-Temperature-Transformation Diagram of Thin Film Amorphous Alloys Reviewed

Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe, and Seiichi Hata,

Applied Physics Express   Vol. 3 ( 12 ) page： 125601-125601-3   2010

ガラス成形金型用Ptフリーアモルファス合金のコンビナトリアル探索 Reviewed

秦　誠一，桜井淳平，阿部充博，安藤正将，青野祐子，下河邉明

日本機械学会論文集(C編)   Vol. 76   page： 682-684   2010

A piezoelectric linear ultrasonic motor with the structure of circular cylindrical stator and slider Reviewed

D. M. Sun, S. Wang, J. Sakurai, K. B. Choi, A. Shimokohbe, S. Hata

Smart Mater. Struct.   Vol. 19 ( 4 ) page： 045008   2010

Axial vibration characteristics of a cylindrical Reviewed

D. M. Sun, S. Wang, S. Hata, A. Shimokohbe,

radially polarized piezoelectric transducer with different electrode patterns, Ultrasonics   Vol. 50 ( 3 ) page： 403-410   2010

Theoretical and experimental investigation of the traveling wave propagation on a several-millimeter-long cylindrical pipe driven by piezoelectric ceramic tubes, Reviewed

D. M. Sun, S. Wang, S. Hata, J. Sakurai, A. Shimokohbe

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control   Vol. 57 ( 7 ) page： 1600-1611   2010

Development of high-performance vacuum sensor using joining method for thin film metallic glass Reviewed

Seiichi Hata, Junpei Sakurai, Hiroshi Kozako, Yukiko Matsumoto, Akira Shimokohbe, Nobuyuki Mukai, Yoshinori Ohnuma, Tsutomu Takahashi, Yasunori Saotome, Hisamichi Kimura, Parmanand Sharma and Akihisa Inoue

Proc. of ICCCI 2009     page： CR-ROM   2009.9

Fabrication of thin film metallic glass (TFMG) pipe for a cylindrical ultrasonic linear micro-actuator Reviewed

Sheng Wang, Dongming Sun, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

Sensor and Actuator A Physical   Vol. 153 ( 1 ) page： 120-126   2009.6

Novel Crystallization Temperature Measurement Method for Combinatorial Evaluation using Infrared Thermography Reviewed

Yuko Aono, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe

Proc. of 2009 MRS Spring Meeting   ( 1159E ) page： G1-4 CD-ROM   2009.4

Vibration characteristics of a cylindrical shell with 25 µm thickness fabricated by the rotating sputtering system Reviewed

Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe,

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control   Vol. 56 ( 3 ) page： 622-630   2009.3

単一アークプラズマガンを用いたコンビナトリアル蒸着法 Reviewed

秦　誠一，藤田敏充，桜井淳平，下河邉明

材料   Vol. 58 ( 10 ) page： 821-826   2009

Laser Forming of Thin Film Metallic Glass Reviewed

Masaaki OTSU, Yuki IDE, Junpei SAKURAI Seiichi HATA and Kazyaki TAKASHIMA

Journal of Solid Mechanics and Materials Engineering   Vol. 3 ( 2 ) page： 387-395   2009

Characterization of the Pt-Hf-Zr-Ni Thin Film Amorphous Alloys for Precise Optical Glass Lens Mold Reviewed

Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shinokohbe,

J. Solid Mechanics and Mat. Eng   Vol. 3 ( 8 ) page： 1022-1032   2009

Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator Reviewed

Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

Microelectronic Engineering,   Vol. 86 ( 4-6 ) page： 1262-1266   2009

Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated by a Carousel-Type Sputtering System Reviewed

Junpei SAKURAI, Seiichi HATA and Akira SHIMOKOHBE

Jpn. J. Appl. Phys.   Vol. 48 ( 2 ) page： 025503   2009

Measurement of Crystallization Temperature Using Thermography for Thin Film Amorphous Alloy Samples Reviewed

Meiichi Hata, Yuko Aono, Junpei Sakurai and Akira Shimokohbe

Applied Physics Express   Vol. 2 ( 3 ) page： 036501   2009

A traveling wave type of piezoelectric ultrasonic bidirectional linear microactuator Reviewed

Dongming Sun, Sheng Wang, Junpei Sakurai, Kee-Bong Choi, Seiichi Hata and Akira Shimokohbe

Applied Physics Express   Vol. 2 ( 4 ) page： 046503   2009

Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube, Sensors and Actuators, Reviewed

D. M. Sun, S. Wang, S. Hata, J. Sakurai, A. Shimokohbe

A: physical   Vol. 156 ( 2 ) page： 359-365   2009

A cylindrical ultrasonic linear microactuator Reviewed

Sheng Wang, Dongming Sun, Seiichi Hata and Akira Shimokohbe

Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008)     page： CD-ROM   2008.10

Search for Novel MEMS Materials using a Combinatorial Method Reviewed

Seiichi Hata, Ryusuke Yamauchi, Taiyo Ueshima, Junpei Sakurai and Akira Shimokohbe

Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008)     page： CD-ROM   2008.10

Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator Reviewed

Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

Book of abstracts in 34th International Conference on Micro & Nano Engineering (MNE 2008)     page： 117   2008.9

Combinatorial evaluation of heat and oxidation resistances of Ni-Nb-Zr thin film amorphous alloys Reviewed

Junpei Sakurai, Seiichi Hata, Mitsuhiro Abe, Yuko Aono and Akira Shimokohbe

Processings of 5th International Conference on Combinatorial and High-Throughput Materials Science.     page： 1035   2008.9

New Measurement Method for Crystallization Temperature of Thin Film Amorphous Alloy Reviewed

Yuko Aono, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

JUNIOR EUROMAT 2008     page： CD-ROM   2008.7

A novel cylindrical ultrasonic linear microactuator Reviewed

Wang Sheng, Dongming Sun, Seiichi Hata and Akira Shimokohbe

Proceedings of European Society for Precision Engineering and Nanotechnology     page： 456-459   2008.5

Laser Forming of Pd-Based Thin Film Metallic Glass Reviewed

14. Masaaki Otsu, Yuki IDE, Junpei Sakurai, Seiichi Hata, Kazuki Takashima

Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials     page： 56   2008.5

Laser Forming of Pd-Based Thin Film Metallic Glass Reviewed

Masaaki Otsu, Yuki IDE, Junpei Sakurai, Seiichi Hata, Kazuki Takashima

Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials     page： 56   2008.5

In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system Reviewed

Yuji Matsumoto, Miki Hiraoka, Masao Katayama, Seiichi Hata, Mikio Fukuhara, Takeshi Wada, Hisamichi Kimura and Akihisa Inoue

Materials Science & Engineering B   Vol. 148 ( 1-3 ) page： 179-182   2008.2

Behavior of Joining Interface between Thin Film Metallic Glass and Silicon Nitride at Heating Reviewed

Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe,

Materials Science & Engineering B   Vol. 148 ( 1-3 ) page： 149-153   2008.2

積層型MEMS血球分析チップの開発 Reviewed

田邊力也， 秦 誠一， 下河邉 明，

精密工学会誌   Vol. 74 ( 7 ) page： 746-751   2008

ガラスレンズ成形金型用の新しいアモルファス合金のコンビナトリアル探索―結晶化開始温度，機械特性の評価― Reviewed

山内隆介，秦　誠一，桜井淳平，下河邉明

精密工学会誌   Vol. 74 ( 3 ) page： 252-263   2008

新しいPt基アモルファス合金を用いたガラスレンズ成形用金型の試作 Reviewed

秦　誠一，桜井淳平，下河邉明

日本機械学会論文集C編   Vol. 74 ( 3 ) page： 252-263   2008

Search for Novel Amorphous Alloys with High Crystallization Temperature by Combinatorial Arc Plasma Deposition Reviewed

Seiichi Hata, Junpei Sakurai, Ryusuke Yamauchi and Akira Shimokohbe

Applied Surface Science,   Vol. 254 ( 3 ) page： 738-742   2007.11

Combinatorial Arc Plasma Deposition Search for Ru-based Thin Film Metallic Glass Reviewed

Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

Applied Surface Science   Vol. 254 ( 3 ) page： 720-724   2007.11

Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold Reviewed

J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe

Proc. of 2007 MRS Fall Meeting A1.6     page： CD-ROM   2007.11

Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion Reviewed

Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe

Proc. of 2007 MRS Fall Meeting A6.8     page： CD-ROM   2007.11

Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold Reviewed

M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe

Proc. of 2007 MRS Fall Meeting A6.14     page： CD-ROM   2007.11

Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold Reviewed

J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe

Proc. of 2007 MRS Fall Meeting A1.6     page： CD-ROM   2007.11

Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion Reviewed

Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe

Proc. of 2007 MRS Fall Meeting A6.8     page： CD-ROM   2007.11

Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold Reviewed

M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe

Proc. of 2007 MRS Fall Meeting A6.14     page： CD-ROM   2007.11

Characteristics of Thin Film Metallic Glasses for MEMS and Precise Part Reviewed

J. Sakurai, S. Hata and A. Shimokohbe

Proceedings of Second TIT-BIT Joint Workshop on Mechanical Engineering     page： CD-ROM   2007.8

Characteristics of Thin Film Metallic Glasses for MEMS and Precise Part Reviewed

J. Sakurai, S. Hata and A. Shimokohbe

Proceedings of Second TIT-BIT Joint Workshop on Mechanical Engineering     page： CD-ROM   2007.8

A Hemoglobin and Volum Measurement Sensor for Point of Care Testing Analyzer using MEMS Process Reviewed

Rikiya Tanabe, Seiichi Hata and Akira Shimokohbe

IEEJ Transactions on Sensors and Micromachines   Vol. 127 ( 5 ) page： 267-271   2007.8

Behavior of joining interface between thin film metallic glass and silicon nitride at heating Reviewed

19. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC),     page： 56   2007.5

Behavior of joining interface between thin film metallic glass and silicon nitride at heating Reviewed

Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC     page： 56   2007.5

Searching for Novel Ru-Based Thin Film Metallic Glass by Combinatorial Arc Plasma Deposition Reviewed

Junpei Sakurai Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

Jpn. J. Appl. Phys   Vol. 46 ( 4A ) page： 1590-1595   2007

A Disposable Concept Laminated MEMS Hematology Chip Reviewed

R. Tanabe, S. Hata, A. Shimokohbe

Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology   ( 1 ) page： 45-48   2007

A Disposable Concept Laminated MEMS Hematology Chip Reviewed

R. Tanabe, S. Hata, A. Shimokohbe

Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology   ( 1 ) page： 45-48   2007

Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition Reviewed

Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology, pp     page： 41   2006.12

The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition Reviewed

Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology     page： pp63   2006.12

Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition Reviewed

Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology     page： pp63   2006.12

The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition Reviewed

Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology     page： pp63   2006.12

Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators Reviewed

Takashi Fukushige, Takehiko Hayashi, Seiichi Hata and Akira Shimokohbe

IEEJ Transactions on Sensors and Micromachines   Vol. 126 ( 9 ) page： 522-527   2006

MEMS complete blood count sensors designed to reduce noises from electolysis gas Reviewed

Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe

Microelectronic Engineering   Vol. 83 ( 4-9 ) page： 1646-1650   2006

Combinatorial Arc Plasma Deposition of Thin Films Reviewed

Seiichi HATA, Ryusuke YAMAUCHI, Junpei SAKURAI and Akira SHIMOKOHBE

Jpn. J. Appl. Phys.   Vol. 45 ( 4A ) page： 2708-2713   2006

Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass Reviewed

Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI and Akira SHIMOKOHBE

Jpn. J. Appl. Phys   Vol. 45 ( 7 ) page： 5911-5919   2006

A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas Reviewed

Rikiya Tanabe, Seiichi Hata and Akira Shimokohbe

IEEJ Transactions on Sensors and Micromachines   Vol. 126 ( 7 ) page： 297-301   2006

Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy Reviewed

Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

Proc. of 2005 MRS Fall Meeting     page： CD-ROM   2005.11

Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass Reviewed

Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa and Akira Shimokohbe

Proc. of 18th International Congress of Mechanical Engineering (COBEM 2005)     page： CD-ROM   2005.11

Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses Reviewed

Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

Proc. of 2005 MRS Fall Meeting     page： CD-ROM   2005.11

Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature Reviewed

24. Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

Proc. of 2005 MRS Fall Meeting     page： CD-ROM   2005.11

Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy Reviewed

Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

Proc. of 2005 MRS Fall Meeting     page： CD-ROM   2005.11

Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature Reviewed

Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

Proc. of 2005 MRS Fall Meeting     page： CD-ROM   2005.11

Integrated conical spring linear actuators for tilting-mirror applications Reviewed

T. Fukushige, S. Hata and A. Shimokohbe

Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)     page： pp12-13   2005.9

A complete blood count micro sensor designed to reduce noise from electrolysis gas Reviewed

R. Tanabe, S. Hata and A. Shimokohbe

Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005)     page： pp622-623   2005.9

Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range Reviewed

T. Fukushige, S. Hata, Takehiko Hayashi, and A. Shimokohbe

Proc. IPACK2005     page： CD-ROM, pp. IPACK2005-73145   2005.6

Thin Film Metallic Glasses as New MEMS Materials Reviewed

Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

Technical Digest of The 18th IEEE International Conference on MEMS 2005     page： 479-482   2005.1

A MEMS Conical Spring Actuator Array Reviewed

T. Fukushige, S. Hata, and A. Shimokohbe,

IEEE/ASME Journal of Microelectromechanical Systems   Vol. 14 ( 2 ) page： 243-253   2005

Novel fabrication method of metallic glass thin film using carousel type sputtering system Reviewed

J. Sakurai, S. Hata and A. Shimokohbe

Proc. of SPIE Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II,     page： 260-267   2004.12

A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking Reviewed

T. Fukushige, S. Hata and A. Shimokohbe

Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)     page： 15-16   2004.6

2-DOF thin film metallic glass microactuator Reviewed

S. Hata, H. W. JEONG and A. Shimokohbe

Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)     page： 9-10   2004.6

Large-output-force out-of-plane MEMS actuator array Reviewed

T. Fukushige, S. Hata and A. Shimokohbe

Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology,   Vol. 5276   page： 240-248   2003.12

Micro dome shape structures made of thin film metallic glass Reviewed

Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai and Akira Shimokohbe

Micro System Technology 2003     page： (MST '03), 180-187   2003.10

Reduction of electrical resistivity in PdCuSi thin film metallic glass Reviewed

J. Sakurai, S. Hata and A. Shimokohbe

Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03)     page： CD-ROM   2003.9

On-Chip Variable Inductor Using Microelectromechanical Systems Technology Reviewed

Yoshisato YOKOYAMA ,Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE

Jpn. J. Appl. Phys   Vol. 42   page： 2190-2192   2003

Self-alignment of microparts using liquid surface tension - behavior of microparts and alignment characteristics Reviewed

Kaiji Sato, Kentaro Ito, Seiichi Hata and Akira Shimokohbe

Precision Engineering   Vol. 27   page： 42-50   2003

Microforming of Three-Dimensional Microstructures from Thin Film Metallic Glass Reviewed

Hee-Won Jeong, Seiichi Hata and Akira Shimokohbe

IEEE/ASME Journal of Microelectromechanical Systems   Vol. 12 ( 1 ) page： 42-52   2003

Fabrication and Evaluation of On-Chip Micro Variable Inductor Reviewed

Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe

Microelectronic Engineering   ( 67-68 ) page： 582-587   2003

集積化円すいばねマイクロアクチュエータ Reviewed

秦 誠一，加藤友和，福重孝志，下河邉 明

精密工学会誌   Vol. 69 ( 3 ) page： 438-442   2003

Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass Reviewed

Seiichi Hata, Takashi Fukushige and Akira Shimokohbe

Proceedings of CPT2002     page： 162-167   2002.10

Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass, Reviewed

Seiichi Hata, Takashi Fukushige and Akira Shimokohbe

Proceedings of CPT2002     page： 162-167   2002.10

Fabrication and Evaluation of On-Chip Micro Variable Inductor Reviewed

Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe

Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002     page： 210-211   2002.9

Integrated Conical Soring Linear Actuator Reviewed

Seiichi Hata, Tokokazu Kato, Takashi Fukushige and Akira Shimokohbe

Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002)     page： 208-209   2002.9

EMS Technology. Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, 306-307 (2002.9. N Reviewed

Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE

Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE     page： 306-307   2002.9

Micro-Forming of Thin Film Metallic Glass by Local Laser Heating Reviewed

Hee-Won JEONG, Seiichi HATA and Akira SHIMOKOHBE

Technical Digest of The 15th IEEE International Conference on MEMS 2002     page： 372-375   2002.1

A Micro Lens Actuator for Optical Flying Head Reviewed

Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA and Akira SHIMOKOHBE

Technical Digest of The 15th IEEE International Conference on MEMS 2002,     page： 507-510   2002.1

Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region Reviewed

S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE

Proceedings of 10th International Conference on Precision Engineering (ICPE)     page： 37-41   2001.7

Thin Film Metallic Glasses: Fabrication and Property Test. Reviewed

Y. LIU, S. HATA, K. WADA and A. SHIMOKOHBE

Technical Digest of The 14th IEEE International Conference on MEMS 2001     page： 102-105   2001.1

薄膜金属ガラスの成膜と物性 Reviewed

秦　誠一，劉　永東，和田晃一，下河邉明

精密工学会誌   Vol. 67 ( 10 ) page： 1708-1713   2001

金属ガラスの精密・微細加工に関する基礎的研究（Zr基バルク金属ガラスの引張変形挙動） Reviewed

秦　誠一，劉　永東，長峯靖之，下河邉明

日本機械学会論文集Ｃ編   Vol. 67 ( 660 ) page： 313-318   2001

Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass Reviewed

YONGDONG LIU, SEIICHI HATA, KOUICHI WADA and AKIRA SHIMOKOHBE

J. Appl. Phys   Vol. 40   page： 5382-5388   2001

超塑性複合加工によるマイクロ２段歯車の創製 Reviewed

早乙女康典，秦　誠一，坂口幸二

塑性と加工   Vol. 41 ( 468 ) page： 49-53   2000

薄膜金属ガラスを用いた微細構造物の製作－（第１報）薄膜金属ガラスの製作と過冷却液体域を利用した微細成形－ Reviewed

秦　誠一, 後藤　潤, 佐藤海二, 下河邉明

精密工学会誌   Vol. 66 ( 1 ) page： 96-101   2000

薄膜金属ガラスを用いた微細構造物の製作－（第２報）薄膜金属ガラス静電マイクロアクチュエータの提案と試作－ Reviewed

秦　誠一, 後藤　潤, 佐藤海二, 下河邉明

精密工学会誌   Vol. 66 ( 2 ) page： 287-291   2000

液体の表面張力を利用したマイクロ部品のセルフアライメントの原理と特性 Reviewed

佐藤海二, 関　智紀, 秦　誠一, 下河邉明

精密工学会誌   Vol. 66 ( 2 ) page： 282-286   2000

Self-alignment of Microparts Using Liquid Surface Tension - Examination of the Alignment Characteristics Reviewed

K. SATO, K. ITO, S. HATA and A. SHIMOKOHBE

Proceedings of ASPE's 15th Annual Meeting     page： 345-348   2000

elf-alignment for Microparts Assembly using Water Surface Tension Reviewed

K. SATO, S. HATA and A. SHIMOKOHBE

Proceedings of SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS'99   Vol. 3892   page： 321-328   1999.10

Fabrication of Thin Film Metallic Glass and its Application to Microactuator. Reviewed

S. HATA, K. SATO and A. SHIMOKOHBE

International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS'99   Vol. 3892   page： 97-108   1999.10

金属ガラスの精密・微細加工に関する研究（Ｚｒ基金属ガラスの過冷却液体域における成形性） Reviewed

秦　誠一, 山田典弘, 早乙女康典, 井上明久, 下河邉明

日本機械学会論文集Ｃ編   Vol. 65 ( 633 ) page： 346-352   1999

Precision and Micro Machining of Metallic Glasses -Formability of Zr Based Metallic Glasses in the Supercooled Liquid State Reviewed

S. HATA, N. YAMADA, Y. SAOTOME, A. INOUE and A. SHIMOKOHBE

Proceedings of China-Japan Bilateral Symposium on Advanced Manufacturing Engineering     page： 81-86   1998.10

延性モード切削加工用の超精密変位台の開発 Reviewed

大塚二郎, 秦　誠一, 下河邉明, 越水重臣

精密工学会誌   Vol. 64 ( 4 ) page： 546-551   1998

Direct Writing of Cu-based Micro-temperature Sensors onto Glass and Poly(dimethylsiloxane) Substrates Using Femtosecond Laser Reductive Patterning of CuO Nanoparticles Reviewed

Mizue Mizoshiri, Seiichi Hata

Research & Reviews: Journal of Material Sciences   Vol. 4 ( 4 ) page： 47-54   1016.10

632 Novel evaluation method for machinability of Ni-Nb-Ti alloy

JIANG Shengxian, SAKURAI Junpei, AONO Yuko, HATA Seiichi

Materials and processing conference   Vol. 2013 ( 21 ) page： "632 - 1"-"632-3"   2013.11

6AM2-A-7 Deposition and pattering of thermoelectric thick films by thermally-assisted sputtering method and lift-off technique Reviewed

Mizoshiri Mizue, Mikami Masashi, Ozaki Kimihiro, Shikida Mitsuhiro, Hata Seiichi

  Vol. 2013 ( 5 ) page： 105 - 106   2013.11

Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

井上 慎，岡智絵美，櫻井淳平，秦誠一

形状記憶合金協会 第11期定時総会  2021.3.12  形状記憶合金協会

新規医療用Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

井上 慎，岡智絵美，櫻井淳平，秦誠一

生体医歯工学共同研究拠点 令和2年度成果報告会  2021.3.5  生体医歯工学共同研究拠点

Ti-Ni-Cu高成形性形状記憶合金を用いた，反力可変受動形触覚ディスプレイ用触知ピンの作製及び駆動評価

南原 圭汰，伊木 啓一郎，岡智絵美，櫻井淳平，秦誠一

第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

逆リフトオフ法を用いた MEMS ミラーデバイスの作製

高瀬 駿，山田 恭平，中川 優希，岡智絵美，櫻井淳平，秦誠一

第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

Ti-Ni-Cu高成形性形状記憶合金のソフトアクチュエータへの基礎検討

浅井 泰平，青山 椋佑，岡智絵美，櫻井淳平，秦誠一

第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

二層構造を有した手術シミュレータ用血管モデルの作製

山田 大地，堀 史門，山崎貴大，岡智絵美，櫻井淳平，秦誠一

第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

高効率長寿命FABガンの開発 Invited

秦　誠一

接合界面創成技術委員会第29回研究会  2020.11.19  接合界面創成技術委員会

Plasma analysis of the FAB source for the SAB process by PIC-MCC simulation International conference

R. Morisaki, T. Hirai, T. Takahashi, H. Tsuji, N. Ohno, Takahiro Yamazaki, Chiemi Oka, Junpei Sakurai, Seiichi Hata

33rd International Microprocesses and Nanotechnology Conference  2020.11.9 

材料創製・加工技術で拓くマイクロ・ナノの世界 Invited

秦　誠一

長野県精密加工技術研究会　令和２年度技術講演会  2020.11.2  長野県精密加工技術研究会

Ti-Ni-Cu高成形性形状記憶合金を用いた，反力可変受動形触覚ディスプレイ用触知ピンの作製

南原 圭汰，伊木 啓一郎，岡智絵美，櫻井淳平，秦誠一

日本機械学会2020年度年次大会  2020.9.13  日本機械学会

磁性ナノ粒子の発熱を利用した新規マイクロバルブの作製

三輪 大貴，岡智絵美，櫻井淳平，秦誠一

日本機械学会2020年度年次大会  2020.9.13  日本機械学会

プラズマ解析による表面活性化接合用FAB源の高性能化

森崎 諒，平井 隆巳，高橋 知典，辻 裕之，大野 哲靖，岡智絵美，櫻井淳平，秦誠一

日本機械学会2020年度年次大会  2020.9.13  日本機械学会

テクスチャ基板による色素増感太陽電池における変換効率への影響

西保 裕司，楊 娜，岡智絵美，櫻井淳平，秦誠一

日本機械学会2020年度年次大会  2020.9.13  日本機械学会

手術シミュレータ用3次元次元応力測定系の開発

山田 大地，堀 史門，山崎貴大，岡智絵美，櫻井淳平，秦誠一

日本機械学会2020年度年次大会  2020.9.13  日本機械学会

機能性薄膜のコンビナトリアル探索とセンサ応用 Invited

秦　誠一

新化学技術推進協会 電子情報技術部会 ナノフォトニクスエレクトロニクス交流会　講演会  2020.2.25  新化学技術推進協会 電子情報技術部会 ナノフォトニクスエレクトロニクス交流会

マルチスケール、マルチマテリアル3D造形技術とCOMSOLへの期待 Invited

秦　誠一

COMSOL CONFERENCE 2016 

フェムト秒レーザ還元直接描画法による非平面基板上への温度センサ作製

伊藤恭章，溝尻瑞枝，櫻井淳平，秦誠一

第2回日本機械学会イノベーション講演会 

Fabrication of Ni/Cr2O3 Composite Microstructures Using Femtosecond Laser Reductive Sintering of NiO/Cr Mixed Nanoparticles International conference

Kenki Tamura,Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

29th International Microprocesses and Nanotechnology Conference(MNC2016) 

フェムト秒レーザ還元焼結を用いたNi合金微細パターン作製

田村健紀，溝尻瑞枝，櫻井淳平，秦誠一

第33回「センサ・マイクロマシンと応用システム」シンポジウム 

新奇金属系マイクロマシン・センサ材料とその微細加工 Invited

秦　誠一，溝尻瑞枝，櫻井淳平

「センサ・マイクロマシンと応用システム」シンポジム 

リアルメカトロニクスを目指すマルチマテリアル・マルチスケール３Ｄ造形技術 Invited International conference

秦　誠一

第65回高分子討論会 

フェムト秒レーザ還元直接描画法による非平面基板上へのCu微細構造形成

伊藤恭章，溝尻瑞枝，櫻井淳平，秦誠一

日本機械学会2016年度年次大会 

フェムト秒レーザ還元直接描画法による3次元微細Cuパターンの積層造形

荒金駿，溝尻瑞枝，櫻井淳平，秦誠一

日本機械学会2016年度年次大会 

Three-dimensional Cu micropatterns fabricated using femtosecond laser-induced CuO nanoparticle reduction International conference

Shun Arakane, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

10th International Conference on Photoexcited Processes and Applications 

Femtosecond laser-induced reductive sintering to fabricate Ni-based alloy micropatterns International conference

Kenki Tamura, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

10th International Conference on Photoexcited Processes and Applications 

イノベーションを如何に起こすか？～マルチマテリアル３D造形を例として～ Invited

秦　誠一

ナノ物質集積複合化技術研究会 

フェムト秒レーザ還元直接描画法を用いた金属微細パターニングとその応用 Invited

溝尻瑞枝，秦　誠一

（社）溶接学会第114回マイクロ接合研究委員会 

金属酸化物ナノ微粒子を用いたフェムト秒レーザー還元直接描画法 Invited

溝尻瑞枝，秦　誠一

展示会OPIE'16＆月刊オプトロニクス　連動特別講演会 

Spray-coating of CuO nanoparticles for femtosecond laser reduction patterning on nonplanar substrates International conference

Yasuaki Ito, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

The Second Smart Laser Processing Conference 2016 (SLPC2016) 

Cu micropatterning on poly(dimethylsiloxane) using femtosecond laser reduction of CuO nanoparticles International conference

Mizue Mizoshiri, Yasuaki Ito, Junpei Sakurai, Seiichi Hata

The Second Smart Laser Processing Conference 2016 (SLPC2016) 

機械と電気の真の融合を目指した新しい微細加工技術

秦　誠一

第５回集積化MEMS技術研究ワークショップ  

Fe-Ni-Cr系磁歪材料のコンビナトリアル探索とその磁歪特性評価

前谷卓哉，中光豊，桜井淳平，中川茂樹，秦　誠一

日本機械学会 2013年度年次大会 

マイクロアクチュータを使用した薄膜金属材料疲労試験

YapJeng Hua，佐藤康平，Tamjidi Nastaran，桜井淳平，中光豊，秦　誠一

日本機械学会 2013年度年次大会 

金属ガラス厚膜微細構造体の新しい微細加工法

秦　誠一

粉体粉末冶金協会講演　平成２４年度秋季大会 

Material search in the age of AI applying microfabrication Invited

HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan  2021  The Japan Society of Mechanical Engineers

機械と電気の真の融合を目指した新しい微細加工技術 Invited

秦 誠一

第５回集積化MEMS技術研究ワークショップ  2014.7.11  応用物理学会集積化MEMS技術研究会

28pm3-F-7 Fabrication of thin-film thermoelectric generator with CuO-based anti-reflection structures

Kondo Tasuku, Mizoshiri Mizue, Mikami Masashi, Itou Yoshitaka, Sakurai Junpei, Hata Seiichi

The Proceedings of the Symposium on Micro-Nano Science and Technology  2015  The Japan Society of Mechanical Engineers

635 Moisture-in-oil sensor using NFTS deposition

YOSHII Yusuke, NAKAMITSU Yutaka, MUKAI Nobuyuki, MIZOGUTI Takashi, TAKAHASHI Tsutomu, HATA Seiichi

The Proceedings of the Materials and processing conference  2013  The Japan Society of Mechanical Engineers

634 Fabrication and evaluation of thin-film thermoelectric solar power generator

MIZOSHIRI Mizue, MIKAMI Masashi, OZAKI Kimihiro, SHIKIDA Mitsuhiro, HATA Seiichi

The Proceedings of the Materials and processing conference  2013  The Japan Society of Mechanical Engineers

632 Novel evaluation method for machinability of Ni-Nb-Ti alloy

JIANG Shengxian, SAKURAI Junpei, AONO Yuko, HATA Seiichi

The Proceedings of the Materials and processing conference  2013  The Japan Society of Mechanical Engineers

29pm1-B-4 Fabrication of Cu2O-rich micro-temperature sensor using direct femtosecond laser reduction patterning

Itou Yasuaki, Mizoshiri Mizue, Arakane Shun, Sakurai Junpei, Hata Seiichi

The Proceedings of the Symposium on Micro-Nano Science and Technology  2015  The Japan Society of Mechanical Engineers

Ultra high-throughput evaluation technology for materials using integrated MEMS

Grant number：16H04300  2016.4 - 2019.3

Hata Seiichi

Seminar on Micro/Nano Processing 2C

2022

Seminar on Micro/Nano Processing 2A

2022

Exercises in Micro/Nano Processing　A

2022

Seminar on Micro/Nano Processing 1C

2022

Seminar on Micro/Nano Processing 1A

2022

Advanced Lectures on Materials and Processes

2022

Exercises in Micro/Nano Processing　B

2022

Seminar on Micro/Nano Processing 1D

2022

Seminar on Micro/Nano Processing 1B

2022

Design Practice 3

2022

Fundamentals of Design

2022

Fundamentals of Design

2020

Design Practice 3

2020

Science of Materials II

2020

Manufacturing Processes 2

2020

材料加工学

2015

計測基礎論

2015

超精密工学

2015

Micromachining and Micromechatronics

2015