Updated on 2021/12/03

写真a

 
SAKAI Itsuko
 
Organization
Center for Low-temperature Plasma Sciences (cLPS) Designated professor
Title
Designated professor

Degree 1

  1. 博士(工学) ( 2018.9   名古屋大学 ) 

 

Papers 1

  1. Cyclic C4F8 and O2 plasma etching of TiO2 for high-aspect-ratio three-dimensional devices

    Tsubasa Imamura, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine and Masaru Hori

    The Japan Society of Applied Physics   Vol. 60 ( 3 ) page: 036001   2021.2