論文 - 鈴木 陽香
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Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave 査読有り
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
Japanese Journal of Applied Physics 55 巻 ( 1S ) 頁: 01AH09 2015年12月
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Low-pressure sustainment of surface-wave microwave plasma with modified microwave coupler 査読有り
Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Japanese Journal of Applied Physics 55 巻 ( 1 ) 頁: 016203 2015年12月
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New line plasma source excited by 2.45 GHz microwave at atmospheric pressure 査読有り
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
Applied Physics Express 8 巻 ( 3 ) 頁: 036001 2015年2月
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Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation 査読有り
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa
Japanese Journal of Applied Physics 58 巻 ( SE ) 頁: SE802 2019年6月
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Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development 査読有り
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa
Japanese Journal of Applied Physics 58 巻 ( SE ) 頁: SE804 2019年6月
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Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? 査読有り
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa
Japanese Journal of Applied Physics 58 巻 ( SE ) 頁: SE803 2019年6月