Organization
Center for Low-temperature Plasma Sciences (cLPS) Designated Lecturer
Title
Designated Lecturer
NGUYEN Thi Thuy Nga
Degree 2
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Doctor of Philosophy （ 2016.6 Feng Chia University (FCU), Taiwan ）
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Bachelor's Degree （ 2011.7 Hanoi University of Science and Technology (HUST), Vietnam ）
Awards 6
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Best Poster Presentation Award
2025.3 ISPlasma2025/IC-PLANTS2025 Low-Damage Plasma Etching of Metal Gate TiAlC Using Nonhalogen Chemistries at Room Temperature
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Shih-Nan Hsiao, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori
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2021.3 ISPlasma2021/IC-PLANTS2021 Design of Removal Process of SnO2 on Glass by H2/Ar Plasma at Atmospheric Pressure and Medium Pressure
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori, Nagoya University
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Best Poster Presentation Award
2017.3 ISPlasma2017/IC-PLANTS2017 The Influence of R2R-HIPIMS Ti-O Coatings on the NIR Reflectance/Cooling Effect of PET Fabric
Thi-Thuy-Nga Nguyen, Ying-Hung Chen, Zih-Min Chen, Kuo-Bing Cheng, Ju-Liang He, Feng Chia University, Taiwan
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Second Prize for Oral Presentations
2016.9 Organic/Inorganic Hybrid Material & Textile MOST Projects, Taiwan Conductive Yarn Obtained by Using R2R-HIPIMS
Thu-Trang Nguyen (阮朱蔷), Thi-Thuy-Nga Nguyen (阮氏翠兒)*, Ying-Hung Chen (陳瑛鴻), Min-Yi Chen (陳旻毅), Kuo-Bing Cheng (鄭國彬), Ju-Liang He (何主亮), Feng Chia University, Taiwan
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First Prize for Oral Presentations
2016.9 Organic/Inorganic Hybrid Material & Textile MOST Projects, Taiwan Hydrophobic-TiO/Fabric/Hydrophilic-TiO2 Prepared by Using Roll-to-Roll Dual High Power Impulse Magnetron Sputtering System
Thi-Thuy-Nga Nguyen (阮氏翠兒)*, Ying-Hung Chen(陳瑛鴻), Min-Yi Chen(陳旻毅), Kuo-Bing Cheng(鄭國彬), Ju-Liang He (何主亮), Feng Chia University, Taiwan
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Academic Excellence Award for Outstanding Academic Performance
2016.6 Department of Materials Science and Engineering, Feng Chia University, Taiwan
Thi-Thuy-Nga Nguyen
Papers 22
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Controlling etch selectivity of TiAlC and TiN films in nonhalogen N-H-O plasmas: Implications for DRAM peripheral transistor fabrication Reviewed Open Access
Thi-Thuy-Nga Nguyen*, Kazunori Shinoda, Makoto Miura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, Masaru Hori
Surfaces and Interfaces Vol. 74 ( 107664 ) 2025.10
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Selective dry etching of TiAlC over TiN using nonhalogen N2/H2 plasma Reviewed Open Access
Thi-Thuy-Nga Nguyen*, Kazunori Shinoda, Shih-Nan Hsiao, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, Masaru Hori
Applied Surface Science Vol. 691 ( 162665 ) 2025.5
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Low-temperature atomic layer etching of platinum via sequential wet-like reactions of plasma oxidation and complexation Reviewed Open Access
Thi-Thuy-Nga Nguyen*, Daijiro Akagi, Takeshi Okato, Kenji Ishikawa, Masaru Hori
Applied Surface Science Vol. 687 ( 162325 ) 2025.4
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Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation Reviewed Open Access
Liugang Hu, Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Shih-Nan Hsiao, Masaru Hori
Applied Surface Science Vol. 669 page： 160598 2024.10
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Nonhalogen Dry Etching of Metal Carbide TiAlC by Low-Pressure N2/H2 Plasma at Room Temperature Reviewed Open Access
Thi-Thuy-Nga Nguyen*, Kazunori Shinoda, Shih-Nan Hsiao, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, Masaru Hori
ACS Applied Materials & Interfaces Vol. 16 page： 53195 - 53206 2024.9
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Nitrogen admixture effects on growth characteristics and properties of carbon nanowalls Reviewed Open Access
Peter Raj Dennis Christy, Ngo Van Nong, Nikolay Britun, Ngo Quang Minh, Thi-Thuy-Nga Nguyen, Hiroki Kondo, Osamu Oda, Kenji Ishikawa, Masaru Hori
Thin Solid Films Vol. 795 page： 140322 2024.4
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Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching Reviewed Open Access
Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Yuta Aoki, Hiroyasu Sato, Junichi Kawakami, Shuji Tsuno, Shih-Nan Hsiao, Masaru Hori
Applied Surface Science Vol. 645 page： 158876 2024.2
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Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated SiN Films Using HF/H2 and CF4/H2 Plasmas Reviewed
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Makoto Sekine, Masaru Hori
ACS Applied Electronic Materials Vol. 12 page： 6797 - 6804 2023.12
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Bias-supply timing tailored to the aspect ratio dependence of silicon trench etching in Ar plasma with alternately injected C4F8 and SF6 Invited Reviewed Open Access
Taito Yoshie, Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Shih-Nan Hsiao, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori
Applied Surface Science Vol. 638 page： 157981 2023.11
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Deposition of carbon-based materials directly on copper foil and nickel foam as 2D- and 3D-networked metal substrates by in-liquid plasma Reviewed Open Access
Ma. Shanlene D. C. Dela Vega, Thi-Thuy-Nga Nguyen, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
Plasma Processes and Polymers Vol. 20 ( 11 ) page： e2300036 2023.8
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Manipulation of etch selectivity of silicon nitride over silicon dioxide to a-carbon by controlling substrate temperature with a CF4/H2 plasma Reviewed
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
Vacuum Vol. 210 page： 111863 2023.4
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Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma Reviewed Open Access
Thi-Thuy-Nga Nguyen*, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, Masaru Hori
Scientific Reports Vol. 12 page： 20394 2022.11
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Low-temperature reduction of SnO2 by floating wire-assisted medium-pressure H2/Ar plasma Reviewed
Thi-Thuy-Nga Nguyen*, Minoru Sasaki, Shih-Nan Hsiao, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
Plasma Processes and Polymers Vol. 19 page： 1 - 13 2022.2
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On the Etching Mechanism of Highly Hydrogenated SiN Films by CF4/D2 Plasma: Comparison with CF4/H2 Reviewed Open Access
Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
Coatings Vol. 11 ( 12 ) page： 1535 2021.12
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Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H2 plasma at different substrate temperatures Reviewed
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
Plasma Processes and Polymers Vol. 18 page： 2100078 2021.8
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Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H2/Ar plasma at atmospheric pressure Reviewed Open Access
Thi-Thuy-Nga Nguyen*, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa & Masaru Hori
Scientific Reports Vol. 10 page： 17770 2020.10
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Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass Reviewed
Thi-Thuy-Nga Nguyen*; Minoru Sasaki; Hidefumi Odaka; Takayoshi Tsutsumi; Kenji Ishikawa; Masaru Hori
Journal of Applied Physics Vol. 125 page： 063304 2019.2
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Microstructure, near infrared reflectance, and surface temperature of Ti-O coated polyethylene terephthalate fabrics prepared by roll-to-roll high power impulse magnetron sputtering system Reviewed
Thi-Thuy-Nga Nguyen*, Ying-Hung Chen, Zih-Min Chen, Kuo-Bing Cheng, Ju-Liang He
Thin Solid Films Vol. 663 page： 1 - 8 2018.10
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Multifunctional Ti-O coatings on polyethylene terephthalate fabric produced by using roll-to-roll high power impulse magnetron sputtering system Reviewed
Thi-Thuy-Nga Nguyen*, Ying-Hung Chen, Min-Yi Chen, Kuo-Bing Cheng, Ju-Liang He
Surface and Coatings Technology Vol. 324 page： 249 - 256 2017.9
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Preparation of titanium monoxide nanopowder by low-energy wet ball-milling Reviewed
Thi-Thuy-Nga Nguyen*, Ju-Liang He
Advanced Powder Technology Vol. 27 page： 1868 - 1873 2016.7
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One-step inkjet printing of tungsten oxide-poly(3,4-ethylenedioxythiophene):polystyrene sulphonate hybrid film and its applications in electrochromic devices Reviewed
Thi-Thuy-Nga Nguyen*, Chih-Yu Chan, Ju-Liang He
Thin Solid Films Vol. 603 page： 276 - 282 2016.3
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Preparation of inkjet-printed titanium monoxide as p-type absorber layer for photovoltaic purposes Reviewed
Thi-Thuy-Nga Nguyen*, Ying-Hung Chen, Ju-Liang He
Thin Solid Films Vol. 572 page： 8 - 14 2014.12
Presentations 22
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Wet-like atomic layer etching of WCN by applying the Leidenfrost effect to obtain floating nanomist-assisted vapor etching International conference
Thi-Thuy-Nga Nguyen*, Kazunori Shinoda, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori
The AVS 71 International Symposium and Exhibition 2025.9.24 American Vacuum Society
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Ti-O coated fabrics produced by roll-to-roll high power impulse magnetron sputtering (R2R-HIPIMS) for functional textile applications Invited International coauthorship
Thi-Thuy-Nga Nguyen, Kuo-Bing Cheng, Ju-Liang He
The 16th Global Plasma Forum 2024.11.8 Nagoya University
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A new challenge for developing novel atomic layer etching: Applying the Leidenfrost effect to obtain floating nanomist-assisted vapor etching International conference
Thi-Thuy-Nga Nguyen, Yoshihide Yamaguchi, Kazunori Shinoda, KuangDa Sun, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa and Masaru Hori
ALD/ALE 2024 2024.8
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Atomic layer etching of platinum with sequential exposure to high-density oxygen/argon plasma and formic acid vapor at low temperature International conference
Thi-Thuy-Nga Nguyen, Daijiro Akagi, Toshiyuki Uno, Takeshi Okato, Kenji Ishikawa, and Masaru Hori
ISPlasma2024/IC-PLANTS2024 2024.3
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Wet-like plasma for the next generation of atomic layer etching Invited International conference
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa and Masaru Hori
AAPPS-DPP2023 2023.11
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Surface reactions during atomic layer etching of platinum by high-density nitrogen-oxygen plasma and organic acid vapor International conference
Thi-Thuy-Nga Nguyen, Daijiro Akagi, Toshiyuki Uno, Takeshi Okato, Kenji Ishikawa, and Masaru Hori
AVS 69th International Symposium & Exhibition 2023.11
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Non-halogen plasma for selective removal of titanium compounds applied in advanced atomic layer etching International conference
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Shih-Nan Hsiao, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa and Masaru Hori
ALD/ALE 2023 2023.6
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Development and Application of Novel Atmospheric Pressure Plasma Invited
Thi-Thuy-Nga Nguyen
The Global Plasma Forum 12th, Japan 2023.3.26
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Etching Behavior of Lamellar Poly(styrene-b-2-vinylpyridine) Block Copolymer under N2/H2 Plasma Process International conference
Ma. Shanlene Dela Vega, Ayane Kitahara, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Atsushi Takano, Yushu Matsushita and Masaru Hori
ISPlasma2023/IC-PLANTS2023 2023.3
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Non-Halogen Plasma Etching of Metal Gate TiAlC International conference
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Shih-Nan Hsiao, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa and Masaru Hori
ISPlasma2023/IC-PLANTS2023 2023.3
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Selective dry etching of TiAlC over TiN using N2/H2 plasma chemistry International conference
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori
AVS 68th International Symposium & Exhibition 2022.11
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Surface modification for atomic layer etching of TiAlC using floating wire-assisted liquid vapor plasma at medium pressure International conference
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori
ALD/ALE 2022 2022.6
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Floating wire assisted plasma with vapor injection of liquid mixtures for etching titanium compounds International conference
Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori
AVS 67 Virtual Symposium 2021.10
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Quantitative Analyses of Graphene Layer Etching Using Oxygen Radicals Generated in Remote Plasma for Realization of Atomic Layer Etching International conference
Liugang Hu, Takayoshi Tsutsumi, Thi-Thuy-Nga Nguyen, Shih-Nan Hsiao, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Masaru Hori
ISPlasma2021/IC-PLANTS2021 2021.3
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Design of Removal Process of SnO2 on Glass by H2/Ar Plasma at Atmospheric Pressure and Medium Pressure International conference
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
ISPlasma2021/IC-PLANTS2021 2021.3
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Formation of spherical Sn particles from SnO2 film by atmospheric-pressure plasma International conference
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
ISPlasma2020/IC-PLANTS2020 2020.3
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Remote Generation of High-Density Atmospheric Pressure Inductively Coupled Plasma Invited
Thi-Thuy-Nga Nguyen
The 1st Global Plasma Forum 2020.2.20
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Novel Atmospheric Pressure Plasma for Large-Area Treatment International conference
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
The 11th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-11) 2019.12
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Floating-Wire-Assisted Atmospheric Pressure Plasma for High-Speed Glass Etching International conference
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
The 40th International Symposium on Dry Process (DPS2018) 2018.11
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Floating-Wire-Assisted Remote Generation of High-Density Atmospheric Pressure Inductively Coupled Plasma International conference
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
The 71st Annual Gaseous Electronics Conference (GEC) 2018.11
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Etching of glass by floating-wire assisted atmospheric pressure plasma
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
The 79th JSAP 2018.9
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The Influence of R2R-HIPIMS Ti-O Coatings on the NIR Reflectance/Cooling Effect of PET Fabric International conference
Thi-Thuy-Nga Nguyen, Ying-Hung Chen, Zih-Min Chen, Kuo-Bing Cheng, Ju-Liang He
ISPlasma2017/IC-PLANTS2017 2017.3