Organization
Center for Low-temperature Plasma Sciences (cLPS) Designated professor
Title
Designated professor
SAKAI Itsuko
Degree 1
-
博士(工学) （ 2018.9 名古屋大学 ）
Papers 1
-
Cyclic C4F8 and O2 plasma etching of TiO2 for high-aspect-ratio three-dimensional devices
Tsubasa Imamura, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine and Masaru Hori
The Japan Society of Applied Physics Vol. 60 ( 3 ) page： 036001 2021.2