Updated on 2021/11/08

写真a

 
HATA Seiichi
 
Organization
Graduate School of Engineering Micro-Nano Mechanical Science and Engineering 2 Professor
Graduate School
Graduate School of Engineering
Undergraduate School
School of Engineering Mechanical and Aerospace Engineering
Title
Professor
Contact information
メールアドレス

Degree 1

  1. 博士(工学) ( 2002.2   東京工業大学 ) 

Research Interests 6

  1. Combinatorial technology

  2. Micro and nano processing

  3. Micro-machining

  4. Micro machine

  5. MEMS

  6. Mechanical engineering

Research Areas 3

  1. Others / Others  / High Throughput Evaluation

  2. Others / Others  / Combinatorial Technology

  3. Others / Others  / MEMS, Materials for MEMS

Current Research Project and SDGs 11

  1. Development of combinatorial deposition equipment​

  2. Searching for novel functional thin film metallic materials for MEMS​

  3. Materials research by materials informatics​

  4. Development of a novel fast atom beam source

  5. Fabrication of metal-based MEMS using reverse lift-off process​

  6. Production of porous materials utilizing self-assembly of magnetic particles​

  7. Fabrication of electro static vacuum sensors using combined process​

  8. Fabrication of tactile display changing reaction force​

  9. Development of surgery simulator using photoelasticity materials​

  10. Light management substrate fabricated by nanoimprint for solar cell​

  11. Microsystems utilizing unique properties of magnetic nanoparticles​

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Research History 7

  1. Toyota Technological Institute

    2018.9 - 2019.3

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    Country:Japan

  2. Toyota Technological Institute

    2017.9 - 2018.3

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    Country:Japan

  3. 東京工業大学 客員教授

    2012.10 - 2015.3

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    Country:Japan

  4. 東京工業大学 准教授

    2007.4 - 2012.9

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    Country:Japan

  5. 東京工業大学 助教授

    2005.10 - 2007.3

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    Country:Japan

  6. 東京工業大学 助手

    1997.6 - 2005.9

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    Country:Japan

  7. オリンパス株式会社 研究員

    1994.4 - 1997.5

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    Country:Japan

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Education 2

  1. Tokyo Institute of Technology

    - 1994.3

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    Country: Japan

  2. Gunma University   Faculty of Engineering

    1988.4 - 1992.3

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    Country: Japan

Professional Memberships 7

  1. The Japan Society of Mechanical Engineering   Fellow

    2016.1

  2. 精密工学会東海支部   幹事

    2018.3 - 2019.3

  3. 精密工学会   会誌編集委員会委員

    2011.3 - 2013.3

  4. 電気学会   E部門役員会委員

  5. 応用物理学会

  6. IEEE

  7. MRS

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Committee Memberships 13

  1. 日本機械学会 第95期機械材料・材料加工部門   副部門長  

    2017.4 - 2018.3   

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    Committee type:Academic society

  2. 日本機械学会 第95期マイクロ・ナノ工学部門 運営委員会   委員  

    2017.4 - 2018.3   

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    Committee type:Academic society

  3. 日本機械学会 第95期機械材料・材料加工部門 総務委員会   副委員長  

    2017.4 - 2018.3   

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    Committee type:Academic society

  4. 日本機械学会 第95期機械材料・材料加工部門 ICM&Pワーキング   委員  

    2017.4 - 2018.3   

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    Committee type:Academic society

  5. 精密工学会東海支部   幹事  

    2017.3 - 2018.3   

  6. 電気学会 E部門編修委員会   副委員長  

    2012.4   

  7. 日本機械学会 マイクロ・ナノ工学部門技術委員会   委員長  

    2012.4   

  8. 日本機械学会 機械材料・材料加工部門 第4技術委員会(国際交流関係)   委員長  

    2012.4 - 2013.3   

  9. 電気学会 E部門役員会   委員  

    2011.4   

  10. 精密工学会 会誌編集委員会   委員  

    2011.4   

  11. 日本機械学会 マイクロ・ナノ工学専門会議   副委員長  

    2011.4 - 2012.3   

  12. 日本機械学会 第88期機械材料・材料加工部門 第1技術委員会(年次大会担当)   委員長  

    2010.4 - 2011.3   

  13. 日本機械学会 産学連携センター技術ロードマップ委員会   委員  

    2007.6   

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Awards 9

  1. 日本機械学会機械材料・材料加工部門部門賞(功績賞)

    2020.9   日本機械学会  

    秦 誠一

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

    日本機械学会機械材料・材料加工部門において,永年にわたり運営委員を務め,部門活動の活性化に努力し,第96期部門長として部門運営の中枢を担い部門の発展に貢献したことに対する受賞

  2. 教育優秀賞特別表彰

    2020.5   豊田工業大学  

    秦 誠一

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    Country:Japan

    教育優秀賞を5年間のうち,3度受賞した者に対する特別表彰

  3. 2019年度教育優秀賞

    2020.5   豊田工業大学  

    秦 誠一

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    創意・工夫をもって特色のある講義・実験・実習を行い、優れた教育を行った者に対してその業績を称え、さらなる発展を奨励する.

  4. 日本機械学会 機械材料・材料加工部門業績賞

    2010.8   日本機械学会  

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    Country:Japan

  5. 日本機械学会 機械材料・材料加工部門一般表彰(優秀講演論文部門)

    2009.9   日本機械学会  

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    Country:Japan

  6. 平成18年度東工大挑戦的研究賞

    2006.12   東京工業大学  

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    Country:Japan

  7. 平成16年度財団法人ファナックFAロボット財団論文賞(特別賞)

    2005.12   財団法人ファナックFAロボット財団  

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    Country:Japan

  8. 平成15年度精密工学会論文賞

    2004.3   精密工学会  

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    Country:Japan

  9. 平成13年度(第36回)日本塑性加工学会論文賞

    2001.2   日本塑性加工学会  

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Papers 157

  1. Examination of Mechanical Properties and Photoelastic Properties of Gel Material for Blood Vesssel Mimics Reviewed International journal

    Yamada Daichi, Hori Simon, Abe Shuhe, Kumeno Yuki, Yamazaki Takahiro, Oka Chiemi, Sakurai Junpei, Hata Seiichi

    JOURNAL OF MEDICAL DEVICES-TRANSACTIONS OF THE ASME   Vol. 15 ( 3 )   2021.9

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1115/1.4051516

    Web of Science

  2. Combinatorial synthesis of nanocrystalline FeSiBPCuC–Ni–(Nb,Mo) soft magnetic alloys with high corrosion resistance Reviewed International journal

    TakahiroYamazaki, TatsuyaTomita, Katsutoshi Uji, Hidenori Kuwata, Kohya Sano, Chiemi Oka, Junpei Sakurai, Seiichi Hata

    Journal of Non-Crystalline Solids   Vol. 563   page: 120808   2021.7

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.jnoncrysol.2021.120808

    Web of Science

  3. Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding Reviewed International journal

    Morisaki Ryo, Yamazaki Takahiro, Oka Chiemi, Sakurai Junpei, Hirai Takami, Takahashi Tomonori, Tsuji Hiroyuki, Ohno Noriyasu, Hata Seiichi

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 60 ( SC )   2021.6

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/abe683

    Web of Science

  4. Development of a fast atom beam gun for surface-activated bonding Reviewed International journal

    Morisaki Ryo, Hirai Yuuki, Oka Chiemi, Mizoshiri Mizue, Yamazaki Takahiro, Sakurai Junpei, Hirai Takami, Takahashi Tomonori, Tsuji Hiroyuki, Hata Seiichi

    Precision Engineering   Vol. 62   page: 106 - 112   2020.3

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2019.11.006

    Web of Science

  5. Fabrication of a Novel Nanoporous Film via Chemical Dealloying of a Cu-Cr Alloy for Sensing Moisture in Oil Reviewed International journal

    Yoshii Yusuke, Sakurai Junpei, Mizoshiri Mizue, Hata Seiichi

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   Vol. 28 ( 2 ) page: 279 - 289   2019.4

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/JMEMS.2019.2895164

    Web of Science

  6. Fabrication of textured substrates for dye-sensitized solar cells using polydimethylsiloxane nanoimprint lithography

    Yang Na, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    ADVANCED OPTICAL TECHNOLOGIES   Vol. 8 ( 6 ) page: 491 - 497   2019.12

  7. FABRICATION AND EVALUATION OF TACTILE PINS FOR PASSIVE TYPE TACTILE DISPLAYS USING HIGH FORMABILITY SHAPE MEMORY ALLOYS

    Nambara Keita, Iki Keiichirou, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)     page: 1854 - 1857   2019

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  8. Effect of Heat Accumulation on Femtosecond Laser Reductive Sintering of Mixed CuO/NiO Nanoparticles Reviewed

    Mizoshiri Mizue, Nishitani Kenta, Hata Seiichi

    MICROMACHINES   Vol. 9 ( 6 )   2018.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.3390/mi9060264

    Web of Science

  9. Selective fabrication of p-type and n-type thermoelectric micropatterns by the reduction of CuO/NiO mixed nanoparticles using femtosecond laser pulses Reviewed

    Mizoshiri Mizue, Hata Seiichi

    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING   Vol. 124 ( 1 )   2018.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s00339-017-1489-x

    Web of Science

  10. FABRICATION OF A NOVEL NANOPOROUS FILM BY CHEMICAL DEALLOYING OF CU-CR AND ITS APPLICATION FOR A SENSOR Reviewed

    Yoshii Yusuke, Sakurai Junpei, Mizoshiri Mizue, Hata Seiichi

    2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)     page: 1104-1107   2018

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    Language:English  

    Web of Science

  11. Fabrication of Novel Nanoporous Films in Moisture in-Oil Sensors via Chemical Dealloying of Cu-Cr using Combinatorial Search of Cu Cr Alloy Compositions Reviewed

    Yoshii Yusuke, Sakurai Junpei, Mizoshiri Mizue, Hata Seiichi

    MRS ADVANCES   Vol. 3 ( 4 ) page: 225-232   2018

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1557/adv.2018.198

    Web of Science

  12. FABRICATION OF FLEXIBLE THE OELECTRIC GENE A TORS WITH A LENS ARRAY FOR NEAR-INFRARED SOLAR LIGHT HARVESTING Reviewed

    Shimizu Y., Mizoshiri M., Mikami M., Ito Y., Sakurai J., Hata S.

    2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)     page: 604-607   2018

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    Language:English  

    Web of Science

  13. Basic research on micro processing characteristics of reverse lift-off process

    Nakagawa Yuki, Yamada Kyohei, Mizoshiri Mizue, Oka Chiemi, Sakurai Junpei, Hata Seiichi

    2018 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS)     2018

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  14. Femtosecond laser direct writing of Cu-based fine patterns using Cu2O nanospheres

    Kondo Yukinari, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

    LASER-BASED MICRO- AND NANOPROCESSING XII   Vol. 10520   2018

  15. Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass

    Uejima S., Oka C., Hata S., Sakurai J.

    2018 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS)     2018

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  16. FABRICATION OF COPPER/COPPER-NICKEL THIN-FILM THERMOELECTRIC GENERATORS WITH ENERGY STORAGE DEVICES

    Shimizu Y., Mizoshiri M., Mikami M., Sakurai J., Hata S.

    17TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2017)   Vol. 1052   2018

  17. Direct writing of three-dimensional Cu-based sensors using femtosecond laser reduction of CuO nanoparticles

    Mizoshiri Mizue, Hata Seiichi

    LASER-BASED MICRO- AND NANOPROCESSING XII   Vol. 10520   2018

  18. Fabrication of thin-film thermoelectric generators with ball lenses for conversion of near-infrared solar light Reviewed

    Ito Yoshitaka, Mizoshiri Mizue, Mikami Masashi, Kondo Tasuku, Sakurai Junpei, Hata Seiichi

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 56 ( 6 )   2017.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.56.06GN06

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  19. Ni-based composite microstructures fabricated by femtosecond laser reductive sintering of NiO/Cr mixed nanoparticles Reviewed

    Tamura Kenki, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 56 ( 6 )   2017.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.56.06GN08

    Web of Science

  20. Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles Reviewed

    Arakane S., Mizoshiri M., Sakurai J., Hata S.

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   Vol. 27 ( 5 )   2017.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/1361-6439/aa6820

    Web of Science

  21. Three-dimensional Cu microfabrication using femtosecond laser-induced CuO nanoparticle reduction Reviewed

    Shun Arakane, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

    Applied Physics Express   Vol. 10   page: 017201   2017.4

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    Three-dimensional Cu microstructures were formed using a combined process of dispensing coating and femtosecond laser-induced reduction of CuO nanoparticles. Layer-by-layer lamination of two-dimensional Cu micropatterns was performed by alternately coating with a CuO nanoparticle solution and using direct laser writing, followed by the removal of nonirradiated CuO nanoparticles. The resistance of the 3D microstructures decreased as the number of layers increased, indicating that each layer was electrically connected to the others. We also demonstrated the fabrication of a microbridge heater composed of electrode pads and a microbridge, and found that its heating characteristics are suitable for use in microsensors, such as thermal-type flow sensors.

    DOI: 1882-0786/10/1/017201

  22. Three-dimensional Cu microfabrication using femtosecond laser-induced reduction of CuO nanoparticles Reviewed

    Arakane Shun, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

    APPLIED PHYSICS EXPRESS   Vol. 10 ( 1 )   2017.1

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    DOI: 10.7567/APEX.10.017201

    Web of Science

  23. Direct-writing of copper-based micropatterns on polymer substrates using femtosecond laser reduction of copper (II) oxide nanoparticles Reviewed

    Mizoshiri Mizue, Ito Yasuaki, Sakurai Junpei, Hata Seiichi

    NANOSENSORS, BIOSENSORS, INFO-TECH SENSORS AND 3D SYSTEMS 2017   Vol. 10167   2017

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    Language:English  

    DOI: 10.1117/12.2261398

    Web of Science

  24. Polymer-based blood vessel models with micro-temperature sensors in EVE Reviewed

    Mizoshiri Mizue, Ito Yasuaki, Hayakawa Takeshi, Maruyama Hisataka, Sakurai Junpei, Ikeda Seiichi, Arai Fumihito, Hata Seiichi

    NANOSENSORS, BIOSENSORS, INFO-TECH SENSORS AND 3D SYSTEMS 2017   Vol. 10167   2017

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    DOI: 10.1117/12.2265050

    Web of Science

  25. MICRO FOLDING STRUCTURE USING TI-NI-ZR HIGH FORMABLE SHAPE MEMORY ALLOYS

    Watanabe H., Mizoshiri M., Hata S., Sakurai J.

    2017 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS)     2017

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  26. Effect of different solvents on Cu micropatterns formed via femtosecond laser reduction patterning Reviewed

    Mizue Mizoshiri, Shun Arakane, Junpei Sakurai, Seiichi Hata

    International Journal of Automation Technology   Vol. 10   page: 934-940   2016.11

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    We investigated the effect of different solvents on the Cu micropatterns formed via femtosecond laser reduction patterning. Solvents such as ethylene glycol, 2-propanol, and glycerol were mixed with CuO nanoparticles and polyvinylpyrrolidone. The degree of reduction and the resistivity of the fabricated micropatterns depended on the solvent. Glycerol was the most effective reducing agent. This solution was used to fabricate Cu/Cu2O composite micro-temperature sensors. Cu-rich electrodes and Cu2O-rich sensors were selectively formed by controlling the laser scanning speed at 5 mm/s and 0.5 mm/s, respectively, when the pulse energy was 0.53 nJ. The temperature sensor exhibited a negative temperature coefficient of the resistance, which was consistent with the value for Cu2O.

    DOI: 10.20965/ijat.2016.p0934

  27. Direct Writing of Cu-based Micro-temperature Sensors onto Glass and Poly(dimethylsiloxane) Substrates Using Femtosecond Laser Reductive Patterning of CuO Nanoparticles

    Mizue Mizoshiri, Seiichi Hata

    Research & Reviews: Journal of Material Sciences   Vol. 4 ( 4 ) page: 47-54   2016.10

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    Language:English  

    DOI: 10.4172/2321-6212.1000155

  28. Fabrication of a Cr Nanoporous Thin Film via Sputter Deposition and Investigation of Its Applicability as a Water-oil Separation Electrode in a MEMS Moisture Sensor Reviewed

    Yusuke Yoshii, Yuuki Fukagawa, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

    IEEJ Transactions on Sensors and Micromachines   Vol. 137 ( 1 ) page: 15-22   2016.10

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1541/ieejsmas.137.15

  29. Fabrication of CuO-based anti-reflection structures using self-arranged submicron SiO2 spheres for thermoelectric solar generation Reviewed

    Tasuku Kondou, Mizue Mizoshiri, Masashi Mikami, Junpei Sakurai, Seiichi Hata

    Japanese Journal of Applied Physics   Vol. 55 ( 6S1 )   2016.5

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    DOI: 1347-4065/55/6S1/06GP07

  30. Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning Reviewed

    Mizue Mizoshiri, Yasuaki Ito, Shun Arakane Junpei Sakurai, Seiichi Hata

    Japanese Journal of Applied Physics   Vol. 55   page: 06GP05   2016.5

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    Micro-temperature sensors, which composed of a Cu2O-rich sensing part and two Cu-rich electrodes, were directly fabricated by femtosecond
    laser reduction patterning of CuO nanoparticles. Patterning of the microstructures was performed by laser scanning with pitches of 5, 10, and
    15 µm. Cu2O-rich micropatterns were formed at the laser scan speed of 1 mm/s, the pitch of 5 µm, and the pulse energy of 0.54 nJ. Cu-rich
    micropatterns that had high generation selectivity of Cu against Cu2O were fabricated at the laser scan speed of 15 mm/s, the pitch of 5 µm, and
    the pulse energy of 0.45 nJ. Electrical resistivities of the Cu2O- and Cu-rich micropatterns were approximately 10 Ω m and 9 µΩ m, respectively. The
    temperature coefficient of the resistance of the micro-temperature sensor fabricated under these laser irradiation conditions was %5.5 ' 10%3/°C.
    This resistance property with a negative value was consistent with that of semiconductor Cu2O. © 2016 The Japan Society of Applied Physics

    DOI: 1347-4065/55/6S1/06GP05

  31. 金属酸化物ナノ粒子を用いたフェムト秒レーザー還元直接描画法

    溝尻瑞枝,秦誠一

    OPTRONICS   Vol. 35 ( 413 ) page: 145-151   2016.5

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  32. Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method Reviewed

    Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, and Seiichi Hata

    Applied Physics Express   Vol. 7   page: 057101   2014.4

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    We have demonstrated a patterning process for the fabrication of thermoelectric thick-film modules by a thermally assisted sputtering method
    (TASM) and a lift-off technique. Given the experimental requirements of TASM, poly(dimethylsiloxane) (PDMS) was used as the heat-resistant
    masks in the lift-off technique. After the film deposition, the PDMS lift-off mask was removed from the substrate. This process enables the
    fabrication of 30-µm-thick and 300-µm-wide Sb2Te3 and Bi2Te3 thick-film patterns. The increase in film thickness increased the power generated by
    the module, which was consistent with the theoretical value.

    DOI: 10.7567/APEX.7.057101

  33. Ni-Nb-Zr-Ti amorphous alloys for glass lens molding die materials Reviewed

    Jiang S., Abe M., Ando M., Aono Y., Sakurai J., Hata S.

    Journal of Microelectronic Engineering   Vol. 116   page: 6-10   2014.3

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mee.2013.11.008

  34. Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks Reviewed

    Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Seiichi Hata

    Proceedings of 24th 2013 International Symposium on Micro-NanoMechatronics and Human Science     page: 100-106   2013.11

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  35. Novel Combinatorial Method for Evaluation of Machinability for Glass Lens Mold Material Reviewed

    Shengxian Jiang, Junpei Sakurai, Yuko Aono and Seiichi Hata

    Proceedings of 24th 2013 International Symposium on Micro-NanoMechatronics and Human Science     page: 100-106   2013.11

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  36. センサ用磁歪材料のコンビナトリアル探索 Reviewed

    前谷卓也,中光 豊,桜井淳平,中川茂樹,秦 誠一

    電気学会論文誌E   Vol. 133 ( 8 ) page: 342-347   2013.8

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1541/ieejsmas.133.342

  37. High-Throughput Characterization of Thin Film Shape Memory Alloys Reviewed

    IEEJ Transactions on Sensors and Micromachines   Vol. 133 ( 8 ) page: 348-353   2013.8

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    Authorship:Lead author   Language:Japanese   Publishing type:Research paper (scientific journal)  

    Thin film shape memory alloys (SMAs) are promising materials for micro-machines because of their high-output power, large strain, and actuation without high voltage. To search for compositions of suitable thin film SMAs for each application, combinatorial technique is useful tool, however the technique requires high-throughput characterization method for thermal property which is an important property of thin film SMAs such as two way martensitic transformation temperature and thermal hysteresis. In this paper, novel high-throughput characterization method for such properties using thermography is proposed and demonstrated. Compositionally integrated thin film SMA samples (TiNiPd) with only 1mm2 of each area are characterized at once. The difference of martensitic and reverse martensitic transformation temperature against those temperatures measured by a conventional method, differential scanning calorimetry, is about 5K.

    DOI: 10.1541/ieejsmas.133.348

  38. PVDF Actuator for High-Frequency Fatigue Test of Thin-Film Metals Reviewed

    Nastaran Tamjidia, Kohei Sato, Junpei Sakurai, and Seiichi Hata

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   Vol. 8 ( 2 ) page: 199-205   2013.1

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/tee.21840

  39. High-frequency fatigue test of sputtered metallic thin film using PVDF microactuator Reviewed

    Tamjidi N., Suzaki R., Sato K., Nakamitsu Y., Sakurai J., Hata S.

    IEICE Electronics Express   Vol. 9 ( 5 ) page: 403-409   2012

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  40. Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization Reviewed

    Sakurai J., Hata S.

    Materials Science and Engineering: A   ( 541 ) page: 8–13   2012

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  41. 電鋳Niパイプを用いた円筒形超音波リニアマイクロアクチュエータ Reviewed

    高垣輝多, 孫 東明, 汪 盛, 桜井淳平, 秦 誠一

    日本機械学会論文集C編   Vol. 77 ( 783 ) page: 4136-4143   2011.11

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  42. Searching for noble Ni-Nb-Zr thin film amorphous alloys for optical glass device molding die materials Reviewed

    Junpei Sakurai, Mitsuhiro Abe, Masahiro Ando, Yuko Aono and Seiichi Hata

    Precision Engineering   Vol. 35 ( 4 ) page: 537-546   2011.10

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  43. Novel Thermographic Method for Characterizing Transformation Temperatures of Thin Film Shape Memory Alloys Aimed at Combinatorial Approach Reviewed

    Yuko Aono, Junpei Sakurai, Akira Shimokohbe, and Seiichi Hata

    Japanese Journal of Applied Physics   Vol. 50 ( 066601 ) page: 5   2011.2

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  44. CORROSION RESISTANCE CONSOLIDATION OF A DIAPHRAGM TYPE VACUUM SENSOR Reviewed

    H. Kozako, J. Sakurai, N. Mukai, Y. Ohnuma, T. Takahashii, and S. Hata

    Technical Digest of The 24th IEEE International Conference on MEMS     page: 400-403   2011.1

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  45. Driving mechanism, design, fabrication process and experiments of a cylindrical ultrasonic linear microactuator Reviewed

    Sheng Wang, Dongming Sun, Keebong Choi. Seiichi Hata and Akira Shimokohbe

    IEEE Transactions on UFFC   Vol. 58 ( 1 ) page: 168-77   2011.1

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    DOI: 10.1109

  46. Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials Reviewed

    Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Shengxian Jiang, Akira Shimokohbe, Seiichi Hata

    Journal Solid Mechanics and Materials Engineering   Vol. 4 ( 12 ) page: 1742-1753   2010.12

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    DOI: 10.1299/jmmp.4.1742

  47. Combinatorial Technology on Searching for Novel Amorphous Alloys Reviewed

    Seiichi Hata, Junpei Sakurai, Y. Aono, N. Tamujidi, Y. Matsumoto and A. Shimokohbe

    The 6th International Workshop on Combinatorial Materials Science and Technology     page: CDROM   2010.10

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  48. Temperature gradient heating system for high-throughput method for determining time-temperature-transformation diagram using thin film samples Reviewed

    Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe and Seiichi Hata

    The 6th International Workshop on Combinatorial Materials Science and Technology     page: CD-ROM   2010.10

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  49. Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials Reviewed

    Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando and Seiichi Hata

    Key Eng. Mater.   Vol. 447-448   page: 661-665   2010.9

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    DOI: 10.4028

  50. Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting a Shape Memory Effect after Crystallization Reviewed

    Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata

    Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing     page: 78   2010.8

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  51. High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples Reviewed

    Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata

    Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing, 90 (2010.8, Cairns, Australia)     page: 90   2010.8

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  52. Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Optical Glass Lenses Molding Materials Reviewed

    Junpei Sakurai, Seiichi Hata, Ryusuke Yamuchi, Mitsuhiro Abe, and Akira Shimokohbe

    Precision Engineering   Vol. 34 ( 3 ) page: 431-439   2010.7

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    DOI: 10.1016

  53. A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel Reviewed

    Kee-Bong Choi, Jae Jong Lee, Seiichi Hata

    Sensors and Actuators A   Vol. 161 ( 1-2 ) page: 173-181   2010.6

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    DOI: 10.1016

  54. High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples Reviewed

    Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata

    Materials Science Forum   Vol. 654-656   page: 2426-2429   2010.6

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    DOI: 10.4028

  55. Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting Shape Memory Effect After Crystallization Reviewed

    Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata

    Materials Science Forum   Vol. 654-656   page: 1066-1069   2010.6

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    DOI: 10.4028

  56. Evaluation of the validity of crystallization temperature measurements using thermograpy with different sample configurations Reviewed

    Yuko Aono, Junpei Sakurai, Akira Shimokohbe, and Seiichi Hata

    Jpn. J. Appl. Phys   Vol. 49 ( 7 ) page: 076601-076601-7   2010

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  57. High-Throughput Measurement Method for Time-Temperature-Transformation Diagram of Thin Film Amorphous Alloys Reviewed

    Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe, and Seiichi Hata,

    Applied Physics Express   Vol. 3 ( 12 ) page: 125601-125601-3   2010

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  58. A piezoelectric linear ultrasonic motor with the structure of circular cylindrical stator and slider Reviewed

    D. M. Sun, S. Wang, J. Sakurai, K. B. Choi, A. Shimokohbe, S. Hata

    Smart Mater. Struct.   Vol. 19 ( 4 ) page: 045008   2010

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    DOI: 10.1088/0964-1726/19/4/045008

  59. Axial vibration characteristics of a cylindrical Reviewed

    D. M. Sun, S. Wang, S. Hata, A. Shimokohbe,

    radially polarized piezoelectric transducer with different electrode patterns, Ultrasonics   Vol. 50 ( 3 ) page: 403-410   2010

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  60. Theoretical and experimental investigation of the traveling wave propagation on a several-millimeter-long cylindrical pipe driven by piezoelectric ceramic tubes, Reviewed

    D. M. Sun, S. Wang, S. Hata, J. Sakurai, A. Shimokohbe

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control   Vol. 57 ( 7 ) page: 1600-1611   2010

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  61. ガラス成形金型用Ptフリーアモルファス合金のコンビナトリアル探索 Reviewed

    秦 誠一,桜井淳平,阿部充博,安藤正将,青野祐子,下河邉明

    日本機械学会論文集(C編)   Vol. 76   page: 682-684   2010

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  62. Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials Reviewed

    Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Shengxian Jiang, Akira Shimokohbe, Seiichi Hata,

    Journal Solid Mechanics and Materials Engineering   Vol. 4 ( 12 ) page: 1742-1753   2010

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  63. Development of high-performance vacuum sensor using joining method for thin film metallic glass Reviewed

    Seiichi Hata, Junpei Sakurai, Hiroshi Kozako, Yukiko Matsumoto, Akira Shimokohbe, Nobuyuki Mukai, Yoshinori Ohnuma, Tsutomu Takahashi, Yasunori Saotome, Hisamichi Kimura, Parmanand Sharma and Akihisa Inoue

    Proc. of ICCCI 2009     page: CR-ROM   2009.9

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  64. Fabrication of thin film metallic glass (TFMG) pipe for a cylindrical ultrasonic linear micro-actuator Reviewed

    Sheng Wang, Dongming Sun, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

    Sensor and Actuator A Physical   Vol. 153 ( 1 ) page: 120-126   2009.6

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    DOI: 10.1016

  65. Novel Crystallization Temperature Measurement Method for Combinatorial Evaluation using Infrared Thermography Reviewed

    Yuko Aono, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe

    Proc. of 2009 MRS Spring Meeting   ( 1159E ) page: G1-4 CD-ROM   2009.4

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  66. Vibration characteristics of a cylindrical shell with 25 µm thickness fabricated by the rotating sputtering system Reviewed

    Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe,

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control   Vol. 56 ( 3 ) page: 622-630   2009.3

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  67. 単一アークプラズマガンを用いたコンビナトリアル蒸着法 Reviewed

    秦 誠一,藤田敏充,桜井淳平,下河邉明

    材料   Vol. 58 ( 10 ) page: 821-826   2009

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    DOI: 10.2472

  68. Laser Forming of Thin Film Metallic Glass Reviewed

    Masaaki OTSU, Yuki IDE, Junpei SAKURAI Seiichi HATA and Kazyaki TAKASHIMA

    Journal of Solid Mechanics and Materials Engineering   Vol. 3 ( 2 ) page: 387-395   2009

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  69. Characterization of the Pt-Hf-Zr-Ni Thin Film Amorphous Alloys for Precise Optical Glass Lens Mold Reviewed

    Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shinokohbe,

    J. Solid Mechanics and Mat. Eng   Vol. 3 ( 8 ) page: 1022-1032   2009

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    DOI: 10.1299

  70. Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator Reviewed

    Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

    Microelectronic Engineering,   Vol. 86 ( 4-6 ) page: 1262-1266   2009

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  71. Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated by a Carousel-Type Sputtering System Reviewed

    Junpei SAKURAI, Seiichi HATA and Akira SHIMOKOHBE

    Jpn. J. Appl. Phys.   Vol. 48 ( 2 ) page: 025503   2009

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    DOI: 10.1143

  72. Measurement of Crystallization Temperature Using Thermography for Thin Film Amorphous Alloy Samples Reviewed

    Meiichi Hata, Yuko Aono, Junpei Sakurai and Akira Shimokohbe

    Applied Physics Express   Vol. 2 ( 3 ) page: 036501   2009

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    DOI: 10.1143

  73. A traveling wave type of piezoelectric ultrasonic bidirectional linear microactuator Reviewed

    Dongming Sun, Sheng Wang, Junpei Sakurai, Kee-Bong Choi, Seiichi Hata and Akira Shimokohbe

    Applied Physics Express   Vol. 2 ( 4 ) page: 046503   2009

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    DOI: 10.1143

  74. Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube, Sensors and Actuators, Reviewed

    D. M. Sun, S. Wang, S. Hata, J. Sakurai, A. Shimokohbe

    A: physical   Vol. 156 ( 2 ) page: 359-365   2009

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    DOI: 10.1016

  75. A cylindrical ultrasonic linear microactuator Reviewed

    Sheng Wang, Dongming Sun, Seiichi Hata and Akira Shimokohbe

    Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008)     page: CD-ROM   2008.10

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  76. Search for Novel MEMS Materials using a Combinatorial Method Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Taiyo Ueshima, Junpei Sakurai and Akira Shimokohbe

    Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008)     page: CD-ROM   2008.10

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  77. Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator Reviewed

    Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

    Book of abstracts in 34th International Conference on Micro & Nano Engineering (MNE 2008)     page: 117   2008.9

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  78. Combinatorial evaluation of heat and oxidation resistances of Ni-Nb-Zr thin film amorphous alloys Reviewed

    Junpei Sakurai, Seiichi Hata, Mitsuhiro Abe, Yuko Aono and Akira Shimokohbe

    Processings of 5th International Conference on Combinatorial and High-Throughput Materials Science.     page: 1035   2008.9

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  79. New Measurement Method for Crystallization Temperature of Thin Film Amorphous Alloy Reviewed

    Yuko Aono, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

    JUNIOR EUROMAT 2008     page: CD-ROM   2008.7

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  80. A novel cylindrical ultrasonic linear microactuator Reviewed

    Wang Sheng, Dongming Sun, Seiichi Hata and Akira Shimokohbe

    Proceedings of European Society for Precision Engineering and Nanotechnology     page: 456-459   2008.5

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  81. Laser Forming of Pd-Based Thin Film Metallic Glass Reviewed

    14. Masaaki Otsu, Yuki IDE, Junpei Sakurai, Seiichi Hata, Kazuki Takashima

    Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials     page: 56   2008.5

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  82. Laser Forming of Pd-Based Thin Film Metallic Glass Reviewed

    Masaaki Otsu, Yuki IDE, Junpei Sakurai, Seiichi Hata, Kazuki Takashima

    Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials     page: 56   2008.5

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  83. In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system Reviewed

    Yuji Matsumoto, Miki Hiraoka, Masao Katayama, Seiichi Hata, Mikio Fukuhara, Takeshi Wada, Hisamichi Kimura and Akihisa Inoue

    Materials Science & Engineering B   Vol. 148 ( 1-3 ) page: 179-182   2008.2

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    DOI: 10.1016

  84. Behavior of Joining Interface between Thin Film Metallic Glass and Silicon Nitride at Heating Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe,

    Materials Science & Engineering B   Vol. 148 ( 1-3 ) page: 149-153   2008.2

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    DOI: 10.1016

  85. 積層型MEMS血球分析チップの開発 Reviewed

    田邊力也, 秦 誠一, 下河邉 明,

    精密工学会誌   Vol. 74 ( 7 ) page: 746-751   2008

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  86. ガラスレンズ成形金型用の新しいアモルファス合金のコンビナトリアル探索―結晶化開始温度,機械特性の評価― Reviewed

    山内隆介,秦 誠一,桜井淳平,下河邉明

    精密工学会誌   Vol. 74 ( 3 ) page: 252-263   2008

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  87. 新しいPt基アモルファス合金を用いたガラスレンズ成形用金型の試作 Reviewed

    秦 誠一,桜井淳平,下河邉明

    日本機械学会論文集C編   Vol. 74 ( 3 ) page: 252-263   2008

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  88. Search for Novel Amorphous Alloys with High Crystallization Temperature by Combinatorial Arc Plasma Deposition Reviewed

    Seiichi Hata, Junpei Sakurai, Ryusuke Yamauchi and Akira Shimokohbe

    Applied Surface Science,   Vol. 254 ( 3 ) page: 738-742   2007.11

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    DOI: 10.1016

  89. Combinatorial Arc Plasma Deposition Search for Ru-based Thin Film Metallic Glass Reviewed

    Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

    Applied Surface Science   Vol. 254 ( 3 ) page: 720-724   2007.11

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    DOI: 10.1016

  90. Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold Reviewed

    J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe

    Proc. of 2007 MRS Fall Meeting A1.6     page: CD-ROM   2007.11

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  91. Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion Reviewed

    Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe

    Proc. of 2007 MRS Fall Meeting A6.8     page: CD-ROM   2007.11

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  92. Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold Reviewed

    M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe

    Proc. of 2007 MRS Fall Meeting A6.14     page: CD-ROM   2007.11

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  93. Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold Reviewed

    J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe

    Proc. of 2007 MRS Fall Meeting A1.6     page: CD-ROM   2007.11

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  94. Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion Reviewed

    Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe

    Proc. of 2007 MRS Fall Meeting A6.8     page: CD-ROM   2007.11

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  95. Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold Reviewed

    M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe

    Proc. of 2007 MRS Fall Meeting A6.14     page: CD-ROM   2007.11

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  96. Characteristics of Thin Film Metallic Glasses for MEMS and Precise Part Reviewed

    J. Sakurai, S. Hata and A. Shimokohbe

    Proceedings of Second TIT-BIT Joint Workshop on Mechanical Engineering     page: CD-ROM   2007.8

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  97. Characteristics of Thin Film Metallic Glasses for MEMS and Precise Part Reviewed

    J. Sakurai, S. Hata and A. Shimokohbe

    Proceedings of Second TIT-BIT Joint Workshop on Mechanical Engineering     page: CD-ROM   2007.8

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  98. A Hemoglobin and Volum Measurement Sensor for Point of Care Testing Analyzer using MEMS Process Reviewed

    Rikiya Tanabe, Seiichi Hata and Akira Shimokohbe

    IEEJ Transactions on Sensors and Micromachines   Vol. 127 ( 5 ) page: 267-271   2007.8

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    DOI: 10.1541

  99. Behavior of joining interface between thin film metallic glass and silicon nitride at heating Reviewed

    19. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

    Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC),     page: 56   2007.5

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  100. Behavior of joining interface between thin film metallic glass and silicon nitride at heating Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

    Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC     page: 56   2007.5

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  101. Searching for Novel Ru-Based Thin Film Metallic Glass by Combinatorial Arc Plasma Deposition Reviewed

    Junpei Sakurai Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

    Jpn. J. Appl. Phys   Vol. 46 ( 4A ) page: 1590-1595   2007

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    DOI: 10.1143

  102. A Disposable Concept Laminated MEMS Hematology Chip Reviewed

    R. Tanabe, S. Hata, A. Shimokohbe

    Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology   ( 1 ) page: 45-48   2007

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  103. A Disposable Concept Laminated MEMS Hematology Chip Reviewed

    R. Tanabe, S. Hata, A. Shimokohbe

    Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology   ( 1 ) page: 45-48   2007

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  104. Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition Reviewed

    Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

    Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology, pp     page: 41   2006.12

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  105. The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

    Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology     page: pp63   2006.12

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  106. Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition Reviewed

    Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

    Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology     page: pp63   2006.12

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  107. The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

    Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology     page: pp63   2006.12

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  108. Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators Reviewed

    Takashi Fukushige, Takehiko Hayashi, Seiichi Hata and Akira Shimokohbe

    IEEJ Transactions on Sensors and Micromachines   Vol. 126 ( 9 ) page: 522-527   2006

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  109. MEMS complete blood count sensors designed to reduce noises from electolysis gas Reviewed

    Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe

    Microelectronic Engineering   Vol. 83 ( 4-9 ) page: 1646-1650   2006

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  110. Combinatorial Arc Plasma Deposition of Thin Films Reviewed

    Seiichi HATA, Ryusuke YAMAUCHI, Junpei SAKURAI and Akira SHIMOKOHBE

    Jpn. J. Appl. Phys.   Vol. 45 ( 4A ) page: 2708-2713   2006

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  111. Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass Reviewed

    Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI and Akira SHIMOKOHBE

    Jpn. J. Appl. Phys   Vol. 45 ( 7 ) page: 5911-5919   2006

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  112. A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas Reviewed

    Rikiya Tanabe, Seiichi Hata and Akira Shimokohbe

    IEEJ Transactions on Sensors and Micromachines   Vol. 126 ( 7 ) page: 297-301   2006

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  113. Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

    Proc. of 2005 MRS Fall Meeting     page: CD-ROM   2005.11

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  114. Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass Reviewed

    Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa and Akira Shimokohbe

    Proc. of 18th International Congress of Mechanical Engineering (COBEM 2005)     page: CD-ROM   2005.11

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  115. Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses Reviewed

    Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

    Proc. of 2005 MRS Fall Meeting     page: CD-ROM   2005.11

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  116. Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature Reviewed

    24. Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

    Proc. of 2005 MRS Fall Meeting     page: CD-ROM   2005.11

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  117. Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy Reviewed

    Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe

    Proc. of 2005 MRS Fall Meeting     page: CD-ROM   2005.11

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  118. Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature Reviewed

    Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe

    Proc. of 2005 MRS Fall Meeting     page: CD-ROM   2005.11

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  119. Integrated conical spring linear actuators for tilting-mirror applications Reviewed

    T. Fukushige, S. Hata and A. Shimokohbe

    Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)     page: pp12-13   2005.9

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  120. A complete blood count micro sensor designed to reduce noise from electrolysis gas Reviewed

    R. Tanabe, S. Hata and A. Shimokohbe

    Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005)     page: pp622-623   2005.9

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  121. Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range Reviewed

    T. Fukushige, S. Hata, Takehiko Hayashi, and A. Shimokohbe

    Proc. IPACK2005     page: CD-ROM, pp. IPACK2005-73145   2005.6

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  122. Thin Film Metallic Glasses as New MEMS Materials Reviewed

    Seiichi Hata, Junpei Sakurai and Akira Shimokohbe

    Technical Digest of The 18th IEEE International Conference on MEMS 2005     page: 479-482   2005.1

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  123. A MEMS Conical Spring Actuator Array Reviewed

    T. Fukushige, S. Hata, and A. Shimokohbe,

    IEEE/ASME Journal of Microelectromechanical Systems   Vol. 14 ( 2 ) page: 243-253   2005

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  124. Novel fabrication method of metallic glass thin film using carousel type sputtering system Reviewed

    J. Sakurai, S. Hata and A. Shimokohbe

    Proc. of SPIE Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II,     page: 260-267   2004.12

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  125. A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking Reviewed

    T. Fukushige, S. Hata and A. Shimokohbe

    Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)     page: 15-16   2004.6

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  126. 2-DOF thin film metallic glass microactuator Reviewed

    S. Hata, H. W. JEONG and A. Shimokohbe

    Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)     page: 9-10   2004.6

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  127. Large-output-force out-of-plane MEMS actuator array Reviewed

    T. Fukushige, S. Hata and A. Shimokohbe

    Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology,   Vol. 5276   page: 240-248   2003.12

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  128. Micro dome shape structures made of thin film metallic glass Reviewed

    Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai and Akira Shimokohbe

    Micro System Technology 2003     page: (MST '03), 180-187   2003.10

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  129. Reduction of electrical resistivity in PdCuSi thin film metallic glass Reviewed

    J. Sakurai, S. Hata and A. Shimokohbe

    Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03)     page: CD-ROM   2003.9

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  130. On-Chip Variable Inductor Using Microelectromechanical Systems Technology Reviewed

    Yoshisato YOKOYAMA ,Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE

    Jpn. J. Appl. Phys   Vol. 42   page: 2190-2192   2003

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  131. Self-alignment of microparts using liquid surface tension - behavior of microparts and alignment characteristics Reviewed

    Kaiji Sato, Kentaro Ito, Seiichi Hata and Akira Shimokohbe

    Precision Engineering   Vol. 27   page: 42-50   2003

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  132. Microforming of Three-Dimensional Microstructures from Thin Film Metallic Glass Reviewed

    Hee-Won Jeong, Seiichi Hata and Akira Shimokohbe

    IEEE/ASME Journal of Microelectromechanical Systems   Vol. 12 ( 1 ) page: 42-52   2003

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  133. Fabrication and Evaluation of On-Chip Micro Variable Inductor Reviewed

    Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe

    Microelectronic Engineering   ( 67-68 ) page: 582-587   2003

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  134. 集積化円すいばねマイクロアクチュエータ Reviewed

    秦 誠一,加藤友和,福重孝志,下河邉 明

    精密工学会誌   Vol. 69 ( 3 ) page: 438-442   2003

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  135. Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass Reviewed

    Seiichi Hata, Takashi Fukushige and Akira Shimokohbe

    Proceedings of CPT2002     page: 162-167   2002.10

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  136. Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass, Reviewed

    Seiichi Hata, Takashi Fukushige and Akira Shimokohbe

    Proceedings of CPT2002     page: 162-167   2002.10

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  137. Fabrication and Evaluation of On-Chip Micro Variable Inductor Reviewed

    Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe

    Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002     page: 210-211   2002.9

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  138. Integrated Conical Soring Linear Actuator Reviewed

    Seiichi Hata, Tokokazu Kato, Takashi Fukushige and Akira Shimokohbe

    Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002)     page: 208-209   2002.9

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  139. EMS Technology. Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, 306-307 (2002.9. N Reviewed

    Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE

    Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE     page: 306-307   2002.9

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  140. Micro-Forming of Thin Film Metallic Glass by Local Laser Heating Reviewed

    Hee-Won JEONG, Seiichi HATA and Akira SHIMOKOHBE

    Technical Digest of The 15th IEEE International Conference on MEMS 2002     page: 372-375   2002.1

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  141. A Micro Lens Actuator for Optical Flying Head Reviewed

    Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA and Akira SHIMOKOHBE

    Technical Digest of The 15th IEEE International Conference on MEMS 2002,     page: 507-510   2002.1

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  142. Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region Reviewed

    S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE

    Proceedings of 10th International Conference on Precision Engineering (ICPE)     page: 37-41   2001.7

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  143. Thin Film Metallic Glasses: Fabrication and Property Test. Reviewed

    Y. LIU, S. HATA, K. WADA and A. SHIMOKOHBE

    Technical Digest of The 14th IEEE International Conference on MEMS 2001     page: 102-105   2001.1

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  144. 薄膜金属ガラスの成膜と物性 Reviewed

    秦 誠一,劉 永東,和田晃一,下河邉明

    精密工学会誌   Vol. 67 ( 10 ) page: 1708-1713   2001

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  145. Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass Reviewed

    YONGDONG LIU, SEIICHI HATA, KOUICHI WADA and AKIRA SHIMOKOHBE

    J. Appl. Phys   Vol. 40   page: 5382-5388   2001

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  146. 金属ガラスの精密・微細加工に関する基礎的研究(Zr基バルク金属ガラスの引張変形挙動) Reviewed

    秦 誠一,劉 永東,長峯靖之,下河邉明

    日本機械学会論文集C編   Vol. 67 ( 660 ) page: 313-318   2001

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  147. 超塑性複合加工によるマイクロ2段歯車の創製 Reviewed

    早乙女康典,秦 誠一,坂口幸二

    塑性と加工   Vol. 41 ( 468 ) page: 49-53   2000

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  148. 薄膜金属ガラスを用いた微細構造物の製作-(第1報)薄膜金属ガラスの製作と過冷却液体域を利用した微細成形- Reviewed

    秦 誠一, 後藤 潤, 佐藤海二, 下河邉明

    精密工学会誌   Vol. 66 ( 1 ) page: 96-101   2000

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  149. 薄膜金属ガラスを用いた微細構造物の製作-(第2報)薄膜金属ガラス静電マイクロアクチュエータの提案と試作- Reviewed

    秦 誠一, 後藤 潤, 佐藤海二, 下河邉明

    精密工学会誌   Vol. 66 ( 2 ) page: 287-291   2000

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  150. 液体の表面張力を利用したマイクロ部品のセルフアライメントの原理と特性 Reviewed

    佐藤海二, 関 智紀, 秦 誠一, 下河邉明

    精密工学会誌   Vol. 66 ( 2 ) page: 282-286   2000

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  151. Self-alignment of Microparts Using Liquid Surface Tension - Examination of the Alignment Characteristics Reviewed

    K. SATO, K. ITO, S. HATA and A. SHIMOKOHBE

    Proceedings of ASPE's 15th Annual Meeting     page: 345-348   2000

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  152. elf-alignment for Microparts Assembly using Water Surface Tension Reviewed

    K. SATO, S. HATA and A. SHIMOKOHBE

    Proceedings of SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS'99   Vol. 3892   page: 321-328   1999.10

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  153. Fabrication of Thin Film Metallic Glass and its Application to Microactuator. Reviewed

    S. HATA, K. SATO and A. SHIMOKOHBE

    International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS'99   Vol. 3892   page: 97-108   1999.10

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  154. 金属ガラスの精密・微細加工に関する研究(Zr基金属ガラスの過冷却液体域における成形性) Reviewed

    秦 誠一, 山田典弘, 早乙女康典, 井上明久, 下河邉明

    日本機械学会論文集C編   Vol. 65 ( 633 ) page: 346-352   1999

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  155. Precision and Micro Machining of Metallic Glasses -Formability of Zr Based Metallic Glasses in the Supercooled Liquid State Reviewed

    S. HATA, N. YAMADA, Y. SAOTOME, A. INOUE and A. SHIMOKOHBE

    Proceedings of China-Japan Bilateral Symposium on Advanced Manufacturing Engineering     page: 81-86   1998.10

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  156. 延性モード切削加工用の超精密変位台の開発 Reviewed

    大塚二郎, 秦 誠一, 下河邉明, 越水重臣

    精密工学会誌   Vol. 64 ( 4 ) page: 546-551   1998

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  157. Direct Writing of Cu-based Micro-temperature Sensors onto Glass and Poly(dimethylsiloxane) Substrates Using Femtosecond Laser Reductive Patterning of CuO Nanoparticles Reviewed

    Mizue Mizoshiri, Seiichi Hata

    Research & Reviews: Journal of Material Sciences   Vol. 4 ( 4 ) page: 47-54   1016.10

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    DOI: 10.4172/2321-6212.1000155

▼display all

Books 3

  1. Integration Technology for Heterogeneous Advanced Devices: Basics and Application

    ( Role: Joint author)

    2012.11  ( ISBN:978-4-7813-0586-8

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  2. これで使える機能性材料パーフェクトガイド

    大竹尚登他( Role: Joint author)

    講談社  2012 

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    Language:Japanese

  3. 機械実用便覧(改訂第7版)

    日本機械学会編( Role: Sole author)

    日本機械学会  2011 

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    Language:Japanese

Presentations 34

  1. Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

    井上 慎,岡智絵美,櫻井淳平,秦誠一

    形状記憶合金協会 第11期定時総会  2021.3.12  形状記憶合金協会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

  2. 新規医療用Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

    井上 慎,岡智絵美,櫻井淳平,秦誠一

    生体医歯工学共同研究拠点 令和2年度成果報告会  2021.3.5  生体医歯工学共同研究拠点

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

  3. Ti-Ni-Cu高成形性形状記憶合金を用いた,反力可変受動形触覚ディスプレイ用触知ピンの作製及び駆動評価

    南原 圭汰,伊木 啓一郎,岡智絵美,櫻井淳平,秦誠一

    第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (general)  

  4. 逆リフトオフ法を用いた MEMS ミラーデバイスの作製

    高瀬 駿,山田 恭平,中川 優希,岡智絵美,櫻井淳平,秦誠一

    第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (general)  

  5. Ti-Ni-Cu高成形性形状記憶合金のソフトアクチュエータへの基礎検討

    浅井 泰平,青山 椋佑,岡智絵美,櫻井淳平,秦誠一

    第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (general)  

  6. 二層構造を有した手術シミュレータ用血管モデルの作製

    山田 大地,堀 史門,山崎貴大,岡智絵美,櫻井淳平,秦誠一

    第28回機械材料・材料加工技術講演会  2020.11.19  日本機械学会機械材料・材料加工部門

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (general)  

  7. 高効率長寿命FABガンの開発 Invited

    秦 誠一

    接合界面創成技術委員会第29回研究会  2020.11.19  接合界面創成技術委員会

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  8. Plasma analysis of the FAB source for the SAB process by PIC-MCC simulation International conference

    R. Morisaki, T. Hirai, T. Takahashi, H. Tsuji, N. Ohno, Takahiro Yamazaki, Chiemi Oka, Junpei Sakurai, Seiichi Hata

    33rd International Microprocesses and Nanotechnology Conference  2020.11.9 

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    Event date: 2020.11

    Language:English   Presentation type:Oral presentation (general)  

  9. 材料創製・加工技術で拓くマイクロ・ナノの世界 Invited

    秦 誠一

    長野県精密加工技術研究会 令和2年度技術講演会  2020.11.2  長野県精密加工技術研究会

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    Event date: 2020.11

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  10. Ti-Ni-Cu高成形性形状記憶合金を用いた,反力可変受動形触覚ディスプレイ用触知ピンの作製

    南原 圭汰,伊木 啓一郎,岡智絵美,櫻井淳平,秦誠一

    日本機械学会2020年度年次大会  2020.9.13  日本機械学会

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  11. 磁性ナノ粒子の発熱を利用した新規マイクロバルブの作製

    三輪 大貴,岡智絵美,櫻井淳平,秦誠一

    日本機械学会2020年度年次大会  2020.9.13  日本機械学会

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  12. プラズマ解析による表面活性化接合用FAB源の高性能化

    森崎 諒,平井 隆巳,高橋 知典,辻 裕之,大野 哲靖,岡智絵美,櫻井淳平,秦誠一

    日本機械学会2020年度年次大会  2020.9.13  日本機械学会

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  13. テクスチャ基板による色素増感太陽電池における変換効率への影響

    西保 裕司,楊 娜,岡智絵美,櫻井淳平,秦誠一

    日本機械学会2020年度年次大会  2020.9.13  日本機械学会

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  14. 手術シミュレータ用3次元次元応力測定系の開発

    山田 大地,堀 史門,山崎貴大,岡智絵美,櫻井淳平,秦誠一

    日本機械学会2020年度年次大会  2020.9.13  日本機械学会

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  15. 機能性薄膜のコンビナトリアル探索とセンサ応用 Invited

    秦 誠一

    新化学技術推進協会 電子情報技術部会 ナノフォトニクスエレクトロニクス交流会 講演会  2020.2.25  新化学技術推進協会 電子情報技術部会 ナノフォトニクスエレクトロニクス交流会

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    Event date: 2020.2

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

  16. マルチスケール、マルチマテリアル3D造形技術とCOMSOLへの期待 Invited

    秦 誠一

    COMSOL CONFERENCE 2016 

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    Event date: 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京   Country:Japan  

  17. フェムト秒レーザ還元直接描画法による非平面基板上への温度センサ作製

    伊藤恭章,溝尻瑞枝,櫻井淳平,秦誠一

    第2回日本機械学会イノベーション講演会 

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    Event date: 2016.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

  18. Fabrication of Ni/Cr2O3 Composite Microstructures Using Femtosecond Laser Reductive Sintering of NiO/Cr Mixed Nanoparticles International conference

    Kenki Tamura,Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

    29th International Microprocesses and Nanotechnology Conference(MNC2016) 

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    Event date: 2016.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Kyoto   Country:Japan  

  19. フェムト秒レーザ還元焼結を用いたNi合金微細パターン作製

    田村健紀,溝尻瑞枝,櫻井淳平,秦誠一

    第33回「センサ・マイクロマシンと応用システム」シンポジウム 

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    Event date: 2016.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:平戸   Country:Japan  

  20. 新奇金属系マイクロマシン・センサ材料とその微細加工 Invited

    秦 誠一,溝尻瑞枝,櫻井淳平

    「センサ・マイクロマシンと応用システム」シンポジム 

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    Event date: 2016.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:平戸   Country:Japan  

  21. リアルメカトロニクスを目指すマルチマテリアル・マルチスケール3D造形技術 Invited International conference

    秦 誠一

    第65回高分子討論会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川   Country:Japan  

  22. フェムト秒レーザ還元直接描画法による非平面基板上へのCu微細構造形成

    伊藤恭章,溝尻瑞枝,櫻井淳平,秦誠一

    日本機械学会2016年度年次大会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  23. フェムト秒レーザ還元直接描画法による3次元微細Cuパターンの積層造形

    荒金駿,溝尻瑞枝,櫻井淳平,秦誠一

    日本機械学会2016年度年次大会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:九州大学   Country:Japan  

  24. Three-dimensional Cu micropatterns fabricated using femtosecond laser-induced CuO nanoparticle reduction International conference

    Shun Arakane, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

    10th International Conference on Photoexcited Processes and Applications 

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    Event date: 2016.8 - 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Brasov   Country:Romania  

  25. Femtosecond laser-induced reductive sintering to fabricate Ni-based alloy micropatterns International conference

    Kenki Tamura, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

    10th International Conference on Photoexcited Processes and Applications 

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    Event date: 2016.8 - 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Brasov   Country:Romania  

  26. イノベーションを如何に起こすか?~マルチマテリアル3D造形を例として~ Invited

    秦 誠一

    ナノ物質集積複合化技術研究会 

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    Event date: 2016.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋   Country:Japan  

  27. フェムト秒レーザ還元直接描画法を用いた金属微細パターニングとその応用 Invited

    溝尻瑞枝,秦 誠一

    (社)溶接学会第114回マイクロ接合研究委員会 

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    Event date: 2016.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:京都   Country:Japan  

  28. 金属酸化物ナノ微粒子を用いたフェムト秒レーザー還元直接描画法 Invited

    溝尻瑞枝,秦 誠一

    展示会OPIE'16&月刊オプトロニクス 連動特別講演会 

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    Event date: 2016.5

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  29. Spray-coating of CuO nanoparticles for femtosecond laser reduction patterning on nonplanar substrates International conference

    Yasuaki Ito, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata

    The Second Smart Laser Processing Conference 2016 (SLPC2016) 

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    Event date: 2016.5

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Yokohama   Country:Japan  

  30. Cu micropatterning on poly(dimethylsiloxane) using femtosecond laser reduction of CuO nanoparticles International conference

    Mizue Mizoshiri, Yasuaki Ito, Junpei Sakurai, Seiichi Hata

    The Second Smart Laser Processing Conference 2016 (SLPC2016) 

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    Event date: 2016.5

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Yokohama   Country:Japan  

  31. 機械と電気の真の融合を目指した新しい微細加工技術

    秦 誠一

    第5回集積化MEMS技術研究ワークショップ  

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    Event date: 2014.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:豊橋技術科学大学   Country:Japan  

  32. Fe-Ni-Cr系磁歪材料のコンビナトリアル探索とその磁歪特性評価

    前谷卓哉,中光豊,桜井淳平,中川茂樹,秦 誠一

    日本機械学会 2013年度年次大会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:岡山大学   Country:Japan  

  33. マイクロアクチュータを使用した薄膜金属材料疲労試験

    YapJeng Hua,佐藤康平,Tamjidi Nastaran,桜井淳平,中光豊,秦 誠一

    日本機械学会 2013年度年次大会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:岡山大学   Country:Japan  

  34. 金属ガラス厚膜微細構造体の新しい微細加工法

    秦 誠一

    粉体粉末冶金協会講演 平成24年度秋季大会 

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    Event date: 2012.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:滋賀・立命館大学びわこ・くさつキャンパス エポック立命21   Country:Japan  

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Research Project for Joint Research, Competitive Funding, etc. 1

  1. イノベーションソサエティを活用した中部発革新的機器製造技術の研究開発

    2014.10

    SIP(戦略的イノベーション創造プログラム)/革新的設計生産技術 

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    Grant type:Competitive

    金属とポリマー材料や特性の異なるポリマー材料を任意に積層できるリアルマルチ材料積層造形技術を用い、超リアル手術シミュレータ実体モデル製造技術の基礎研究開発を行う。また、複雑な骨折箇所を迅速的確に固定を可能とするTiの金型フリー板材成形技術による即時オーダメイド体内固定用プレート製造技術の基礎研究開発を行う。
     加えて、開発する技術や製品の社会実装や、研究開発から生まれた新技術やその分野横断的技術の体系化・規格化・標準化を進めるシステムを日本機械学会に構築する。

KAKENHI (Grants-in-Aid for Scientific Research) 6

  1. 集積化MEMSを用いた超ハイスループット材料評価技術

    2016.4 - 2019.3

    科学研究費補助金  基盤研究(B)

    秦 誠一

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    本研究の目的は,MEMS技術とコンビナトリアル技術を応用・融合した新しい超ハイスループット評価技術を開拓し,新エネルギー,省エネルギーや耐環境材料,医療技術,細胞観察などグリーン/ライフ・イノベーションにつながる新材料の効率的・迅速な創成に資することである.本研究期間では,数ミリ角,厚さ数十マイクロメートルオーダの多種多数個の薄膜サンプルを,MEMS技術を応用し同時または別個に加振すると共に,その振動状態をセンシングすることで,各種物性を超ハイスループット評価することができる集積化MEMS薄膜ライブラリを製作する.これを用いて広角スキャナ用高弾性高疲労強度材料や,超小型トルクセンサ用高性能磁歪材料などイノベーションに資する新材料の超ハイスループット評価が可能であることを実証する.

  2. ソフトマテリアルを用いたパッド型ドラッグデリバリーシステム

    2014.4 - 2016.3

    科学研究費補助金 

    秦 誠一

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    Authorship:Principal investigator 

    本研究では,日常動作によるランダムな外力を駆動力とし,温度応答性ゲルを用いたマイクロバルブにより送液量と,そのタイミングの制御を可能とする全く新しいドラックデリバリーシステム(以下,DDS)の構築を目的とする. 本DDSは,従来のDDSに比べ,以下のような特徴を有する.
    ①小型の絆創膏程度の大きさ,柔軟性を有し,低価格で使い捨て可能
    ②マイクロニードルを含む経皮吸収型DDS以上の投与時間,投与量とその制御性
    ③マイクロポンプ型DDS以上の小型,柔軟,極低消費電力

  3. ガラス成形金型用Ptフリーアモルファス合金のコンビナトリアル探索とそのナノ加工

    2008.4 - 2013.3

    科学研究費補助金  若手研究(S)

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    Authorship:Principal investigator 

  4. 高機能金型材料の創成とそのナノ加工

    2007.4 - 2008.3

    科学研究費補助金  基盤研究(B)

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    Authorship:Principal investigator 

  5. Measurement and control of internal stress in thin film metallic glass using combinatorial technology

    Grant number:19H02040  2019.4 - 2023.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\17420000 ( Direct Cost: \13400000 、 Indirect Cost:\4020000 )

  6. Ultra high-throughput evaluation technology for materials using integrated MEMS

    Grant number:16H04300  2016.4 - 2019.3

    Hata Seiichi

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    Authorship:Principal investigator 

    Grant amount:\17420000 ( Direct Cost: \13400000 、 Indirect Cost:\4020000 )

    The purpose of this research is to develop a new ultra-high throughput evaluation technology that combines and integrated MEMS technology and combinatorial technology. The technology contributes to the efficient and prompt creation of new materials that lead to green / life innovation such as new energy, energy saving and environment resistant materials, medical technology and cell observation.
    In this research, various thin film samples of several millimeters square and several tens of micrometers thick were excited simultaneously or separately by applying MEMS technology. By sensing the vibration state, we fabricated an integrated MEMS thin film library that can evaluate various physical properties with extremely high throughput. We demonstrated that it is possible to evaluate super high throughput of new materials contributing to innovation such as high performance magnetostrictive material for ultra-compact torque sensor.

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Teaching Experience (On-campus) 8

  1. Fundamentals of Design

    2020

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    To learn fundamental knowledge about scheme of engineering design for machines and structures. The analytical technique needed for the machine design is learnt on the basis of the understanding of various material characteristics which are required for the selection of materials.
    Goals
    1. The basic concept of the machine design should be able to be understood, and to be explained.
    2. An appropriate material can be selected for the given design parameter.
    3. The machine element corresponding to the working period can be designed.
    4. Working period corresponding to the operating condition can be evaluated.

  2. Design Practice 3

    2020

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    Through this course, students are supposed to experience and establish the foundation of the whole process of making things based on specialized courses in the second and third years.

  3. Science of Materials II

    2020

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    Mechanical properties of metallic materials are lectured from the viewpoint of internal structures such as dislocations. First, various strength characteristics of metallic materials are overviewed. Then, such characteristics, as well as hardening mechanisms, are described on the basis of internal structures.

  4. Manufacturing Processes 2

    2020

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    Fundamental knowledge of Heating Process and Plastic Working in relation to Material science, Solid Mechanics, Heat Transfer Engineering

  5. 計測基礎論

    2015

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     計測は,科学と工学の基盤であり基礎である.
    教科書的理論のみならず現実の計測,データおよび信号処理において注意すべき点や, データ収集など,卒業研究などにおいて自ら実験を行う際に基礎となる内容を講義する.
    達成目標
     基礎力:計測と測定,誤差と精度など用語を正しく理解し,使用できる.誤差論,データ処理,計測法,信号処理など計測に関する基礎的知識を理解し,説明できる.
     応用力:基礎的知識を,実際の計測を行うために応用できる.
     創造力・総合力:実際の測定を行うために適切なセンサ及び計測回路と,信号処理,データ処理を適切に選択することができる.

  6. Micromachining and Micromechatronics

    2015

  7. 超精密工学

    2015

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    高度な機械システムに必要な高精度メカニズムを実現する手段としての,先端的加工技術を総合的に学ぶ.
    達成目標
    基礎力:
    精密測定,精密加工にかかわる基礎的知識を理解し,説明できる.
    応用力:
    基礎的知識を応用し,超精密測定・加工の原理やその装置を理解し,説明できる.
    創造力・総合力:
    基礎的知識,超精密測定・加工法を総合的に理解し,高精度メカニズムを説明できる.

  8. 材料加工学

    2015

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    材料加工技術は,あらゆる工業製品の実現にかかわっている.材料加工プロセスが材料の機械的特性と関係して如何に工業製品の生産に適用されているかを理解する.
    達成目標
    基礎力:
    材料の強度,特性,加工性にかかわる基礎的知識,物理的意味を理解し,説明できる.
    応用力:
    基礎的知識を応用し,工業製品を製作するための各種加工手段を理解し,説明できる.
    創造力・総合力:
    基礎的知識,各種加工手段を総合的に理解し,工業製品の加工プロセスをイメージできる.

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Social Contribution 3

  1. 第4次産業革命を支える マイクロ・ナノ機械

    Role(s):Lecturer

    株式会社フロムページ  夢ナビライブ  2019.7

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    Audience: High school students

    Type:Lecture

    マイクロ・ナノ機械によって、世界はどう変わるのか?

    目に見えないほど小さい機械って何?
     1970年代の初頭から始まった、オートメーション化による第3次産業革命に続き、現代は技術が社会や人体の内部に組み込まれる第4次産業革命の真っ只中と言われています。そこでは使っていることすら気づかないほど微小な機械「マイクロ・ナノ機械」が活躍します。
     マイクロ(メートル)とは1mmの1000分の1の長さの単位で、ナノ(メートル)は、さらにその1000分の1の長さを示す単位です。現在では、マイクロは加工精度などで使われることが多く、ナノはLSI(大規模集積回路)で、回路の線幅でよく用いられている長さの単位です。原子の大きさはおおよそ0.1ナノです。

    すでにマイクロ・ナノ機械は使われている
     例えば、あなたが普段使っているスマートフォンには、モーションセンサが組み込まれています。スマホ本体を縦や横にすると画面もそれに合わせてくれる技術にマイクロ・ナノ機械の技術が使われています。1日の歩数や心拍数、睡眠時間を測る活動計、GPSと連動するジャイロなども同様です。機械といっても、あまりに小さいため、材料を加工して部品を組み立ててといった従来の方法での加工は困難で、あらかじめ一体となるように作っているのです。

    そして魔法のような世界がやってくる!
     現在、この分野で最も普及しているのはMEMS(微小電気機械システム)です。これは材料にシリコンを使い、半導体加工技術で回路と共に機械を作ろうという発想です。ただシリコンで作ることにも限界があり、アモルファス合金という、特殊な金属を応用できないかというアプローチも始まっています。
     マイクロ・ナノ機械の時代は、すでに始まっています。空間に情報を投影しているかのように目に表示したり、腕や指を動かすだけで家電製品が操作できたりするなど、漫画や映画の世界だと思っていたことも、まもなく現実になろうとしているのです。

  2. 韮山高校出張講義

    Role(s):Lecturer

    静岡県立韮山高等学校  2017.12

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    Audience: High school students

    大学レクチャー

  3. 工学教育の質保証に関するフォーラム(JABEE 新人審査委員研修を兼ねて)

    Role(s):Panelist

    日本機械学会  2016年度日本機械学会年次大会 市民フォーラム  九州大学伊都キャンパスセンターゾーン  2016.9

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    Audience: Teachers, Researchesrs, General, Scientific, Governmental agency

    Type:Seminar, workshop

Academic Activities 2

  1. 日本機械学会2020年度年次大会実行副委員長

    Role(s):Planning, management, etc.

    日本機械学会  2020.9

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    Type:Academic society, research group, etc. 

  2. Publication Co-Chair, 31st 2020 IEEE International Symposium on Micro-NanoMechatronics and Human Science International contribution

    Role(s):Planning, management, etc.

    IEEE  2020.12

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    Type:Academic society, research group, etc.