論文 - 鈴木 陽香
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Time-varying mechanism of ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma 査読有り
Shuichi Kuboi, Haruhito Kato, Yudai Akatsuka, Haruka Suzuki, and Hirotaka Toyoda
Japanese Journal of Applied Physics 63 巻 頁： 016001 2023年12月
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Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma 査読有り
Shuichi Kuboi, Haruhito Kato, Yuto Seki, Haruka Suzuki, and Hirotaka Toyoda
Japanese Journal of Applied Physics 62 巻 頁： SI1003 2023年3月
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Polyvinyl alcohol-potassium iodide gel probe to monitor the distribution of reactive species generation around atmospheric-pressure plasma jet 査読有り
Trung Nguyen TRAN, Min HU, Tomohiro OGASAWARA, Yuki IWATA, Haruka SUZUKI, Jin SAKAMOTO, Masafumi AKIYOSHI, Hirotaka TOYODA and Hiroto MATSUURA
Plasma Science and Technology 25 巻 頁： 035404 2023年1月
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Influence of small ground surface on plasma property in an inductively–coupled plasma with floating liner 査読有り
Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki, and Hirotaka Toyoda
Japanese Journal of Applied Physics 62 巻 頁： SA1008 2022年11月
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High-speed hydrophilic and ashing treatments of polyimide using Ar/O2 atmospheric-pressure microwave line plasma 査読有り
Haruka Suzuki,Tomohiro Ogasawara,Yuki Iwata, Hansin Bae, and Hirotaka Toyoda
Japanese Journal of Applied Physics 61 巻 頁： SI1008 2022年6月
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Enhancement of the ion flux to the substrate by high voltage biasing in an electron cyclotron resonance plasma and its application to high-speed deposition of conductive carbon film 査読有り
Hansin Bae, Ikumi Hamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka toyoda
Japanese Journal of Applied Physics 60 巻 ( 12 ) 頁： 126002 2021年12月
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Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma 査読有り
Keita Ichikawa, Manh Hung CHU, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Daiki Iino, Hiroyuki Fukumizu, Kazuaki Kurihara and Hirotaka Toyoda
Applied Physics Express 14 巻 ( 12 ) 頁： 126001 2021年11月
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Quantitative evaluation of hydrogen retention of solid tin after exposure to hydrogen plasma 査読有り
Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Hirotaka Toyoda
Fusion Engineering and Design 170 巻 頁： 112532 2021年9月
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High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing 査読有り
H. Bae, K. Sasai, H. Suzuki, and H. Toyoda
Vacuum 192 巻 頁： 110429 2021年7月
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Spatial uniformity evaluation of atmospheric-pressure microwave line plasma for wide-area surface treatment 査読有り
Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Yosuke Koike, Hirotaka Toyoda
Plasma and Fusion Research 16 巻 頁： 1406046 2021年4月
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Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma 査読有り
Makoto Moriyama, Naoya Nakahara, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, Haruka Suzuki, and Hirotaka Toyoda
Japanese Journal of Applied Physics 60 巻 ( 1 ) 頁： 016001 2020年12月
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Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma 査読有り
Makoto Moriyama, Naoya Nakahara, Akihiro Mitsuya, Haruka Suzuki, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, and Hirotaka Toyoda
Japanese Journal of Applied Physics 59 巻 ( SJ ) 頁： SJJB03 2020年4月
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Atmospheric-pressure microwave line plasma with an asymmetric cross-section waveguide for long-scale N<sub>2</sub> plasma production 査読有り
Haruka Suzuki, Yuto Tamura, Manh Hung Chu and Hirotaka Toyoda
Japanese Journal of Applied Physics 59 巻 ( 1 ) 頁： 016002 2020年1月
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Rapid resist ashing by slot-excited atmospheric pressure microwave O<sub>2</sub> plasma 査読有り
Hirotaka Toyoda, Shota Ishikawa, Haruka Suzuki, Takeshi Honda
Japanese Journal of Applied Physics 58 巻 ( 12 ) 頁： 126001 2019年11月
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Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow 査読有り
Hikaru Senba, Haruka Suzuki, Hirotaka Toyoda
Japanese Journal of Applied Physics 58 巻 頁： SAAC05 2018年12月
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Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment 査読有り
Kensuke Sasai, Kazuki Keyamura, Haruka Suzuki, Hirotaka Toyoda
Japanese Journal of Applied Physics 57 巻 頁： 066201 2018年5月
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Quantitative evaluation of high-energy O<sup>-</sup> ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target 査読有り
Taku Suyama, Hansin Bae, Kenta Setaka, Hayato Ogawa, Yushi Fukuoka, Haruka Suzuki, Hirotaka Toyoda
Journal of Physics D: Applied Physics 50 巻 ( 44 ) 頁： 445201 2017年10月
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An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge 査読有り
Haruka Suzuki, Hirotaka Toyoda
Japanese Journal of Applied Physics 56 巻 ( 11 ) 頁： 116001 2017年9月
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Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition 査読有り
Kensuke Sasai, Toshiya Hagihara, Tomonori Noda, Haruka Suzuki, Hirotaka Toyoda
Japanese Journal of Applied Physics 55 巻 ( 8 ) 頁： 086202 2016年7月
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Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma 査読有り
Takafumi Takaba, Haruka Suzuki, Hirotaka Toyoda
Journal of Physics D: Applied Physics 49 巻 ( 29 ) 頁： 295202 2016年6月
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Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave 査読有り
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
Japanese Journal of Applied Physics 55 巻 ( 1S ) 頁： 01AH09 2015年12月
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Low-pressure sustainment of surface-wave microwave plasma with modified microwave coupler 査読有り
Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Japanese Journal of Applied Physics 55 巻 ( 1 ) 頁： 016203 2015年12月
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New line plasma source excited by 2.45 GHz microwave at atmospheric pressure 査読有り
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
Applied Physics Express 8 巻 ( 3 ) 頁： 036001 2015年2月
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Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation 査読有り
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa
Japanese Journal of Applied Physics 58 巻 ( SE ) 頁： SE802 2019年6月
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Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development 査読有り
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa
Japanese Journal of Applied Physics 58 巻 ( SE ) 頁： SE804 2019年6月
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Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? 査読有り
Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa
Japanese Journal of Applied Physics 58 巻 ( SE ) 頁： SE803 2019年6月