Updated on 2023/10/16
Doctor of Engineering （ 1988.3 Nagoya University ）
Plasma Science and Technology
Others / Others / Plasma Science
Others / Others / Atomic/Molecular/Quantum Electronics, Plasma
Large area process by atmospheric pressure microwave line plasma
Charging process on the hole bottom of high-aspect hole in etching plasma
Frontier material processing and water purification by microwave plasma
Analysis of angular distribution of high energy particles in etching plasma
Plasma behavior of inductively/capacitively coupled plasma
Surface interaction between liquid tin and hydrogen plasma
自然科学研究機構 核融合科学研究所 特任教授
2020.4
名古屋大学教授（工学研究科） 教授
2007.4
Country：Japan
名古屋大学助教授（工学研究科プラズマナノ工学研究センター） 助教授
2006.10 - 2007.3
Country：Japan
名古屋大学助教授（工学研究科） 助教授
2000.4 - 2006.9
Country：Japan
名古屋大学講師（工学部） 講師
1992.4 - 2000.3
Country：Japan
名古屋大学助手（工学部） 助手
1988.4 - 1992.3
Country：Japan
Nagoya University Graduate School, Division of Engineering Department of Electrical Engineering
- 1988
Country： Japan
Nagoya University Faculty of Engineering
- 1983
Country： Japan
The Japan Society of Plasma Science and Nuclear Fusion Research
The Institute of Electrical Engineers of Japan
Japan Society of Applied Physics
International Organizing Committee
2022.1 - 2022.12
International Symposium on Dry Process Chair of Publication Committee
2022.1 - 2022.12
International Symposium on Dry Process International Program Committee
2022.1 - 2022.12
名古屋大学プラズマ研究60年記念シンポジウム オーガナイザー
2021.7 - 2021.9
応用物理学会東海支部 幹事
2021.4 - 2022.3
Committee type：Academic society
International Symposium on Advanced Plasma Science and its Application to Nitorides and Nanomaterials International Organizing Committee
2021.3 - 2022.3
International Symposium on Advanced Plasma Science and its Application to Nitrides and Nanomaterials Chair of Executive Committee
2021.3 - 2022.3
International Program Committee
2021.3 - 2022.3
International Symposium on Dry Process International Organizing Committee
2021.1 - 2021.12
International Symposium on Dry Process Vice Chair of Publication Committee
2021.1 - 2021.12
International Symposium on Advanced Plasma Science and its application to nitride and nanomaterials International Organizing Committee
2020.4 - 2021.3
International Symposium on Dry Process Organizing Committee
2020.3 - 2020.11
応用物理学会東海支部 企画幹事
2019.4 - 2020.4
Committee type：Academic society
プラズマ・核融合学会 副会長
2018.6 - 2020.5
Committee type：Academic society
電気学会 理事・東海支部支部長
2018.6 - 2020.5
Committee type：Academic society
Microwave Discharge Workshop International Organizing Committee
2018.3
Committee type：Academic society
プラズマ・核融合学会 理事
2014.6 - 2018.5
Committee type：Academic society
Plasma Electronics Award
2023.3 Japan Society of Applied Physics, Plasma Electronics Division
応用物理学会フェロー表彰
2020.9 公益社団法人 応用物理学会 プロセスプラズマの気相・表面解析と新規プロセスプラズマ源創出
豊田浩孝
平成22年度第4回貢献賞
2010.11 （社）プラズマ・核融合学会
Plasma Electronics Award
2007.3 Japan Society of Applied Physics, Plasma Electronics Division
講演奨励賞
2022.10 応用物理学会 二周波重畳容量結合型プラズマから 電極へ入射する高速粒子の イメージング法を用いた角度分布計測
市川景太, 鈴木陽香, 飯野大輝, 福水裕之, 栗原一彰, 豊田浩孝
Best Poster Presentation Award
2022.3 ISPlasma2022/IC-PLANTS2022 Radical measurements of Ar/C4F8 dual frequency capacitively-coupled plasma
電気学会優秀論文発表賞
2022.1 令和3年度電気・電子・情報関係学会東海支部連合大会 イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測
市川景太，鈴木陽香，豊田浩孝
APEX/JJAP編集貢献賞
2016.4 応用物理学会
Best Poster Presentation Award (Poster)
2014.3 ISPlasma2014 Organizing Committee
応用物理学会講演奨励賞
2000
応用物理学会講演奨励賞
1998
*Fine Structure of O Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism Reviewed
H.Toyoda, K. Goto, T. Ishijima, T. Morita, N. Ohshima, K. Kinoshita
Applied Physics Express Vol. 2 ( 12 ) page： 126001-(1-3) 2009.11
Design of Large-Area Surface Wave Plasma Excited by Slotted Waveguide Antennas with Novel Power Divider Reviewed
Tatsuo Ishijima, Hirotaka Toyoda, Yudai Takanishi, and Hideo Sugai
Jpn. J. Appl. Phys. Vol. 50 page： 036002 2011.3
*Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma Reviewed
Y. Takagi, Y. Sakashita, H. Toyoda, and H. Sugai
Vacuum Vol. 80 ( 6 ) page： 581-587 2006.3
*Evidence of Radical-free Etching of SiO2 by Fluorocarbon Molecules under Ion Bombardment Reviewed
N. Takada, H. Toyoda and H. Sugai
Transacitons of the Materials Research Society of Japan Vol. 30 ( 1 ) page： 319-322 2005
*Suppression of Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H2/SiH4 Plasma Reviewed
S. Somiya, H. Toyoda, Y. Hotta and H. Sugai
Jpn. J. Appl. Phys. Vol. 43 ( 11A ) page： 7696-7700 2004
Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma International journal
Shuichi Kuboi, Haruhito Kato, Yuto Seki, Haruka Suzuki and Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 62 ( SI ) page： SI1003 2023.7
Tran Trung Nguyen, Hu Min, Ogasawara Tomohiro, Iwata Yuki, Suzuki Haruka, Sakamoto Jin, Akiyoshi Masafumi, Toyoda Hirotaka, Matsuura Hiroto
PLASMA SCIENCE & TECHNOLOGY Vol. 25 ( 3 ) 2023.3
Influence of small ground surface on plasma property in an inductively-coupled plasma with floating liner Reviewed International journal
Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki and Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 62 ( SA ) page： SA1008-1 - SA1008-7 2023.1
NUCLEAR FUSION Vol. 62 ( 12 ) 2022.12
Bubbling phenomenon of liquidized Sn-Bi-Li-Er alloy under hydrogen plasma exposure Reviewed
Tamura Kota, Miyazawa Junichi, Masuzaki Suguru, Tokitani Masayuki, Hamaji Yukinori, Toyoda Hirotaka
JAPANESE JOURNAL OF APPLIED PHYSICS Vol. 61 ( 10 ) page： 106005 2022.10
Japanese Journal of Applied Physics Vol. 61 ( SI ) 2022.7
High-speed hydrophilic and ashing treatments of polyimide using Ar/O-2 atmospheric-pressure microwave line plasma Reviewed
Japanese Journal of Applied Physics Vol. 61 ( SI ) page： 1008-1 - 1008-5 2022.7
Bae Hansin, Hamaguchi Ikumi, Sasai Kensuke, Suzuki Haruka, Toyoda Hirotaka
JAPANESE JOURNAL OF APPLIED PHYSICS Vol. 60 ( 12 ) 2021.12
Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma Reviewed
Keita Ichikawa, Manh Hung CHU, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Daiki Iino, Hiroyuki Fukumizu, Kazuaki KURIHARA and Hirotaka TOYODA
Applied Physics Express Vol. 14 ( 126001 ) page： 126001-1 - 126001-5 2021.11
Hansin BAE,Kensuke Sasai,Haruka Suzuki,Hirotaka Toyoda
Vacuum Vol. 192 page： 110429-1 - 110429-8 2021.10
Quantitative evaluation of hydrogen retention of solid tin after exposure to hydrogen plasma Reviewed
Kota Tamura,Haruka Suzuki, Junichi Miyazawa,Suguru Masuzaki,Hirotaka Toyoda
Fusion Engineering and Design Vol. 170 ( September 112532 ) page： 112532-1 - 112532-6 2021.9
Haruka SUZUKI, Hirotsugu KOMA, Tomohiro OGASAWARA, Yosuke KOIKE and Hirotaka TOYODA
Plasma and Fusion Research Vol. 16 ( 0 ) page： 1406046 - 1406046 2021.4
Makoto Moriyama, Naoya Nakahara, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, Haruka Suzuki, and Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 60 ( 016001 ) page： 016001-1 - 016001-5 2021.1
長尺大気圧マイクロ波プラズマの生成と表面処理への応用
豊田 浩孝、鈴木 陽香
表面技術 Vol. 71 ( 10 ) page： 624-628 2020.10
Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma
Makoto Moriyama1*, Naoya Nakahara1, Akihiro Mitsuya1, Haruka Suzuki1 , Kazuaki Kurihara2, Daiki Iino2, Hiroyuki Fukumizu2, and Hirotaka Toyoda1,3
Japanese Journal of Applied Physics Vol. 59 page： SJJB03 2020.4
Atmospheric-pressure microwave line plasma with an asymmetric cross-section waveguide for long-scale N2 plasma production
Haruka Suzuki1, Yuto Tamura1, Manh Hung Chu2 and Hirotaka Toyoda1
Japanese Journal of Applied Physics Vol. 59 ( 016002 ) page： 016002-1-016002-6 2020.1
Toyoda H.
RF Power Semiconductor Generator Application in Heating and Energy Utilization page： 181 - 194 2020.1
高密度表面波励起プラズマによるフッ素樹脂の表面改質
豊田浩孝
機能材料 ( 12月 ) page： PP 2019.12
Rapid resist ashing by slot-excited atmospheric pressure microwave O2 plasma
Hirotaka Toyoda1, Shota Ishikawa1, Haruka Suzuki1 and Takeshi Honda2
Japanese Journal of Applied Physics Vol. 58 ( 12 ) page： 126001-1-4 2019.11
大気圧マイクロ波放電による高密度長尺ラインプラズマ Reviewed
豊田浩孝、鈴木陽香
応用物理 Vol. 88 ( 2 ) page： 101-104 2019.2
Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow Reviewed
Hikaru Senba, Haruka Suzuki and Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 58 ( SA ) page： pp.SAAC05-1～SAAC05-5 2018.12
Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment
Sasai Kensuke, Keyamura Kazuki, Suzuki Haruka, Toyoda Hirotaka
JAPANESE JOURNAL OF APPLIED PHYSICS Vol. 57 ( 6 ) 2018.6
液体処理用マイクロ波励起プラズマの生成
豊田 浩孝
表面と真空 Vol. 61 ( 3 ) page： 113-118 2018.3
Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiNx:H films using RF-near microwave PECVD
Sahu Bibhuti Bhusan, Toyoda Hirotaka, Han Jeon Geon
PHYSICS OF PLASMAS Vol. 25 ( 2 ) page： 023511-1-14(2018) 2018.2
Development and plasma characterization of an 850 MHz surface-wave plasma source Reviewed
B. B. Sahu, S. Koga, H. Toyoda, and Jeon G. Han
AIP Advances Vol. 7 page： 105213-1-17(2017) 2017.10
Quantitative evaluation of high-energy O- ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target
Suyama Taku, Bae Hansin, Setaka Kenta, Ogawa Hayato, Fukuoka Yushi, Suzuki Haruka, Toyoda Hirotaka
JOURNAL OF PHYSICS D-APPLIED PHYSICS Vol. 50 ( 44 ) 2017.10
An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge
Suzuki Haruka, Toyoda Hirotaka
JAPANESE JOURNAL OF APPLIED PHYSICS Vol. 56 ( 11 ) 2017.9
液体処理用マイクロ波励起プラズマの生成 Reviewed
豊田浩孝
表面と真空 Vol. 61 ( 3 ) page： 113-118 2017.2
Enhancement of Liquid Treatment Efficiency by Microwave Plasma under Flow-Induced Reduced Pressure Reviewed
Michiko Ito, Tomohiro Takahashi, Sho Takitou, Seigo Takashima, Norio Nomura, Tominori Kitagawa, Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 56 page： 026201-1-6 2017.1
Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition Reviewed
K. Sasai, T. Hagihara, T. Noda, H. Suzuki, H. Toyoda
Jpn. J. Appl. Phys., Vol. 55 page： 086202 -1-5(2016) 2016.7
Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma Reviewed
Takafumi Takaba, Haruka Suzuki and Hirotaka Toyoda
Journal of Physics D: Applied Physics, Volume 49, Number 29 Vol. 49 ( 29 ) page： 295202 2016.6
Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave Reviewed
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
Jpn. J. Appl. Phys. ( 55 ) page： Article ID: 01AH09-1-6(2016) 2015.12
Low pressure sustainment of surface-wave microwave plasma with modified microwave coupler Reviewed
Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Jpn. J. Appl. Phys. ( 55 ) page： Article ID: 016203-1-5(2016) 2015.12
New line plasma source excited by 2.45 GHz microwave at atmospheric pressure Reviewed
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
Vol. 8 ( 3 ) page： 036001 2015.2
Synergistic effect of microwave plasma and ultrasonic wave on decomposition of organic compounds in water Reviewed
Tomohiro Takahashi, Noriharu Takada, and Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 53 ( 7S ) page： 07KE01 2014.6
酸化物ターゲットを用いたRFマグネトロンプラズマにおける高エネルギー粒子の挙動 Invited Reviewed
豊田浩孝
Journal of the Vacuum Society of Japan Vol. 57 ( 3 ) page： 80-83 2014.3
Influence of Si Substrate Temperature and Bias Voltage on Surface Reaction of Br Radical in HBr Inductively Coupled Plasma
D. Iino, Y. Fujii, T. Oike, H. Toyoda
JPS Conf. Proc. Vol. 1 page： 015070-1-4 (2014) 2014.3
Influence of Oxygen Addition and Wafer Bias Voltage on Bromine Atom Surface Reaction in a HBr/Ar Inductively Coupled Plasma Reviewed
Daiki Iino , Yasuhiro Nojiri, Keiji Suzuki, Takumi Oike, Yoshitaka Fujii, and Hirotaka Toyoda
Japanese Journal of Applied Physics Vol. 52 ( 11 ) page： 11NC01-1-6 2013.11
High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System Reviewed
Hitoshi Itoh, Yusuke Kubota, Yusaku Kashiwagi, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Hirotaka Toyoda and Masaru Hori
Jpn. J. Appl. Phys. Vol. 52 page： 11NE01 2013.11
A Development of Atmospheric Pressure Plasma Equipment and Its Applications for Treatment of Ag Films Formed from Nano-Particle Ink
H. Itoh, Y. Kubota, Y. Kashiwagi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, H. Toyoda and M. Hori
Journal ofPhysics:ConferenceSeries Vol. 441 page： 012019 2013.6
Rapid Plasma Treatment of Polyimide for Adhesive and Durable Copper Film Deposition
K. Usami, T. Ishijima, H. Toyoda
Thin Solid Films Vol. 521 page： 22-26 2012.10
High performance of carbon nanowall supported Pt catalyst for methanol electro-oxidation
Chengxu Zhang , Jue Hu , Xiangke Wang , Xiaodong Zhang , Hirotaka Toyoda , Masaaki Nagatsu , Yuedong Meng
CARBON Vol. 50 page： 3731–3738 2012.4
Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source Reviewed
Yasuhiro Hara , Keigo Takeda, Koji Yamakawa, Shoji Den, Hirotaka Toyoda, Makoto Sekine, and Masaru Hori
Applied Physics Express Vol. 5 page： 035801 2012.2
Characterization of a steam plasma jet at atmospheric pressure
Guohua Ni, Peng Zhao, Cheng Cheng, Ye Song, Hirotaka Toyoda and Yuedong Meng
Plasma Sources Sci. Technol. Vol. 21 page： 015009 (12pp) 2012.1
Microphase separated hydroxide exchange membrane synthesis by a novel plasma copolymerization approach
Chengxu Zhang, Jue Hua, Xiangke Wang, Hirotaka Toyoda, Masaaki Nagatsu, Xiaodong Zhang, Yuedong Meng
Journal of Power Sources Vol. 198 page： 112– 116 2011.10
Spatial Profile Measurement of SiH3 Radical Flux in SiH4/H2 Microwave Plasma by Modified Appearance Mass Spectrometry Reviewed
Toshiyuki Kuroda, Masahira Ikeda, Tatsuo Ishijima, and Hirotaka Toyoda
Jpn. J. Appl. Phys. Vol. 50 page： 08JB05 2011.8
High-Performance Plasma-Polymerized Alkaline Anion-Exchange Membranes for Potential Application in Direct Alcohol Fuel Cells
Chengxu Zhang, Jue Hu, Masaaki Nagatsu, Yuedong Meng, Wei Shen, Hirotaka Toyoda, Xingsheng Shu
Plasma Process. Polym. Vol. 8 page： 1024–1032 2011.8
Preparation of high-performance hydroxide exchange membrane by a novel ablation restriction plasma polymerization approach
Chengxu Zhang, Jue Hu, Yuedong Meng, Masaaki Nagatsu and Hirotaka Toyoda
Chem. Commun. Vol. 47 page： 10230–10232 2011.5
Magnetron sputtering of platinum nanoparticles onto vertically aligned carbon nanofibers for electrocatalytic oxidation of methanol
Chengxu Zhang, Jue Hu, Masaaki Nagatsu, Xingsheng Shu, Hirotaka Toyoda, Shidong Fang, Yuedong Meng
Electrochimica Acta Vol. 56 page： 6033– 6040 2011.5
Refractory Organic Solute Decomposition in Water using Microwave Plasma Reviewed
Tatsuo Ishijima, Ryota Saito, Hiroyasu Sugihara, and Hirotaka Toyoda
Transactions of the Materials Research Society of Japan Vol. 36 ( 3 ) page： 475-478 2011.3
Influence of temperature and pressure on solute decomposition efficiency by microwave-excited plasma Reviewed
R. Saito , H. Sugiura , T. Ishijima, H. Toyoda
Current Applied Physics Vol. 11 ( 5 ) page： S195-S198 2011.3
Pulsed plasma-polymerized alkaline anion-exchange membranes for potential application in direct alcohol fuel cells
Chengxu Zhang, Jue Hu, Jie Cong, Yanping Zhao, Wei Shen, Hirotaka Toyoda, Masaaki Nagatsuc, Yuedong Menga
Journal of Power Sources Vol. 196 page： 5386–5393 2011.2
Effect of O Ion Beam Irradiation during RF-Magnetron Sputtering on Characteristics of CoFeB-MgO Magnetic Tunnel Junctions Reviewed
Kazunaga Ono, Norikazu Ohshima, Kazuya Goto, Hiroki Yamamoto, Tadashi Morita, Keizo Kinoshita, Tatsuo Ishijima, and Hirotaka Toyoda
Jpn. J. Appl. Phys. 50 (2011) 023001 Vol. 50 page： 023001 2011.2
Plasma-grafted alkaline anion-exchange membranes based on polyvinyl chloride for potential application in direct alcohol fuel cell
Jue Hu, Chengxu Zhang, Jie Cong, Hirotaka Toyoda, Masaaki Nagatsu, Yuedong Meng
Vol. 196 page： 4483–4490 2011.1
Novel Antenna Coupler Design for Production of Meter-ScaleHigh-Density Planar Surface Wave Plasma Reviewed
Tatsuo Ishijima, Yasunori Nojiri, Hirotaka Toyoda, Hideo Sugai
Vol. 49 page： 086002 2010.8
Efficient production of microwave bubble plasma in water for plasma processing in liquid Reviewed
T. Ishijima, H. Sugiura, R. Saito, H. Toyoda, H. Sugai
Plasma Sources Sci. Technol. 015010 Vol. 19 page： 015010 2010
Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target Reviewed
T. Ishijima, K. Goto, N. Ohshima, K. Kinoshita, and H. Toyoda
Jpn. J. Appl. Phys. Vol. 48 page： 116004 2009.11
メタルスパッタリングプラズマの高度化とその最新動向
豊田浩孝（分担執筆）
電気学会技術報告書 Vol. 1162 page： pp.11~14 2009.7
Rapid treatment of polyimide film surfaces using high-density microwave plasma for enhancement of Cu layer adhesion Reviewed
Y. Takagi , Y. Gunjo , H. Toyoda , H. Sugai
Vacuum, Vol. 83 page： 501–505 2008.10
Effect of Sputtering Deposition Process on Magnetic Properties on Magnetic Multilayers Reviewed
Y. Maeda, Y. Suzuki, Y. Sakashita, S. Iwata, T. Kato, S. Tsunashima, H. Toyoda and H. Sugai
Jpn. J. Appl. Phys. Vol. 47 ( 10 ) page： 7879-7885 2008.10
Surface Modification of Fluorocarbon Polymer Film by High Density Microwave Plasma Reviewed
K. Ishikawa, T. ishijima, K. Sasai, H. Toyoda and H. Sugai
Transactions of the Materials Research Society of Japan Vol. 33 ( 3 ) page： 683-686 2008.9
Characteristics of Low-energy Atom and Molecule Beams Generated by the Charge Exchange Reaction Reviewed
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Toyoda, M. Sekine, M. Hori
J. Appl. Phys. Vol. 103 ( 5 ) page： 053301 1-5 2008.5
Deposition of polycrystalline SiGe by surface wave excited plasma Reviewed
Y. Takanishi, T. Okayasu, H. Toyoda, H. Sugai
Thin Solid Films Vol., pp. Vol. 516 page： 3554-3557 2008.4
スパッタプラズマ中の高エネルギー粒子計測と制御 Reviewed
豊田浩孝
真空 Vol. 51 ( 4 ) page： 258-263 2008.4
Suppression of Super High-Energy Species by VHF-DC Superimposed Magnetron Sputter Plasma Reviewed
Y. Sakashita, Y. Takagi, T. Kato, H. Toyoda, S. Iwata, S. Tsunashima and H. Sugai
Transaction of Materials Research Society of Japan Vol. 32 ( 2 ) page： 481-484 2007.12
Suppression of High-Energy Backscattered Particles in Magnetron Plasma Reviewed
Yusuke Takagi, Hirotaka Toyoda, and Hideo Sugai
Jpn. J. Appl. Phys. Vol. 46 ( 12 ) page： 7865-7869 2007.12
Tunable Low-energy Ar Fast Atom Source with Large Diameter Reviewed
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Toyoda, M. Hori
Appl. Phys.Lett. Vol. 91 ( 23 ) page： 23502 1-3 2007.12
High-Speed μc-Si Films Deposition and Large-Grain Poly-Si Films Deposition by Surface Wave Discharge Reviewed
Y. Hotta, H. Toyoda and H. Sugai
Thin Solid Films Vol. 515 page： 4983-4987 2007.4
Role of atomic nitrogen during GaN growth by plasma-assisted molecular beam epitaxy revealed by appearance mass spectrometry Reviewed
J. Osaka, M. Senthil Kumar, H. Toyoda, T. Ishijima, H. Sugai and T. Mizutani
APPLIED PHYSICS LETTERS Vol. 90 page： 172114 1-3 2007.4
Investigation of the ion dese non-uniformity caused by sheath-lens focusing effect on silicon wafers Reviewed
N. Holtzer , E. Stamate, H. toyoda and H. Sugai
Thin Solid Films Vol. 515 page： 4887-4891 2007.4
Dependence of Giant Magnetoresitance in Cn/Cu Multilayers on Sputtering Condition Reviewed
Changchuan Chen, Y. Suzuki, T. Kato. S. Iwata, S. Tsunashima, H. Toyoda, H. Sugai
Japanese Juenal of Applied Physics Vol. 45 ( 10B ) page： 8466-8468 2006.10
Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma Reviewed
Y. Takagi, Y. Sakashita, H. Toyoda, and H. Sugai
Vacuum Vol. 80 ( 6 ) page： 581-587 2006.3
バイアス光プローブによる反応性プラズマのEEDF測定 Reviewed
豊田浩孝
プラズマ・核融合学会誌 Vol. 81 ( 7 ) page： 496-501 2005
High-energy ions and atoms sputtered and reflected from magnetron source for deposition of magnetic thin films Reviewed
H. Matsui, H. Toyoda and H. Sugai
J. Vac. Sci. Technol. A Vol. 23 ( 4 ) page： 671-675 2005
Evidence of Direct SiO2 Etching by Fluorocarbon Molecules under Ion Bombardment Reviewed
N. Takada, H. Toyoda, I. Murakami and H. Sugai
Journal of Applied Physics Vol. 97 ( 1 ) page： 013534 1-5 2005
Evidence of Radical-free Etching of SiO2 by Fluorocarbon Molecules under Ion Bombardment Reviewed
N. Takada, H. Toyoda and H. Sugai
Transacitons of the Materials Research Society of Japan Vol. 30 ( 1 ) page： 319-322 2005
Beam Study of the Si and SiO2 Etching Processes by Energetic Fluorocarbon Ions Reviewed
H. Toyoda, H. Morishima, R. Fukute, Y. Hori, I .Murakami and H. Sugai
J. Appl. Phys. Vol. 95 page： 5172-5179 2004
Dramatic Reduction of Chemical Sputtering of Graphite under Intercalation of Lithium Reviewed
H. Yagi, H. Toyoda, H. Sugai
J. Nucl. Mater. Vol. 313-316 page： 284-287 2003
Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductively-Coupled Plasma Reviewed
T. Kojima, A. Ohishi, H. Toyoda, M. Goto, M. Nishitani and H. Sugai
Jpn. J. Appl. Phys. Vol. 40 ( 1 ) page： 322-325 2001
Rapid Diffusion of Lithium into Bulk Graphite in Lithium Conditioning Reviewed
N. Itou, H. Toyoda, K. Morita and H. Sugai
J. Nucl. Mater. Vol. 290-293 page： 381-385 2001
Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field Reviewed
H. Sugai, H. Toyoda, J. Ihde and J. Winter
J. Plasma and Fusion Research Vol. 77 ( 2 ) page： 130-136 2001
Electron Energy Distribution Function and the Influence on Fluorocarbon Plasma Chemistry Reviewed
H. Sugai, I. Ghanashev, M. Hosokawa, K. Mizuno, K. Nakamura, H. Toyoda and K. Yamauchi
Plasma Sources Sci. Technol Vol. 10 page： 378-385 2001
Measurement of Electron-Impact-Dissociation Cross Section for Neutral Products Reviewed
H. Sugai, H. Toyoda
AIP Conf. Proc. Vol. 500 page： 349-358 2000
Laboratory Experiment on Lithium Chemistry and its Application to Effective Wall Conditioning Reviewed
S. Kato, M. Watanabe, H. Toyoda, H. Sugai
J. Nucl. Mater. Vol. 266-269 page： 406-411 1999
Mechanism of Carbon Impurity Suppression by Lithium Conditioning Reviewed
J. Plasma and Fusion Research Vol. 75 ( 4 ) page： 459-466 1999
Beam Experiments on Radical Production in Gas Phase and on Solid Surfaces Reviewed
J. Plasma and Fusion Research Vol. 75 ( 7 ) page： 779-784 1999
PSI in Fusion Devices -Function and Perspective of Wall Conditioning
J. Plasma and Fusion Research Vol. 75 ( 4 ) page： 403-408 1999
Lower Temperature Deposition of Poly-Crystalline Silicon Films from a Modified Inductively-Coupled Silane Plasma
K. Goshima, H. Toyoda, T. Kojima, M. Nishitani, M. Kitagawa, H. Yamazoe, H. Sugai
Jpn. J. Appl. Phys. Vol. 38 ( 6A ) page： 3655-3659 1999
High Sensitivity Optical Absorption Spectroscopy by Optical Multichannel Analyzer Reviewed
OYO-BUTURI Vol. 68 ( 5 ) page： 551-552 1999
Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C3HF70 Reviewed
H. Tanaka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 37 ( 9A ) page： 5053-5059 1998
Observation of Surface Dissociation of Low-energy Polyatomic Ions Relevant to Plasma Processing
H. Sugai, Y. Mitsuoka, H. Toyoda
J. Vac. Sci. Technol. Vol. 16 ( 1 ) page： 290-293 1998
Basic Experiments on in-situ Magnetized Boronization by Electron Cycrotron Resonance Discharges Reviewed
H. Kokura, K. Sasaki, H. Toyoda, T. Mizuuchi, K. Kondo, F. Sano, T. Obiki, H. Sugai
J. Nucl. Mater. Vol. 241-243 page： 1217-1221 1997
Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasmas Reviewed
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
Japanese Journal of Applied Physics Vol. 36 ( 6A ) page： 3714-3720 1997
Cross Section Measurements for Electron-Impact Dissociation of C4F8 into Neutral and Ionic Radicals Reviewed
H. Toyoda, M. Iio, H. Sugai
Japanese Journal of Applied Physics Vol. 36 ( 6A ) page： 3730-3735 1997
Laboratory Expercment on hydrogen and impurity behaviors in lithium-deposited environment
H. Toyoda, M. Watanabe, H. Sugai
Journal of Nuclear Materials Vol. 241-243 page： 1031-1035 1997
Diagnostics for Advanced Plasma Control of Materials Processing Reviewed
H. Sugai, T.H. Ahn, I. Ghanashev, M. Goto, H. Toyoda, N. Nagatsu, K. Nakamura, K. Suzuki
Plasma Phys. Control. Fusion Vol. 39 page： A445-458 1997
Lithium Wall Conditioning for Fuel and Impurity Control Reviewed
H. Sugai, M. Ohori, H. Toyoda
Vacuum Vol. 47 ( 6-9 ) page： 981-984 1996
Lower Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductivety Coupled Silane Plasma
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
Japanese Journal of Applied Physics Vol. 35 ( 8A ) page： L1009-1011 1996
Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions. Reviewed
Y. Mitsuoka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 34 ( 11A ) page： L1486-1489 1995
Hydrogen Content and Isotope Exchange in Boronization Reviewed
M. Yamage, H. Sugai, T. Saito, H. Toyoda, M. Saidoh, N. Ogiwara, T. Mizuuchi, F. Sano, et al.
J. Nucl. Mater. Vol. 220-222 page： 743-747 1995
Observation of Ion Scattering from Metals Surfaces Bombarded with Low-Energy Hydrocarbon Ions Reviewed
Y. Mitsuoka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 34 ( 4B ) page： L516-519 1995
Wall Conditioning with Lithium Evaporation Reviewed
H. Sugai, H. Toyoda, K. Nakamura, K. Furuta, M. Ohori, K. Toi, S. Hirokura, K. Sato
J. Nucl. Mater. Vol. 220-222 page： 254 1995
Simple Direct Monitoring of SiH3 Radical and Particulates in a Silane Plasma with Ultra-Violet Transmission Spectroscopy Reviewed
H. Toyoda, M. Goto, M. Kitagawa, T. Hirao, H. Sugai
Jpn. J. Appl. Phys. Vol. 34 ( 4A ) page： L448-451 1995
A Biased Optical Probe Method for Measurements of Electron Enaergy Distribution in a Plasma
H. Sugai, H. Toyoda, K. Nakano, N. Isomura
Journal of Plasma Sources, Science and Technoloy Vol. 4 page： 366372 1995
Boronization Study for Application to Large Helical Device
N. Noda, A. Sagara, H. Yamada, H. Toyoda, H. Sugai, Y. Kubota, N. Inoue, K. Akaishi,, et al.
J. Nucl. Mater. Vol. 220-222 page： 623-626 1995
Relative Cross Sections for Electron-Impact Dissociation of SF6 into SFx(x=1-3) Neutral Radicals Reviewed
M. Iio, M. Goto, H. Toyoda, H. Sugai
Contribution to Plasma Physics Vol. 35 ( 4-5 ) page： 405-413 1995
Absolute Cross Sections for the Electron-Impact Dissociation of CF4 and CHF3 into the CFx (x=1-3) Neutral Radicals Reviewed
H. Sugai, H. Toyoda, T. Nakano, M. Goto
Contribution to Plasma Physics Vol. 35 ( 4-5 ) page： 415-420 1995
CCH3 and CH Densities in a Diamond Growth DC Discharge Reviewed
K.L. Menningen, M.A. Childs, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. .Lawler
Contribution to Plasma Physics Vol. 35 ( 4-5 ) page： 359-373 1995
Measurement of CH3 and CH Densities in a Diamond Growth d. c. Discharge Reviewed
M.A. Childs, K.L. Menningen, H. Toyoda, L.W. Anderson, J.E. Lawler
Europhys. Lett. Vol. 25 ( 9 ) page： 729-734 1994
Measurement of Absolute Hydrogen Dissociation in a Diamond Deposition System Reviewed
M.A. Childs, K.L. Menningen, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. Lawler
Phys. Lett. A Vol. 194 page： 119123 1994
Ultraviolet Spectroscopy of Gaseous Spacies in a Hot Filament Diamond Deposition System When C2H2 and H2 are the Input Gases. Reviewed
H. Toyoda, M.A. Childs, K.L. Menningen, L.W. Anderson, J.E. Lawler
J. Appl. Phys. Vol. 75 ( 6 ) page： 3142-3150 1994
Absolute Radical Density Measurements in a CH4-H2 d.c. Discharge Reviewed
K.L. Menningen, M.A. Childs, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. Lawler
Diamond and Related Mater Vol. 3 page： 422-425 1994
Evaluation of a Substrate Pretreatment for Hot Filament CVD Reviewed
K.L. Menningen, M.A. Childs, H. Toyoda, L.W. Anderson, J.E. Lawler
J. Mater. Res. Vol. 9 ( 4 ) page： 915-920 1994
Cross Section Measurements for Electron-Impact Dissociation of CHF3 into Neutral and Ionic Radicals, Reviewed
M. Goto, K. Nakamura, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys., Vol. 33 ( 6A ) page： 3602-3607 1994
Plasma-assisted Surface Modification and Radical Diagnostics Reviewed
H. Sugai, M. Yamage, Y. Hikosaka, T. Nakano, H. Toyoda
J. Nucl. Mater Vol. 200 page： 403-411 1993
Spatial Distribution and Surface Loss of CF3 and CF2 Radicals in a CF4 Etching Plasma Reviewed
Y. Hikosaka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys Vol. 32 ( 3A ) page： L353-L356 1993
Drastic Change in CF2 and CF3 Kinetics Induced by Hydrogen Addition into CF4 Etching Plasma Reviewed
Y. Hikosaka, H. Toyoda, H. Sugai
Japanese J. Appl. Phys Vol. 32 ( 5A ) page： L690-L693 1993
Methyl Radical Production in a Hot Filament CVD System Reviewed
K.L. Menningen, M.A. Childs, P. Chevako, H. Toyoda, L.W. Anderson, J.E. Lawler
Chem. Phys. Lett Vol. 204 ( 5-6 ) page： 573-577 1993
Appearance Mass Spectrometry of Neutral Radicals in Radio Frequency Plasmas Reviewed
H. Sugai, H. Toyoda
Journal of Vacuum Science and Technology Vol. A10 ( 4 ) page： 1193-12004 1992
プラズマ界面における異常発光とフラグメンテーション Reviewed
片寄恭一, 豊田浩孝, 菅井秀郎
核融合研究 Vol. 67 ( 1 ) page： 51-61 1992
In-situ Boron Nitride Coating and Comparison with Existing Boronization Reviewed
M. Yamage, T. Ejima, H. Toyoda, H. Sugai
J. Nucl. Mater. Vol. 196-198 page： 618-621 1992
High Speed Cleaning of Boronized Wall with a CF4 Containing Plasma Reviewed
H. Toyoda, A. Hanami, M. Yamage, H. Sugai
Japanese Journal of Applied Physics Vol. 30 ( 3B ) page： L514-517 1991
Electron Impact Dissociation of Methane into CH3 and CH2 Radicals, II. Absolute Cross Sections Reviewed
T. Nakano, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 30 ( 11A ) page： 2912-2915 1991
Electron Impact Dissociation of Methane into CH3 and CH2 Radicals, I. Relative Cross Sections Reviewed
T. Nakano, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 30 ( 11A ) page： 2908-2911 1991
Interactions of Bulk-Boronized Graphites with Deuterium Plasmas in the PISCES-B Facility Reviewed
Y. Hirooka, R.W. Conn, H. Toyoda, H. Sugai et al.
Fusion Technol Vol. 19 page： 2059-2069 1991
Spatial Distribution of CH2 and CH2 Radicals in a Methane RF Discharge Reviewed
H. Sugai, H. Kojima, A. Ishida, H. Toyoda
Applied Physics Letters Vol. 56 ( 26 ) page： 2616-2618 1990
Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge Reviewed
H. Toyoda, A. Hanami, H. Sugai
Jpn. J. Appl. Phys. Vol. 29 ( 7 ) page： 1322-1323 1990
RF Plasma Production at Ultralow Pressure with Surface Magnetic Confinement Reviewed
T. Shirakawa, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 29 ( 6 ) page： L1015-1018 1990
Ion-Induced Radical Production on Surfaces during Deposition of Hydrogenated Amorphous Carbon Reviewed
Y. Yamashita, K. Katayose, H. Toyoda, H. Sugai
Journal of Applied Physics Vol. 68 ( 7 ) page： 3735-3737 1990
Effects of Carbon Wall on the Bahaviour of Heliotron-E Plasmas Reviewed
N. Noda, T. Mizuuchi, H. Toyoda, S. Yoshida, H. Sugai et al.
J. Nucl. Mater. Vol. 162-164 page： 769-775 1989
Hydrogen Release and Retention Dynamics of Amorphous Carbon Layers Exposed to a Hydrogen/Helium Plasma Reviewed
S. Yoshida, H. Sugai, H. Toyoda
Jpn. J. Appl. Phys Vol. 28 ( 6 ) page： 1101-1108 1989
Genaration of a Large Electron Beam for Plasma Processing, Reviewed
H. Sugai, N. Yabuoshi, H. Toyoda
Jpn. J. Appl. Phys. Vol. 28 ( 5 ) page： L868-870 1989
Hydrogen Recycling Control by Helium Ion Bombardment onto Carbonized Surfaces Reviewed
H. Sugai, H. Toyoda, S. Ohshita, S. Yoshida, A. Sagara
J. Nucl. Meter. Vol. 162-164 page： 1035-1039 1989
Carbonization Experiment by ECR Discharge in JIPPT-IIU Reviewed
Y.Sakamoto, H. Amemiya, H. Toyoda, H. Sugai et al.
J. Nucl. Mater. Vol. 162-164 page： 783-786 1989
Mass Spectroscopic Investigation of the CH3 Radicals in a Methane RF Discharge Reviewed
H. Toyoda, H. Kojima, H. Sugai
Applied Physics Letters Vol. 54 ( 16 ) page： 1507-1509 1989
Hydrogen Retention and Release Dynamics of Amorphous Carbon Filsm Exposed to a Hydrogen Plasma Reviewed
H. Sugai, S. Yoshida, H. Toyoda
Applied Physics Letters Vol. 54 ( 15 ) page： 1412-1414 1989
In situ Boron Coating and its Removal by Glow Discharge Processes Reviewed
H. Toyoda, T. Isozumi, H. Sugai, T. Okuda
Journal of Nuclear Materials Vol. 162-164 page： 732-736 1989
Observation of CH2 Radical and Comparison with CH3 Radical in a RF Methane Discharge Reviewed
H. Kojima, H. Toyoda, H. Sugai
Applied Physics Letters Vol. 55 ( 13 ) page： 1292-1294 1989
Formation of CH Radical by Surface Bombardment in a Methane/Argon DC Discharge Reviewed
Y. Yamashita, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 28 ( 9 ) page： L1647-1650 1989
Control of Hydrogen Content of Boron Films Produced by a DC Toroidal Discharge Reviewed
H. Toyoda, H. Sugai, T. Isozumi, T. Okuda
Applied Physics Letters Vol. 51 ( 11 ) page： 798-800 1987
イオン束を制御した水素化アモルファスシリコンの生成と成膜過程 Reviewed
豊田浩孝, 菅井秀郎, 吉田 明, 奥田孝美
応用物理 Vol. 55 ( 7 ) page： 718-726 1986
Hydrogenated Amorphous Silicon Formation by Flux Control and Hydrogen Effects on the Growth Mechanism Reviewed
H. Toyoda, H. Sugai, K. Kato, A. Yoshida, T. Okuda
Appl. Phys. Lett. Vol. 48 ( 24 ) page： 1648-1650 1986
Ion and Radical Contributions to a Si : H Film Formation in a DC Toroidal Discharge Reviewed
H. Sugai, H. Toyoda, A. Yoshida, T. Okuda
Applied Physics Letters Vol. 46 ( 11 ) page： 1048-1050 1985
プラズマイオン分析器の開発 Reviewed
菅井秀郎, 小島啓明, 森 直生, 豊田浩孝, 奥田孝美
核融合研究 Vol. 51 ( 3 ) page： 221-240 1984
A Mass Spectrometer for Boundary Plasma Diagnostics Reviewed
H. Kojima, H. Sugai, T. Mori, H. Toyoda, T. Okuda
J. Nucl. Mater Vol. 128-129 page： 965-968 1984
RF Power Semiconductor Generator Application in Heating and Energy Utilization
Hirotaka Toyoda（ Role： Joint author）
2020 （ ISBN:978-981-15-3547-5 ）
メタルスパッタリングプラズマの高度化とその最新動向
（ Role： Joint author）
電気学会技術報告書 第1162号2009年7月 pp.11~14 2009.7
スパッタ実務（Q&A集）
（ Role： Joint author）
㈱技術情報協会 2009.1
最新プラズマプロセスのモニタリング技術と解析・制御
豊田浩孝（ Role： Joint author）
リアライズ社 1997
Large volume liquid treatment with high-density microwave plasma Invited International conference
Hirotaka Toyoda
Plasma Thin Film International Meeting (PLATHINUM2021) 2021.9.13
High-energy Negative Ions in Sputtering Plasma - Energy Distribution and Its Spatial Variation - Invited International conference
Hirotaka Toyoda
3rd Asia-Pacific Conference on Plasma Physics
高速ガス流を用いた弱減圧マイクロ波プラズマ生成にむけた減圧形成シミュレーション
中林 賢二，小川 泰那，鈴木 陽香, 豊田 浩孝
令和5年度電気・電子情報関係学会東海支部連合講演会 2023.8.29
二周波容量結合型Ar/C4F8/O2パルスプラズマの電子密度時分解計測
赤塚 勇大，加藤 閣人，久保井 宗一, 鈴木 陽香, 豊田 浩孝
令和5年度電気・電子情報関係学会東海支部連合講演会 2023.8.29
トリチウムプラズマ照射による固体・液体スズ中水素分布の高精度評価
豊田浩孝
核融合科学研究所-富山大学研究推進機構水素同位体科学研究センター 双方向型共同研究 研究会 2023.7.17
Time-dependent measurement of ion composition in a capacitively-coupled Ar/C4F8/O2 power-modulated VHF plasma International conference
H. Toyoda, H. Kato, Y. Seki, S. Kuboi, Y. Akatsuka, and H. Suzuki
International Conference on Phenomena of Ionized Gases 2023.7.10
Influence of Pulse-off Time on Time-varying Ion Composition in a Pulse-operated Ar/C4F8/O2 Dual-frequency Capacitively Coupled Plasma International conference
Shuichi Kuboi, Haruhito Kato, Yuto Seki, Yudai Akatsuka, Haruka Suzuki and Hirotaka Toyoda
International Symposium on Plasma Chemistry 2023.5.22
高アスペクト比加工におけるチャージング現象 Invited
豊田浩孝
グリーンDXプラズマコンソーシアム２０２３年度第1回講習会 2023.4.21 名古屋大学低温プラズマ科学研究センター
二周波重畳容量結合型プラズマにおけるシース内衝突がRF電極入射粒子の角度分布に及ぼす影響
川村 隼也，市川 景太，鈴木 陽香, 飯野大輝，福水裕之，栗原一彰，豊田浩孝
第70回応用物理学会春季講演会 2023.3.17 応用物理学会
旋回流による流動液体プラズマ処理装置の放電部の電極保護
柚木 健吾，鈴木 陽香，笹井 建典，増崎 貴，林 浩 己，村瀬 尊則，中川 翔，柳原 悠人，豊田 浩孝
第70回応用物理学会春季講演会 2023.3.18 応用物理学会
発光イメージをもとにしたプラズマ構造の評価
原田健汰, 久蔵学, 大館暁, 豊田浩孝
第70回応用物理学会春季講演会 2023.3.16 応用物理学会
二周波容量結合型Ar/C4F8/O2プラズマにおける電力変調方式がイオン組成に与える影響
加藤閣人，関悠斗，久保井宗一，鈴木陽香, 豊田浩孝
第70回応用物理学会春季講演会 2023.3.17 応用物理学会
高速ガス流を用いた減圧形成によるマイクロ波放電の易化
小川泰那，岩田悠輝，鈴木陽香，豊田浩孝
第70回応用物理学会春季講演会 2023.3.15 応用物理学会
大気圧プラズマによるラジカル生成に及ぼす酸素ガス混合の効果
松浦寛人、トラントラングエン、岡本陽太、胡敏、仲野匠、岩田悠輝、鈴木陽香、豊田浩孝
第70回応用物理学会春季講演会 2023.3.15 応用物理学会
C2F4の電子物性とPTFEの生成機構
林俊雄、石川健治、関根誠、堀勝、兒玉直人，豊田浩孝
第70回応用物理学会春季講演会 2023.3.17 応用物理学会
Time dependent nanoparticle density measurement in a liquid-flow plasma process International conference
Kengo Yunoki, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda
ISPlasma2023/IC-PLANTS2023 2023.3.6
Microwave plasma production under air-flow-induced reduced pressure International conference
Taina Ogawa, Yuki Iwata, Haruka Suzuki and Hirotaka Toyoda
ISPlasma2023/IC-PLANTS2023 2023.3.6
Time Variation of Ion Composition in Dual-frequency Capacitively-Coupled Ar/C4F8/O2 Pulsed Plasma International conference
Haruhito Kato, Yuto Seki, Shuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda
ISPlasma2023/IC-PLANTS2023 2023.3.6
Power absorption of high negative pulse power to an electron cyclotron plasma International conference
Ikumi Hamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
ISPlasma2023/IC-PLANTS2023 2023.3.6
Development of a tomography calculation code for three-dimensional emission profile reconstruction International conference
Kenta Harada, Manabu Kyuzo, Satoshi Ohdachi, Hirotaka Toyoda
ISPlasma2023/IC-PLANTS2023 2023.3.6
Atomic composition of droplet ejected from liquidized Sn-Bi-Li-Er alloy under hydrogen plasma exposure International conference
Kota Tamura, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Yukinori Hamaji, Hirotaka Toyoda
ISPlasma2023/IC-PLANTS2023 2023.3.6
Hydrogen bubble formation on liquidized Sn-Bi-Li-Er Alloy under H2 Plasma Exposure International conference
Hirotaka Toyoda
US-Japan and International Workshop on Power and Particle Control in DEMO Fusion Reactor by Liquid Metal Plasma-Facing Components 2023.3.1
未来社会を担うクリーンエネルギー生成研究の最先端 Invited
豊田浩孝
グリーンDXプラズマコンソーシアム第4回講習会 2023.2.24 名古屋大学低温プラズマ科学研究センター
Sn-Bi-Li-Er液体合金への水素プラズマ照射における気泡中への水素吸蔵量定量評価
豊田浩孝
2023.2.17
パルス変調Ar/C4F8/O2二周波容量結合型プラズマにおけるイオン組成時間変化のメカニズム Invited
久保井宗一，加藤閣人，関悠斗， 鈴木陽香, 豊田浩孝
第242回シリコンテクノロジー分科会研究集会 2023.2.17 応用物理学会シリコンテクノロジー分科会
Quantitative Evaluation of Hydrogen Accumulation into Bubble Occurred in Liquidized Sn-Bi-Li-Er under H2 Plasma Exposure International conference
Kota Tamura
The 7th INTERNATIONAL SYMPOSIUM ON LIQUID METALS APPLICATIONS FOR FUSION
Imaging measurement of angular distribution of high-speed particles from a dual-frequency capacitively-coupled plasma incident on an RF electrode International conference
K. Ichikawa, H. Suzuki, D. Iino, H. Fukumizu, K. Kurihara and H. Toyoda
43rd International Symposium on Dry Process 2022.11.24 Japan Society of Applied Physics
Time-resolved measurement of Ionic composition change in Pulse-modulated Ar/C4F8/O2 DF-CCP International conference
Shuichi Kuboi, Haruhito Kato, Yuto Seki, Haruka Suzuki, Hirotaka Toyoda
43rd International Symposium on Dry Process 2022.11.24 Japan Society of Applied Physics
マイクロ波プラズマ技術による大気圧プラズマ生成と液体処理 Invited
豊田浩孝
第16回日本電磁波エネルギー応用学会 2022.10.14 日本電磁波エネルギー応用学会
Microwave plasma source development and applications from low pressure to atmospheric pressure Invited International conference
2022.10.13 Association of Asia Pacific Physical Societies, Division of Plasma Physics
Continuous liquid treatment by high-density microwave plasma in flowing liquid Invited International conference
Haruka Suzuki, Hirotaka Toyoda
11th International Conference on Reactive Plasmas/75th Annual Gaseous Electronics Conference 2022.10.6 Japan Society of Applied Physics
二周波容量結合型Ar/C4F8/O2プラズマのパルス運転がイオン組成に及ぼす影響
関 悠斗、加藤 閣人、久保井 宗一，鈴木 陽香, 豊田浩孝
2022年第83回応用物理学会秋季学術講演会 2022.9.22 応用物理学会
二周波重畳容量結合型プラズマからRF電極へ入射する高速粒子入射角度分布のイメージング計測 Invited
市川 景太，鈴木 陽香, 飯野大輝， 福水裕之，栗原一彰，豊田浩孝
2022年第83回応用物理学会秋季学術講演会 2022.9.22 応用物理学会
化学プローブを用いた長尺大気圧プラズマ生成活性ラジカルの可視化
松浦寛人、トラントラングエン、胡敏、仲野匠、岩田悠揮、鈴木陽香、豊田浩孝
2022年第83回応用物理学会秋季学術講演会 2022.9.20 応用物理学会
Angular distribution of high-energy species on RF-biased electrode of a capacitively-coupled plasma Invited International conference
Hirotaka Toyoda
cLPS Global Plasma Forum 2022.9.8 Center for Low-temperature Plasma Sciences
二周波容量結合型Ar/C4F8/O2パルスプラズマ中のイオン時分解計測
加藤 閣人, 関 悠斗，久保井 宗一, 鈴木 陽香, 豊田 浩孝
令和４年度電気・電子情報関係学会東海支部連合講演会 2022.8.29
Experimental Study on boron distribution and transport at plasma-facing components during impurity powder dropping International coauthorship International conference
T. Kawate, N. Ashikawa, M. Goto, T. Oishi, Y. Kawamoto, H. Toyoda, M. Shoji, G. Kawamura, S. Masuzaki, F. Nespoli, E.P. Gilson, R. Lunsford, C. Suzuki, A. Nagy, D. Gates
15th Asia Pacific Physics Conference Association of Asia Pacific Physical Societies
二周波重畳容量結合型プラズマから電極へ入射する高速粒子のイメージング法を用いた角度分布計測
市川景太, 鈴木陽香, 豊田浩孝
第69回応用物理学会春期学術講演会 2022.3.25
水シールド環境下でのマイクロ波励起水蒸気プラズマの生成と応用 Invited
鈴木陽香、豊田浩孝
第69回応用物理学会春期学術講演会 2022.3.23
Time-resolved measurements of ions in a dual-frequency capacitively-coupled Ar/C4F8/O2 pulsed plasma by mass spectrometry
Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, Hirotaka Toyoda
2022.3.25
Increase in plasma density by applying negative pulse bias voltage on a substrate stage in an electron cyclotron resonance plasma
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai2, Haruka Suzuki, and Hirotaka Toyoda
2022.3.22
Surface analysis of polyimide film treated by Ar/O2 atmospheric-pressure microwave plasma
Y. Iwata, T. Ogasawara, H. Suzuki, H. Toyoda
2022.3.26
高周波容量結合型プラズマにおける高アスペクト比キャピラリーホール底部のチャージアップ現象 Invited
豊田 浩孝
応用物理学会シリコンテクノロジー分科会第234回研究集会 2022.3.15
Bubbling Phenomenon on Liquidized Sn-Bi-Li-Er Alloy Surface under H-Plasma Exposure International conference
Kota Tamura, Hirotaka Toyoda
The 2nd US-Japan Workshop on Power and Particle Control in a Steady State Magnetic Fusion DEMO Reactor by Liquid Metal PFCs 2022.3.11
Angular distribution of high-energy Ar ion and neutral in a 13.56 MHz capacitively-coupled plasma International conference
Keita Ichikawa, Haruka suzuki, Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 09aC05O 2022.3.9
RF Voltage Division of in RF-biased High-density Plasma with Floating Liner International conference
Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki, Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 07P-14 2022.3.7
Radical measurements of Ar/C4F8 dual frequency capacitively-coupled plasma International conference
Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 08P-14 2022.3.8
Bubbling Phenomenon of Sn-Bi-Li-Er Alloy under H2 Plasma Exposure International conference
Kota Tamura, H. Suzuki, J. Miyazawa, S. Masuzaki, M. Tokitani, H. Toyoda
ISPlasma2022/IC-PLANTS2022 08P-21 2022.3.8
O Radical Measurement of Ar/O2 Microwave Plasma in Atmospheric Pressure International conference
Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki and Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 07pC09O 2022.3.7
Plasma density increase of electron cyclotron resonance plasma by high voltage pulse power application International conference
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 07pC08O 2022.3.7
Influence of the magnetic field configuration on the conductive carbon film deposition in an ECR Ar/C6H6 plasma with high voltage bias
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda
Bubbling phenomenon of melted tin-bismuth-lithium-erbium alloy during hydrogen plasma exposure
Kota Tamura, H. Suzuki, J. Miyazawa, S. Masuzaki, M. Tokitani, H. Toyoda
2022.1.25
Imaging measurement of angular distribution of high-energy particles incident on an electrode in a capacitively-coupled plasma
Keita Ichikawa, Manh Hung Chu, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, and Hirotaka
2022.1.25
Ionic and Neutral radical measurement of Ar/C4F8/O2 very high frequency capacitively-coupled plasma
Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda
2022.1.24
液体スズ合金の水素プラズマ照射における発泡現象
田村晃汰、豊田浩孝
「ダイバータの学理と応用」研究会 2022.1.21
大気圧長尺マイクロ波プラズマの連続・離散構造変化
豊田浩孝、鈴木陽香
「原子分子過程研究の最先端と先進的プラズマ分光計測」 「原子分子データ応用フォーラムセミナー」合同研究会 2021.12.24
High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device International conference
Kazuya Yamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Materials Research Meeting2021(MRM2021) 2021.12.14
Conductive carbon film deposition by microwave plasma with high voltage biasing International conference
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Materials Research Meeting2021(MRM2021) 2021.12.16
Spatial distribution measurement of atomic oxygen from atmospheric-pressure microwave line plasma by atomic absorption spectroscopy International conference
Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori, Hirotaka Toyoda
The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12) 2021.12.10
Influence of metal exposure on the plasma potential in RF-biased high-density plasma with floating liner International conference
Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki and Hirotaka Toyoda
The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12) 2021.12.9
Performance evaluation of pulsed-microwave atmospheric-pressure Ar/O₂ line plasma source
Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori, Hirotaka Toyoda
2021.11.22
Measurement of sputtered atoms from Sn and Sn alloy exposed to hydrogen plasma
Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Hirotaka Toyoda
2021.11.22
Melting of Ag nanoparticles by using a high-density surface-wave plasma
Kazuya Hikita, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
2021.11.22
Influence of small grounded surface on plasma property in an inductively-coupled plasma with floating liner International conference
Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, and Hirotaka Toyoda
DPS2021 ONLINE SYMPOSIUM 42nd International Symposium on DryProcess
Investigation of Ar/O2 atmospheric-pressure microwave line plasma and its application to Polyimide film ashing International conference
H. Suzuki, T. Ogasawara1, Y. Iwata and H. Toyoda
DPS2021 ONLINE SYMPOSIUM 42nd International Symposium on DryProcess
High Speed sp2-rich Carbon Film Deposition with Surface-wave Microwave Plasma International conference
H. Bae, H. Suzuki, K. Sasai and H. Toyoda
DPS2021 ONLINE SYMPOSIUM 42nd International Symposium on DryProcess
Conductive carbon deposition by surface wave plasma with high voltage pulse biasing International conference
Ikumi Hamaguchi, Hansin Bae, Haruka Suzuki,Kensuke Sasai and Hirotaka Toyoda
Workshop Japan-RUB 2021Bridging the Pandemic: Reigniting Cooperation on Plasma Research(Germany, Online) 2021.11.25
Microwave application to liquid process in reduced pressure environment Invited International conference
Hirotaka Toyoda, Kazuya Yamaguchi, Kengo Yunoki, Haruka Suzuki, Kensuke Sasai
Workshop Japan-RUB 2021,Bridging the Pandemic: Reigniting Cooperation on Plasma Research 2021.10.29
Oxygen radical measurement in Ar/O2 atmospheric pressure microwave line plasma International conference
Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki and Hirotaka Toyoda
Workshop Japan-RUB 2021,Bridging the Pandemic: Reigniting Cooperation on Plasma Research 2021.11.25
Conductive carbon deposition by surface wave plasma with high voltage pulse biasing International conference
Ikumi Hamaguchi, Hansin Bae, Haruka Suzuki,Kensuke Sasai and Hirotaka Toyoda
Workshop Japan-RUB 2021,Bridging the Pandemic: Reigniting Cooperation on Plasma Research 2021.11.25
Evaluation of charge density at hole bottom of capillary plates in a pulsed dual-frequency capacitively coupled plasma International conference
Haruka Suzuki,Makoto Moriyama,Naoya Nakahara,Hirotaka Toyoda
74th Annual Gaseous Electronics Conference 2021.10.7
Fast and massive synthesis of silver nanoparticle by a liquid-flow plasma source using AgNO3 solution* International conference
Haruka Suzuki,Kazuya Yamaguchi,Kensuke Sasai,Hirotaka Toyoda
74th Annual Gaseous Electronics Conference 2021.10.5
Highly conductive carbon film deposition by DC and microwave power superposition International conference
Hansin Bae,Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
74th Annual Gaseous Electronics Conference 2021.10.5
Time-resolved Measurement of Charge Density at the Bottom of High-aspect-ratio Holes in a Pulsed Capacitively Coupled Plasma Invited International conference
Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, and Hirotaka Toyoda
5th Asia-Pacific Conference on Plasma Physics, 26 Sept-1Oct, 2021, Remote e-conference(AAPPS-DPP2021) 2021.9.28
Large A rea Ashing Treatment of Polyimide Film by Atmospheric pressure Pulsed Microwave Line Plasma with Ar/O 2 International conference
T.Ogasawara, Y.Iwata, H.Suzuki and H.Toyoda
5th Asia-Pacific Conference on Plasma Physics, 26 Sept-1Oct, 2021, Remote e-conference(AAPPS-DPP2021)
流動液体プラズマ処理装置を用いたAgナノ粒子の長時間安定合成
〇山口 和也1、鈴木 陽香1、笹井 建典1、豊田 浩孝1,2 (1.名大工、2.核融合研)
第82回応用物理学会秋季学術講演会、22a-P08-2 2021.9.22 応用物理学会
High conductive carbon film deposition by electron cyclotron resonance (ECR) plasma
〇Hansin BAE1、Hamaguchi Ikumi1、Kensuke Sasai2、Haruka Suzuki1,2、Hirotaka Toyoda1,2,3 (1.Nagoya Univ.、2.Nagoya Univ. cLPS、3.NIFS)
2021.9.12
イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測
○市川景太，鈴木陽香（名大），豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-7 2021.9.7
二周波容量結合型フルオロカーボンプラズマ中のラジカル計測
○関悠斗，久保井宗一，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-6 2021.9.7
表面波プラズマを用いた高導電性炭素膜の高速堆積
○濱口育未，BaeHansin，笹井建典，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-5 2021.9.7
大気圧長尺マイクロ波ラインプラズマによる広幅高速アッシング処理
○岩田悠揮，小笠原知裕，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-4 2021.9.7
BH and BD molecular spectroscopy during the Impurity Powder Dropper experiments International conference
T. KAWATE, N. Ashikawa, M. Goto, T. Oishi, Y. Kawamoto, and H. Toyoda
15th International Workshop on Hydrogen Isotopes in Fusion Reactor Materials（HWS2020）
ＬＨＤにおけるボロンを使った水素リサイクリング抑制実験
芦川直子（核融合研、総研大）、川手朋子（核融合研、総研大）、豊田浩孝（名古屋大学）、Zhen SUN（ASIPP、PPPL）
日本原子力学会 春の年会（2021）オンライン（早稲田大学） 2021.3.17
High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-wave Plasma
2021.3.18
International Expansion of Division of Plasma Electronics -Collaboration with GEC- Invited
2021.3.17
Long-term Operation of Liquid Flow Plasma Processing Device and Its Application to Ag Nanoparticle Production
2021.3.19
Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O2 Plasma
2021.3.19
Plasma Fluctuation b y Inse rtion of a Small Grou nded Electrode into I nductively Coupled Plasma with I nsulated L iner
2021.3.19
Wide-area and High-speed Deposition of Graphitic Film by Microwave Surface Wave Plasma with High Power Pulse International conference
Hansin Bae, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 09aB05O 2021.3.9
Effect of grounded electrode on plasma propety in ICP with floating liner International conference
Manabu Kyuzo*, Yukinori Chiba, Haruka Suzuki and Hirotaka Toyoda
2021.3.8
Deuterium Depth Profile of Plasma-Exposed Solid/Liquid Tin International conference
Kota Tamura,Haruka Suzuki, Suguru Masuzaki,Masayuki Tokitani, Junichi Miyazawa, Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 08P-38 2021.3.8
Time-dependent Measurement of Charge Density at Bottom of High-aspect Hole in a Capacitively-coupled Plasma International conference
Makoto Moriyama, Naoya Nakahara, Keita Ichikawa,Manh Hung Chu,Haruka Suzuki* and Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 08pB14O 2021.3.8
Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave Line Plasma with Ar/O2 International conference
2Haruka Suzuki*, Tomohiro Ogasawara, Yuki Iwata, and Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 08pB07O 2021.3.8
Wide Area and High Rate Deposition of Graphitic Carbon by Surface Wave Plasma
Temporal Variation of Accumulated Charge at the Bottom of High Aspect Hole in Pulse-modulated Capacitively-Coupled Plasma
グロー放電水素プラズマを用いたスズ-水素プラズマ相互作用の基礎研究
田村 晃汰
ダイバータの学理と応用 NIFS
A Deuterium Distribution Measurement in Deuterium Plasma Exposed-Tin
Kota Tamura1), Haruka Suzuki1), Suguru Masuzaki2), Masayuki Tokitani2), Junichi Miyazawa2), Hirotaka Toyoda1,2) 1)Nagoya Univ., 2) NIFS
High speed and wide area conductive carbon film deposition by surface-wave plasma.
H.Bae 1), K.Hikita 1), H.Suzuki 1) 2), K.Sasai 2), H.Toyoda 1) 2) 3) (1) Department of electronics, Nagoya univ., (2) Center for Low-temperature Plasma Sciences(cLPS), Nagoya univ., (3) National Institute for Fusion Science(NIFS)
Surface treatment of resin material by pulsed microwave atmospheric pressure Ar/O2 plasma
OGASAWARA Tomohiro1), SUZUKI Haruka1), TOYODA Hirotaka1,2) (1)Nagoya Univ.,2)NIFS)
Evaluation of charge density at the bottom of the capillary plate in a pulse modulated dual frequency CCP International conference
Application of atmospheric pressure microwave plasma to large area and high-speed surface treatment
2020.12.3
Quantitative Evaluation of Hydrogen Retention of Solid and Liquid Tin by Thermal Desorption Spectroscopy International conference
Kota TAMURA1, Haruka SUZUKI1, Junichi MIYAZAWA2, Suguru MASUZAKI2, Hirotaka TOYODA1;2 1. Nagoya University
The 29th International Toki Conference on Plasma and Fusion Research
Evaluation of absolute charge density at the bottom of hole pattern using high aspect ratio capillary plate International conference
MAKOTO MORIYAMA, NAOYA NAKAHARA, HARUKA SUZUKI,HIROTAKA TOYODA
GEC20 Meeting of The American Physical Society、RW3.4
Film Surface Treatment with O2/Ar Line Plasma under Atmospheric Pressure International conference
Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Manh Hung Chu, Hirotaka Toyoda
GEC20 Meeting of The American Physical Society、LT3.00007 2020.10.6
パルス変調容量結合型プラズマにおけるキャピラリープレート下部の電荷密度変化
中原 尚哉 ,森山 誠 ,鈴木 陽香 ,豊田 浩孝
第81回応用物理学会秋季学術講演会
Time-resolved measurement of charge density at the bottom of capillary plate in a pulse modulated CCP
Ag Particle Behavior in an Inductively Coupled Plasma
Surface Hydrophilic Treatment by Microwave Line Plasma at Atmospheric Pressure
Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate
(M2) Manh Hung Chu1, Haruka Suzuki1, Hirotaka Toyoda1
Suppression of redissolution of p lasma synthesis silver nanoparticles using alkaline agent
Absolute charge density evaluation of a capillary plate in a pulse modulated CCP
Estimation of voltage at the top of capillary plate in a CCP
Temperature measurement of slot-plate in an atmospheric-pressure microwave linear plasma International conference
ISPlasma/IC-PLANTS2020
Electromagnetic Analysis in a Long-scale Slot Plasma Excited by Microwave Travelling Wave International conference
Hirotsugu Koma, Haruka Suzuki and Hirotaka Toyoda
ISPlasma/IC-PLANTS2020
Synthesis of silver nanoparticles by in line liquid process using microwave plasma source International conference
Jyo Suzuki, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda
ISPlasma/IC-PLANTS2020
Quantitative Evaluation of Hydrogen Retention in Metal Tin using Thermal Desorption Spectroscopy International conference
ISPlasma/IC-PLANTS2020
Spatial characteristics analysis of atmospheric pressure microwave plasma with FEM simulation International conference
Yoshiki Baba*, Makoto Moriyama, Haruka Suzuki and Hirotaka Toyoda
ISPlasma/IC-PLANTS2020
容量結合プラズマ中に設置されたエッチングホール模擬用キャピラリープレートの電位構造解析
森⼭ 誠、中原 尚哉、三⽮ 晶洋、鈴⽊ 陽⾹、豊⽥ 浩孝
プラズマ・核融合学会 第36回年会
核融合炉ダイバー応用へ向けたスズの水素吸蔵量定量評価
田村晃汰，鈴木陽香，宮澤順一，豊田浩孝
プラズマ・核融合学会 第36回年会
potential structure of high-aspect-ratio capillary hole in a pulsed-VHF capactive coupled plasma International conference
M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda
2019 International Symposium on DryProcess
Microscopic observation of an atmospheric-pressure microwave plasma produced in a meter-scale slot with sub-millimeter gap International conference
HIROTAKA TOYODA, HIROTSUGU KOMA, YOSHIKI BABA, MANH HUNG CHU, HANSIN BAE, HARUKA SUZUKI
GEC19 Meeting of The American Physical Society
Space-resolved oxygen radical measurement of atmo- spheric pressure microwave line plasma using vacuum ul- traviolet absorption spectroscopy International conference
HANSIN BAE, HIROTSUGU KOMA, HARUKA SUZUKI, HIROTAKA TOYODA
GEC19 Meeting of The American Physical Society
Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma
Temporal Variation of Surface Potential on Insulated Film During DC Pulse Voltage Application to an Antenna of Surface-wave Plasma
Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma
Electromagnetic field distribution in a long-scale slot plasma using traveling waves
Potential structure analysis of a capillary plate in a dual frequency CCP
Space-resolved cross-sectional observation of slot-excited microwave O2/Ar plasma at atmospheric pressure
二周波重畳容量結合型プラズマにおける キャピラリープレート内の電位構造解析
中原 尚哉*, 森山 誠，三矢 晶洋，鈴木 陽香，豊田 浩孝 (名大工) 栗原 一彰，飯野 大輝，福水 裕之，林 久貴，鈴木 啓之 (東芝メモリ)
令和元年度 電気・電子・情報関係学会東海支部連合大会
大気圧マイクロ波プラズマにおけるギャップ内ガス温度の空間分解計測
馬場 賀己＊，鈴木 陽香，豊田 浩孝
令和元年度 電気・電子・情報関係学会東海支部連合大会
"二周波重畳容量結合型プラズマ装置における ファラデーカップを用いたイオンエネルギー分布の測定"
三矢 晶洋*，森山 誠，中原 尚哉、鈴木 陽香、豊田 浩孝
令和元年度 電気・電子・情報関係学会東海支部連合大会
昇温脱離法を用いた固体スズ中の水素吸蔵量評価
田村晃汰，鈴木陽香，宮澤順一，豊田浩孝
令和元年度 電気・電子・情報関係学会東海支部連合大会
Consideration of Surface Potential on Insulated Film during DC Pulse Voltage Application to an Antenna of Surface-wave Plasma
High Speed Synthesis of Nanoparticles in Liquid Environment by In-Line Type Plasma Device
Shaofei Yang, Jyo Suzuki, Haruka Suzuki, Hirotaka Toyoda
High Speed Synthesis of Nanoparticles in Liquid Environment by In-Line Type Plasma Device
Shaofei Yang, Jyo Suzuki, Haruka Suzuki, Hirotaka Toyoda
Oxygen Radical Flux Measurement of Atmospheric Pressure Microwave Line Plasma International conference
H. Bae, Y. Koike, H. Koma, H. Suzuki and H. Toyoda
AEPSE2019
Potential Control of Surface Wave Excited Plasma by Pulsed DC Voltage Applied to Plasma-Immersed Waveguide International conference
S. Fukuda, K. Udagawa, H. Suzuki, Y. Tauchi, H. Toyoda
XXXIV ICPIG & ICRP-10
Measurement of ion energy in dual-frequency capacitive coupled plasma International conference
M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda
XXXIV ICPIG & ICRP-10
Development of Microwave Remote Plasma Source for New Surface Functionalization International conference
T. Okimoto, Yoshiyuki Isomura, Y. Ikari, Y. Tauchi, K. Nishiyama, Kobe Steel, Ltd., Japan H. Toyoda, H. Suzuki, Nagoya University, Japan
International Conference on Metallurgical Coatings and Thin Films(ICMCTF 2019)
Large-area surface treatment using microwave plasma excited in meter-length slot with sub-millimeter gap International conference
Haruka Suzuki, Hirotsugu Koma, Manh Hung Chu, Hansin Bae, Yoshiki Baba, and Hirotaka Toyoda
The 10th of International Workshop on Microplasmas (IWM-10)
Time-resolved microscopic measurement of slot excited atmospheric pressure microwave plasma International conference
Yoshiki Baba, Haruka Suzuki, and Hirotaka Toyoda
The 10th of International Workshop on Microplasmas (IWM-10)
革新的プラズマ源開発とエネルギー科学応用 Invited International conference
豊田浩孝
第82回マテリアルズテーラリング研究会
長尺大気圧マイクロ波プラズマ生成と表面処理の応用 Invited
豊田浩孝
表面技術協会 第139回講演大会
Optimized waveguide structure for atmospheric pressure microwave plasma International conference
Manh Hung Chu,Haruka Suzuki ,Hirotaka Toyoda
ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science)
Time-resolved Measurement of Cross-Sectional Structure of a Narrow Gap Plasma Produced by an Atmospheric Pressure Microwave Discharge International conference
Yoshiki Baba, Haruka Suzuki and Hirotaka Toyoda
ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science)
Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Slot type Microwave Antenna International conference
Sho Fukuda, Kou Udagawa, Haruka Suzuki, Yuki Yauchi, Hirotaka Toyoda
ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science)
Microscopic Measurement of Long Microwave Plasma at Atmospheric Pressure International conference
Hirotsugu Koma, Yosuke Koike, Haruka Suzuki,Hirotaka Toyoda
ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science)
Oxygen radical measurement of atmospheric pressure microwave plasma employing vacuum ultraviolet absorption spectroscopy International conference
Hansin Bae, Koike Yosuke, Hirotsugu Koma, Haruka Suzuki Hirotaka Toyoda
ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science)
Hydrogen Recycling Properties of Tin wall in DC Glow Hydrogen Plasma International conference
Kota Tamura*, Haruka Suzuki, Hirotaka Toyoda and Junichi Miyazawa
ISPlasma/IC-PLANTS2019(11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science)
大気圧長尺マイクロ波プラズマによる大面積高速表面処理
小間 浩嗣 ，杉山 敦士 ，鈴木 陽香，本田 剛 ，豊田 浩
第66回応用物理学会春季学術講演会
マイクロ波アンテナへのDCパルス電圧印加による絶縁表面へのイオン衝撃
福田 奨,宇田川 洸, 鈴木 陽香, 田内 裕基, 豊田 浩孝
第66回応用物理学会春季学術講演会
High Speed Synthesis of Nanoparticles by Liquid Flow-type Microwave Plasma
Shaofei Yang, Shohei Fujimura, Masafumi Shiigai, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Oxygen Radical Measurement of Atmospheric Pressure Microwavw Line Plasma by Vacuum Ultraviolet Absorption Spectroscopy
二周波重畳容量結合プラズマ基本特性の実験的評価 の実験的評価 の実験的評価
三矢 晶洋， 森山 誠，鈴木 ，鈴木 陽香，豊田 浩孝
第66回応用物理学会春季学術講演会
シミュレーションによる二周波重畳容量結合プラズマの基本特性解析
森山 誠，三矢 晶洋，中原 尚哉，鈴木 陽香，豊田 浩孝
第66回応用物理学会春季学術講演会
スロット型大気圧マイクロ波プラズマの時空間分解計測
馬場 賀己，鈴木陽香，豊田 浩孝
第66回応用物理学会春季学術講演会
Time-resolved microscopic measurement of cross-sectional structure of slot excited atmospheric pressure microwave plasma
A Systematic Analysis of Modified Waveguide Structure for Atmospheric-Pressure Microwave Plasma Source via Simulations
メートル級長尺スロット型プラズマ源における 大気圧マイクロ波プラズマの顕微計測
小間 浩嗣、小池 洋右、鈴木 陽香、豊田 浩孝、
第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
Water Vapor Plasma Treatment Process using Slot-Excited Microwave Plasma Invited
28th Annual Meeting of MRS-Japan 2018
Organic-matter removal treatment using atmospheric pressure microwave O2/CF4
新規大気圧マイクロ波プラズマ源の開発と応用 Invited
鈴木陽香、豊田浩孝
高機能トライボ表面プロセス部会 第12回例会
直流放電プラズマを用いた金属スズの水素リサイクリング評価
田村晃汰，鈴木陽香，豊田浩孝，宮澤順一
プラズマ核融合学会 第35回年会
二周波重畳容量結合プラズマの基本特性評価
森山誠，三矢晶洋，中原尚哉，鈴木陽香，豊田浩孝
プラズマ核融合学会 第35回年会
大気圧マイクロ波ラインプラズマにおける酸素原子の紫外吸収分光計測
BAE Hansin，小池洋右，小間浩嗣，鈴木陽香，豊田浩孝
プラズマ核融合学会 第35回年会
大気圧下でのメートル級マイクロ波プラズマの生成と応用 Invited
鈴木陽香、豊田浩孝
プラズマ核融合学会 第35回年会
Influence of magnetic field on high-energy negative ion behavior in magnetron plasma with oxide targets Invited International conference
Hirotaka Toyoda, Ko Udagawa, Akihiro Mitsuya, Hansin Bae, Haruka Suzuki
2nd Asia-Pacific Conference on Plasma Physics
High speed photoresist removal using slot-excited atmospheric-pressure microwave O2/CF4 plasma International conference
Shota Ishikaw1, Haruka Suzuki, Tsuyoshi Honda and Hirotaka Toyoda
The 40th International Symposium on Dry Process(2018)
Ring-shaped microwave plasma production in liquid flow environment for nanoparticle synthesis Invited International conference
S. Fujimura, S. Yang, K. Sasai, H. Suzuki and H. Toyoda
The 40th International Symposium on Dry Process(2018)
Observation of cross sectional plasma structure in a gap of an atmospheric pressure microwave discharge International conference
Hirotaka Toyoda Yoshiki Baba Haruka Suzuki
71st Annual Gaseous Electronics Conference
Scaling of Microwave Absorption in Atmospheric Pressure Microwave Line Plasma International conference
Ivan Ganachev,Haruka Suzuki, and Hirotaka Toyoda
The Eighteenth Biennial IEEE Conference on Electromagnetic Field Computation (CEFC2018)
Diagnostics of energetic particles in magnetron plasma using oxide target Invited International conference
Ivan Ganachev, Haruka Suzuki, and Hirotaka Toyoda
International Symposium on Sputtering & Plasma Processes Pre session (ISSP2018)
流動液体マイクロ波プラズマによるナノ粒子生成
藤村 昇平、楊 少菲、鈴木 陽香、豊田 浩孝
応用物理学会秋季学術講演会
大気圧マイクロ波励起O2/CF4プラズマによるフォトレジスト除去処理
(M2)石川 翔太1、鈴木 陽香1、本田 剛2、豊田 浩孝1 (1.名大工、2.ニッシン)
応用物理学会秋季学術講演会
メートル級長尺大気圧マイクロ波プラズマの顕微計測 Invited
鈴木 陽香、小池 洋右、小間 浩嗣、馬場 賀己、豊田 浩孝
応用物理学会秋季学術講演会
電磁界シミュレーションを用いた大気圧長尺マイクロ波プラズマにおける定在波抑制
(M2)小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝
応用物理学会秋季学術講演会
Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Microwave Antenna
(M2)Kou Udagawa1,Sho Fukuda1,Haruka Suzuki1,Yuki Tauchi2,Hirotaka Toyoda1(1.Nagoya Univ.,2.Kobe Steel Ltd.)
Meter-scale atmospheric pressure microwave line plasma and its applications. Invited International conference
H. Toyoda
Xth INTERNATIONAL WORKSHOP on MICROWAVE DISCHARGES: Fundamentals and Applications
表面波プラズマアンテナへのDC パルス電圧印加によるプラズマ電位制御
福田奨、宇田川洸、鈴木陽香、豊田浩孝（名古屋大学）、田内裕基（神戸製鋼所）
平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
酸化物ターゲットを用いたマグネトロンスパッタにおける酸素負イオンフラックスの空間分布の数値解析
三矢 晶洋、宇田川 洸、鈴木 陽香、豊田 浩孝
平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
大気圧メートル級長尺マイクロ波ラインプラズマの顕微計測
小間 浩嗣、小池 洋右、鈴木 陽香、豊田 浩孝
平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
スロット励起大気圧マイクロ波プラズマにおけるスロット断面構造の顕微観測
馬場賀己, 鈴木陽香,豊田浩孝
平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
Surface Roughness Control of ITO Films by VHF Superposed DC Magnetron Plasma Invited International conference
Hirotaka Toyoda, Haruka Suzuki
THERMEC2018
Long-scale atmospheric-pressure microwave plasma Invited International conference
H. Toyoda, H. Suzuki Y. Koike, H. Koma, Y. Baba, J.H. Qiu, M.H. Chu, A. Sugiyama
JAPAN-RUB Workshop on Plasma Science
Meter-scale atmospheric-pressure microwave plasma for molecular gas processes Invited International conference
Hirotaka Toyoda
19th International Congress on Plasma Physics
大気圧長尺マイクロ波プラズマにおける電力吸収の空間分布
小池 洋右，田村 宥人，鈴木 陽香，豊田 浩孝
第65回応用物理学会春季学術講演会
同軸導波管の外部導体ギャップ間におけるマイクロ波プラズマ生成
藤村 昇平, 鈴木 陽香, 笹井 建典, 豊田 浩孝
第65回応用物理学会春季学術講演会
マグネトロンスパッタリングにおける負イオンの数値解析による評価
宇田川 洸，三矢 晶洋，鈴木 陽香，豊田 浩孝
第65回応用物理学会春季学術講演会
Water-vapor Atmospheric Pressure Microwave Plasma in an Air-Shielded Environment by Water Flow International conference
Haruka Suzuki, Hikaru Senba and Hirotaka Toyoda
ISPlasma2018 / IC-PLANTS2018
Space-Resolved Measurement of Microwave Power along Waveguide in Atmospheric Pressure Microwave Line Plasma International conference
Yosuke Koike, Haruka Suzuki, Yuto Tamura, Yoshiki Baba and Hirotaka Toyoda
ISPlasma2018 / IC-PLANTS2018
Oxygen Negative Ion Behavior in a VHF-superposed DC Magnetron Sputtering International conference
Kou Udagawa, Akihiro Mitsuya, Haruka Suzuki and Hirotaka Toyoda
ISPlasma2018 / IC-PLANTS2018
A coaxial-waveguide microwave plasma source for in-line treatment of large volume liquid International conference
Shohei Fujimura, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda
ISPlasma2018 / IC-PLANTS2018
Power Absorption Mechanism of Atmospheric-Pressure Microwave Line Plasma International conference
Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba and Hirotaka Toyoda
ISPlasma2018 / IC-PLANTS2018
質量分析を用いた粒子計測の基礎 — 計測原理から分析応用までー International conference
豊田 浩孝
第30回専門講習会「プロセスプラズマ診断の基礎」
Development of Microwave Plasma Sources and its Application to Materials Processing International conference
Hirotaka Toyoda
27th Annual Meeting of MRS-Japan 2017
大気圧マイクロ波プラズマCVDによるSiO2膜形成及び膜評価
石川 翔太、鈴木 陽香、豊田 浩孝
直流およびVHF重畳直流マグネトロンプラズマにおける高エネルギー酸素負イオンに起因する指向性熱フラックスの測定
宇田川 洸、鈴木 陽香、豊田 浩孝
電磁界シミュレーションを用いた大気圧マイクロ波ラインプラズマの均一性向上の検討
小池 洋右、田村 宥人、鈴木 陽香、豊田 浩孝
ギャップ型マイクロ波プラズマ源の改良による液体処理能力向上
藤村 昇平、堤 和紀、鈴木 陽香、豊田 浩孝
水流遮蔽水蒸気マイクロ波プラズマの生成とその応用
鈴木 陽香、仙波 輝、豊田 浩孝
Power Absorption Mechanism of Atmospheric Microwave Line Plasma International conference
H. Suzuki, Y. Koike, Y. Tamura, Y. Baba, and H. Toyoda
DPS2017
Power absorption of atmospheric-pressure microwave-line-plasma International conference
HIROTAKA TOYODA, HARUKA SUZUKI, YUTO TAMURA, YOSUKE KOIKE, YOSHIKI BABA
GEC2017
Production of long-scale atmospheric pressure microwave plasma Invited International conference
Hirotaka Toyoda
AAPPS-DPP2017(the 1st Asia-Pacific Conference on Plasma Physics)
Oxygen Negative Ion Flux Evaluation in DC and DC-VHF Magnetron Plasmas through Directional Heat Flux Measurement International conference
Hirotaka Toyoda, Kou Udagawa, Haruka Suzuki, Taku Suyama and Hansin Bae
AEPSE2017
VHF-DC重畳マグネトロンプラズマにおける高エネルギーO-イオンに由来する熱フラックスの評価
宇田川 洸，鈴木 陽香，豊田 浩孝
平成29年度電気・電子・情報関係学会東海支部連合大会
空間分解型吸収分光装置を用いたプラズマによる有機溶質分解過程の調査
藤村 昇平, 堤 和紀, 鈴木 陽香, 豊田 浩孝
平成29年度電気・電子・情報関係学会東海支部連合大会
スロット励起大気圧マイクロ波プラズマにおける消費電力シミュレーション
小池 洋右，田村 宥人，馬場 賀己，鈴木 陽香，豊田 浩孝
平成29年度電気・電子・情報関係学会東海支部連合大会
スロット励起大気圧マイクロ波プラズマCVDによるSiO2薄膜形成
石川 翔太，鈴木 陽香，豊田 浩孝
平成29年度電気・電子・情報関係学会東海支部連合大会
スロット励起大気圧マイクロ波プラズの電力消費に関する電磁界シミュレーョン
鈴木 陽香 ，小池 洋右 , 田村 宥人 , 馬場 賀己 , 豊田 浩孝
水流により遮蔽された空間での水蒸気マイクロ波プラズ生成
仙波 輝, 小池 洋右 , 鈴木 陽香 , 豊田 浩孝
大気圧マイクロ波ラインプラズマにおける電力吸収機構
田村 宥人， 小池 洋右 , 鈴木 陽香 , 豊田 浩孝
マイクロ波インライン液体処理における反応領域のその場計測
堤 和紀 ，藤村 昇平, 鈴木 陽香，豊田 浩孝
Meter -scale microwave plasma production with various discharge gases for large-area surface treatment under atmospheric pressure Invited International conference
H. Suzuki, Y. Tamura, Y. Inomata, and H. Toyoda
IUMRS-ICAM 2017(The 15th International Conference on Advanced Materials)
Improvement of SiO2 film properties synthesized by plasma-enhanced chemical vapor deposition using slot-type microwave plasma with O 2/TEOS Invited International conference
S. Ishikawa , M. Yamamoto, H. Suzuki, and H. Toyoda
IUMRS-ICAM 2017(The 15th International Conference on Advanced Materials)
Optical measurement of meter-scale microwave line plasma under atmospheric pressure International conference
H. Suzuki, Y. Tamura, Y. Inomata, and H. Toyoda
ICPIG 2017
Quantitative Evaluation of High-Energy Oxygen Negative Ion Flux in DC Magnetron Sputtering of Indium-Tin-Oxide International conference
H. Toyoda, H. Bae, T. Suyama, K. Setaka, H. Suzuki
ICPIG 2017
Microwave plasma production inside the micro-gap with metergap with meter -scale length Invited International conference
H. Suzuki and H. Toyoda
IWM 2017(The 9th International Workshop on Microplasmas)
Development of atmospheric pressure microwave plasma source for large-area surface treatment International conference
H. Suzuki and H. Toyoda
The 22th KJ workshop
マイクロ波励起メートル級大気圧プラズマの生成とその特性
鈴木陽香 ，田村宥人 ，猪俣弥雄起 ，関根誠 ，堀勝 ，豊田浩孝
第64回応用物理学会春季学術講演会
マイクロ波インライン液体処理における反応領域の空間分布計測
堤和紀，滝藤奨，藤村昇平, 鈴木陽香，豊田浩孝
第64回応用物理学会春季学術講演会
水流により遮蔽された空間での大気圧プラズマジェット生成
仙波 輝 , 小池 洋右 , 鈴木 陽香 , 豊田 浩孝
第64回応用物理学会春季学術講演会
マイクロ波励起長尺大気圧プラズマにおけるプラズマ維持機構の検討
田村 宥人 ，猪俣 弥雄起 , 鈴木 陽香 , 豊田 浩孝
第64回応用物理学会春季学術講演会
Measurement of directional heat flux component in VHF-magnetron sputtering International conference
Hansin Bae, Taku Suyama, Kenta Setaka, Haruka Suzuki and Hirotaka Toyoda
9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
Film quality improvement in slot-type microwave plasma CVD of SiO2 International conference
Masaki Yamamoto, Shota Ishikawa, Haruka Suzuki, and Hirotaka Toyoda
9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
Long-scale N2 line plasma production under atmospheric pressure International conference
Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hitoshi Itoh, Makoto Sekine, Masaru Hori, and Hirotaka Toyoda
9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
Shielding of plasma jets from ambient air by water flow certain International conference
Hikaru Senba, Yosuke Koike, Haruka Suzuki and Hirotaka Toyoda
9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
Introduction to Plasma Production - from Breakdown to Plasma Sustainment - Invited International conference
Hirotaka Toyoda
9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
スパッタの基礎とプラズマ解析
豊田 浩孝
第29回専門講習会「スパッタ技術の現状と展望」
ITOターゲットを用いたVHF重畳DCマグネトロンプラズマにおける熱フラックスの空間分布
Bae Hansin, 巣山 拓, 鈴木 陽香, 豊田 浩孝
第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム（合同会議）
改良導波管および連続発振マイクロ波電力によるメートル級長尺大気圧ラインプラズマの効率的生成
鈴木 陽香，田村 宥人，猪俣 弥雄起, 伊藤 仁，関根 誠，堀 勝，豊田 浩孝
第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム（合同会議）
長尺ラインプラズマ生成のための改良型導波管の電磁界シミュレーション
田村 宥人，鈴木 陽香，猪俣 弥雄起, 伊藤 仁，関根 誠，堀 勝，豊田 浩孝
第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム（合同会議）
インラインマイクロ波プラズマ処理の高流速化による有機物分解効率の向上
堤和紀，滝藤奨，藤村昇平, 伊藤美智子，高島成剛，鈴木陽香，豊田浩孝
第34回プラズマプロセシング研究会／第29回プラズマ材料科学シンポジウム（合同会議）
酸化物ターゲットを用いたスパッタリングにおける酸素負イオン挙動 Invited
豊田 浩孝
負イオン研究会2016
マグネトロンプラズマ中の高エネルギー負イオンフラックス評価
豊田浩孝,巣山拓, Bae Hansin, 鈴木陽香
プラズマ・核融合学第33回会年会
大気圧高密度マイクロ波プラズマの生成とその応用 Invited
豊田 浩孝
2016年真空・表面科学合同講演会
Plasma -enhanced chemical vapor deposition of SiO2 films by slot type microwave plasma with O 2/TEOS International conference
Haruka Suzuki, Masaki Yamamoto, and Hirotaka Toyoda
DPS2016
Evaluation of O- Ion Flux in a VHFVHF -DC Magnetron Plasma under ITO Sputtering Process International conference
Hirotaka Toyoda, Taku Suyama, Hansin Bae and Haruka Suzuki
DPS2016
High speed deposition of SiO2 lm by slot-type microwave CVD system International conference
HIROTAKA TOYODA, MASAKI YAMAMOTO, HARUKA SUZUKI
69th Annual Gaseous Electronics Conference
100% N2 atmospheric-pressure microwave-line-plasma production with a modi ed waveguide structure International conference
HARUKA SUZUKI, YUTO TAMURA, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HI- ROTAKA TOYODA
69th Annual Gaseous Electronics Conference
Development of microwave plasma sources and its applications Invited International conference
Hirotaka Toyoda
The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016)
Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path International conference
Haruka Suzuki, Sho Takitou, Hirotaka Toyoda
The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016)
ITO マグネトロンスパッタにおける酸素負イオンフラックス評価
巣山 拓, Bae Hansin, 瀬高 健太, 笹井 建典, 鈴木 陽香, 豊田 浩孝
第77回応用物理学会秋季学術講演会
O2/TEOS スロット型マイクロ波プラズマCVD によるSiO2 膜形成
山本 匡毅、鈴木 陽香、豊田 浩孝
第77回応用物理学会秋季学術講演会
インラインマイクロ波プラズマの流路狭小化による液体処理性能向上
滝藤 奨、伊藤 美智子 、高島 成剛、野村 記生、北川 富則、豊田 浩孝
第77回応用物理学会秋季学術講演会
改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成
鈴木陽香 ，田村宥人 ，伊藤仁 ，関根誠 ，堀勝 ，豊田浩孝
第77回応用物理学会秋季学術講演会
窒素ガスを用いたマイクロ波大気圧ラインプラズマの生成
田村 宥人，鈴木 陽香，伊藤 仁，関根 誠，堀 勝，豊田 浩孝
平成28年度電気・電子・情報関係学会東海支部連合大会
Evaluation of O- Ion Flux in VHF-DC Magnetron Sputtering
Hansin Bae, Taku Suyama, Kenta Setaka, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda
プラズマスパッタ ―スパッタの物理とマグネトロンプラズマ―
豊田 浩孝
第10回プラズマエレクトロニクスインキュベーションホール
High-speed -camera observation of plasma behavior in atmospheric-pressure microwave line plasma International conference
H. Suzuki, H. Ito, M. Sekine, M. Hori, H. Toyoda
7th International Workshop on Plasma Spectroscopy (IPS2016)
Two-Dimensional Atomic Absorption Spectroscopy of Plasma-Stimulated Zn Atom Desorption from ZnSO4 Solution International conference
H. Toyoda, T. Takaba, H. Suzuki
7th International Workshop on Plasma Spectroscopy (IPS2016)
VHF-DC重畳マグネトロンスパッタによる平坦性向上機構の検討
巣山 拓，福井 崇史, 瀬高 健太, 笹井建典, 豊田 浩孝
第63回応用物理学会春季学術講演会
マイクロ波プラズマ液体処理におけるエネルギー効率向上
滝藤 奨、伊藤 美智子 、高島 成剛、野村 記生、北川 富則、豊田 浩孝
第63回応用物理学会春季学術講演会
スロット内生成マイクロ波プラズマを用いた高速プラズマCVD
山本 匡毅、鈴木 陽香、豊田 浩孝
第63回応用物理学会春季学術講演会
Low Pressure Sustainment of Surface-Wave Microwave Plasma with Modified Microwave Coupler (MMC-SWP) International conference
KENSUKE SASAI, HARUKA SUZUKI AND HIROTAKA TOYODA
8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/9th International Conference on Plasma-Nano Technology & Science
マイクロ波プラズを用いた高圧無電極紫外ランプの試作とその長尺化の検討
西川 拓、豊田 浩孝
第3回光源物性とその応用研究会
大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性
鈴木陽香, 中野優, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
第32回プラズマ・核融合学会 年会
Experimental Verification of the Importance of Slot Position in Microwave Plasma Production with Slot Antenna Array International conference
S. Koga and H. Toyoda
DPS2015
Surface Roughness Control of DC Sputter Film Deposition by Superposition of VHF Power International conference
Takashi Fukui, Taku Suyama, Yushi Fukuoka, Kensuke Sasai, Hirotaka Toyoda
ICRP-9/GEC-68/SPP-33
Development of High-Throughput Liquid Treatment System Using Slot Antenna Excited Microwave Plasma International conference
SHO TAKITOU, MICHIKO ITO, SEIGOU TAKASHIMA, NORIO NOMURA, TOMINORI KITAGAWA, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process International conference
HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
Origin of Substrate Heating During Oxide Film Deposition by DC Magnetron Discharge and Superposition of VHF Power International conference
KENTA SETAKA, TAKASHI FUKUI, KENSUKE SASAI, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
Organic Decomposition Performance of In-line Liquid Treatment System Using Microwave Plasma International conference
MICHIKO ITO, SEIGO TAKASHIMA, NORIO NOMURA, TOMINORI NOMURA, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
Ultraviolet Light Source Using Electrodeless Microwave Discharge International conference
Taku Nishikawa, Hirotaka Toyoda
ICRP-9/GEC-68/SPP-33
Evaluation of Heat Flux to Film Surface in DC-VHF Superposed Magnetron Plasma International conference
K. Setaka, T. Fukui, T. Suyama, K. Sasai, and H. Toyoda
the 21th KJ workshop
ベンチュリ効果を用いたマイクロ波プラズマ液体処理装置の性能向上
滝藤 奨，伊藤 美智子, 高島 成剛, 野村 記生, 北川 富則, 豊田 浩孝
平成27年度電気・電子・情報関係学会東海支部連合大会
VHF-DC重畳マグネトロンスパッタにおける膜特性の評価
巣山 拓，福井 崇史，福岡 侑士，笹井 建典，豊田 浩孝
平成27年度電気・電子・情報関係学会東海支部連合大会
スロット内生成マイクロ波プラズマの基礎的検討
山本 匡毅，鈴木 陽香，豊田 浩孝
平成27年度電気・電子・情報関係学会東海支部連合大会
Desorption of Alkaline Metals from Electrolyte Liquid Contacting with a DC Pulsed-Plasma International conference
Haruka Suzuki, Takafumi Takaba, Noriharu Takada and Hirotaka Toyoda
AEPSE2015
Toward Real Uniform Sputtering – Spatial Uniformity of Thickness and Quality - Invited International conference
Hirotaka Toyoda
AEPSE2015
Optimization of In-line Plasma Treatment Performance International conference
Michiko Ito, Seigo Takashima, Norio Nomura, Tominori Kitagawa and Hirotaka Toyoda
AEPSE2015
吸収分光法によるVHF-DC 重畳マグネトロンプラズマのガス温度測定
第76回応用物理学会秋季学術講演会
Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
VHF -DC 重畳 マグネトロンスパッタにおける膜表面粗さの制御
第76回応用物理学会秋季学術講演会
マイクロ波プラズマを用いた無電極紫外ランプの温度分布
第76回応用物理学会秋季学術講演会
Influence of Solution Temperature on Processing Performance by In-line Plasma Treatment Device International conference
MICHIKO ITO, SEIGO TAKASHIMA, NORIO NOMURA, TOMINORI KITAGAWA AND
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science
Gas Temperature Measurement in Atmospheric-Pressure Microwave Line Plasmas International conference
HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science
吸収分光法によるArパルスマイクロ波プラズマのガス温度時分解測定
瀬高 健太、豊田 浩孝
第62回応用物理学会春季学術講演会
マイクロ波プラズマを用いた無電極紫外ランプの開発
西川 拓、豊田 浩孝
第62回応用物理学会春季学術講演会
VHF-DC 重畳マグネトロンスパッタにおける成膜速度評価
福井 崇史, 福岡 侑士, 高田 昇治, 笹井建典, 豊田 浩孝
第62回応用物理学会春季学術講演会
大気圧マイクロ波ラインプラズマにおけるプラズマ挙動シミュレーション
鈴木 陽香，中野 優，伊藤 仁，関根誠，堀 勝，豊田 浩孝
第62回応用物理学会春季学術講演会
パルスマイクロ波プラズを用いた イン ラ溶液処理装置 における処理性能の Duty 比依存性
伊藤美智子, 高島成剛, 野村記生, 北川富則, 豊田浩孝
第62回応用物理学会春季学術講演会
表面波プラズマ支援RFスパッタによるMgO薄膜の堆積 International conference
萩原敏哉, 豊田浩孝
狭ギャップスロットアンテナを用いた大気圧ラインプラズマ生成 International conference
中野優, 鈴木陽香, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
電解質溶液を電極としたパルスDCプラズマにおける液相由来金属原子の吸収分光計測 International conference
鷹羽貴史, 鈴木陽香, 高田昇治, 豊田浩孝
インラインのプラズマ処理装置により生成される水溶液中のOHラジカル評価 International conference
伊藤美智子，高島成剛，野村記生，北川富則，豊田浩孝
Plasma Science for Future Nanotechnology Invited International conference
Hirotaka Toyoda
The GRDC Symposium 2014
Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure International conference
Hirotaka Toyoda, Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine and Masaru Hori
67th Annual Gaseous Electronics Conference
Discharge Characteristic of VHF-DC Superimposed Magnetron Sputtering System International conference
Hirotaka Toyoda, Yushi Fukuoka, Takashi Fukui, Noriharu Takada, Kensuke Sasai
67th Annual Gaseous Electronics Conference
プラズマ技術とその産業応用 Invited
豊田 浩孝
プラズマ技術講演会
Plasma movement mechanism in pseudo-continuous meter-scale atmospheric-pressure line plasma
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
VHF-DC 重畳マグネトロンスパッタ装置の特性評価
福岡 侑士，福井 崇史, 高田 昇治, 笹井建典，豊田 浩孝
第75回応用物理学会秋季学術講演会
ポータブルUHF プラズマ装置の開発
古賀 翔太，豊田浩孝
平成26年度電気・電子・情報関係学会東海支部連合大会
吸収分光法によるAr プラズマの中性粒子温度測定
瀬高 健太，豊田 浩孝
平成26年度電気・電子・情報関係学会東海支部連合大会
VHF-DC 重畳マグネトロンプラズマ装置の特性評価
福井 崇史，福岡 侑士，高田 昇治, 笹井 建典, 豊田 浩孝
平成26年度電気・電子・情報関係学会東海支部連合大会
Novel sputtering system for uniform dielectric film deposition International conference
Hirotaka Toyoda, Toshiya Hagihara
International conference on microelectronics and plasma technology 2014
Development of compact UHF plasma source Invited International conference
Hirotaka Toyoda and Shota Koga
The International Symposium on Plasma-Nano Materials and Processes
パルスDC マグネトロンプラズマ中の酸素負イオン計測
福岡 侑士，小川 勇人, 高田 昇治, 豊田 浩孝
第61回応用物理学関係連合講演会
電解質溶液電極を用いたパルスDCプラズマにおける電解質由来金属原子の二次元吸収分光計測
鷹羽 貴史，鈴木 陽香，高田 昇治，豊田 浩孝
第61回応用物理学関係連合講演会
誘導結合型 誘導結合型 HBr プラズマにおける Br ラジカル表面損失確率の評価
藤井 良隆 ，飯野 大輝 ,豊田 浩孝
第61回応用物理学関係連合講演会
表面波プラズマ支援RF スパッタにおける絶縁性ターゲットの表面電位評価
萩原 敏哉，野田 智紀，豊田 浩孝
第61回応用物理学関係連合講演会
液流路式マイクロ波プラズマの溶液処理性能評価
伊藤 美智子, 高橋 朋大, 高島 成剛, 野村 記生, 北川 富則, 豊田 浩孝
第61回応用物理学関係連合講演会
メートル級マイクロ波大気圧ラインプズマの均一性評価
中野 優 ，鈴木 陽香 ，伊藤 仁 ，関根 誠 ，堀 勝 ，豊田 浩孝
第61回応用物理学関係連合講演会
パルスマイクロ波励起大気圧ラインプラズマの空間分解計測
鈴木 陽香 、中野 優 、伊藤 仁 、関根誠 、堀 勝 、豊田 浩孝
第61回応用物理学関係連合講演会
Evaluation the reaction of Br radical at silicon surface in an Inductively Coupled HBr plasma International conference
YOSHITAKA FUJII, DAIKI IINO, AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Magnet-Free Sputtering System Using Surface Wave Plasma International conference
Toshiya Hagihara, Tomonori Noda and Hirotaka Toyoda
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
O- Energy Distribution in a VHF-Superimposed DC Magnetron Plasma International conference
YUSHI FUKUOKA, HAYATO OGAWA, KENSUKE SASAI, NORIHARU TAKADA AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Spatiotemporal Resolved Investigations of Atmospheric Pressure Line Plasma International conference
SUGURU NAKANO, HARUKA SUZUKI, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Spatio-temporal Behavior of Alkaline Metals in a DC Pulsed-Plasma with Liquid Electrode International conference
TAKAFUMI TAKABA, HARUKA SUZUKI, NORIHARU TAKADA, AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Decomposition of Phenol by Pulsed Microwave Plasma Generated in the Vicinity of a Fluid Flow Path International conference
MICHIKO ITO, TOMOHIRO TAKAHASHI, SEIGO TAKASHIMA, NORIO NOMURA, TOMINORI KITAGAWA AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Design of Meter-Scale Compact Microwave Antenna Structure by Electromagnetic Simulation International conference
SHOGO KONDO, KENSUKE SASAI, NORIHARU TAKADA AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Influence of Discharge-off Duration on the Plasma Density in an Atmospheric-pressure Pulsed Microwave Discharge International conference
KAZUKI EGASHIRA, HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Production of High-Uniform Microwave Line Plasma at Atmospheric Pressure International conference
HARUKA SUZUKI, SUGURU NAKANO,HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
Advanced microwave plasma technology for liquid treatment Invited International conference
Hirotaka Toyoda, T. Takahashi, N. Takada
46th Annual Winter Conference following a special symposium
Release Behavior of Metal Atom from Solution Surface Contacting to Plasma International conference
Haruka Suzuki, Takafumi Takaba, Hirotaka Toyoda
The 18th International Workshop of Advanced Plasma Processing and Diagnostics
Time- and space-resolved measurement of electron density in an atmospheric pressure microwave plasma Invited International conference
Hirotaka Toyoda, Kazuki Egashira
The 18th International Workshop of Advanced Plasma Processing and Diagnostics
Meter -Scale Production of Atmospheric Pressure Microwave Plasma by Travelling Wave International conference
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
ICRP-8/SPP-3
Production of high-density meter-length plasma with metal-covered slot antenna International conference
N. Takada, S. Kondo, S. Nakano, K. Sasai and H. Toyoda
ICRP-8/SPP-3
Dependence of Electron density on Pulse-OFF Time in an Atmospheric Pulse Microwave Discharge International conference
Kazuki Egashira1, Hirotaka Toyoda
ICRP-8/SPP-3
Development of Magnet-Free Uniform Sputtering System by RF and Microwave Power Superposition International conference
Toshiya Hagihara, Tomonori Noda, Hirotaka Toyoda
ICRP-8/SPP-3
Nano-scale film surface control by advanced sputtering system Invited International conference
Hirotaka Toyoda
THERMEC' 2013
マイクロ波プラズマを用いた無磁場酸化物薄膜スパッタ装置の基礎的検討
萩原敏哉,野田智紀,豊田浩孝
電気学会プラズマ研究会
Effect of superposing ultrasonic wave on microwave plasma under water
Tomohiro Takahashi, Noriharu Takada, and Hirotaka Toyoda
Water Treatment by High-Density Microwave Plasma Invited International conference
Hirotaka Toyoda, Tomohiro Takahashi, Takafumi Takaba, Haruka Suzuki, Noriharu Takada
ICSE 2013(International Conference on Surface Engineering)
大気圧パルスプラズマのプラズマ密度時分解計測とプラズマ挙動解析 Invited
豊田 浩孝
第29回 九州・山口プラズマ研究会
Development of Magnet-Free Sputtering System for Dielectric Film Deposition with Surface-Wave Excited Plasma International conference
T. Noda,T. Hagihara, H. Toyoda
66th Annual Gaseous Electronics Conference
Meter-Scale Atmospheric-Pressure Microwave Plasma Using Sub-Millimeter-Gap Slot Invited International conference
HIROTAKA TOYODA
66th Annual Gaseous Electronics Conference
Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure International conference
H. Suzuki, S. Nakano, H. Itoh, M. Sekine, M. Hori, H. Toyoda
66th Annual Gaseous Electronics Conference
表面波プラズマを用いた無磁場スパッタ装置の検討
萩原 敏哉，野田 智紀，豊田 浩孝
平成25年度電気関係学会東海支部連合大会
電解質溶液電極を用いた大気圧パルスDCプラズマにおける放出金属原子の時分解吸収分光計測
鷹羽貴史，鈴木陽香, 高田昇治, 豊田浩孝
平成25年度電気関係学会東海支部連合大会
進行波重畳によるメートル級マイクロ大気圧ランプズの生成
中野 優，鈴木 陽香 ，関根 誠，堀 勝，豊田 浩孝，伊藤 仁
平成25年度電気関係学会東海支部連合大会
誘導結合型HBrプラズマにおけるBrラジカルの表面損失確率評価
藤井 良隆，豊田 浩孝
平成25年度電気関係学会東海支部連合大会
VHF-DC重畳マグネトロンプラズマの生成及び特性評価
福岡 侑士，小川 勇人，豊田 浩孝
平成25年度電気関係学会東海支部連合大会
新規アンテナ構造を用いたメートル級マイクロ波大気圧ラインプラズマの生成
鈴木 陽香 ，中野 優 ，伊藤 仁 ，関根誠 ，堀 勝 ，豊田 浩孝
第74回応用物理学会学術講演会
マイクロ波励起プラズマによる流体連続処理
高橋 朋大，高田 昇治，豊田 浩孝
第74回応用物理学会学術講演会
多目的マイクロ波アンテナの大面積化と高密度プラズマ生成
近藤将吾，中野優、高田昇治,豊田浩孝
第74回応用物理学会学術講演会
大気圧マイクロ波放電 におけるパルス停止時間のプラズマへの影響
江頭一輝 ，豊田浩孝
第74回応用物理学会学術講演会
マイクロ波プラズマを用いた無磁場酸化物薄膜スパッタ装置の開発
野田 智紀，萩原 敏哉，豊田 浩孝
第74回応用物理学会学術講演会
VHF-DC重畳マグネトロンプラズマの生成とプラズマ計測
小川勇人，福岡 侑士，豊田浩孝
第74回応用物理学会学術講演会
Cross section measurement of the neutral dissociation of CH2F2 by electron impact International conference
H. Ogawa and H. Toyoda
DPS2013 (35th International Symposium on Dry Process)
Plasma Characteristics of Multipurpose Microwave Antenna and Its Application to Silicon Thin Film Deposition International conference
S. Kondo, S. Nakano and H. Toyoda
DPS2013 (35th International Symposium on Dry Process)
Superposition of Ultrasonic Power on Microwave Plasma and Its Effect on Solution Treatment Efficiency International conference
T. Takahashi, N. Takada, and H. Toyoda
DPS2013 (35th International Symposium on Dry Process)
Development of Magnet-Free Uniform Sputtering System for Dielectric Film Deposition International conference
Tomonori Noda, and Hirotaka Toyoda
DPS2013 (35th International Symposium on Dry Process)
Surface Treatment of Three-Dimensional Product by Flexible Twin Microwave Plasma Source International conference
K. Sasai, K. Ishikawa, H. Toyoda and H. Sugai
DPS2013 (35th International Symposium on Dry Process)
Influence of gas addition and substrate bias voltage on Br radical behavior in HBr inductively coupled plasma International conference
D. Iino, Y. Nojiri, K. Suzuki, T. Oike, Y. Fujii, and H. Toyoda
DPS2013 (35th International Symposium on Dry Process)
High density plasma production by a Multipurpose Microwave Antenna International conference
Hirotaka Toyoda, Shogo Kondo, Suguru Nakano, Noriharu Takada
The 9th Asian-European International Conference on Plasma Surface Engineering (AEPSE2013)
Influence of Si Substrate Temperature and Bias Voltage on Surface reaction of Br Radical in HBr Inductively Coupled Plasma International conference
D. Iino, Y. Fujii, T. Oike, H. Toyoda
The 12th Asia Pacific Physics Conference
Absorption Spectroscopy of Atomic Metal in Atmospheric-pressure Plasma with Electrolyte Solution Electrode International conference
H. Suzuki, T. Takaba, N. Takada and H. Toyoda
Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
Influence of Ultrasonic Power Superposition to Microwave Plasma Produced under Water Invited International conference
Hirotaka Toyoda
Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
超音波重畳マイクロ波液中プラズマによる液中有機物処理
高橋 朋大，高田 昇治，豊田 浩孝
第60回応用物理学関係連合講演会
低圧環境下における無磁場マイクロ波プラズマ生成と応用
野田 智紀，中坊 将人，豊田 浩孝
第60回応用物理学関係連合講演会
多目的マイクロ波アンテナを用いたプラズマ生成とSi薄膜形成への応用
近藤将吾，中野優，豊田浩孝
第60回応用物理学関係連合講演会
電解質溶液電極を用いた大気圧パルスプラズマにおける金属原子吸収分光計測
鈴木 陽香，鷹羽 貴史，高田 昇治，豊田 浩孝
第60回応用物理学関係連合講演会
CH2F2への電子衝突によるラジカル生成断面積の評価
小川勇人，豊田浩孝
第60回応用物理学関係連合講演会
誘導結合型HBr プラズマ中のBr ラジカル挙動
飯野大輝，野尻康弘，鈴木啓之，大池 匠，藤井良隆，豊田浩孝
第60回応用物理学関係連合講演会
大気圧パルスマイクロ波プラズマにおける放電開始後のプラズマ挙動
江頭一輝 ，村瀬卓也 ，豊田浩孝
第60回応用物理学関係連合講演会
スパッタリングにおける高エネルギー粒子の発生とその制御 Invited
豊田 浩孝
プラズマ材料科学第１５３委員会第108回研究会
Temporal and Spatial Variations of Atomic Metals in Atmospheric-Pressure Pulsed-Plasmas with Liquid Electrode International conference
H.Suzuki, T. Takaba, N. Takada and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
Microwave Plasma Production - From Micro- to Meter-scale - Invited International conference
H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
Absolute Dissociation Cross Section of CH2F2 into CH2F for Electron-Impact International conference
H.Ogawa and H.Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
Deposition of Microcrystalline Silicon Thin Film by Compact Antenna Structure International conference
S.Kondo, S.Nakano and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
Synergistic Effect of Ultrasonic Wave on Microwave Excited Plasma Production under Water International conference
T. Takahashi, N. Takada and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
Surface-Wave Excited Plasma Produced in Low Pressures International conference
T. Noda, M. Nakabo and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
Measurement of Br Atom Density in an Inductively-Coupled HBr Plasma by Appearance Mass Spectrometry International conference
Y.Fujii, T. Oike, D. Iino, K. Suzuki and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Development of Compact Microwave Plasma Source and Its Application to Si Film Deposition International conference
S. Kondo, S. Nakano and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Production of Surface-Wave Excited Plasma in Low Pressures International conference
T.Noda, M. Nakabo and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Effect of Superposition of Ultrasonic Power on Microwave Plasma under Water International conference
T. Takahashi, N. Takada, H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Absolute Cross Section Measurement for Electron-Impact Dissociation of CH2F2 into CH2F International conference
H. Ogawa and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Temporal Variation of Alkaline Metals in an Atmospheric-Pressure Pulsed-Plasma with Liquid Electrode International conference
H. Suzuki, T. Takaba, N. Takada, H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Time-Resolved Measurement of Electric Field in Ar and N2 Atmospheric-Pressure Microwave Plasmas International conference
K. Egashira, T. Murase AND H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Measurement of Electron-Impact Cross Section for Dissociation of CH2F2 into CH2F International conference
H. Ogawa and H. Toyoda
The 16th International Workshop of Advanced Plasma Processing and Diagnostics
コンパクトマイクロ波アンテナを用いた微結晶シリコン薄膜の生成
近藤将吾，中野優，豊田浩孝
第３０回プラズマプロセシング研究会
二電子ビーム法を用いたCH2F2への電子衝突によるCH2Fラジカル生成断面積測定
小川勇人，豊田浩孝
第３０回プラズマプロセシング研究会
シュタルク分光を用いたAr及びN2添加大気圧マイクロ波プラズマの時分解計測
江頭 一輝，村瀬 卓也，豊田 浩孝
第３０回プラズマプロセシング研究会
マイクロ波液中プラズマ生成における超音波波動の影響
高橋朋大，高田昇治，豊田浩孝
第３０回プラズマプロセシング研究会
Diagnostics and Control of High Energy Species in Magnetron Sputter Plasmas Invited International conference
Hirotaka TOYODA
The International Symposium on Visualization in Joining & Welding Science through Advanced Measurements and Simulation
液体電極を用いた大気圧マイクロ波プラズマの光学的時分解計測 International conference
鈴木陽香, 鷹羽貴史, 高田昇治, 豊田浩孝
第5回プラズマ技術産業応用センター＆プラズマが拓くものづくり研究会国際シンポジウム
Plasma ignition dynamics in atmospheric-pressure pulsed-microwave plasma International conference
H. Toyoda, T. Murase, K. Egashira
GEC2012(65th Annual Gaseous Electronics Conference)
A Development of Atmospheric Pressure Plasma Equipment and Its Applications for Treatment of Ag Films Formed from Nano-Particle Ink International conference
Hitoshi Itoh, Yusuke Kubota, Yusaku Kashiwagi, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, Hirotaka Toyoda and Masaru Hori
11th APCPST (Asia Pacific Conference on Plasma Science and Technology)and 25th SPSM (Symposium on Plasma Science for Materials)
Preparation of Direct Alcohol Fuel Cells by Plasma Technology International conference
Y. D. Meng, C. X. Zhang, J. Hu, M. Nagatsu and H. Toyoda
11th APCPST (Asia Pacific Conference on Plasma Science and Technology)and 25th SPSM (Symposium on Plasma Science for Materials)
Temporal Variation of Ar/H2 and N2/H2 Atmospheric Pressure Microwave Plasma International conference
Takuya Murase, Kazuki Egashira, Hirotaka Toyoda
11th APCPST (Asia Pacific Conference on Plasma Science and Technology)and 25th SPSM (Symposium on Plasma Science for Materials)
希ガス及び分子ガスを用いた大気圧パルスマイクロ波放電におけるプラズマの時間発展
江頭 一輝，村瀬 卓也，豊田 浩孝
平成24年度電気関係学会東海支部連合大会
CH2F2 への電子衝突によるCH2F ラジカル生成絶対断面積
小川 勇人，豊田 浩孝
平成24年度電気関係学会東海支部連合大会
スロットアンテナ励起マイクロ波プラズマによる微結晶シリコン薄膜の生成
近藤 将吾,豊田 浩孝
平成24年度電気関係学会東海支部連合大会
マイクロ波液中プラズマ生成における超音波重畳効果
高橋 朋大，高田 昇治, 豊田 浩孝
平成24年度電気関係学会東海支部連合大会
低圧環境下における高密度マイクロ波プラズマの生成
野田 智紀，中坊 将人，豊田 浩孝
平成24年度電気関係学会東海支部連合大会
液体を電極としたマイクロ波励起大気圧プラズマの発光分光計測
鈴木 陽香，鷹羽 貴史，高田 昇治，豊田 浩孝
第73回応用物理学会学術講演会
RFマグネトロンプラズマにおける高エネルギーO-イオン挙動のシミュレーション
中坊 将人，豊田 浩孝
第73回応用物理学会学術講演会
誘導結合HBrプラズマ中Br原子の出現質量分析
大池 匠，藤井 良隆，豊田 浩孝
第73回応用物理学会学術講演会
大気圧パルスマイクロ波プラズマにおける放電開始後のプラズマの時間発展
村瀬卓也，江頭一輝，豊田浩孝
第73回応用物理学会学術講演会
Microwave Plasma Production - From Low- to Atmospheric-pressure. From Micro- to Meter-scale - Invited International conference
Hirotaka Toyoda
The 15th International Workshop on Advanced Plasma Processing and Diagnostics
Time-resolved Evaluation of Ar/H2 Microwave Plasma in Atmospheric Pressure Using Optical Emission Spectroscopy International conference
T. Murase, K. Egashira, and H. Toyoda
The 15th International Workshop on Advanced Plasma Processing and Diagnostics
誘導結合HBrプラズマにおける高エネルギー電子の空間分布評価
大池 匠，石島 達夫，豊田 浩孝
第59回応用物理学関係連合講演会
シュタルク分光を用いた大気圧パルスマイクロ波プラズマの時空間分解計測
村瀬卓也，石島達夫，豊田浩孝
第59回応用物理学関係連合講演会
液中気泡内における水蒸気とマイクロ波プラズマの相互作用
鈴木 陽香，石島 達夫，豊田 浩孝
第59回応用物理学関係連合講演会
Temporal-Spatial Measurement of Electric Field Using Stark Spectroscopy in Atmospheric-pressure Pulsed Slot-antenna Microwave Plasma International conference
T. Murase, T. Ishijima and H. Toyoda
The 5th International Conference on Plasma-Nano Technology & Science
Temporal Variation of Water Vapor Pressure inside a Bubble under Water Induced by Microwave Plasma International conference
H. Suzuki, T. Ishijima and H. Toyoda
The 5th International Conference on Plasma-Nano Technology & Science
Spatial Profile Measurement of High Energy Electrons in an Inductively Coupled Plasma with Electronegative Gas International conference
Takumi Oike, Tatsuo Ishijima and Hirotaka Toyoda
The 5th International Conference on Plasma-Nano Technology & Science
Simulation of Spatial- and Energy-Distributions of High-Energy O- Ions in a RF Magnetron Plasma International conference
MASATO NAKABO, KAZUNAGA ONO, TADASHI MORITA, NORIKAZU OHSHIMA, TATSUO ISHIJIMA AND HIROTAKA TOYODA
4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Evaluation of High Energy Electrons in an Inductively Coupled Plasma Using Optical Emission Spectroscopy International conference
TAKUMI OIKE ,TATSUO ISHIJIMA AND HIROTAKA TOYODA
4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Temporal Variation of Water Vapor Pressure inside a Bubble under Water Induced by Atmospheric Pressure Microwave Plasma International conference
HARUKA SUZUKI, TATSUO ISHIJIMA AND HIROTAKA TOYODA
4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Spatio-temporal Variation of Microwave Electric Field in an Atmospheric Pressure Slot-antenna Microwave Plasma International conference
TAKUYA MURASE, TATSUO ISHIJIMA AND HIROTAKA TOYODA
4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Bubble Plasma Production under Water using Microwave -Basic Study in Multiphase Structure and Application- Invited International conference
T. Ishijima, H. Suzuki, K. Kanetake, H. Toyoda
12th International Symposium on Biomimetic Materials Processing(BWWMP-12)
Evaluation of High Energy Electrons in an Inductively- Coupled Plasma with Electronegative Gas International conference
T. Oike and H. Toyoda, T. Ishijima
The 14th International Workshop of Advanced Plasma Processing and Diagnostics
Microwave Plasma Production under Water - Basic Research and Organic Decomposition - Invited International conference
H. Toyoda, K. Kanetake, H. Suzuki and T. Ishijima
The 14th International Workshop of Advanced Plasma Processing and Diagnostics
Evaluation of Deposited Film Suppression on the Dielectric Window Using Gas Flow
K. Keyamura, T. Ishijima and H. Toyoda
Improvement of Silicon Thin Film Quality by Modified Microwave Antenna under High Pressure SiH4/H2 Plasma
Y. Ito, S.Kondo, T. Ishijima and H. Toyoda
マイクロ波励起プラズマを用いた減圧流水中有機物の分解処理における効率向上 International conference
金武浩司、石島達夫、豊田浩孝
第4回プラズマ技術産業応用センター＆プラズマが拓くものづくり研究会国際シンポジウム
RFマグネトロンプラズマ中の酸素負イオン軌道解析 International conference
中坊 将人, 小野 一修，森田 正，大嶋 則和，石島 達夫，豊田 浩孝
発光分光法を用いたICPアンテナ近傍の高エネルギー電子空間分布計測 International conference
大池匠, 石島達夫,豊田浩孝
Microwave Plasma CVD for High-Rate and Large-Area Si Deposition - Plasma Control and Plasma Chemistry- Invited International conference
Hirotaka Toyoda
Topical Workshop on Green Plasma-Nano Technology- Green Energy and Flexible New Materials -
マイクロ波励起液中気泡内プラズマの時分解発光分光計測 International conference
鈴木陽香, 石島達夫，豊田浩孝
時空間発光分光によるスロットアンテナ励起大気圧マイクロ波プラズマの診断 International conference
村瀬卓也, 石島達夫，豊田浩孝
Time-resolved OES measurement of microwave plasma produced inside controlled bubbles under water International conference
T. Ishijima, H. Suzuki and H. Toyoda
GEC2011(64th Annual Gaseous Electronics Conference)
Suppression of film deposition in a plasma CVD system using gas flow International conference
H. Toyoda, K. Keyamura and T. Ishijima
GEC2011(64th Annual Gaseous Electronics Conference)
Influence of microwave electric field on Hb broadening in atmospheric pressure microwave plasma International conference
H. Toyoda, T. Murase and T. Ishijima
GEC2011(64th Annual Gaseous Electronics Conference)
Spatial Profile of SiH4 and SiH3 Fluxes under High Speed Gas Flow Environ International conference
M. Ikeda, T. Ishijima and H. Toyoda
DPS2011(33rd International Symposium on Dry Process)
Trajectory Simulation of High-Energy O- Ions in RF Magnetron Plasma International conference
M. Nakabo, K. Ono, T. Morita, N. Ohshima, K. Kinoshita, T. Ishijima and H. Toyoda
DPS2011(33rd International Symposium on Dry Process)
誘導結合型プラズマにおける高エネルギー電子空間分布評価
大池 匠，石島 達夫，豊田 浩孝
応用物理学会 プラズマエレクトロニクス分科会２０周年（研究会創設２５周年）記念 特別シンポジウム
数値シミュレーションを用いたRFマグネトロンプラズマにおける酸素負イオンの軌道解析
中坊 将人, 森田 正, 小野 一修,大嶋 則和, 石島 達夫, 豊田 浩孝
応用物理学会 プラズマエレクトロニクス分科会２０周年（研究会創設２５周年）記念 特別シンポジウム
大気圧パルスマイクロ波プラズマの時空間発光分光計測
村瀬 卓，石島 達夫，豊田 浩孝
応用物理学会 プラズマエレクトロニクス分科会２０周年（研究会創設２５周年）記念 特別シンポジウム
パルスマイクロ波液中気泡内プラズマの時分解発光分光計測
鈴木 陽香，石島 達夫，豊田 浩孝
応用物理学会 プラズマエレクトロニクス分科会２０周年（研究会創設２５周年）記念 特別シンポジウム
時空間発光分光計測を用いた大気圧パルスマイクロ波プラズマ生成過程の観察
村瀬 卓也*，石島 達夫，豊田 浩孝
平成23年度電気関係学会東海支部連合大会
パルスマイクロ波液中プラズマの時分解発光分光計測
鈴木 陽香，石島 達夫，豊田 浩孝
平成23年度電気関係学会東海支部連合大会
分光的手法を用いた誘導結合プラズマ中高エネルギー電子の空間分布評価
大池 匠，石島 達夫，豊田 浩孝
平成23年度電気関係学会東海支部連合大会
数値シミュレーションを用いたマグネトロンプラズマ中の高エネルギー負イオン挙動の解析
中坊 将人，森田 正，小野 一修，大嶋 則和，木下 啓藏，石島 達夫，豊田 浩孝
平成23年度電気関係学会東海支部連合大会
質量分析法を用いた大気圧マイクロ波プラズマの気相診断
澤口 陽介，石島 達夫，豊田 浩孝
平成23年度電気関係学会東海支部連合大会
Silicon Film Deposition by Microwave-Excited SiH4/H2 Plasma Invited International conference
H. Toyoda, Y. Ito, S. Kondo, T. Ishijima
The 8th Asian-European International Conference on Plasma Surface Engineering(AEPSE2011)
Particle Diagnostics of Reactive Species in Processing Plasmas Invited International conference
Hirotaka Toyoda
The 8th Asian-European International Conference on Plasma Surface Engineering(AEPSE2011)
ガス流を用いた誘電体窓への膜堆積抑制の検討
毛家村 一樹，石島 達夫，豊田 浩孝
第72回応用物理学会学術講演会
Behavior of High-Energy Oxygen Negative Ions in a RF Magnetron Plasma Invited International conference
Hirotaka Toyoda
The XXX International Conference on Phenomena in Ionized Gases (ICPIG)
Influence of Microwave Electric Field on Spatial and Time-Variation of Hb Spectra in Pulsed-Microwave Atmospheric Pressure Plasma International conference
T. Murase, A. Kamata, T. Ishijima, H. Toyoda
The XXX International Conference on Phenomena in Ionized Gases (ICPIG)
高圧力SiH4/H2マイクロ波プラズマによるシリコン製膜
伊藤裕紀，近藤将吾，石島達夫，豊田浩孝
第72回応用物理学会学術講演会
ガス流環境下におけるH2/SiH4プラズマの気相診断
池田昌平,石島 達夫,豊田 浩孝
第72回応用物理学会学術講演会
マイクロ波励起プラズマを用いた有機物含有流体処理におけるプロセスの高効率化
金武 浩司，石島 達夫，豊田 浩孝
第72回応用物理学会学術講演会
Flowing Liquid Treatment by Microwave Plasma International conference
K. Kanetake, T. Ishijima, and H. Toyoda
The 13th International Workshop on Advanced Plasma Processing and Diagnostics
Spatiotemporal measurement of microwave electric field in an atmospheric pressure microwave plasma Invited International conference
Hirotaka Toyoda, Takuya Murase, Tasuo Ishijima
The 13th International Workshop on Advanced Plasma Processing and Diagnostics
Behavior of High Energy Negative Ions in RF Magnetron Sputtering Plasma Invited
H. Toyod, T. Ishijima, K. Ono, T. Morita, N. Ohshima, K. Kinoshita
Flowing Liquid Treatment by Microwave Plasma under Reduced Pressures
Koji Kanetake, Tatsuo Ishijima and Hirotaka Toyoda
Time- and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using Ultra Short Pulses International conference
T. Murase, A. Kamata, T. Ishijima, Y. Kinoshita, H. Kawauchi, K. Yoshida, and H. Toyoda
The 3rd International Conference on Microelectronics and Plasma Technology (ICMAP-2011)
Enhancement of Polyimide/Copper Film Adhesion by Dense Carbon Interlayer using Microwave Plasma CVD International conference
K. Usami, T. Ishijima, and H. Toyoda
The 3rd International Conference on Microelectronics and Plasma Technology (ICMAP-2011)
RFマグネトロン・スパッタリング法で作製したMgO障壁層MTJのMgO結晶配向性と高エネルギー負イオンとの関係 Invited
小野一修, 大嶋則和, 後藤和也, 森田正, 木下啓藏, 石島達夫, 豊田浩孝
日本HDD協会 ヘッド・ディスク部会
有機物含有流体の減圧下における連続プラズマ処理
金武 浩司，石島 達夫，豊田 浩孝
第58回応用物理学関係連合講演会
熱流束抑制による微結晶シリコン薄膜特性の改善
伊藤裕紀，坂井淳二，石島達夫，豊田浩孝
第58回応用物理学関係連合講演会
SiH4/H2マイクロ波プラズマ中のSiH3ラジカル空間分布計測
池田昌平, 黒田 俊之, 石島 達夫, 豊田 浩孝
第58回応用物理学関係連合講演会
質量分析法による大気圧プラズマの気相診断
澤口 陽介，石島 達夫，豊田 浩孝
第58回応用物理学関係連合講演会
Space- and Time-Resolved Measurement of Electric Field International conference
T. Murase, A. Kamata, T. Ishijima and H. Toyoda
The 4th International Conference on Plasma-Nano Technology & Science
Improvement of Silicon Thin Film Quality for Photovoltaic Cells by Modified Microwave Antenna Structure International conference
Y. Ito, J. Sakai, T. Ishijima and H. Toyoda
The 4th International Conference on Plasma-Nano Technology & Science
Reactive Species Measurement of an Atmosphere-pressure Plasma by a Differentially-Pumped Mass-Spectrometer International conference
Y. Sawaguchi, T. Ishijima and H. Toyoda
The 4th International Conference on Plasma-Nano Technology & Science
Investigation of C6H6 Dissociation Process in a Microwave Plasma International conference
K .Keyamura, T. Ishijima and H. Toyoda
The 4th International Conference on Plasma-Nano Technology & Science
Treatment of Flowing Organic Solution by Microwave Excited Plasma under Reduced-Pressure Condition International conference
K. Kanetake, T. Ishijima and H. Toyoda
The 4th International Conference on Plasma-Nano Technology & Science
Measurement of SiH3 Spatial Profile in H2/SiH4 Microwave Plasma International conference
M. Ikeda, T. Kuroda, T. Ishijima and H. Toyoda
The 4th International Conference on Plasma-Nano Technology & Science
Dissociation Process of C6H6 Molecules in Surface Wave Plasma International conference
KAZUKI KEYAMURA, TATSUO ISHIJIMA AND HIROTAKA TOYODA
3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Gas-Phase Diagnostics of Hydrogen Diluted Silane Plasma by Modified Appearance Mass Spectrometry International conference
MASAHIRA IKEDA, TOSHIYUKI KURODA, TATSUO ISHIJIMA AND HIROTAKA TOYODA
3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Improvement of Silicon Thin Film Quality for Photovoltaic Cells by Newly-developed Microwave Antenna International conference
YUKI ITO, JUNJI SAKAI, TASTUO ISHIJIMA AND HIROTAKA TOYODA
3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Flowing Liquid Treatment by Microwave Plasma under Reduced Pressure Condition International conference
KOJI KANETAKE, TATSUO ISHIJIMA AND HIROTAKA TOYODA
3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Improvement of Adhesion Strength between Polyimide and Copper Foil by High Density Plasma Treatment Invited International conference
T. Ishijima, K. Usami, H. Toyoda
11th International Symposium on Biomimetic Materials Processing(BWWMP-11)
Evaluation of Absolute SiH3 Radical Density in H2/SiH4 Surface Wave Exited Plasma International conference
M. Ikeda, T. Kuroda, T. Ishijima, and H. Toyoda
The 12th International Workshop of Advanced Plasma Processing and Diagnostics
Time and Space Resolved Measurement of Microwave Electric Field in Atmospheric Pressure Plasma Invited International conference
H. Toyoda, A. Kamata, T. Murase, T. Ishijima
The 12th International Workshop of Advanced Plasma Processing and Diagnostics
表面波プラズマ処理によるCu膜とポリイミドフィルムの密着性向上
宇佐見健二，石島達夫，豊田浩孝
第20日本MRS学術シンポジウム
Organic Solute Decomposition in Water using Microwave Plasma
T. Ishijima, K. Kanetake and H. Toyoda
Diagnostics of atmospheric pressure plasma by space and time-resolved Stark broadening Invited International conference
H. Toyoda, A. Kamata, T. Murase, and T. Ishijima
The 2nd International Plasma Nanoscience Symposium
Microwave H2/SiH4 PCVD by Modified Microwave Antenna for Improvement of Silicon Film Quality International conference
J. Sakai, Y. Ito, T. Ishijima, H. Toyoda
The 32nd International Symposium on Dry Process
RFマグネトロンプラズマにおける高エネルギー粒子の挙動 Invited
豊田 浩孝 , 後藤 和也，石島 達夫
第26回九州・山口プラズマ研究会
マグネトロンプラズマ中の高エネルギー負イオン計測 Invited
豊田 浩孝
真空・表面科学合同講演会
プラズマ計測：電気的計測
豊田 浩孝
第21回プラズマエレクトロニクス講習会
Influences of Liquid Temperature and Pressure on Microwave-Excited Bubble Plasma Production International conference
T. Ishijima, R. Saito, K. Kanetake, H. Toyoda
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
Formation of High Energy Oxygen Species in RF Magnetron Sputter Plasma International conference
K. Goto, T. Ishijima, T. Morita, K. Ono, N. Ohshima, K. Kinoshita, H. Toyoda
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
Study on modified surface layer of photoresist employing fluorocarbon ion beam and radicals International conference
Takuya Takeuchi, Shinpei Amasaki, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Hirotaka Toyoda
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
Synthesis of High Quality SiO2 Film by Capacitively-Coupled Plasma CVD with Comb-Type Electrodes International conference
Takahiro Hiramatsu, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Mamoru Furuta, Takashi Hirao, Koji Kanetake, Hirotaka Toyoda
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
Space- and Time-Resolved Measurement of Hb Emission Spectrum in Atmospheric-pressure Pulsed Microwave Plasma International conference
Azumi Kamata, Takuya Murase, Tatsuo Ishijima and Hirotaka Toyoda
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
Absolute Density Measurement of SiHx Radicals in SiH4/H2 Microwave Plasma by Modified Appearance Mass Spectrometry International conference
T. Kuroda, M. Ikeda, T. Ishijima and H. Toyoda
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
Capacitively Coupled Plasma Source with Comb-Type Electrodes for Uniform Plasma Processing International conference
Hirotaka Toyoda, Koji Kanetake, Takahiro Hiramatsu, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Mamoru Furuta, Takashi Hirao
7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing and 63rd Gaseous Electronics Conference
フルオロカーボンプラズマビームによるフォトレジスト表面改質層の解析
竹内拓也、尼崎新平、竹田圭吾、石川健治、近藤博基、豊田浩孝、関根誠、康松潤、沢田郁夫、堀勝
第71回応用物理学会学術講演会
表面波励起プラズマ処理によるポリイミドフィルムの密着性向上
宇佐見健二，石島達夫，豊田浩孝，伊関清司，菅井秀郎
第71回応用物理学会学術講演会
新規マイクロ波PCVDによるシリコン薄膜の高品質化
坂井淳二，伊藤裕紀，石島達夫，豊田浩孝
第71回応用物理学会学術講演会
酸化物ターゲットマグネトロンプラズマにおける高エネルギー粒子挙動シミュレーション
後藤 和也，石島 達夫，森田 正，小野一修，大嶋 則和，木下 啓藏，豊田 浩孝
第71回応用物理学会学術講演会
改良型出現質量分析法によるSiH4/H2マイクロ波プラズマ中のラジカル絶対密度計測
黒田 俊之, 池田 昌平, 石島 達夫, 豊田 浩孝
第71回応用物理学会学術講演会
マイクロ波SiH4/H2プラズマCVDによる大面積シリコン堆積 Invited
豊田 浩孝
プラズマ材料科学第153委員会, 第98回研究会
MgOターゲットRFマグネトロンプラズマにおける高エネルギー酸素負イオンの空間分布計測
後藤 和也，石島 達夫，森田 正，小野一修，大嶋 則和，木下 啓藏，豊田 浩孝
第34回日本磁気学会学術講演会
高密度表面波プラズマにおけるC6H6分子の解離過程
毛家村 一樹，石島 達夫，豊田 浩孝
平成22年度電気関係学会東海支部連合大会
CH2F2への電子衝突によるCH2Fラジカル生成断面積測定
齊藤 耕平，関根 誠，堀 勝，石島 達夫，豊田 浩孝，康 松潤，澤田 郁夫
平成22年度電気関係学会東海支部連合大会
新規マイクロ波アンテナによるシリコン薄膜の高品質化
伊藤 裕紀, 坂井 淳二，石島 達夫，豊田 浩孝
平成22年度電気関係学会東海支部連合大会
減圧環境下における液体流の連続プラズマ処理
金武 浩司，石島 達夫，豊田 浩孝
平成22年度電気関係学会東海支部連合大会
質量分析法による大気圧プラズマの気相診断
澤口 陽介，石島 達夫，豊田 浩孝
平成22年度電気関係学会東海支部連合大会
大気圧パルスマイクロ波プラズマにおける時空間発光分光計測
齊藤 耕平，関根 誠，堀 勝，石島 達夫，豊田 浩孝，康 松潤，澤田 郁夫
平成22年度電気関係学会東海支部連合大会
改良型出現質量分析法を用いたマイクロ波励起水素希釈シランプラズマ中の気相診断
池田 昌平，黒田 俊之，石島 達夫，豊田 浩孝
平成22年度電気関係学会東海支部連合大会
Gas phase diagnostics of high-density SiH4/H2 microwave plasma Invited International conference
Hirotaka Toyoda, Toshiyuki Kuroda, Masahira Ikeda, Junji Sakai, Yuki Ito, Tatsuo Ishijima
39th The Korean Vacuum Society Summer
Organic Solute Decomposition using Microwave excited Plasma Invited International conference
T. Ishijima, H. Toyoda
The 11th International Workshop on Advanced Plasma Processing and Diagnostics
酸化物ＲＦスパッタにおける高エネルギー酸素負イオンの空間分布計測
石島達夫、後藤和也、小野一修、森田 正、大嶋則和、木下啓藏、豊田浩孝
酸化物ＲＦスパッタにおける高エネルギー酸素負イオンの空間分布計測
Influence of pressure and water temperature on the microwave plasma production under water International conference
T. Ishijima, R. Saito, K. Kanetake, H. Toyoda
10th APCPST (Asia Pacific Conference on Plasma Science and Technology)and 23th SPSM (Symposium on Plasma Science for Materials)
Dissociation process of SiH4 parent gas in high density microwave plasma for Si film deposition International conference
T. Ishijima, H. Endo, T. Kuroda, H. Toyoda
10th APCPST (Asia Pacific Conference on Plasma Science and Technology)and 23th SPSM (Symposium on Plasma Science for Materials)
Diagnostics of high-energy negative ion in RF magnetron plasma Invited International conference
H. Toyoda
The 3rd International Oce Science Leader Workshop on Plasma Nanoscience and Nanotechnology
Multibubble Plasma Production and Efficient Liquid Treatment by Slot-excited Microwave International conference
T. Ishijima, R. Saito, K. Kanetake, H. Toyoda
International Workshop on Plasmas with Liquids
高密度マイクロ波プラズマを用いたポリィミドフィルムの高速密着性改善
宇佐見 健二，石島 達夫，豊田 浩孝，伊関清司，菅井秀郎
第57回応用物理学関係連合講演会
酸化物ターゲットのスパッタプロセスにおける酸素負イオンエネルギー分布中微細構
後藤 和也，石島 達夫，森田 正，小野 一修，大嶋則和，木下 啓藏，豊田 浩孝
第57回応用物理学関係連合講演会
高密度SiH4/H2マイクロ波PCVDによる基板表面温度制御下での微結晶シリコン薄膜堆積
坂井 淳二，池田 昌平，伊藤 裕紀，石島 達夫，豊田 浩孝
第57回応用物理学関係連合講演会
水素原子偏光スペクトル計測を用いた大気圧パルスプラズマの外部印加電界強度の検討
鎌田 安住，楊 海鵬，石島 達夫，豊田 浩孝
第57回応用物理学関係連合講演会
SiH4/H2マイクロ波プラズマの気相診断
黒田 俊之,石島 達夫，豊田 浩孝
第57回応用物理学関係連合講演会
TiCl4への電子衝突によるTiCl2ラジカル生成断面積測定
齊藤 耕平，関根 誠，堀 勝，豊田 浩孝，康 松潤，沢田 郁夫
第57回応用物理学関係連合講演会
Microcrystalline Silicon Film Deposition by 915MHz High-Density Microwave Plasma International conference
J. Sakai, T. Ishijima, H. Toyoda
The 3rd International Conference on Plasma-Nano Technology & Science
Effect of Post-Baking on Copper Adhesion to Polyimide Films Treated by High Density Microwave Plasma International conference
K. Usami, T. Ishijima, H. Toyoda, K. Iseki, H. Sugai
The 3rd International Conference on Plasma-Nano Technology & Science
Time Resolved Measurement of Hb Emission from Atmospheric-Pressure Pulsed Microwave Plasma International conference
A. Kamata, H. Yang, T. Ishijima, H. Toyoda
The 3rd International Conference on Plasma-Nano Technology & Science
Mass Spectrometric Measurement of Neutral Radicals in SiH4/H2 High Density Microwave Plasma International conference
T. Kuroda, T. Ishijima, H. Toyoda
The 3rd International Conference on Plasma-Nano Technology & Science
Gas-Phase Diagnostics of SiH4/H2 Surface Wave Excited Plasma International conference
T. Kuroda, T. Ishijima, H. Toyoda
2nd International Symposium on Advansed Plasma Science and its Applications for Nitrides and Nanomaterials
The Effect of Temperature and Pressure for Microwave-Excited Bubble Plasma Production International conference
R. Saito, K. Kanetake, T. Ishijima, H. Toyoda
The 3rd International Conference on Plasma-Nano Technology & Science
Substrate Temperature Control in Microwave Plasma CVD International conference
J. Sakai, T. Ishijima, H. Toyoda
2nd International Symposium on Advansed Plasma Science and its Applications for Nitrides and Nanomaterials
Periodic Peak Formation in O- Energy Distribution in RF Magnetron Plasma International conference
K. Goto, T. Ishijima, T. Morita, N. Ohshima, K. Kiinoshita, H. Toyoda
2nd International Symposium on Advansed Plasma Science and its Applications for Nitrides and Nanomaterials
表面波励起高密度プラズマによる高分子フィルムの高速密着性改善
宇佐見 健二，石島 達夫，豊田 浩孝
第27回プラズマプロセシング研究会
大気圧パルスマイクロ波プラズマの時分解発光分光計測
鎌田 安住，楊 海鵬，石島 達夫，豊田 浩孝
第27回プラズマプロセシング研究会
マイクロ波励起SiH4/H2高密度プラズマの気相診断
黒田 俊之,石島 達夫，豊田 浩孝
第27回プラズマプロセシング研究会
Influence of Temperature and Pressure on Multibubble Plasma Production by Microwave Invited International conference
T. Ishijima, R. Saito, K. Kanetake, H. Toyoda
10th International Symposium on Biomimetic Materials Processing(BWWMP-10) and 1st International Symposium on Water Science and Technology(WaST-1)
Plasma innovation towards next generation green technology Invited International conference
M. Hori, M. Aekine, H. Toyoda
The 10th International Worksop on Advanced Plasma Processing and Diagnostics
Behavior of High-Energy Oxygen Negative Ions in Magnetron Plasma with Oxide Targets International conference
K. Goto, T. Ishijima, T. Morita, N. Ohshima, K. Kiinoshita, H. Toyoda
The 10th International Worksop on Advanced Plasma Processing and Diagnostics
Deposition of Microcrystalline Silicon Thin Film by 915 MHz Microwave Plasma CVD
J. Sakai, T. Ishijima, H. Toyoda
Periodic Peal Structure on O- Energy Distribution in RF Magnetron Plasma
K. Goto, T. Ishijima, T. Morita, N. Ohshima, K. Kinoshita, H. Toyoda
Analysis of the surface reactions of ArF photoresist during fluorocarbon plasma etching by XPS International conference
Takuya Takeuchi, Makoto Sekine, Hirotaka Toyoda, Keigo Takeda, Masaru Hori, Song-Yun Kang, Ikuo Sawada
62nd Annual GEC
Spatial variation of O− Energy distribution in an RF magnetron plasma International conference
H. Toyoda, K. Goto, T. Ishijima, N. Ohshima, K. Kinoshita
62nd Annual GEC
Temporal variation of plasma density in atmospheric pressure International conference
H. Toyoda, H. Yang, T. Ishijima
62nd Annual GEC
2次元大面積プラズマ生成用表面波の並列励起
平成18年度電気関係学会東海支部連合大会
TIME-DEPENDENT PLASMA-DENSITY MEASUREMENT OF ATMOSPHERIC-PRESSURE PULSED-MICROWAVE PLASMA BY STARK BROADENING International conference
H. Toyoda, H. Yang, T. Ishijima
7th International Workshop on "Microwave Discharges: Fundamentals and Applications"
SIH4 GAS DISSOCIATION PROCESS IN HIGH-DENSITY MICROWAVE PLASMA FOR SILICON FILM DEPOSITION International conference
T. Ishijima, H. Asano, J. Sakai, T. Kuroda, M. Ikeda, H. Toyoda
7th International Workshop on "Microwave Discharges: Fundamentals and Applications"
Time-dependent measurement of plasma density in atmospheric-pressure microwave plasma using Stark broadening International conference
H. Toyoda, H. Yang, T. Ishijima
International Conference on Plasma Surface Engineering (AEPSE2009)
Monosilane Dissociation Process in Microwave-Excited High-Density H2/SiH4 Plasma International conference
H. Asano, H. Endo, T. Ishijima and H. Toyoda
The 31th International Symposium on Dry Process
TOC Evaluation of Organic Solute Treated by Microwave-Excited Bubble Plasma International conference
R. Saito, H. Sugiura, T. Ishijima and H. Toyoda
The 31th International Symposium on Dry Process
Temporal Variation of Hydrogen Atom Spectrum Emitted from Pulsed Microwave Plasma under Atmospheric Pressure International conference
H. Yang, T. Ishijima, and H. Toyoda
The 31th International Symposium on Dry Process
Investigation of photoresist surface modeified layer by fluorocarbon ion ombardment International conference
T. Takeuchi, M. Sekine, H. Toyoda, K. Takeda, M. Hori, S-Y. Kang, I. Sawada
The 31th International Symposium on Dry Process
Energy distribution of oxygen negative ion in an RF magnetron plasma International conference
H. Toyoda, K. Goto, T. Ishijima, N. Ohshima, K. Kinoshita
2nd International Conference on Microelectronics and Plasma Technology(ICMAP 2009)
Rapid Improvement of Polymer Film Adhesion by High Density Plasma International conference
Y. Gunjo, K. Goto, T. Ishijima, H. Toyoda, K. Iseki, and H. Sugai
International Conference on Plasma Surface Engineering (AEPSE2009)
High-density microwave plasma for fabrication of silicon thin film solar cells Invited International conference
Hirotaka Toyoda
International Conference on Plasma Surface Engineering (AEPSE2009)
マイクロ波プラズマCVD における基板への熱流束評価
坂井 淳二，石島 達夫，豊田 浩孝
平成21年度電気関係学会東海支部連合大会
微結晶シリコン薄膜堆積用SiH4/H2 マイクロ波プラズマの気相診断
黒田 俊之，石島 達夫，豊田 浩孝
平成21年度電気関係学会東海支部連合大会
酸化物ターゲットRF マグネトロンプラズマにおける高エネルギー酸素負イオンの空間分布計測
後藤 和也，石島 達夫，大嶋 則和，木下 啓藏，豊田 浩孝
平成21年度電気関係学会東海支部連合大会
915MHz表面波プラズマCVDにおける高付着性ラジカルの抑制
浅野弘嗣、池田昌平、石島達夫、豊田浩孝
第70回応用物理学会学術講演会
大気圧パルスマイクロ波プラズマにおける印加外部電界に起因するスペクトル拡がり
鎌田 安住，楊 海鵬，石島 達夫，豊田 浩孝
平成21年度電気関係学会東海支部連合大会
CF系イオン照射によるフォトレジスト表面改質層の解析(2)
竹内拓也、関根誠、豊田浩孝、竹田圭吾、堀勝、康松潤、沢田郁夫
第70回応用物理学会学術講演会
シュタルク拡がりを用いたプラズマ密度計測における外部電界の影響
楊 海鵬、石島達夫、豊田浩孝
第70回応用物理学会学術講演会
マイクロ波バブルプラズマにおける水温・圧力の影響
齋藤良太、杉浦宏康、石島達夫、豊田浩孝
第70回応用物理学会学術講演会
マイクロ波プラズマ生成による難分解性有機物分解処理
石島達夫，齋藤良太，豊田浩孝
電気学会プラズマ研究会
Detection of High Energy Negative Ions in an RF Magnetron Sputter Plasma International conference
H. Toyoda, K. Goto, T. Ishijima, N. Ohshima, K. Kinoshita
The 19th International Symposium on Plasma Chemistry
Decomposition of Organic Solute with Microwave Bubble Plasmas International conference
T. Ishijima, R. Saito, H. Sugiura, H. Toyoda
The 19th International Symposium on Plasma Chemistry
High-Density Microwave Plasma Production For Thin Film Si Solar Cell and Monitoring of SiH4 Gas Dissociation Process Invited International conference
T. Ishijima, H. Endo, H. Asano, H. Toyoda
The 9th Korea-Japan Workshop on Thin Film and Plasma Process for Green Plasma Technology Advanced Plasma Diagnostics for Plasma-Nano Processing
915MHz表面波プラズマを用いた微結晶シリコン薄膜の膜特性評価
浅野弘嗣、遠藤浩孝、石島達夫、豊田浩孝
第56回応用物理学関係連合講演会
スロットアンテナ励起マイクロ波液中プラズマによる有機物含有溶液処理
齋藤良太、杉浦宏康、石島達夫、豊田浩孝
第56回応用物理学関係連合講演会
シュタルク拡がりを用いた大気圧パルスマイクロ波プラズマの電子密度計測
楊 海鵬、石島達夫、豊田浩孝
第56回応用物理学関係連合講演会
高周波マグネトロンプラズマ中の高エネルギー負イオンエネルギーの空間分布計測
後藤和也、石島達夫、大嶋則和、木下啓蔵、豊田浩孝
第56回応用物理学関係連合講演会
微結晶Si薄膜超高速堆積用表面波プラズマ Invited
豊田浩孝
太陽電池製造用新規プラズマ源に関する研究会
Basic experiment on microcrystalline silicon film deposition by 915 MHz microwave PlasmaCVD International conference
H. Asano, T. Ishijima, H. Toyoda
First International Symposium on Advanced Plasma Science and its Applications
Low Temperature Microcrystalline Silicon Film Deposition by Microwave High-density Plasma Invited International conference
Hirotaka Toyoda
First International Symposium on Advanced Plasma Science and its Applications
CF系プラズマにより改質されたフォトレジスト表面層の観察
竹内拓也、関根誠、豊田浩孝、竹田圭吾、堀勝、康松潤、沢田郁夫
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
マイクロ波励起による液中プラズマ生成と化学反応性
石島達夫、齋藤良太、豊田浩孝
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
スロットアンテナ励起バブルプラズマによる高速溶質処理
齋藤良太、杉浦宏康、石島達夫、豊田浩孝
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
915ＭＨｚマイクロ波励起 プラズマによる微結晶シリコン薄膜堆積
浅野弘嗣、遠藤広考、石島達夫、豊田浩孝
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
大気圧パルスマイクロ波プラズマにおける水素原子スペクトルの時分解計測
楊 海鵬、石島達夫、豊田浩孝
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
RFマグネトロンプラズマ中の高エネルギー負イオン計測
後藤和也、石島達夫、大嶋則和、木下啓蔵、豊田浩孝
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
SiH4 Dissociation Process in Microwave-Excited SiH4/H2 Plasma International conference
H. Endo, H. Asano, T. Ishijima and H. Toyoda
The 2nd International Conference on Plasma-Nanotechnology & Science
Detection of Energetic Negative Ions in an RF Magnetron Plasma International conference
K. Goto, T. Ishijima, N. Ohshima, K. Kinoshita and H. Toyoda
The 2nd International Conference on Plasma-Nanotechnology & Science
Treatment of Organic Solution with Microwave Excited Plasmas International conference
R. Saito, H. Sugiura, T. Ishijima and H. Toyoda
The 2nd International Conference on Plasma-Nanotechnology & Science
Organic Solute Decomposition with Microwave Bubble Plasma International conference
T. Ishijima, R. Saito, H. Sugiura, H. Toyoda
9th International Symposium on Biomimetic Materials Processing (BMMP-9)
SOLUTE DECOMPOSITION WITH MICROWAVE-EXCITED BUBBLE PLASMA International conference
R. Saito, H. Sugiura, T. Ishijima and H. Toyoda
The 8th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri(PLAM)
Investigation of Solute Decomposition Process in Water by Multibubble Plasma at Reduced and Atmospheric Pressures International conference
T. Ishijima, H. Sugiura, R. Saito and H. Toyoda
The IUMRS International Conference in Asia 2008
Rapid Surface Modification of PET Film by High Density Microwave Plasma International conference
Y. Gunjo, K. Goto, T. Ishijima, H. Toyoda, K. Iseki, and H. Sugai
The IUMRS International Conference in Asia 2008
Evaluation of Absolute H2O2 Concentration in Water Treated by Microwave Bubble Plasma International conference
R. Saito, H. Sugiura, T. Ishijima, H. Toyoda
The IUMRS International Conference in Asia 2008
Film Quality of Microcrystalline Silicon Films Deposited by SiH4/H2 Surface Wave Plasma CVD International conference
H. Endo, J. Sakai, H. Asano, T. Ishijima, H. Toyoda
The IUMRS International Conference in Asia 2008
Production of Large-Area Plasma by Three Parallel Waveguide Systems and Its Application to Si Film Deposition International conference
H. Endo, T. Hayashi. Y. Takanishi, T. Ishijima, H. Toyoda, H. Sugai, A. Masuda and M. Kondo
30th International Symposium on Dry Process(DPS2008)
Effect of H2O Addition on Rapid Surface Treatment of Polymer Film by High Density Microwave Plasma International conference
Y. Gunjo, K. Goto, T. Ishijima, H. Toyoda, K. Iseki, and H. Sugai
30th International Symposium on Dry Process(DPS2008)
Diagnostics of Microwave Excited Plasma in Liquid Using Spectroscopic Measurements International conference
H. Sugiura, R. Saito, T. Ishijima, and H. Toyoda
30th International Symposium on Dry Process(DPS2008)
Mater-Scale Microwave Plasma Production and its Application to Silicon Thin Film Deposition International conference
H. Toyoda, Y. Takanishi, H. Endo, T. Ishijima
61th Gaseous Electronics Conference
Diagnostics of Microwave Bubble Plasma in Liquid International conference
H. Toyoda, H. Sugiura, R. Saito, T. Ishijima
61th Gaseous Electronics Conference
Meter-Scale Plasma Production and Thin Film Deposition Process with Parallel Waveguide at 915 MHz Microwave Excitation International conference
T. Ishijima, Y. Takanishi, H. Endo and H. Toyoda
9th Asia-Pacific Conference on Plasma Science and Technology and 21st Symposium on Plasma Science for Materials
Solute Decomposition in Water by Slot-Excited Microwave Plasmas at Atmospheric Pressures International conference
T. Ishijima, H. Sugiura, R. Saito and H. Toyoda
9th Asia-Pacific Conference on Plasma Science and Technology and 21st Symposium on Plasma Science for Materials
915ＭＨｚ表面波プラズマによる微結晶シリコン薄膜堆積
浅野弘嗣、坂井淳二、遠藤広考、石島達夫、豊田浩孝
平成20年度電気関係学会東海支部連合大会
大気圧マイクロ波プラズマによる溶質処理
齋藤良太、杉浦宏康、石島達夫、豊田浩孝、菅井秀郎
平成20年度電気関係学会東海支部連合大会
表面波プラズマCVDによる微結晶シリコン薄膜堆積と電気伝導特性評価
遠藤広考、坂井淳二、浅野弘嗣、石島達夫、豊田浩孝
平成20年度電気関係学会東海支部連合大会
水蒸気添加高密度マイクロ波アルゴンプラズマによるPETフィルムの高速表面改質
郡上祐一、後藤和也、石島達夫、豊田浩孝、伊関清司、菅井秀郎
平成20年度電気関係学会東海支部連合大会
蛍光プローブを用いたマイクロ波励起バブルプラズマの反応生成物診断
杉浦宏康、齋藤良太、石島達夫、豊田浩孝
平成20年度電気関係学会東海支部連合大会
Simulation of Microwave Rediation for Microwave Discharge in Liquid International conference
T. Ishijima, K. Nagira, H. Sugiura and H. Toyoda
International Congress on Plasma Physics 2008
Production of One-meter Square High Density Microwave Plasma for Thin Film Deposition International conference
Y. Takanishi, H. Endo, T. Ishijima, and H. Toyoda
International Congress on Plasma Physics 2008
Efficient Decomposition of Organic Materials by Slot-Excited Microwave Plasmas in Water International conference
H. Sugiura, T. Ishijima, and H. Toyoda, H. Sugai
International Congress on Plasma Physics 2008
Efficiency Improvement of Solute Decomposition in Water by Multibubble Plasma Excited by Microwave Discharge International conference
T. Ishijima, H. Sugiura, R. Saito, H. Toyoda and H. Sugai
International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas
表面波プラズマCVDにより堆積した微結晶シリコン薄膜の電気伝導特性評価
遠藤広考、坂井淳二、浅野弘嗣、石島達夫、豊田浩孝
第69回応用物理学会学術講演会
シュタルク広がりを用いたマイクロ波液中プラズマの電子密度測定
豊田浩孝、杉浦宏康、齋藤良太、石島達夫
第69回応用物理学会学術講演会
高密度マイクロ波プラズマを用いたPETフィルム表面改質における水蒸気添加の効果
郡上祐一、豊田浩孝、伊関清司、菅井秀郎
第69回応用物理学会学術講演会
表面波プラズマによる円筒状樹脂の均一表面改質
石川喬介，石島達夫，豊田浩孝，笹井建典，菅井秀郎
第69回応用物理学会学術講演会
大気圧マイクロ波バブルプラズマによる溶質処理
齋藤良太、杉浦宏康、石島達夫、豊田浩孝、菅井秀郎
第69回応用物理学会学術講演会
蛍光プローブを用いたマイクロ波バブルプラズマの反応生成物診断
杉浦宏康、齋藤良太、石島達夫、豊田浩孝
第69回応用物理学会学術講演会
マイクロ波励起高密度プラズマを用いたPTFEフィルムの表面改質
石川喬介，石島達夫，笹井建典，豊田浩孝，菅井秀郎
プラズマ研究会
Measurement and Control of Energetic Rare Gas Atoms in Magnetron Plasma Invited International conference
Hirotaka Toyoda
6th EU-Japan Joint Symposium on Plasma Processing
スロット励起大気圧マイクロ波プラズマの生成
郡上祐一、石島達夫、豊田浩孝
第55回応用物理学関係連合講演会
マイクロ波バブルプラズマを用いた溶質の高速処理
杉浦宏康、石島達夫、豊田浩孝、佐藤正典、菅井秀郎
第55回応用物理学関係連合講演会
915MHzマイクロ波による大面積プラズマの生成と微結晶シリコン薄膜堆積
遠藤広孝、林 孝信、高西雄大、石島達夫、豊田浩孝、菅井秀郎、増田 淳、近藤道雄
第55回応用物理学関係連合講演会
高密度表面波励起プラズマによるPETフィルムの表面改質
石川喬介、石島達夫、豊田浩孝、笹井建典、菅井秀郎
第55回応用物理学関係連合講演会
超伝導溶融バルク体を磁場発生源とする強磁場スパッタ装置のプラズマ診断
岡村建志、太田勲、柳陽介、伊藤佳孝、豊田浩孝、生田博志
第55回応用物理学関係連合講演会
One-Meter-Square Surface Wave Plasma for Si Film Deposition International conference
Y. Takanishi, H. Endo, T. Ishijima, H. Toyoda and H. Sugai
The 1st International Conference on PLAsma-NanoTechnology & Science
High Rate Deposition of Silicon Films at Low Temperature Employing Surface Wave Excited Plasma Invited International conference
H. Toyoda
The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
Efficient Solute Decomposition in Liquid with Bubble Plasma Production by Microwaves International conference
H. Sugiura, T. Ishijima, H. Toyoda
The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
Surface Modification of PTFE Film by High Demsity Microwave Plasma International conference
K. Ishikawa, T. Ishijima, H. Toyoda
The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
マイクロ波バブルプラズマの安定生成による溶質分解効果の向上
杉浦宏康，石島達夫，豊田浩孝，佐藤正典，菅井秀郎
第25回プラズマプロセシング研究会プロシーディングス
高密度マイクロ波プラズマによるPETフィルムの高速表面改質
郡上祐一，豊田浩孝，伊関清司，菅井秀郎
第25回プラズマプロセシング研究会プロシーディングス
Production of Surface Wave Excited Plasma by a Parallel-Waveguide System and its Application to Si Film Deposition
H. Endo, Y. Takanishi, T. Hayashi, H. Toyoda, H. Sugai
Surface Modification of Fluorocarbon Polymer Film by High Density Surface Wave Plasma
K. Ishikawa, T. Ishijima, H. Toyoda, K. Sasai, H. Sugai
LARGE-AREA HIGH-SPEED DEPOSITION OF mc-Si THIN FILMS BY 915 MHz SURFACE WAVE PLASMA International conference
Hideo Sugai, Tatsuo Ishijima, Hirotaka Toyoda, Atsushi Masuda, Michio Kondo
17th International Photovoltaic Science and Engineering Conference
Production of High Density Plasma for Silicon Film Deposition at Low Substrate Temperatures Invited International conference
Hirotaka Toyota
2007 Trans-Pacific Workshop on Flexible Electronics
Development and Characteristics of Neutral Beam Source International conference
Y. Hara, S. Takashima, S. Den, K. Yamakawa, H. Kanou, H. Sugai, H. Toyoda, M. Hori
The 3nd International Student Workshop on Plasma Science and Technology
Production of Large-Area and Uniform Surface Wave Plasma along Linear Parallel Waveguides International conference
Y. Takanishi, H. Endo, T. Ishijima, H. Toyoda and H. Sugai
29th International Symposium on Dry Process(DPS2007)
Plasma Activation of Oxide Ceramics Surface for Hydrogen Production by Water Vapor Decomposition International conference
Y. Yamaguchi, T. Ishijima, H. Toyoda and H. Sugai
29th International Symposium on Dry Process(DPS2007)
Microcrystalline Thin Film Deposition by Surface Wave Excited Plasma at 2.45 GHz International conference
T. Hayashi, Y. Takanishi, H. Toyoda and H. Sugai
29th International Symposium on Dry Process(DPS2007)
Development and Characteristics of Nitorogen Radical Beam International conference
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Kano, H. Toyoda, M. Sekine and M. Hori
29th International Symposium on Dry Process(DPS2007)
Reaction of Fluorocarbon Species with Si and SiO2 Surfaces1 Invited International conference
HIROTAKA TOYODA
60th Annual Gaseous Electronics Conference
Suppression of High-Energy Backscattered Species in Magnetron Sputter Plasma with Cylindrical Cathode International conference
HIROTAKA TOYODA, YUSUKE TAKAGI, HIDEO SUGAI
60th Annual Gaseous Electronics Conference
2.45GHz並列励起表面波プラズマの生成とシリコン薄膜堆積
遠藤広考、高西雄大、林孝信、豊田浩孝、菅井秀郎
平成19年度電気関係学会東海支部連合大会
