Surface interaction between liquid tin and hydrogen plasma

名古屋大学助手（工学部）   助手

1988.4 - 1992.3

International　Symposium　on　Advanced　Plasma　Science　and　its　Application　to　Nitorides　and　Nanomaterials   International Organizing Committee  

2021.3 - 2022.3   

International　Symposium　on　Advanced　Plasma　Science　and　its　Application　to　Nitrides　and　Nanomaterials   Chair of Executive Committee  

2021.3 - 2022.3   

  International Program Committee  

2021.3 - 2022.3   

International Symposium on Dry Process   International Organizing Committee  

2021.1 - 2021.12   

International Symposium on Dry Process   Vice Chair of Publication Committee  

2021.1 - 2021.12   

International Symposium on Advanced Plasma Science and its application to nitride and nanomaterials   International Organizing Committee  

2020.4 - 2021.3   

International Symposium on Dry Process   Organizing Committee  

2020.3 - 2020.11   

応用物理学会東海支部   企画幹事  

2019.4 - 2020.4   

プラズマ・核融合学会   副会長  

2018.6 - 2020.5   

電気学会   理事・東海支部支部長  

2018.6 - 2020.5   

Microwave Discharge Workshop   International Organizing Committee  

2018.3   

プラズマ・核融合学会   理事  

2014.6 - 2018.5   

Plasma Electronics Award

2007.3   Japan Society of Applied Physics, Plasma Electronics Division  

講演奨励賞

2022.10   応用物理学会   二周波重畳容量結合型プラズマから 電極へ入射する高速粒子の イメージング法を用いた角度分布計測

市川景太,　鈴木陽香,　飯野大輝, 福水裕之, 栗原一彰, 豊田浩孝

キオクシア優秀研究賞　

2022.8   キオクシア（株）  

豊田浩孝

Best Poster Presentation Award

2022.3   ISPlasma2022/IC-PLANTS2022   Radical measurements of Ar/C4F8 dual frequency capacitively-coupled plasma

電気学会優秀論文発表賞

2022.1   令和3年度電気・電子・情報関係学会東海支部連合大会   イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測

市川景太，鈴木陽香，豊田浩孝

APEX/JJAP編集貢献賞

2016.4   応用物理学会  

Best Poster Presentation Award (Poster)

2014.3   ISPlasma2014 Organizing Committee  

応用物理学会講演奨励賞

2000  

応用物理学会講演奨励賞

1998  

Measurement of energy-resolved ion angular distribution in a dual-frequency capacitively coupled argon plasma Reviewed

Kim, Dohan; Kawamura, Shunya; Naito, Masayoshi; Iino, Daiki; Fukumizu, Hiroyuki; KURIHARA, Kazuaki; Suzuki, Haruka; TOYODA, Hirotaka

Japanese Journal of Applied Physics   Vol. 64   page： 05SP15-1 - 05SP15-7   2025.5

Angular distribution measurement of high-energy ions and neutrals impinging on an RF electrode in a dual-frequency capacitively-coupled Ar plasma Invited Reviewed

Shunya Kawamura, Dohan Kim, Keita Ichikawa, Haruka Suzuki, Daiki Iino, Hiroyuki Fukumizu, Kazuaki Kurihara and Hirotaka Toyoda

Plasma Sources Science and Technology     2025.5

Dry Process 2023 Open Access

Koga K., Takeda K., Toyoda H., Ishikawa K., Ichiki T., Nunomura S., Kurihara K., Kuboi N., Ohta T., Takenaka K.

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers   Vol. 63 ( 8 )   2024.8

Influence of bias voltage on the Ar/CH₂F₂/O₂ plasma etching of Si₃N₄ films Reviewed

Kuboi, S; Kataoka, J; Iino, D; Kurihara, K; Toyoda, H; Fukumizu, H

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 63 ( 8 )   2024.8

Evaluation of the spatial structure of multiline emission in a capacitively coupled plasma using tomographic reconstruction Reviewed

Kyuzo, M; Harada, K; Izumi, R; Suzuki, H; Toyoda, H

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 63 ( 5 )   2024.5

Time-varying mechanism of ion composition in a pulse-modulated Ar/C₄F₈/O₂ dual-frequency capacitively coupled plasma Reviewed

Kuboi, S; Kato, H; Akatsuka, Y; Suzuki, H; Toyoda, H

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 63 ( 1 ) page： 016001   2024.1

Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma International journal

Shuichi Kuboi, Haruhito Kato, Yuto Seki, Haruka Suzuki and Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 62 ( SI ) page： SI1003   2023.7

Polyvinyl alcohol-potassium iodide gel probe to monitor the distribution of reactive species generation around atmospheric-pressure plasma jet

Tran, TN; Hu, M; Ogasawara, T; Iwata, Y; Suzuki, H; Sakamoto, J; Akiyoshi, M; Toyoda, H; Matsuura, H

PLASMA SCIENCE & TECHNOLOGY   Vol. 25 ( 3 )   2023.3

Influence of small ground surface on plasma property in an inductively-coupled plasma with floating liner International journal

Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki and Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 62 ( SA ) page： SA1008-1 - SA1008-7   2023.1

Experimental study on boron distribution and transport at plasma-facing components during impurity powder dropping in the Large Helical Device Reviewed Open Access

Kawate T., Ashikawa N., Goto M., Oishi T., Kawamoto Y., Toyoda H., Shoji M., Kawamura G., Masuzaki S., Nespoli F., Gilson E. P., Lunsford R., Suzuki C., Nagy A., Gates D.

NUCLEAR FUSION   Vol. 62 ( 12 ) page： 126052-1 - 126052-9   2022.12

Bubbling phenomenon of liquidized Sn-Bi-Li-Er alloy under hydrogen plasma exposure Reviewed

Tamura Kota, Miyazawa Junichi, Masuzaki Suguru, Tokitani Masayuki, Hamaji Yukinori, Toyoda Hirotaka

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( 10 ) page： 106005   2022.10

Dry Process

Japanese Journal of Applied Physics   Vol. 61 ( SI )   2022.7

High-speed hydrophilic and ashing treatments of polyimide using Ar/O-2 atmospheric-pressure microwave line plasma Reviewed

Japanese Journal of Applied Physics   Vol. 61 ( SI ) page： 1008-1 - 1008-5   2022.7

Enhancement of the ion flux to the substrate through high-voltage biasing in an electron cyclotron resonance plasma and its application to high-speed deposition of conductive carbon film Reviewed

Bae Hansin, Hamaguchi Ikumi, Sasai Kensuke, Suzuki Haruka, Toyoda Hirotaka

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 60 ( 12 )   2021.12

Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma Reviewed

Keita Ichikawa, Manh Hung CHU, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Daiki Iino, Hiroyuki Fukumizu, Kazuaki KURIHARA and Hirotaka TOYODA

Applied Physics Express   Vol. 14 ( 126001 ) page： 126001-1 - 126001-5   2021.11

High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing Reviewed

Hansin BAE,Kensuke Sasai,Haruka Suzuki,Hirotaka Toyoda

Vacuum   Vol. 192   page： 110429-1 - 110429-8   2021.10

Quantitative evaluation of hydrogen retention of solid tin after exposure to hydrogen plasma Reviewed

Kota Tamura,Haruka Suzuki, Junichi Miyazawa,Suguru Masuzaki,Hirotaka Toyoda

Fusion Engineering and Design   Vol. 170 ( September 112532 ) page： 112532-1 - 112532-6   2021.9

Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment Reviewed

Haruka SUZUKI, Hirotsugu KOMA, Tomohiro OGASAWARA, Yosuke KOIKE and Hirotaka TOYODA

Plasma and Fusion Research   Vol. 16 ( 0 ) page： 1406046 - 1406046   2021.4

Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma Reviewed

Makoto Moriyama, Naoya Nakahara, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, Haruka Suzuki, and Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 60 ( 016001 ) page： 016001-1 - 016001-5   2021.1

長尺大気圧マイクロ波プラズマの生成と表面処理への応用

豊田　浩孝、鈴木　陽香

表面技術   Vol. 71 ( 10 ) page： 624-628   2020.10

Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma

Makoto Moriyama1*, Naoya Nakahara1, Akihiro Mitsuya1, Haruka Suzuki1 , Kazuaki Kurihara2, Daiki Iino2, Hiroyuki Fukumizu2, and Hirotaka Toyoda1,3

Japanese Journal of Applied Physics   Vol. 59   page： SJJB03   2020.4

Atmospheric-pressure microwave line plasma with an asymmetric cross-section waveguide for long-scale N2 plasma production

Haruka Suzuki1, Yuto Tamura1, Manh Hung Chu2 and Hirotaka Toyoda1

Japanese Journal of Applied Physics   Vol. 59 ( 016002 ) page： 016002-1-016002-6   2020.1

Microwave plasma

Toyoda H.

RF Power Semiconductor Generator Application in Heating and Energy Utilization     page： 181 - 194   2020.1

高密度表面波励起プラズマによるフッ素樹脂の表面改質

豊田浩孝

機能材料   ( 12月 ) page： PP   2019.12

Rapid resist ashing by slot-excited atmospheric pressure microwave O2 plasma

Hirotaka Toyoda1, Shota Ishikawa1, Haruka Suzuki1 and Takeshi Honda2

Japanese Journal of Applied Physics   Vol. 58 ( 12 ) page： 126001-1-4   2019.11

大気圧マイクロ波放電による高密度長尺ラインプラズマ Reviewed

豊田浩孝、鈴木陽香

応用物理   Vol. 88 ( 2 ) page： 101-104   2019.2

Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow Reviewed

Hikaru Senba, Haruka Suzuki and Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 58 ( SA ) page： pp.SAAC05-1～SAAC05-5   2018.12

Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment

Sasai Kensuke, Keyamura Kazuki, Suzuki Haruka, Toyoda Hirotaka

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 57 ( 6 )   2018.6

液体処理用マイクロ波励起プラズマの生成

豊田　浩孝

表面と真空   Vol. 61 ( 3 ) page： 113-118   2018.3

Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiNx:H films using RF-near microwave PECVD

Sahu Bibhuti Bhusan, Toyoda Hirotaka, Han Jeon Geon

PHYSICS OF PLASMAS   Vol. 25 ( 2 ) page： 023511-1-14(2018)   2018.2

Development and plasma characterization of an 850 MHz surface-wave plasma source Reviewed

B. B. Sahu, S. Koga, H. Toyoda, and Jeon G. Han

AIP Advances   Vol. 7   page： 105213-1-17(2017)   2017.10

Quantitative evaluation of high-energy O- ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target

Suyama Taku, Bae Hansin, Setaka Kenta, Ogawa Hayato, Fukuoka Yushi, Suzuki Haruka, Toyoda Hirotaka

JOURNAL OF PHYSICS D-APPLIED PHYSICS   Vol. 50 ( 44 ) page： 445201   2017.10

An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge

Suzuki Haruka, Toyoda Hirotaka

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 56 ( 11 )   2017.9

液体処理用マイクロ波励起プラズマの生成 Reviewed

豊田浩孝

表面と真空   Vol. 61 ( 3 ) page： 113-118   2017.2

Enhancement of Liquid Treatment Efficiency by Microwave Plasma under Flow-Induced Reduced Pressure Reviewed

Michiko Ito, Tomohiro Takahashi, Sho Takitou, Seigo Takashima, Norio Nomura, Tominori Kitagawa, Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 56   page： 026201-1-6   2017.1

Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition Reviewed

K. Sasai, T. Hagihara, T. Noda, H. Suzuki, H. Toyoda

Jpn. J. Appl. Phys.,   Vol. 55   page： 086202 -1-5(2016)   2016.7

Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma Reviewed

Takafumi Takaba, Haruka Suzuki and Hirotaka Toyoda

Journal of Physics D: Applied Physics, Volume 49, Number 29   Vol. 49 ( 29 ) page： 295202   2016.6

Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave Reviewed

Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

Jpn. J. Appl. Phys.   ( 55 ) page： Article ID: 01AH09-1-6(2016)   2015.12

Low pressure sustainment of surface-wave microwave plasma with modified microwave coupler Reviewed

Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

Jpn. J. Appl. Phys.   ( 55 ) page： Article ID: 016203-1-5(2016)   2015.12

New line plasma source excited by 2.45 GHz microwave at atmospheric pressure Reviewed

Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda

  Vol. 8 ( 3 ) page： 036001   2015.2

Synergistic effect of microwave plasma and ultrasonic wave on decomposition of organic compounds in water Reviewed

Tomohiro Takahashi, Noriharu Takada, and Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 53 ( 7S ) page： 07KE01   2014.6

酸化物ターゲットを用いたRFマグネトロンプラズマにおける高エネルギー粒子の挙動 Invited Reviewed

豊田浩孝

Journal of the Vacuum Society of Japan   Vol. 57 ( 3 ) page： 80-83   2014.3

Influence of Si Substrate Temperature and Bias Voltage on Surface Reaction of Br Radical in HBr Inductively Coupled Plasma

D. Iino, Y. Fujii, T. Oike, H. Toyoda

JPS Conf. Proc.   Vol. 1   page： 015070-1-4 (2014)   2014.3

Influence of Oxygen Addition and Wafer Bias Voltage on Bromine Atom Surface Reaction in a HBr/Ar Inductively Coupled Plasma Reviewed

Daiki Iino , Yasuhiro Nojiri, Keiji Suzuki, Takumi Oike, Yoshitaka Fujii, and Hirotaka Toyoda

Japanese Journal of Applied Physics   Vol. 52 ( 11 ) page： 11NC01-1-6   2013.11

High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System Reviewed

Hitoshi Itoh, Yusuke Kubota, Yusaku Kashiwagi, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Hirotaka Toyoda and Masaru Hori

Jpn. J. Appl. Phys.   Vol. 52   page： 11NE01   2013.11

A Development of Atmospheric Pressure Plasma Equipment and Its Applications for Treatment of Ag Films Formed from Nano-Particle Ink

H. Itoh, Y. Kubota, Y. Kashiwagi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, H. Toyoda and M. Hori

Journal ofPhysics:ConferenceSeries   Vol. 441   page： 012019   2013.6

Rapid Plasma Treatment of Polyimide for Adhesive and Durable Copper Film Deposition

K. Usami, T. Ishijima, H. Toyoda

Thin Solid Films   Vol. 521   page： 22-26   2012.10

High performance of carbon nanowall supported Pt catalyst for methanol electro-oxidation

Chengxu Zhang , Jue Hu , Xiangke Wang , Xiaodong Zhang , Hirotaka Toyoda , Masaaki Nagatsu , Yuedong Meng

CARBON   Vol. 50   page： 3731–3738   2012.4

Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source Reviewed

Yasuhiro Hara , Keigo Takeda, Koji Yamakawa, Shoji Den, Hirotaka Toyoda, Makoto Sekine, and Masaru Hori

Applied Physics Express   Vol. 5   page： 035801   2012.2

Characterization of a steam plasma jet at atmospheric pressure

Guohua Ni, Peng Zhao, Cheng Cheng, Ye Song, Hirotaka Toyoda and Yuedong Meng

Plasma Sources Sci. Technol.   Vol. 21   page： 015009 (12pp)   2012.1

Microphase separated hydroxide exchange membrane synthesis by a novel plasma copolymerization approach

Chengxu Zhang, Jue Hua, Xiangke Wang, Hirotaka Toyoda, Masaaki Nagatsu, Xiaodong Zhang, Yuedong Meng

Journal of Power Sources   Vol. 198   page： 112– 116   2011.10

Spatial Profile Measurement of SiH₃ Radical Flux in SiH₄/H₂ Microwave Plasma by Modified Appearance Mass Spectrometry Reviewed

Toshiyuki Kuroda, Masahira Ikeda, Tatsuo Ishijima, and Hirotaka Toyoda

Jpn. J. Appl. Phys.   Vol. 50   page： 08JB05   2011.8

High-Performance Plasma-Polymerized Alkaline Anion-Exchange Membranes for Potential Application in Direct Alcohol Fuel Cells

Chengxu Zhang, Jue Hu, Masaaki Nagatsu, Yuedong Meng, Wei Shen, Hirotaka Toyoda, Xingsheng Shu

Plasma Process. Polym.   Vol. 8   page： 1024–1032   2011.8

Preparation of high-performance hydroxide exchange membrane by a novel ablation restriction plasma polymerization approach

Chengxu Zhang, Jue Hu, Yuedong Meng, Masaaki Nagatsu and Hirotaka Toyoda

Chem. Commun.   Vol. 47   page： 10230–10232   2011.5

Magnetron sputtering of platinum nanoparticles onto vertically aligned carbon nanofibers for electrocatalytic oxidation of methanol

Chengxu Zhang, Jue Hu, Masaaki Nagatsu, Xingsheng Shu, Hirotaka Toyoda, Shidong Fang, Yuedong Meng

Electrochimica Acta   Vol. 56   page： 6033– 6040   2011.5

Refractory Organic Solute Decomposition in Water using Microwave Plasma Reviewed

Tatsuo Ishijima, Ryota Saito, Hiroyasu Sugihara, and Hirotaka Toyoda

Transactions of the Materials Research Society of Japan   Vol. 36 ( 3 ) page： 475-478   2011.3

Influence of temperature and pressure on solute decomposition efficiency by microwave-excited plasma Reviewed

R. Saito , H. Sugiura , T. Ishijima, H. Toyoda

Current Applied Physics   Vol. 11 ( 5 ) page： S195-S198   2011.3

Pulsed plasma-polymerized alkaline anion-exchange membranes for potential application in direct alcohol fuel cells

Chengxu Zhang, Jue Hu, Jie Cong, Yanping Zhao, Wei Shen, Hirotaka Toyoda, Masaaki Nagatsuc, Yuedong Menga

Journal of Power Sources   Vol. 196   page： 5386–5393   2011.2

Effect of O Ion Beam Irradiation during RF-Magnetron Sputtering on Characteristics of CoFeB-MgO Magnetic Tunnel Junctions Reviewed

Kazunaga Ono, Norikazu Ohshima, Kazuya Goto, Hiroki Yamamoto, Tadashi Morita, Keizo Kinoshita, Tatsuo Ishijima, and Hirotaka Toyoda

Jpn. J. Appl. Phys. 50 (2011) 023001   Vol. 50   page： 023001   2011.2

Plasma-grafted alkaline anion-exchange membranes based on polyvinyl chloride for potential application in direct alcohol fuel cell

Jue Hu, Chengxu Zhang, Jie Cong, Hirotaka Toyoda, Masaaki Nagatsu, Yuedong Meng

  Vol. 196   page： 4483–4490   2011.1

Novel Antenna Coupler Design for Production of Meter-ScaleHigh-Density Planar Surface Wave Plasma Reviewed

Tatsuo Ishijima, Yasunori Nojiri, Hirotaka Toyoda, Hideo Sugai

  Vol. 49   page： 086002   2010.8

Efficient production of microwave bubble plasma in water for plasma processing in liquid Reviewed

T. Ishijima, H. Sugiura, R. Saito, H. Toyoda, H. Sugai

Plasma Sources Sci. Technol. 015010   Vol. 19   page： 015010   2010

Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target Reviewed

T. Ishijima, K. Goto, N. Ohshima, K. Kinoshita, and H. Toyoda

Jpn. J. Appl. Phys.   Vol. 48   page： 116004   2009.11

メタルスパッタリングプラズマの高度化とその最新動向

豊田浩孝（分担執筆）

電気学会技術報告書   Vol. 1162   page： pp.11~14   2009.7

Rapid treatment of polyimide film surfaces using high-density microwave plasma for enhancement of Cu layer adhesion Reviewed

Y. Takagi , Y. Gunjo , H. Toyoda , H. Sugai

Vacuum,   Vol. 83   page： 501–505   2008.10

Effect of Sputtering Deposition Process on Magnetic Properties on Magnetic Multilayers Reviewed

Y. Maeda, Y. Suzuki, Y. Sakashita, S. Iwata, T. Kato, S. Tsunashima, H. Toyoda and H. Sugai

Jpn. J. Appl. Phys.   Vol. 47 ( 10 ) page： 7879-7885   2008.10

Surface Modification of Fluorocarbon Polymer Film by High Density Microwave Plasma Reviewed

K. Ishikawa, T. ishijima, K. Sasai, H. Toyoda and H. Sugai

Transactions of the Materials Research Society of Japan   Vol. 33 ( 3 ) page： 683-686   2008.9

Characteristics of Low-energy Atom and Molecule Beams Generated by the Charge Exchange Reaction Reviewed

Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Toyoda, M. Sekine, M. Hori

J. Appl. Phys.   Vol. 103 ( 5 ) page： 053301 1-5   2008.5

Deposition of polycrystalline SiGe by surface wave excited plasma Reviewed

Y. Takanishi, T. Okayasu, H. Toyoda, H. Sugai

Thin Solid Films Vol., pp.   Vol. 516   page： 3554-3557   2008.4

スパッタプラズマ中の高エネルギー粒子計測と制御 Reviewed

豊田浩孝

真空   Vol. 51 ( 4 ) page： 258-263   2008.4

Suppression of Super High-Energy Species by VHF-DC Superimposed Magnetron Sputter Plasma Reviewed

Y. Sakashita, Y. Takagi, T. Kato, H. Toyoda, S. Iwata, S. Tsunashima and H. Sugai

Transaction of Materials Research Society of Japan   Vol. 32 ( 2 ) page： 481-484   2007.12

Suppression of High-Energy Backscattered Particles in Magnetron Plasma Reviewed

Yusuke Takagi, Hirotaka Toyoda, and Hideo Sugai

Jpn. J. Appl. Phys.   Vol. 46 ( 12 ) page： 7865-7869   2007.12

Tunable Low-energy Ar Fast Atom Source with Large Diameter Reviewed

Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Toyoda, M. Hori

Appl. Phys.Lett.   Vol. 91 ( 23 ) page： 23502 1-3   2007.12

High-Speed μc-Si Films Deposition and Large-Grain Poly-Si Films Deposition by Surface Wave Discharge Reviewed

Y. Hotta, H. Toyoda and H. Sugai

Thin Solid Films   Vol. 515   page： 4983-4987   2007.4

Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry Reviewed

J. Osaka, M. Senthil Kumar, H. Toyoda, T. Ishijima, H. Sugai and T. Mizutani

APPLIED PHYSICS LETTERS   Vol. 90   page： 172114 1-3   2007.4

Investigation of the ion dese non-uniformity caused by sheath-lens focusing effect on silicon wafers Reviewed

N. Holtzer , E. Stamate, H. toyoda and H. Sugai

Thin Solid Films   Vol. 515   page： 4887-4891   2007.4

Dependence of Giant Magnetoresitance in Cn/Cu Multilayers on Sputtering Condition Reviewed

Changchuan Chen, Y. Suzuki, T. Kato. S. Iwata, S. Tsunashima, H. Toyoda, H. Sugai

Japanese Juenal of Applied Physics   Vol. 45 ( 10B ) page： 8466-8468   2006.10

Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma Reviewed

Y. Takagi, Y. Sakashita, H. Toyoda, and H. Sugai

Vacuum   Vol. 80 ( 6 ) page： 581-587   2006.3

バイアス光プローブによる反応性プラズマのEEDF測定 Reviewed

豊田浩孝

プラズマ・核融合学会誌   Vol. 81 ( 7 ) page： 496-501   2005

High-energy ions and atoms sputtered and reflected from magnetron source for deposition of magnetic thin films Reviewed

H. Matsui, H. Toyoda and H. Sugai

J. Vac. Sci. Technol. A   Vol. 23 ( 4 ) page： 671-675   2005

Evidence of Direct SiO2 Etching by Fluorocarbon Molecules under Ion Bombardment Reviewed

N. Takada, H. Toyoda, I. Murakami and H. Sugai

Journal of Applied Physics   Vol. 97 ( 1 ) page： 013534 1-5   2005

Evidence of Radical-free Etching of SiO2 by Fluorocarbon Molecules under Ion Bombardment Reviewed

N. Takada, H. Toyoda and H. Sugai

Transacitons of the Materials Research Society of Japan   Vol. 30 ( 1 ) page： 319-322   2005

Beam Study of the Si and SiO₂ Etching Processes by Energetic Fluorocarbon Ions Reviewed

H. Toyoda, H. Morishima, R. Fukute, Y. Hori, I .Murakami and H. Sugai

J. Appl. Phys.   Vol. 95   page： 5172-5179   2004

Dramatic Reduction of Chemical Sputtering of Graphite under Intercalation of Lithium Reviewed

H. Yagi, H. Toyoda, H. Sugai

J. Nucl. Mater.   Vol. 313-316   page： 284-287   2003

Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductively-Coupled Plasma Reviewed

T. Kojima, A. Ohishi, H. Toyoda, M. Goto, M. Nishitani and H. Sugai

Jpn. J. Appl. Phys.   Vol. 40 ( 1 ) page： 322-325   2001

Rapid Diffusion of Lithium into Bulk Graphite in Lithium Conditioning Reviewed

N. Itou, H. Toyoda, K. Morita and H. Sugai

J. Nucl. Mater.   Vol. 290-293   page： 381-385   2001

Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field Reviewed

H. Sugai, H. Toyoda, J. Ihde and J. Winter

J. Plasma and Fusion Research   Vol. 77 ( 2 ) page： 130-136   2001

Electron Energy Distribution Function and the Influence on Fluorocarbon Plasma Chemistry Reviewed

H. Sugai, I. Ghanashev, M. Hosokawa, K. Mizuno, K. Nakamura, H. Toyoda and K. Yamauchi

Plasma Sources Sci. Technol   Vol. 10   page： 378-385   2001

Measurement of Electron-Impact-Dissociation Cross Section for Neutral Products Reviewed

H. Sugai, H. Toyoda

AIP Conf. Proc.   Vol. 500   page： 349-358   2000

Laboratory Experiment on Lithium Chemistry and its Application to Effective Wall Conditioning Reviewed

S. Kato, M. Watanabe, H. Toyoda, H. Sugai

J. Nucl. Mater.   Vol. 266-269   page： 406-411   1999

PSI in Fusion Devices -Function and Perspective of Wall Conditioning

J. Plasma and Fusion Research   Vol. 75 ( 4 ) page： 403-408   1999

Lower Temperature Deposition of Poly-Crystalline Silicon Films from a Modified Inductively-Coupled Silane Plasma

K. Goshima, H. Toyoda, T. Kojima, M. Nishitani, M. Kitagawa, H. Yamazoe, H. Sugai

Jpn. J. Appl. Phys.   Vol. 38 ( 6A ) page： 3655-3659   1999

High Sensitivity Optical Absorption Spectroscopy by Optical Multichannel Analyzer Reviewed

OYO-BUTURI   Vol. 68 ( 5 ) page： 551-552   1999

Beam Experiments on Radical Production in Gas Phase and on Solid Surfaces Reviewed

J. Plasma and Fusion Research   Vol. 75 ( 7 ) page： 779-784   1999

Mechanism of Carbon Impurity Suppression by Lithium Conditioning Reviewed

J. Plasma and Fusion Research   Vol. 75 ( 4 ) page： 459-466   1999

Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C3HF70 Reviewed

H. Tanaka, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 37 ( 9A ) page： 5053-5059   1998

Observation of Surface Dissociation of Low-energy Polyatomic Ions Relevant to Plasma Processing

H. Sugai, Y. Mitsuoka, H. Toyoda

J. Vac. Sci. Technol.   Vol. 16 ( 1 ) page： 290-293   1998

Basic Experiments on in-situ Magnetized Boronization by Electron Cycrotron Resonance Discharges Reviewed

H. Kokura, K. Sasaki, H. Toyoda, T. Mizuuchi, K. Kondo, F. Sano, T. Obiki, H. Sugai

J. Nucl. Mater.   Vol. 241-243   page： 1217-1221   1997

Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasmas Reviewed

M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai

Japanese Journal of Applied Physics   Vol. 36 ( 6A ) page： 3714-3720   1997

Cross Section Measurements for Electron-Impact Dissociation of C4F8 into Neutral and Ionic Radicals Reviewed

H. Toyoda, M. Iio, H. Sugai

Japanese Journal of Applied Physics   Vol. 36 ( 6A ) page： 3730-3735   1997

Laboratory Expercment on hydrogen and impurity behaviors in lithium-deposited environment

H. Toyoda, M. Watanabe, H. Sugai

Journal of Nuclear Materials   Vol. 241-243   page： 1031-1035   1997

Diagnostics for Advanced Plasma Control of Materials Processing Reviewed

H. Sugai, T.H. Ahn, I. Ghanashev, M. Goto, H. Toyoda, N. Nagatsu, K. Nakamura, K. Suzuki

Plasma Phys. Control. Fusion   Vol. 39   page： A445-458   1997

Lithium Wall Conditioning for Fuel and Impurity Control Reviewed

H. Sugai, M. Ohori, H. Toyoda

Vacuum   Vol. 47 ( 6-9 ) page： 981-984   1996

Lower Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductivety Coupled Silane Plasma

M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai

Japanese Journal of Applied Physics   Vol. 35 ( 8A ) page： L1009-1011   1996

Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions. Reviewed

Y. Mitsuoka, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 34 ( 11A ) page： L1486-1489   1995

Wall Conditioning with Lithium Evaporation Reviewed

H. Sugai, H. Toyoda, K. Nakamura, K. Furuta, M. Ohori, K. Toi, S. Hirokura, K. Sato

J. Nucl. Mater.   Vol. 220-222   page： 254   1995

Simple Direct Monitoring of SiH3 Radical and Particulates in a Silane Plasma with Ultra-Violet Transmission Spectroscopy Reviewed

H. Toyoda, M. Goto, M. Kitagawa, T. Hirao, H. Sugai

Jpn. J. Appl. Phys.   Vol. 34 ( 4A ) page： L448-451   1995

A Biased Optical Probe Method for Measurements of Electron Enaergy Distribution in a Plasma

H. Sugai, H. Toyoda, K. Nakano, N. Isomura

Journal of Plasma Sources, Science and Technoloy   Vol. 4   page： 366372   1995

Boronization Study for Application to Large Helical Device

N. Noda, A. Sagara, H. Yamada, H. Toyoda, H. Sugai, Y. Kubota, N. Inoue, K. Akaishi,, et al.

J. Nucl. Mater.   Vol. 220-222   page： 623-626   1995

Relative Cross Sections for Electron-Impact Dissociation of SF6 into SFx(x=1-3) Neutral Radicals Reviewed

M. Iio, M. Goto, H. Toyoda, H. Sugai

Contribution to Plasma Physics   Vol. 35 ( 4-5 ) page： 405-413   1995

Absolute Cross Sections for the Electron-Impact Dissociation of CF4 and CHF3 into the CFx (x=1-3) Neutral Radicals Reviewed

H. Sugai, H. Toyoda, T. Nakano, M. Goto

Contribution to Plasma Physics   Vol. 35 ( 4-5 ) page： 415-420   1995

CCH3 and CH Densities in a Diamond Growth DC Discharge Reviewed

K.L. Menningen, M.A. Childs, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. .Lawler

Contribution to Plasma Physics   Vol. 35 ( 4-5 ) page： 359-373   1995

Observation of Ion Scattering from Metals Surfaces Bombarded with Low-Energy Hydrocarbon Ions Reviewed

Y. Mitsuoka, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 34 ( 4B ) page： L516-519   1995

Hydrogen Content and Isotope Exchange in Boronization Reviewed

M. Yamage, H. Sugai, T. Saito, H. Toyoda, M. Saidoh, N. Ogiwara, T. Mizuuchi, F. Sano, et al.

J. Nucl. Mater.   Vol. 220-222   page： 743-747   1995

Measurement of CH3 and CH Densities in a Diamond Growth d. c. Discharge Reviewed

M.A. Childs, K.L. Menningen, H. Toyoda, L.W. Anderson, J.E. Lawler

Europhys. Lett.   Vol. 25 ( 9 ) page： 729-734   1994

Cross Section Measurements for Electron-Impact Dissociation of CHF3 into Neutral and Ionic Radicals, Reviewed

M. Goto, K. Nakamura, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.,   Vol. 33 ( 6A ) page： 3602-3607   1994

Measurement of Absolute Hydrogen Dissociation in a Diamond Deposition System Reviewed

M.A. Childs, K.L. Menningen, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. Lawler

Phys. Lett. A   Vol. 194   page： 119123   1994

Ultraviolet Spectroscopy of Gaseous Spacies in a Hot Filament Diamond Deposition System When C2H2 and H2 are the Input Gases. Reviewed

H. Toyoda, M.A. Childs, K.L. Menningen, L.W. Anderson, J.E. Lawler

J. Appl. Phys.   Vol. 75 ( 6 ) page： 3142-3150   1994

Absolute Radical Density Measurements in a CH4-H2 d.c. Discharge Reviewed

K.L. Menningen, M.A. Childs, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. Lawler

Diamond and Related Mater   Vol. 3   page： 422-425   1994

Evaluation of a Substrate Pretreatment for Hot Filament CVD Reviewed

K.L. Menningen, M.A. Childs, H. Toyoda, L.W. Anderson, J.E. Lawler

J. Mater. Res.   Vol. 9 ( 4 ) page： 915-920   1994

Plasma-assisted Surface Modification and Radical Diagnostics Reviewed

H. Sugai, M. Yamage, Y. Hikosaka, T. Nakano, H. Toyoda

J. Nucl. Mater   Vol. 200   page： 403-411   1993

Methyl Radical Production in a Hot Filament CVD System Reviewed

K.L. Menningen, M.A. Childs, P. Chevako, H. Toyoda, L.W. Anderson, J.E. Lawler

Chem. Phys. Lett   Vol. 204 ( 5-6 ) page： 573-577   1993

Spatial Distribution and Surface Loss of CF3 and CF2 Radicals in a CF4 Etching Plasma Reviewed

Y. Hikosaka, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys   Vol. 32 ( 3A ) page： L353-L356   1993

Drastic Change in CF2 and CF3 Kinetics Induced by Hydrogen Addition into CF4 Etching Plasma Reviewed

Y. Hikosaka, H. Toyoda, H. Sugai

Japanese J. Appl. Phys   Vol. 32 ( 5A ) page： L690-L693   1993

Appearance Mass Spectrometry of Neutral Radicals in Radio Frequency Plasmas Reviewed

H. Sugai, H. Toyoda

Journal of Vacuum Science and Technology   Vol. A10 ( 4 ) page： 1193-12004   1992

In-situ Boron Nitride Coating and Comparison with Existing Boronization Reviewed

M. Yamage, T. Ejima, H. Toyoda, H. Sugai

J. Nucl. Mater.   Vol. 196-198   page： 618-621   1992

プラズマ界面における異常発光とフラグメンテーション Reviewed

片寄恭一, 豊田浩孝, 菅井秀郎

核融合研究   Vol. 67 ( 1 ) page： 51-61   1992

High Speed Cleaning of Boronized Wall with a CF₄ Containing Plasma Reviewed

H. Toyoda, A. Hanami, M. Yamage, H. Sugai

Japanese Journal of Applied Physics   Vol. 30 ( 3B ) page： L514-517   1991

Electron Impact Dissociation of Methane into CH3 and CH2 Radicals, II. Absolute Cross Sections Reviewed

T. Nakano, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 30 ( 11A ) page： 2912-2915   1991

Electron Impact Dissociation of Methane into CH3 and CH2 Radicals, I. Relative Cross Sections Reviewed

T. Nakano, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 30 ( 11A ) page： 2908-2911   1991

Interactions of Bulk-Boronized Graphites with Deuterium Plasmas in the PISCES-B Facility Reviewed

Y. Hirooka, R.W. Conn, H. Toyoda, H. Sugai et al.

Fusion Technol   Vol. 19   page： 2059-2069   1991

Spatial Distribution of CH₂ and CH₂ Radicals in a Methane RF Discharge Reviewed

H. Sugai, H. Kojima, A. Ishida, H. Toyoda

Applied Physics Letters   Vol. 56 ( 26 ) page： 2616-2618   1990

Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge Reviewed

H. Toyoda, A. Hanami, H. Sugai

Jpn. J. Appl. Phys.   Vol. 29 ( 7 ) page： 1322-1323   1990

RF Plasma Production at Ultralow Pressure with Surface Magnetic Confinement Reviewed

T. Shirakawa, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 29 ( 6 ) page： L1015-1018   1990

Ion-Induced Radical Production on Surfaces during Deposition of Hydrogenated Amorphous Carbon Reviewed

Y. Yamashita, K. Katayose, H. Toyoda, H. Sugai

Journal of Applied Physics   Vol. 68 ( 7 ) page： 3735-3737   1990

Effects of Carbon Wall on the Bahaviour of Heliotron-E Plasmas Reviewed

N. Noda, T. Mizuuchi, H. Toyoda, S. Yoshida, H. Sugai et al.

J. Nucl. Mater.   Vol. 162-164   page： 769-775   1989

Hydrogen Release and Retention Dynamics of Amorphous Carbon Layers Exposed to a Hydrogen/Helium Plasma Reviewed

S. Yoshida, H. Sugai, H. Toyoda

Jpn. J. Appl. Phys   Vol. 28 ( 6 ) page： 1101-1108   1989

Genaration of a Large Electron Beam for Plasma Processing, Reviewed

H. Sugai, N. Yabuoshi, H. Toyoda

Jpn. J. Appl. Phys.   Vol. 28 ( 5 ) page： L868-870   1989

Hydrogen Recycling Control by Helium Ion Bombardment onto Carbonized Surfaces Reviewed

H. Sugai, H. Toyoda, S. Ohshita, S. Yoshida, A. Sagara

J. Nucl. Meter.   Vol. 162-164   page： 1035-1039   1989

Carbonization Experiment by ECR Discharge in JIPPT-IIU Reviewed

Y.Sakamoto, H. Amemiya, H. Toyoda, H. Sugai et al.

J. Nucl. Mater.   Vol. 162-164   page： 783-786   1989

Mass Spectroscopic Investigation of the CH₃ Radicals in a Methane RF Discharge Reviewed

H. Toyoda, H. Kojima, H. Sugai

Applied Physics Letters   Vol. 54 ( 16 ) page： 1507-1509   1989

Hydrogen Retention and Release Dynamics of Amorphous Carbon Filsm Exposed to a Hydrogen Plasma Reviewed

H. Sugai, S. Yoshida, H. Toyoda

Applied Physics Letters   Vol. 54 ( 15 ) page： 1412-1414   1989

In situ Boron Coating and its Removal by Glow Discharge Processes Reviewed

H. Toyoda, T. Isozumi, H. Sugai, T. Okuda

Journal of Nuclear Materials   Vol. 162-164   page： 732-736   1989

Observation of CH2 Radical and Comparison with CH3 Radical in a RF Methane Discharge Reviewed

H. Kojima, H. Toyoda, H. Sugai

Applied Physics Letters   Vol. 55 ( 13 ) page： 1292-1294   1989

Formation of CH Radical by Surface Bombardment in a Methane/Argon DC Discharge Reviewed

Y. Yamashita, H. Toyoda, H. Sugai

Jpn. J. Appl. Phys.   Vol. 28 ( 9 ) page： L1647-1650   1989

Control of Hydrogen Content of Boron Films Produced by a DC Toroidal Discharge Reviewed

H. Toyoda, H. Sugai, T. Isozumi, T. Okuda

Applied Physics Letters   Vol. 51 ( 11 ) page： 798-800   1987

イオン束を制御した水素化アモルファスシリコンの生成と成膜過程 Reviewed

豊田浩孝, 菅井秀郎, 吉田　明, 奥田孝美

応用物理   Vol. 55 ( 7 ) page： 718-726   1986

Hydrogenated Amorphous Silicon Formation by Flux Control and Hydrogen Effects on the Growth Mechanism Reviewed

H. Toyoda, H. Sugai, K. Kato, A. Yoshida, T. Okuda

Appl. Phys. Lett.   Vol. 48 ( 24 ) page： 1648-1650   1986

Ion and Radical Contributions to a Si : H Film Formation in a DC Toroidal Discharge Reviewed

H. Sugai, H. Toyoda, A. Yoshida, T. Okuda

Applied Physics Letters   Vol. 46 ( 11 ) page： 1048-1050   1985

プラズマイオン分析器の開発 Reviewed

菅井秀郎, 小島啓明, 森　直生, 豊田浩孝, 奥田孝美

核融合研究   Vol. 51 ( 3 ) page： 221-240   1984

A Mass Spectrometer for Boundary Plasma Diagnostics Reviewed

H. Kojima, H. Sugai, T. Mori, H. Toyoda, T. Okuda

J. Nucl. Mater   Vol. 128-129   page： 965-968   1984

Reconstruction of three-dimensional plasma emission strucuture based on multi-view images International conference

Ryota Izumi, Manabu Kyuzo, Hayato Yoshikawa, Haruka Suzuki and Hirotaka Toyoda

ISPlasma2025/IC-PLANTS2025  2025.3 

Influence of air-exposure on surface composition of plasma-exposed polyethylene terephthalate film International conference

Tomoya Murase, Haruka Suzuki and Hirotaka Toyoda

ISPlasma2025/IC-PLANTS2025  2025.3 

二周波容量結合型プラズマにおける電極入射高エネルギーイオンのエネルギー分解角度分布計測 Invited

豊田浩孝

応用物理学会シリコンテクノロジー分科会研究集会  2025.2.27  応用物理学会シリコンテクノロジー分科会

流動液体マイクロ波プラズマを用いた高効率銀ナノ粒子合成プロセス

高辻乃輔，柚木健吾，鈴木陽香，笹井建典，豊田浩孝

第42回プラズマプロセシング研究会  2025.1  応用物理学会

電荷重畳法を用いたトレンチチャージングシミュレーション

菊池拓哉，鈴木陽香，豊田浩孝

第42回プラズマプロセシング研究会  2025.1  応用物理学会

入射角可変型高エネルギーイオン照射装置の開発

渡邉　隆斗，鈴木陽香，豊田浩孝

第42回プラズマプロセシング研究会  2025.1  応用物理学会

Charging simulation of high-aspect ratio hole by method of fundamental solutions International conference

T. Kikuchi1, H. Suzuki, and H. Toyoda

2024.12.18 

High-speed Plasma-enhanced Chemical Vapor Deposition of Conductive Carbon Film Using Microwave Plasmas International conference

H. Suzuki H. Bae, I. Hamaguchi, K. Sasai, and H. Toyoda

2024.12.18 

多視点画像を用いたプラズマの３次元構造解析

泉　涼太,　鈴木　陽香,　藤井　俊彰,　豊田　浩孝

第41回プラズマ核融合学会年会  2024.11.17  プラズマ核融合学会

Energy-resolved measurement of ion angular distribution in dual-frequency capacitively-coupled Ar plasma incident on an RF electrode International conference

S. Kawamura, M. Naito, D. Kim, H. Suzuki, D. Iino, H. Fukumizu, K. Kurihara and H. Toyoda

45th International Symposium on Dry Process  2024.11.15 

Influence of Ion Incident Energy on Charge Accumulation at the Bottom of High Aspect Ratio Holes in Dual-Frequency Capacitively-Coupled Plasma International conference

Y. Akatsuka, H. Suzuki, M. Moriyama, K. Tamura, S. Kuboi, D. Iino, H. Fukumizu, K. Kurihara, and H. Toyoda

45th International Symposium on Dry Process  2024.11.15 

Time-resolved measurement of ion composition in a pulse modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma using mass spectrometry Invited International conference

Haruka Suzuki, Shuichi Kuboi, Haruhito Kato, Yuto Seki, Yudai Akatsuka, Hirotaka Toyoda

8th Asia-Pacific Conference on Plasma Physics  2024.11 

プラズマの魅力 Invited

豊田浩孝

あいちサイエンスフェスタ  2024.9.28 

多方向視野像を用いた不均一プラズマ発光の再構築

鈴木 陽香, 泉 涼太, 久蔵 学, 豊田 浩孝

応用物理学会秋季学術講演会  2024.9.20  応用物理学会

磁場閉じ込めプラズマにおける水素化ホウ素分子の形成・放射過程 Invited International coauthorship

川手朋子, 芦川直子, 後藤基志, 大石鉄太郎, 川本靖子,豊田浩孝, 庄司主, 河村学思, 増崎貴, F. Nespoli, E.P.Gilson, R. Lunsford, 鈴木千尋, A. Nagy，D. Gates, 村上泉

日本物理学会第79次年次大会  2024.9.16  日本物理学会

Development of new plasma process sources using microwave power Invited International conference

Hirotaka Toyoda

19th International Conference on Plasma Surface Engineering 

表面波プラズマ照射による金属ナノ粒子の合成

髙辻　乃輔，鈴木　陽香, 笹井 建典, 豊田　浩孝

電気関係学会東海支部連合講演会  2024.8.29 

電荷重畳法によるトレンチ内のチャージングシミュレーション

菊池　拓哉，鈴木　陽香，豊田　浩孝

電気関係学会東海支部連合講演会  2024.8.29 

多視点画像を基にした不均一プラズマ分布の再構築

泉　涼太, 久蔵　学, 鈴木　陽香, 豊田　浩孝

電気関係学会東海支部連合講演会  2024.8.29 

入射エネルギー及び入射角度可変プラズマ引き出し型イオンビーム源の開発

渡邉　隆斗，鈴木　陽香，豊田　浩孝

電気関係学会東海支部連合講演会  2024.8.29 

高密度マイクロ波プラズマを用いた液体処理とナノ粒子合成への応用 Invited

豊田浩孝

第73回　プラズマが拓くものづくり研究会  2024.6.25  名古屋産業振興公社

プラズマ生成と半導体微細加工の基礎 Invited

豊田浩孝

講習会  2024.5.21 

Plasma processing: Key technology for the next-generation semiconductor device fabrication Invited International conference

Hirotaka Toyoda

The 1ST Global Forum and International Workshop on Industrial Plasma Plasma Processes and Diagnostics 2024  2024.5.9 

Angular distribution measurement of high-energy argon neutrals and ions incident on RF electrode of a capacitively-coupled plasma Invited International conference

H. Toyoda, S. Kawamura, D.H. Kim, H. Suzuki, M. Moriyama, K. Tamura, S. Kuboi, D. Iino, H. Fukumizu, K. Kurihara

Frontiers in Low Temperature Plasma Diagnostics  2024.5.1 

二周波重畳容量結合型プラズマにおけるRF電極入射高エネルギー粒子の角度分布評価 Invited

市川景太,Manh Hung Chu,森山誠,鈴木陽香, 飯野大輝,福水裕之,栗原一彰,豊田浩孝

第71回応用物理学会春季講演会  2024.3  応用物理学会

On-Off及びHigh-Low変調VHFプラズマ照射下のキャピラリープレート底部の電荷蓄積におけるデューティー比の影響

赤塚 勇大，鈴木 陽香，森山 誠，飯野 大輝， 福水 裕之，栗原 一彰，豊田 浩孝

第71回応用物理学会春季講演会  2024.3  応用物理学会

二周波重畳容量結合型プラズマにおけるイオン角度分布のエネルギー分解計測

川村 隼也，Kim Dohan, 鈴木 陽香，飯野 大輝，福水 裕之，栗原 一彰，豊田 浩孝

第71回応用物理学会春季講演会  2024.3  応用物理学会

Plasma Science: achievements and future impact on semiconductor technologies Invited International conference

Hirotaka Toyoda

Nano Fabrication Technologies for Semiconductor Industry and Quantum Computing  2024.3.15  Japan Alumni and Researcher Assembly

Interaction of liquid tin with hydrogen plasma International conference

Hirotaka Toyoda, Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Yukinori Hamaji

US-Japan and International Workshop on Power and Particle Control in DEMO Fusion Reactor by Liquid Metal Plasma-Facing Components  2024.3.7  National Institute for Fusion Science

テレセントリックレンズを用いて撮影された画像からのプラズマ発光強度3次元空間分布の評価

鈴木陽香，原田健汰，久蔵学，泉涼太，豊田浩孝

第41回プラズマプロセシング研究会  2024.1  応用物理学会プラズマエレクトロニクス分科会

On-OffおよびHigh-Low変調VHFプラズマにおけるキャピラリープレート底部の電荷蓄積挙動比較

赤塚勇大，鈴木陽香，森山誠，飯野大輝，福水裕之，栗原一彰，豊田浩孝

第41回プラズマプロセシング研究会  2024.1  応用物理学会プラズマエレクトロニクス分科会

二周波重畳容量性結合型Arプラズマにおけるイオン角度分布のエネルギー分解計測

川村隼也，金度漢，鈴木陽香，飯野大輝，福水裕之，栗原一彰，豊田浩孝

第41回プラズマプロセシング研究会  2024.1  応用物理学会プラズマエレクトロニクス分科会

プラズマ材料科学賞基礎部門賞受賞講演 Invited

豊田浩孝

第41回プラズマプロセシング研究会  2024.1  応用物理学会プラズマエレクトロニクス分科会

高アスペクト比エッチングプラズマにおけるイオン挙動 Invited

豊田浩孝

サタデーモーニング講座  2023.12.9  名古屋大学低温プラズマ科学研究センター

気体流による減圧形成を応⽤した放電易化におけるノズル電極の構造検討

小川泰那, 中林賢二, 鈴木陽香, 豊田浩孝

第40回　プラズマ・核融合学会　年会  2023.11.29  プラズマ・核融合学会

多⽅向画像からの3次元プラズマ空間構造の評価

鈴木陽香, 原田健太, 久蔵学, 豊田浩孝

第40回　プラズマ・核融合学会　年会  2023.11.30  プラズマ・核融合学会

Effect of collisions in a sheath on angular distributions of high-speed particles incident on an RF electrode from a dual-frequency capacitively-coupled plasma International conference

S. Kawamura, H. Suzuki, D. Iino, H. Fukumizu, K. Kurihara and H. Toyoda

44th International Symposium on Dry Process 

Influence of Ion Composition on High Aspect Ratio Etching in Pulse-operated Ar/C4F8/O2 DF-CCP International conference

S. Kuboi, Y. Akatsuka, H. Kato, H. Suzuki and H. Toyoda

44th International Symposium on Dry Process 

Quantitative evaluation of ion composition in Ar/C4F8/O2 pulsed capacitively-coupled plasma based on electron impact ionization rates International conference

H. Kato, Y. Akatuka, S. Kuboi, H. Suzuki and H. Toyoda

44th International Symposium on Dry Process 

Production and Application of High-density Microwave Plasma in Contact with Flowing Liquid Invited International conference

Haruka Suzuki, Hirotaka Toyoda

13th Asia European International Conference on Plasma Surface Engineering  2023.11 

高周波電極へ入射する高エネルギー粒子角度分布のイメージング計測

豊田浩孝，市川景太，Manh Hung Chu，森山誠， 鈴木陽香，飯野大輝，福水裕之，栗原一彰

2023年第84回応用物理学会秋季学術講演会　プラズマエレクトロニクス賞受賞講演  2023.9.20  応用物理学会

複数視野像をもとにしたプラズマ3次元構造評価の試み

原田健汰, 久蔵学, 大舘暁, 鈴木陽香、豊田浩孝

2023年第84回応用物理学会秋季学術講演会  2023.9.21  応用物理学会

流動液体プラズマ処理装置を用いたAgナノ粒子合成における生成性能評価

柚木健吾, 鈴木陽香, 豊田浩孝

2023年第84回応用物理学会秋季学術講演会  2023.9.19  応用物理学会

Ar/C4F8/O2容量結合型パルスプラズマにおける 放電開始直後の電離レートをもとにしたイオン組成の定量的評価

加藤閣人, 赤塚勇大, 久保井宗一, 鈴木陽香, 豊田浩孝

2023年第84回応用物理学会秋季学術講演会  2023.9.22  応用物理学会

高速ガス流を用いた弱減圧マイクロ波プラズマ生成にむけた減圧形成シミュレーション

中林　賢二，小川　泰那，鈴木　陽香, 豊田　浩孝

令和5年度電気・電子情報関係学会東海支部連合講演会  2023.8.29 

二周波容量結合型Ar/C4F8/O2パルスプラズマの電子密度時分解計測

赤塚　勇大，加藤　閣人，久保井　宗一, 鈴木　陽香, 豊田　浩孝

令和5年度電気・電子情報関係学会東海支部連合講演会  2023.8.29 

トリチウムプラズマ照射による固体・液体スズ中水素分布の高精度評価

豊田浩孝

核融合科学研究所-富山大学研究推進機構水素同位体科学研究センター 双方向型共同研究　研究会  2023.7.17 

Time-dependent measurement of ion composition in a capacitively-coupled Ar/C4F8/O2 power-modulated VHF plasma International conference

H. Toyoda, H. Kato, Y. Seki, S. Kuboi, Y. Akatsuka, and H. Suzuki

International Conference on Phenomena of Ionized Gases  2023.7.10 

Influence of Pulse-off Time on Time-varying Ion Composition in a Pulse-operated Ar/C4F8/O2 Dual-frequency Capacitively Coupled Plasma International conference

Shuichi Kuboi, Haruhito Kato, Yuto Seki, Yudai Akatsuka, Haruka Suzuki and Hirotaka Toyoda

International Symposium on Plasma Chemistry  2023.5.22 

高アスペクト比加工におけるチャージング現象 Invited

豊田浩孝

グリーンDXプラズマコンソーシアム２０２３年度第1回講習会  2023.4.21  名古屋大学低温プラズマ科学研究センター

二周波重畳容量結合型プラズマにおけるシース内衝突がRF電極入射粒子の角度分布に及ぼす影響

川村 隼也，市川 景太，鈴木 陽香,　飯野大輝，福水裕之，栗原一彰，豊田浩孝

第70回応用物理学会春季講演会  2023.3.17  応用物理学会

発光イメージをもとにしたプラズマ構造の評価

原田健汰, 久蔵学, 大館暁, 豊田浩孝

第70回応用物理学会春季講演会  2023.3.16  応用物理学会

二周波容量結合型Ar/C4F8/O2プラズマにおける電力変調方式がイオン組成に与える影響

加藤閣人，関悠斗，久保井宗一，鈴木陽香, 豊田浩孝

第70回応用物理学会春季講演会  2023.3.17  応用物理学会

高速ガス流を用いた減圧形成によるマイクロ波放電の易化

小川泰那，岩田悠輝，鈴木陽香，豊田浩孝

第70回応用物理学会春季講演会  2023.3.15  応用物理学会

旋回流による流動液体プラズマ処理装置の放電部の電極保護

柚木 健吾，鈴木 陽香，笹井 建典，増崎 貴，林 浩 己，村瀬 尊則，中川 翔，柳原 悠人，豊田 浩孝

第70回応用物理学会春季講演会  2023.3.18  応用物理学会

大気圧プラズマによるラジカル生成に及ぼす酸素ガス混合の効果

松浦寛人、トラントラングエン、岡本陽太、胡敏、仲野匠、岩田悠輝、鈴木陽香、豊田浩孝

第70回応用物理学会春季講演会  2023.3.15  応用物理学会

C2F4の電子物性とPTFEの生成機構

林俊雄、石川健治、関根誠、堀勝、兒玉直人，豊田浩孝

第70回応用物理学会春季講演会  2023.3.17  応用物理学会

Time dependent nanoparticle density measurement in a liquid-flow plasma process International conference

Kengo Yunoki, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda

ISPlasma2023/IC-PLANTS2023  2023.3.6 

Microwave plasma production under air-flow-induced reduced pressure International conference

Taina Ogawa, Yuki Iwata, Haruka Suzuki and Hirotaka Toyoda

ISPlasma2023/IC-PLANTS2023  2023.3.6 

Time Variation of Ion Composition in Dual-frequency Capacitively-Coupled Ar/C4F8/O2 Pulsed Plasma International conference

Haruhito Kato, Yuto Seki, Shuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda

ISPlasma2023/IC-PLANTS2023  2023.3.6 

Power absorption of high negative pulse power to an electron cyclotron plasma International conference

Ikumi Hamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

ISPlasma2023/IC-PLANTS2023  2023.3.6 

Development of a tomography calculation code for three-dimensional emission profile reconstruction International conference

Kenta Harada, Manabu Kyuzo, Satoshi Ohdachi, Hirotaka Toyoda

ISPlasma2023/IC-PLANTS2023  2023.3.6 

Atomic composition of droplet ejected from liquidized Sn-Bi-Li-Er alloy under hydrogen plasma exposure International conference

Kota Tamura, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Yukinori Hamaji, Hirotaka Toyoda

ISPlasma2023/IC-PLANTS2023  2023.3.6 

Hydrogen bubble formation on liquidized Sn-Bi-Li-Er Alloy under H2 Plasma Exposure International conference

Hirotaka Toyoda

US-Japan and International Workshop on Power and Particle Control in DEMO Fusion Reactor by Liquid Metal Plasma-Facing Components  2023.3.1 

未来社会を担うクリーンエネルギー生成研究の最先端 Invited

豊田浩孝

グリーンDXプラズマコンソーシアム第4回講習会  2023.2.24  名古屋大学低温プラズマ科学研究センター

Sn-Bi-Li-Er液体合金への水素プラズマ照射における気泡中への水素吸蔵量定量評価

豊田浩孝

2023.2.17 

パルス変調Ar/C4F8/O2二周波容量結合型プラズマにおけるイオン組成時間変化のメカニズム Invited

久保井宗一，加藤閣人，関悠斗， 鈴木陽香, 豊田浩孝

第242回シリコンテクノロジー分科会研究集会  2023.2.17  応用物理学会シリコンテクノロジー分科会

Quantitative Evaluation of Hydrogen Accumulation into Bubble Occurred in Liquidized Sn-Bi-Li-Er under H2 Plasma Exposure International conference

Kota Tamura

The 7th INTERNATIONAL SYMPOSIUM ON LIQUID METALS APPLICATIONS FOR FUSION 

Imaging measurement of angular distribution of high-speed particles from a dual-frequency capacitively-coupled plasma incident on an RF electrode International conference

K. Ichikawa, H. Suzuki, D. Iino, H. Fukumizu, K. Kurihara and H. Toyoda

43rd International Symposium on Dry Process  2022.11.24  Japan Society of Applied Physics

Time-resolved measurement of Ionic composition change in Pulse-modulated Ar/C4F8/O2 DF-CCP International conference

Shuichi Kuboi, Haruhito Kato, Yuto Seki, Haruka Suzuki, Hirotaka Toyoda

43rd International Symposium on Dry Process  2022.11.24  Japan Society of Applied Physics

マイクロ波プラズマ技術による大気圧プラズマ生成と液体処理 Invited

豊田浩孝

第16回日本電磁波エネルギー応用学会  2022.10.14  日本電磁波エネルギー応用学会

Microwave plasma source development and applications from low pressure to atmospheric pressure Invited International conference

2022.10.13  Association of Asia Pacific Physical Societies, Division of Plasma Physics

Continuous liquid treatment by high-density microwave plasma in flowing liquid Invited International conference

Haruka Suzuki, Hirotaka Toyoda

11th International Conference on Reactive Plasmas/75th Annual Gaseous Electronics Conference  2022.10.6  Japan Society of Applied Physics

二周波容量結合型Ar/C4F8/O2プラズマのパルス運転がイオン組成に及ぼす影響

関 悠斗、加藤 閣人、久保井 宗一，鈴木 陽香,　豊田浩孝

2022年第83回応用物理学会秋季学術講演会  2022.9.22  応用物理学会

二周波重畳容量結合型プラズマからRF電極へ入射する高速粒子入射角度分布のイメージング計測 Invited

市川 景太，鈴木 陽香,　飯野大輝， 福水裕之，栗原一彰，豊田浩孝

2022年第83回応用物理学会秋季学術講演会  2022.9.22  応用物理学会

化学プローブを用いた長尺大気圧プラズマ生成活性ラジカルの可視化

松浦寛人、トラントラングエン、胡敏、仲野匠、岩田悠揮、鈴木陽香、豊田浩孝

2022年第83回応用物理学会秋季学術講演会  2022.9.20  応用物理学会

Angular distribution of high-energy species on RF-biased electrode of a capacitively-coupled plasma Invited International conference

Hirotaka Toyoda

cLPS Global Plasma Forum  2022.9.8  Center for Low-temperature Plasma Sciences

二周波容量結合型Ar/C4F8/O2パルスプラズマ中のイオン時分解計測

加藤　閣人, 関　悠斗，久保井　宗一, 鈴木　陽香, 豊田　浩孝

令和４年度電気・電子情報関係学会東海支部連合講演会  2022.8.29 

Experimental Study on boron distribution and transport at plasma-facing components during impurity powder dropping International coauthorship International conference

T. Kawate, N. Ashikawa, M. Goto, T. Oishi, Y. Kawamoto, H. Toyoda, M. Shoji, G. Kawamura, S. Masuzaki, F. Nespoli, E.P. Gilson, R. Lunsford, C. Suzuki, A. Nagy, D. Gates

15th Asia Pacific Physics Conference  Association of Asia Pacific Physical Societies

二周波重畳容量結合型プラズマから電極へ入射する高速粒子のイメージング法を用いた角度分布計測

市川景太, 鈴木陽香, 豊田浩孝

第69回応用物理学会春期学術講演会   2022.3.25 

Time-resolved measurements of ions in a dual-frequency capacitively-coupled Ar/C4F8/O2 pulsed plasma by mass spectrometry

Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, Hirotaka Toyoda

2022.3.25 

Increase in plasma density by applying negative pulse bias voltage on a substrate stage in an electron cyclotron resonance plasma

Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai2, Haruka Suzuki, and Hirotaka Toyoda

2022.3.22 

水シールド環境下でのマイクロ波励起水蒸気プラズマの生成と応用 Invited

鈴木陽香、豊田浩孝

第69回応用物理学会春期学術講演会   2022.3.23 

Surface analysis of polyimide film treated by Ar/O2 atmospheric-pressure microwave plasma

Y. Iwata, T. Ogasawara, H. Suzuki, H. Toyoda

2022.3.26 

高周波容量結合型プラズマにおける高アスペクト比キャピラリーホール底部のチャージアップ現象 Invited

豊田 浩孝

応用物理学会シリコンテクノロジー分科会第234回研究集会  2022.3.15 

Bubbling Phenomenon on Liquidized Sn-Bi-Li-Er Alloy Surface under H-Plasma Exposure International conference

Kota Tamura, Hirotaka Toyoda

The 2nd US-Japan Workshop on Power and Particle Control in a Steady State Magnetic Fusion DEMO Reactor by Liquid Metal PFCs  2022.3.11 

Angular distribution of high-energy Ar ion and neutral in a 13.56 MHz capacitively-coupled plasma International conference

Keita Ichikawa, Haruka suzuki, Hirotaka Toyoda

ISPlasma2022/IC-PLANTS2022　09aC05O  2022.3.9 

RF Voltage Division of in RF-biased High-density Plasma with Floating Liner International conference

Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki, Hirotaka Toyoda

ISPlasma2022/IC-PLANTS2022　07P-14  2022.3.7 

Radical measurements of Ar/C4F8 dual frequency capacitively-coupled plasma International conference

Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda

ISPlasma2022/IC-PLANTS2022　08P-14  2022.3.8 

Bubbling Phenomenon of Sn-Bi-Li-Er Alloy under H2 Plasma Exposure International conference

Kota Tamura, H. Suzuki, J. Miyazawa, S. Masuzaki, M. Tokitani, H. Toyoda

ISPlasma2022/IC-PLANTS2022　08P-21  2022.3.8 

O Radical Measurement of Ar/O2 Microwave Plasma in Atmospheric Pressure International conference

Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki and Hirotaka Toyoda

ISPlasma2022/IC-PLANTS2022　07pC09O  2022.3.7 

Plasma density increase of electron cyclotron resonance plasma by high voltage pulse power application International conference

Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda

ISPlasma2022/IC-PLANTS2022　07pC08O  2022.3.7 

Influence of the magnetic field configuration on the conductive carbon film deposition in an ECR Ar/C6H6 plasma with high voltage bias

Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda

Bubbling phenomenon of melted tin-bismuth-lithium-erbium alloy during hydrogen plasma exposure

Kota Tamura, H. Suzuki, J. Miyazawa, S. Masuzaki, M. Tokitani, H. Toyoda

2022.1.25 

Imaging measurement of angular distribution of high-energy particles incident on an electrode in a capacitively-coupled plasma

Keita Ichikawa, Manh Hung Chu, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, and Hirotaka

2022.1.25 

Ionic and Neutral radical measurement of Ar/C4F8/O2 very high frequency capacitively-coupled plasma

Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda

2022.1.24 

液体スズ合金の水素プラズマ照射における発泡現象

田村晃汰、豊田浩孝

「ダイバータの学理と応用」研究会  2022.1.21 

大気圧長尺マイクロ波プラズマの連続・離散構造変化

豊田浩孝、鈴木陽香

「原子分子過程研究の最先端と先進的プラズマ分光計測」 「原子分子データ応用フォーラムセミナー」合同研究会  2021.12.24 

High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device International conference

Kazuya Yamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

Materials Research Meeting2021(MRM2021)  2021.12.14 

Conductive carbon film deposition by microwave plasma with high voltage biasing International conference

Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

Materials Research Meeting2021(MRM2021)  2021.12.16 

Spatial distribution measurement of atomic oxygen from atmospheric-pressure microwave line plasma by atomic absorption spectroscopy International conference

Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori, Hirotaka Toyoda

The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12)  2021.12.10 

Influence of metal exposure on the plasma potential in RF-biased high-density plasma with floating liner International conference

Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki and Hirotaka Toyoda

The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12)  2021.12.9 

Performance evaluation of pulsed-microwave atmospheric-pressure Ar/O₂ line plasma source

Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori, Hirotaka Toyoda

2021.11.22 

Measurement of sputtered atoms from Sn and Sn alloy exposed to hydrogen plasma

Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Hirotaka Toyoda

2021.11.22 

Melting of Ag nanoparticles by using a high-density surface-wave plasma

Kazuya Hikita, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

2021.11.22 

Influence of small grounded surface on plasma property in an inductively-coupled plasma with floating liner International conference

Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, and Hirotaka Toyoda

DPS2021 ONLINE SYMPOSIUM 42nd International Symposium on DryProcess 

Investigation of Ar/O2 atmospheric-pressure microwave line plasma and its application to Polyimide film ashing International conference

H. Suzuki, T. Ogasawara1, Y. Iwata and H. Toyoda

DPS2021 ONLINE SYMPOSIUM 42nd International Symposium on DryProcess 

High Speed sp2-rich Carbon Film Deposition with Surface-wave Microwave Plasma International conference

H. Bae, H. Suzuki, K. Sasai and H. Toyoda

DPS2021 ONLINE SYMPOSIUM 42nd International Symposium on DryProcess 

Conductive carbon deposition by surface wave plasma with high voltage pulse biasing International conference

Ikumi Hamaguchi, Hansin Bae, Haruka Suzuki,Kensuke Sasai and Hirotaka Toyoda

Workshop Japan-RUB 2021Bridging the Pandemic: Reigniting Cooperation on Plasma Research(Germany, Online)  2021.11.25 

Microwave application to liquid process in reduced pressure environment Invited International conference

Hirotaka Toyoda, Kazuya Yamaguchi, Kengo Yunoki, Haruka Suzuki, Kensuke Sasai

Workshop Japan-RUB 2021,Bridging the Pandemic: Reigniting Cooperation on Plasma Research  2021.10.29 

Oxygen radical measurement in Ar/O2 atmospheric pressure microwave line plasma International conference

Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki and Hirotaka Toyoda

Workshop Japan-RUB 2021,Bridging the Pandemic: Reigniting Cooperation on Plasma Research  2021.11.25 

Conductive carbon deposition by surface wave plasma with high voltage pulse biasing International conference

Ikumi Hamaguchi, Hansin Bae, Haruka Suzuki,Kensuke Sasai and Hirotaka Toyoda

Workshop Japan-RUB 2021,Bridging the Pandemic: Reigniting Cooperation on Plasma Research  2021.11.25 

Evaluation of charge density at hole bottom of capillary plates in a pulsed dual-frequency capacitively coupled plasma International conference

Haruka Suzuki,Makoto Moriyama,Naoya Nakahara,Hirotaka Toyoda

74th Annual Gaseous Electronics Conference  2021.10.7 

Highly conductive carbon film deposition by DC and microwave power superposition International conference

Hansin Bae,Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

74th Annual Gaseous Electronics Conference  2021.10.5 

Fast and massive synthesis of silver nanoparticle by a liquid-flow plasma source using AgNO3 solution* International conference

Haruka Suzuki,Kazuya Yamaguchi,Kensuke Sasai,Hirotaka Toyoda

74th Annual Gaseous Electronics Conference  2021.10.5 

Time-resolved Measurement of Charge Density at the Bottom of High-aspect-ratio Holes in a Pulsed Capacitively Coupled Plasma Invited International conference

Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, and Hirotaka Toyoda

5th Asia-Pacific Conference on Plasma Physics, 26 Sept-1Oct, 2021, Remote e-conference(AAPPS-DPP2021)  2021.9.28 

Large A rea Ashing Treatment of Polyimide Film by Atmospheric pressure Pulsed Microwave Line Plasma with Ar/O 2 International conference

T.Ogasawara, Y.Iwata, H.Suzuki and H.Toyoda

5th Asia-Pacific Conference on Plasma Physics, 26 Sept-1Oct, 2021, Remote e-conference(AAPPS-DPP2021) 

流動液体プラズマ処理装置を用いたAgナノ粒子の長時間安定合成

〇山口 和也1、鈴木 陽香1、笹井 建典1、豊田 浩孝1,2 (1.名大工、2.核融合研)

第82回応用物理学会秋季学術講演会、22a-P08-2  2021.9.22  応用物理学会

High conductive carbon film deposition by electron cyclotron resonance (ECR) plasma

〇Hansin BAE1、Hamaguchi Ikumi1、Kensuke Sasai2、Haruka Suzuki1,2、Hirotaka Toyoda1,2,3 (1.Nagoya Univ.、2.Nagoya Univ. cLPS、3.NIFS)

2021.9.12 

イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測

○市川景太，鈴木陽香（名大），豊田浩孝（名大/ 核融合研）

令和3年度電気・電子・情報関係学会東海支部連合大会、A1-7  2021.9.7 

二周波容量結合型フルオロカーボンプラズマ中のラジカル計測

○関悠斗，久保井宗一，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）

令和3年度電気・電子・情報関係学会東海支部連合大会、A1-6  2021.9.7 

表面波プラズマを用いた高導電性炭素膜の高速堆積

○濱口育未，BaeHansin，笹井建典，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）

令和3年度電気・電子・情報関係学会東海支部連合大会、A1-5  2021.9.7 

大気圧長尺マイクロ波ラインプラズマによる広幅高速アッシング処理

○岩田悠揮，小笠原知裕，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）

令和3年度電気・電子・情報関係学会東海支部連合大会、A1-4  2021.9.7 

BH and BD molecular spectroscopy during the Impurity Powder Dropper experiments International conference

T. KAWATE, N. Ashikawa, M. Goto, T. Oishi, Y. Kawamoto, and H. Toyoda

15th International Workshop on Hydrogen Isotopes in Fusion Reactor Materials（HWS2020） 

ＬＨＤにおけるボロンを使った水素リサイクリング抑制実験

芦川直子（核融合研、総研大）、川手朋子（核融合研、総研大）、豊田浩孝（名古屋大学）、Zhen SUN（ASIPP、PPPL）

日本原子力学会　春の年会（2021）オンライン（早稲田大学）  2021.3.17 

High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-wave Plasma

2021.3.18 

International Expansion of Division of Plasma Electronics　-Collaboration with GEC- Invited

2021.3.17 

Long-term Operation of Liquid Flow Plasma Processing Device and Its Application to Ag Nanoparticle Production

2021.3.19 

Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O2 Plasma

2021.3.19 

Plasma Fluctuation b y Inse rtion of a Small Grou nded Electrode into I nductively Coupled Plasma with I nsulated L iner

2021.3.19 

Wide-area and High-speed Deposition of Graphitic Film by Microwave Surface Wave Plasma with High Power Pulse International conference

Hansin Bae, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda

ISPlasma2021/IC-PLANTS2021　09aB05O  2021.3.9 

Effect of grounded electrode on plasma propety in ICP with floating liner International conference

Manabu Kyuzo*, Yukinori Chiba, Haruka Suzuki and Hirotaka Toyoda

2021.3.8 

Deuterium Depth Profile of Plasma-Exposed Solid/Liquid Tin International conference

Kota Tamura,Haruka Suzuki, Suguru Masuzaki,Masayuki Tokitani, Junichi Miyazawa, Hirotaka Toyoda

ISPlasma2021/IC-PLANTS2021　08P-38  2021.3.8 

Time-dependent Measurement of Charge Density at Bottom of High-aspect Hole in a Capacitively-coupled Plasma International conference

Makoto Moriyama, Naoya Nakahara, Keita Ichikawa,Manh Hung Chu,Haruka Suzuki* and Hirotaka Toyoda

ISPlasma2021/IC-PLANTS2021　08pB14O  2021.3.8 

Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave Line Plasma with Ar/O2 International conference

2Haruka Suzuki*, Tomohiro Ogasawara, Yuki Iwata, and Hirotaka Toyoda

ISPlasma2021/IC-PLANTS2021　08pB07O  2021.3.8 

Wide Area and High Rate Deposition of Graphitic Carbon by Surface Wave Plasma

Temporal Variation of Accumulated Charge at the Bottom of High Aspect Hole in Pulse-modulated Capacitively-Coupled Plasma

グロー放電水素プラズマを用いたスズ-水素プラズマ相互作用の基礎研究

田村　晃汰

ダイバータの学理と応用 NIFS 

A Deuterium Distribution Measurement in Deuterium Plasma Exposed-Tin

Kota Tamura1), Haruka Suzuki1), Suguru Masuzaki2), Masayuki Tokitani2), Junichi Miyazawa2), Hirotaka Toyoda1,2) 1)Nagoya Univ., 2) NIFS

High speed and wide area conductive carbon film deposition by surface-wave plasma.

H.Bae 1), K.Hikita 1), H.Suzuki 1) 2), K.Sasai 2), H.Toyoda 1) 2) 3) (1) Department of electronics, Nagoya univ., (2) Center for Low-temperature Plasma Sciences(cLPS), Nagoya univ., (3) National Institute for Fusion Science(NIFS)

Surface treatment of resin material by pulsed microwave atmospheric pressure Ar/O2 plasma

OGASAWARA Tomohiro1), SUZUKI Haruka1), TOYODA Hirotaka1,2) (1)Nagoya Univ.,2)NIFS)

Evaluation of charge density at the bottom of the capillary plate in a pulse modulated dual frequency CCP International conference

Application of atmospheric pressure microwave plasma to large area and high-speed surface treatment

2020.12.3 

Quantitative Evaluation of Hydrogen Retention of Solid and Liquid Tin by Thermal Desorption Spectroscopy International conference

Kota TAMURA1, Haruka SUZUKI1, Junichi MIYAZAWA2, Suguru MASUZAKI2, Hirotaka TOYODA1;2 1. Nagoya University

The 29th International Toki Conference on Plasma and Fusion Research 

Evaluation of absolute charge density at the bottom of hole pattern using high aspect ratio capillary plate International conference

MAKOTO MORIYAMA, NAOYA NAKAHARA, HARUKA SUZUKI,HIROTAKA TOYODA

GEC20 Meeting of The American Physical Society、RW3.4 

Film Surface Treatment with O2/Ar Line Plasma under Atmospheric Pressure International conference

Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Manh Hung Chu, Hirotaka Toyoda

GEC20 Meeting of The American Physical Society、LT3.00007  2020.10.6 

パルス変調容量結合型プラズマにおけるキャピラリープレート下部の電荷密度変化

中原 尚哉 ,森山 誠 ,鈴木 陽香 ,豊田 浩孝

第81回応用物理学会秋季学術講演会 

Time-resolved measurement of charge density at the bottom of capillary plate in a pulse modulated CCP

Ag Particle Behavior in an Inductively Coupled Plasma

Surface Hydrophilic Treatment by Microwave Line Plasma at Atmospheric Pressure

Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate

(M2) Manh Hung Chu1, Haruka Suzuki1, Hirotaka Toyoda1

Suppression of redissolution of p lasma synthesis silver nanoparticles using alkaline agent

Absolute charge density evaluation of a capillary plate in a pulse modulated CCP

Estimation of voltage at the top of capillary plate in a CCP

Temperature measurement of slot-plate in an atmospheric-pressure microwave linear plasma International conference

ISPlasma/IC-PLANTS2020 

Electromagnetic Analysis in a Long-scale Slot Plasma Excited by Microwave Travelling Wave International conference

Hirotsugu Koma, Haruka Suzuki and Hirotaka Toyoda

ISPlasma/IC-PLANTS2020 

Synthesis of silver nanoparticles by in line liquid process using microwave plasma source International conference

Jyo Suzuki, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda

ISPlasma/IC-PLANTS2020 

Quantitative Evaluation of Hydrogen Retention in Metal Tin using Thermal Desorption Spectroscopy International conference

ISPlasma/IC-PLANTS2020 

Spatial characteristics analysis of atmospheric pressure microwave plasma with FEM simulation International conference

Yoshiki Baba*, Makoto Moriyama, Haruka Suzuki and Hirotaka Toyoda

ISPlasma/IC-PLANTS2020 

容量結合プラズマ中に設置されたエッチングホール模擬用キャピラリープレートの電位構造解析

森⼭ 誠、中原 尚哉、三⽮ 晶洋、鈴⽊ 陽⾹、豊⽥ 浩孝

プラズマ・核融合学会　第36回年会 

核融合炉ダイバー応用へ向けたスズの水素吸蔵量定量評価

田村晃汰，鈴木陽香，宮澤順一，豊田浩孝

プラズマ・核融合学会　第36回年会 

potential structure of high-aspect-ratio capillary hole in a pulsed-VHF capactive coupled plasma International conference

M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda

2019 International Symposium on DryProcess 

Microscopic observation of an atmospheric-pressure microwave plasma produced in a meter-scale slot with sub-millimeter gap International conference

HIROTAKA TOYODA, HIROTSUGU KOMA, YOSHIKI BABA, MANH HUNG CHU, HANSIN BAE, HARUKA SUZUKI

GEC19 Meeting of The American Physical Society 

Space-resolved oxygen radical measurement of atmo- spheric pressure microwave line plasma using vacuum ul- traviolet absorption spectroscopy International conference

HANSIN BAE, HIROTSUGU KOMA, HARUKA SUZUKI, HIROTAKA TOYODA

GEC19 Meeting of The American Physical Society 

Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma

Temporal Variation of Surface Potential on Insulated Film During DC Pulse Voltage Application to an Antenna of Surface-wave Plasma

Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma

Electromagnetic field distribution in a long-scale slot plasma using traveling waves

Potential structure analysis of a capillary plate in a dual frequency CCP

Space-resolved cross-sectional observation of slot-excited microwave O2/Ar plasma at atmospheric pressure

二周波重畳容量結合型プラズマにおける キャピラリープレート内の電位構造解析

中原 尚哉*, 森山 誠，三矢 晶洋，鈴木 陽香，豊田 浩孝 (名大工) 栗原 一彰，飯野 大輝，福水 裕之，林 久貴，鈴木 啓之 (東芝メモリ)

令和元年度 電気・電子・情報関係学会東海支部連合大会 

昇温脱離法を用いた固体スズ中の水素吸蔵量評価

田村晃汰，鈴木陽香，宮澤順一，豊田浩孝

令和元年度 電気・電子・情報関係学会東海支部連合大会 

大気圧マイクロ波プラズマにおけるギャップ内ガス温度の空間分解計測　

馬場 賀己＊，鈴木 陽香，豊田 浩孝

令和元年度 電気・電子・情報関係学会東海支部連合大会 

"二周波重畳容量結合型プラズマ装置における ファラデーカップを用いたイオンエネルギー分布の測定"

三矢 晶洋*，森山 誠，中原 尚哉、鈴木 陽香、豊田 浩孝

令和元年度 電気・電子・情報関係学会東海支部連合大会 

Consideration of Surface Potential on Insulated Film during DC Pulse Voltage Application to an Antenna of Surface-wave Plasma

High Speed Synthesis of Nanoparticles in Liquid Environment by In-Line Type Plasma Device

Shaofei Yang, Jyo Suzuki, Haruka Suzuki, Hirotaka Toyoda

High Speed Synthesis of Nanoparticles in Liquid Environment by In-Line Type Plasma Device

Shaofei Yang, Jyo Suzuki, Haruka Suzuki, Hirotaka Toyoda

Oxygen Radical Flux Measurement of Atmospheric Pressure Microwave Line Plasma International conference

H. Bae, Y. Koike, H. Koma, H. Suzuki and H. Toyoda

AEPSE2019 

Potential Control of Surface Wave Excited Plasma by Pulsed DC Voltage Applied to Plasma-Immersed Waveguide International conference

S. Fukuda, K. Udagawa, H. Suzuki, Y. Tauchi, H. Toyoda

XXXIV ICPIG & ICRP-10 

Measurement of ion energy in dual-frequency capacitive coupled plasma International conference

M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda

XXXIV ICPIG & ICRP-10 

Development of Microwave Remote Plasma Source for New Surface Functionalization International conference

T. Okimoto, Yoshiyuki Isomura, Y. Ikari, Y. Tauchi, K. Nishiyama, Kobe Steel, Ltd., Japan H. Toyoda, H. Suzuki, Nagoya University, Japan

International Conference on Metallurgical Coatings and Thin Films(ICMCTF 2019) 

Large-area surface treatment using microwave plasma excited in meter-length slot with sub-millimeter gap International conference

Haruka Suzuki, Hirotsugu Koma, Manh Hung Chu, Hansin Bae, Yoshiki Baba, and Hirotaka Toyoda

The 10th of International Workshop on Microplasmas (IWM-10) 

Time-resolved microscopic measurement of slot excited atmospheric pressure microwave plasma International conference

Yoshiki Baba, Haruka Suzuki, and Hirotaka Toyoda

The 10th of International Workshop on Microplasmas (IWM-10) 

革新的プラズマ源開発とエネルギー科学応用 Invited International conference

豊田浩孝

第82回マテリアルズテーラリング研究会 

長尺大気圧マイクロ波プラズマ生成と表面処理の応用 Invited

豊田浩孝

表面技術協会　第139回講演大会 

Optimized waveguide structure for atmospheric pressure microwave plasma International conference

Manh Hung Chu,Haruka Suzuki ,Hirotaka Toyoda

ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science) 

Time-resolved Measurement of Cross-Sectional Structure of a Narrow Gap Plasma Produced by an Atmospheric Pressure Microwave Discharge International conference

Yoshiki Baba, Haruka Suzuki and Hirotaka Toyoda

ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science) 

Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Slot type Microwave Antenna International conference

Sho Fukuda, Kou Udagawa, Haruka Suzuki, Yuki Yauchi, Hirotaka Toyoda

ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science) 

Microscopic Measurement of Long Microwave Plasma at Atmospheric Pressure International conference

Hirotsugu Koma, Yosuke Koike, Haruka Suzuki,Hirotaka Toyoda

ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science) 

Oxygen radical measurement of atmospheric pressure microwave plasma employing vacuum ultraviolet absorption spectroscopy International conference

Hansin Bae, Koike Yosuke, Hirotsugu Koma, Haruka Suzuki Hirotaka Toyoda

ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science) 

Hydrogen Recycling Properties of Tin wall in DC Glow Hydrogen Plasma International conference

Kota Tamura*, Haruka Suzuki, Hirotaka Toyoda and Junichi Miyazawa

ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science) 

大気圧長尺マイクロ波プラズマによる大面積高速表面処理

小間 浩嗣 ，杉山 敦士 ，鈴木 陽香，本田 剛 ，豊田 浩

第66回応用物理学会春季学術講演会 

マイクロ波アンテナへのDCパルス電圧印加による絶縁表面へのイオン衝撃

福田 奨,宇田川 洸, 鈴木 陽香, 田内 裕基, 豊田 浩孝

第66回応用物理学会春季学術講演会 

High Speed Synthesis of Nanoparticles by Liquid Flow-type Microwave Plasma

Shaofei Yang, Shohei Fujimura, Masafumi Shiigai, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

Oxygen Radical Measurement of Atmospheric Pressure Microwavw Line Plasma by Vacuum Ultraviolet Absorption Spectroscopy

二周波重畳容量結合プラズマ基本特性の実験的評価 の実験的評価 の実験的評価

三矢 晶洋， 森山 誠，鈴木 ，鈴木 陽香，豊田 浩孝

第66回応用物理学会春季学術講演会 

シミュレーションによる二周波重畳容量結合プラズマの基本特性解析

森山 誠，三矢 晶洋，中原 尚哉，鈴木 陽香，豊田 浩孝

第66回応用物理学会春季学術講演会 

スロット型大気圧マイクロ波プラズマの時空間分解計測

馬場 賀己，鈴木陽香，豊田 浩孝

第66回応用物理学会春季学術講演会 

Time-resolved microscopic measurement of cross-sectional structure of slot excited atmospheric pressure microwave plasma

A Systematic Analysis of Modified Waveguide Structure for Atmospheric-Pressure Microwave Plasma Source via Simulations

メートル級長尺スロット型プラズマ源における 大気圧マイクロ波プラズマの顕微計測

小間　浩嗣、小池　洋右、鈴木　陽香、豊田　浩孝、

第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

Water Vapor Plasma Treatment Process using Slot-Excited Microwave Plasma Invited

28th Annual Meeting of MRS-Japan 2018 

Organic-matter removal treatment using atmospheric pressure microwave O2/CF4

新規大気圧マイクロ波プラズマ源の開発と応用 Invited

鈴木陽香、豊田浩孝

高機能トライボ表面プロセス部会 第12回例会 

直流放電プラズマを用いた金属スズの水素リサイクリング評価

田村晃汰，鈴木陽香，豊田浩孝，宮澤順一

プラズマ核融合学会 第35回年会 

二周波重畳容量結合プラズマの基本特性評価

森山誠，三矢晶洋，中原尚哉，鈴木陽香，豊田浩孝

プラズマ核融合学会 第35回年会 

大気圧マイクロ波ラインプラズマにおける酸素原子の紫外吸収分光計測

BAE Hansin，小池洋右，小間浩嗣，鈴木陽香，豊田浩孝

プラズマ核融合学会 第35回年会 

大気圧下でのメートル級マイクロ波プラズマの生成と応用 Invited

鈴木陽香、豊田浩孝

プラズマ核融合学会 第35回年会 

Influence of magnetic field on high-energy negative ion behavior in magnetron plasma with oxide targets Invited International conference

Hirotaka Toyoda, Ko Udagawa, Akihiro Mitsuya, Hansin Bae, Haruka Suzuki

2nd Asia-Pacific Conference on Plasma Physics 

High speed photoresist removal using slot-excited atmospheric-pressure microwave O2/CF4 plasma International conference

Shota Ishikaw1, Haruka Suzuki, Tsuyoshi Honda and Hirotaka Toyoda

The 40th International Symposium on Dry Process(2018) 

Ring-shaped microwave plasma production in liquid flow environment for nanoparticle synthesis Invited International conference

S. Fujimura, S. Yang, K. Sasai, H. Suzuki and H. Toyoda

The 40th International Symposium on Dry Process(2018) 

Observation of cross sectional plasma structure in a gap of an atmospheric pressure microwave discharge International conference

Hirotaka Toyoda Yoshiki Baba Haruka Suzuki

71st Annual Gaseous Electronics Conference  

Scaling of Microwave Absorption in Atmospheric Pressure Microwave Line Plasma International conference

Ivan Ganachev,Haruka Suzuki, and Hirotaka Toyoda

The Eighteenth Biennial IEEE Conference on Electromagnetic Field Computation (CEFC2018) 

Diagnostics of energetic particles in magnetron plasma using oxide target Invited International conference

Ivan Ganachev, Haruka Suzuki, and Hirotaka Toyoda

International Symposium on Sputtering & Plasma Processes Pre session (ISSP2018) 

流動液体マイクロ波プラズマによるナノ粒子生成

藤村 昇平、楊 少菲、鈴木 陽香、豊田 浩孝

応用物理学会秋季学術講演会 

大気圧マイクロ波励起O2/CF4プラズマによるフォトレジスト除去処理

(M2)石川 翔太1、鈴木 陽香1、本田 剛2、豊田 浩孝1 (1.名大工、2.ニッシン)

応用物理学会秋季学術講演会 

メートル級長尺大気圧マイクロ波プラズマの顕微計測 Invited

鈴木 陽香、小池 洋右、小間 浩嗣、馬場 賀己、豊田 浩孝

応用物理学会秋季学術講演会 

電磁界シミュレーションを用いた大気圧長尺マイクロ波プラズマにおける定在波抑制

(M2)小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝

応用物理学会秋季学術講演会 

Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Microwave Antenna

(M2)Kou Udagawa1,Sho Fukuda1,Haruka Suzuki1,Yuki Tauchi2,Hirotaka Toyoda1(1.Nagoya Univ.,2.Kobe Steel Ltd.)

Meter-scale atmospheric pressure microwave line plasma and its applications. Invited International conference

H. Toyoda

Xth INTERNATIONAL WORKSHOP on MICROWAVE DISCHARGES: Fundamentals and Applications