Updated on 2022/01/14

写真a

 
MIYAZAKI, Seiichi
 
Organization
Graduate School of Engineering Electronics 2 Professor
Graduate School
Graduate School of Engineering
Undergraduate School
School of Engineering Electrical Engineering, Electronics, and Information Engineering
Title
Professor
Contact information
メールアドレス

Degree 1

  1. Dr. of Engineering ( 1986.3   Hiroshima University ) 

Research Interests 8

  1. 半導体ナノ構造

  2. 量子ドット

  3. High-k/メタルゲート

  4. 薄膜太陽電池

  5. 薄膜トランジスタ

  6. 抵抗変化メモリ

  7. フローティングゲートメモリデバイス

  8. 極微細MOSトランジスタ

Research Areas 2

  1. Others / Others  / Electronic Device/Electronic Equipment

  2. Others / Others  / Electron/Electric Material Engineering

Current Research Project and SDGs 3

  1. 半導体表面・界面の物性制御に関する研究

  2. 極微細MOSトランジスタおよび量子機能デバイスに関する研究

  3. 高効率太陽電池および高性能薄膜トランジスタ開発のためのシリコン系薄膜の研究

Research History 14

  1. Nagoya University   Professor

    2010.6

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    Country:Japan

  2. Nagoya University

    2021.4

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    Country:Japan

  3. Nagoya University   Synchrotron Radiation Research Center   Director in General

    2019.4

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    Country:Japan

  4. Nagoya University   Institute of Materials and Systems for Sustainability Center for Integrated Research of Future Electronics   Professor

    2017.4

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    Country:Japan

  5. 産業技術総合研究所   窒化物半導体先進デバイスOIL(兼務)   客員研究員

    2017.5

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    Country:Japan

  6. Hiroshima University   客員教授

    2010.8

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    Country:Japan

  7. Nagoya University   Graduate School of Engineering

    2017.4 - 2019.3

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    Country:Japan

  8. 南京大学   電子科学与工程学院(兼務)   兼職教授

    2014.12 - 2017.11

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    Country:China

  9. 南京大学   電子科学与工程学院(兼務)   兼職教授

    2010.10 - 2013.10

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    Country:China

  10. University of Tsukuba

    2011.9 - 2015.3

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    Country:Japan

  11. Hiroshima University   Professor

    2002.4 - 2010.5

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    Country:Japan

  12. Hiroshima University

    2001.4 - 2002.3

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    Country:Japan

  13. Hiroshima University

    1992.4 - 2001.3

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    Country:Japan

  14. Hiroshima University   Assistant

    1986.4 - 1992.3

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    Country:Japan

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Education 3

  1. Hiroshima University   Graduate School, Division of Engineering

    1983.4 - 1986.3

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    Country: Japan

  2. Hiroshima University   Graduate School, Division of Engineering

    1981.4 - 1983.3

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    Country: Japan

  3. Hiroshima University   Faculty of Engineering

    1977.4 - 1981.3

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    Country: Japan

Professional Memberships 12

  1. 日本表面科学会   中部支部役員

    2011.5 - 2012.3

  2. 応用物理学会   理事

    2011.4

  3. 応用物理学会   国際委員会委員

    2009.4

  4. 電子情報通信学会   シリコン材料・デバイス研究専門委員会委員

    1998.4

  5. 応用物理学会   中国四国支部幹事

    1995.4 - 2011.3

  6. 応用物理学会   薄膜・表面物理分科会 幹事, 常任幹事 1997-,1998-1999

  7. 応用物理学会   代議員, 評議員, 2000-2003,2008-

  8. 応用物理学会   シリコンテクノロジー分科会 幹事, 常任幹事, 副幹事長, 幹事長 1999-,2003-2004,2007-2008,2009-2010

  9. The Electrochemical Society

  10. Material Reseach Society

  11. The Materials Research Society of Japan

  12. The Vacuum Society of Japan

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Committee Memberships 94

  1. (公益財団法人)立松財団   理事  

    2021.4 - 2023.3   

  2. (国立大学法人)東京農工大学   テニュア付与外部審査委員  

    2021.2 - 2021.3   

  3. The Electrochemical Society(ECS)日本支部   日本支部長  

    2021.1 - 2022.12   

  4. (公益社団法人)応用物理学会 2021年国際固体素子・材料コンファレンス(SSDM2021)   組織委員  

    2021.1 - 2021.12   

  5. (公益社団法人)応用物理学会 ISPlasma2021/IC-PLANTS2021組織委員会   編集委員会 委員  

    2021.1 - 2021.11   

  6. (公益社団法人)応用物理学会 ISPlasma2021/IC-PLANTS2021組織委員会   組織委員会 委員  

    2020.11 - 2021.3   

  7. (公益社団法人)応用物理学会 ISPlasma2021/IC-PLANTS2021組織委員会   プログラム委員会 委員  

    2020.11 - 2021.3   

  8. (公益財団法人)岐阜県産業経済振興センター   研究開発委員会 委員(アドバイザー)  

    2020.9 - 2023.3   

  9. (独立行政法人)日本学術振興会 R025先進薄膜界面機能創成委員会   委員  

    2020.6   

  10. (公益社団法人)応用物理学会 薄膜・表面物理分科会 電子デバイス界面テクノロジー研究会   運営委員  

    2020.5 - 2021.3   

  11. (公益社団法人)応用物理学会 薄膜・表面物理分科会 2021 IWDTF組織委員会   2021 IWDTF組織委員  

    2020.4 - 2021.11   

  12. 国際会議 Int. SiGe Technology and Device Meeting (ISTDM) 3rd 2021(Taipei))   諮問委員  

    2020   

  13. 第34回日本放射光学会年会・放射光科学合同シンポジウム(JSR2021)(開催日:2021年1月8-10日、開催形態:オンライン)   組織委員  

    2020 - 2021   

  14. ECS Trans. Vol. 98, No. 5 (2020)   学術論文編集委員  

    2020   

  15. 広島大学 HiSIM研究センター   人事選考委員会委員  

    2019.8 - 2020.4   

  16. (公益財団法人)科学技術交流財団   あいちシンクロトロン光センター運営委員会委員  

    2019.5 - 2021.5   

  17. (公益社団法人)応用物理学会 薄膜・表面物理分科会   顧問  

    2019.4   

  18. 東京医科歯科大学   生体医歯工学共同研究拠点運営委員会委員  

    2019.4 - 2022.3   

  19. 第33回日本放射光学会年会・放射光科学合同シンポジウム(JSR2020)(開催日:2020年1月10-12日、開催地:名古屋)   副実行委員長/プログラム委員/組織委員  

    2019 - 2020   

  20. (公益社団法人)日本工学教育協会   事業企画委員会委員  

    2018.6 - 2020.6   

  21. (公益社団法人)日本表面真空学会 中部支部   役員  

    2018.5   

  22. (独立行政法人)日本学術振興会 協力会   評議員  

    2018.5 - 2020.9   

  23. (公益財団法人)立松財団   選考委員  

    2018.3 - 2023.6   

  24. (公益社団法人)応用物理学会 東海支部   諮問委員  

    2017.4 - 2023.3   

  25. (公益社団法人)応用物理学会   応用物理学学術・教育奨励基金委員会委員  

    2015 - 2021.3   

  26. (独立行政法人)日本学術振興会 半導体界面制御技術第154委員会   委員長  

    2013.4 - 2020.6   

  27. 応用物理学会 第52期応用物理学委員会   講演会企画運営委員、講演奨励賞委員  

    2013.4 - 2014.4   

  28. ISPlasma2014組織委員会   組織委員、プログラム委員  

    2013.4 - 2014.3   

  29. DPS2013第35回ドライプロセスシンポジウム組織委員会   論文委員  

    2013.2 - 2014.11   

  30. 応用物理学会諮問委員会   諮問委員  

    2013.2 - 2014.2   

  31. 2013IWDTF組織委員会   組織委員  

    2012.10 - 2013.11   

  32. 応用物理学会 薄膜・表面物理分科会 第18回ゲートスタック研究会   運営委員  

    2012.4 - 2013.3   

  33. Int. Symp on Dry Process Symp. 2011   Vice-Chair  

    2012.4 - 2012.11   

  34. 応用物理学会    代議員  

    2012.2 - 2014.1   

  35. 高輝度光科学研究センターSPring-8成果審査委員会   査読者  

    2012.1 - 2014.3   

  36. 2012年国際固体素子・材料コンファレンス (SSDM2012)   論文委員長  

    2011.12 - 2012.12   

  37. ISPlasma2012組織委員会   プログラム委員会委員  

    2011.12 - 2012.4   

  38. 電子情報通信学会 エレクトロニクスソサイエティ英文論文誌編集委員会   編集委員  

    2011.9 - 2012.5   

  39. 日本学術振興会 薄膜第131委員会   企画委員  

    2011.7 - 2012.3   

  40. SPring-8利用研究課題審査委員会分科会   レフェリー  

    2011.6 - 2013.3   

  41. 応用物理学会 シリコンテクノロジー分科会   諮問委員  

    2011.4   

  42. (公益社団法人)応用物理学会 シリコンテクノロジー分科会   諮問委員  

    2011.4   

  43. 応用物理学会 講演会企画・運営委員会、講演奨励賞委員会   委員  

    2011.4 - 2013.3   

  44. 応用物理学会 東海支部   幹事  

    2011.4 - 2013.3   

  45. 応用物理学会    理事  

    2011.4 - 2013.3   

  46. 日本表面科学会 中部支部   中部支部役員  

    2011.4 - 2012.3   

  47. Int. Symp on Dry Process Symp. 2011   Vice-Chair  

    2011.4 - 2011.11   

  48. 応用物理学会 薄膜・表面物理分科会 第17回ゲートスタック研究会   運営委員  

    2011.3 - 2012.3   

  49.   国際会議諮問委員  

    2011.1 - 2012.3   

  50.   国際会議組織運営委員・国際会議実行委員  

    2011.1 - 2012.3   

  51. 第24回アモルファスおよびナノ結晶半導体国際会議組織運営委員会(ICANS24)   国際会議組織運営委員・出版委員  

    2011.1 - 2011.12   

  52.   国際会議組織運営委員  

    2011.1 - 2011.11   

  53. 第15回薄膜国際会議 組織委員会(ICTF-15)   国際会議組織運営委員  

    2011.1 - 2011.11   

  54. 国際会議 Int. Symp on Dry Process Symp. (DPS; 2005 - 2009, 2011~ )   プログラム委員  

    2011   

  55. 2011年国際固体素子・材料コンファレンス(SSDM2011)   国際会議プログラム委員・副委員長  

    2010.12 - 2011.12   

  56. 日本学術振興会 科学研究費委員会   専門委員  

    2010.12 - 2011.11   

  57. ISPlasma2011組織委員会   国際会議組織運営委員  

    2010.7 - 2011.4   

  58. Int. Symp on Dry Process Symp. (DPS2010)   Chair  

    2010.1 - 2010.12   

  59. 応用物理学会    2009年度支部学術講演会 実行委員長  

    2009.8   

  60. 応用物理学会 シリコンテクノロジー分科会   幹事長  

    2009.4 - 2011.3   

  61. 応用物理学会 国際委員会   委員  

    2009.4 - 2010.3   

  62. Int. Symp on Dry Process Symp. (DPS2009)   Vice-chair  

    2009.1 - 2009.12   

  63. 日本学術振興会 アモルファス・ナノ材料第147委員会   委員  

    2008.4   

  64. 日本学術振興会 半導体界面制御技術第154委員会   企画幹事長  

    2008.4 - 2013.3   

  65. 応用物理学会    評議員  

    2008.4 - 2010.3   

  66. 応用物理学会 シリコンテクノロジー分科会   副幹事長  

    2008.4 - 2010.3   

  67.   国際会議プログラム委員  

    2008.4 - 2009.4   

  68.   国際会議実行委員  

    2008.1 - 2008.12   

  69. (独立行政法人)日本学術振興会 アモルファス・ナノ材料第147委員会   委員  

    2008   

  70.   国際会議組織運営委員・国際会議実行委員  

    2007.1 - 2007.12   

  71. 第30回ドライプロセスシンポジウム組織委員会(DPS2008)   国際会議プログラム委員  

    2005.4 - 2009.11   

  72.   プログラム委員  

    2005.1   

  73. 日本学術振興会 半導体界面制御技術第154委員会   企画副幹事長  

    2004.4 - 2007.3   

  74.   国際会議諮問委員   

    2004.1 - 2004.12   

  75. 応用物理学会 シリコンテクノロジー分科会   常任幹事  

    2003.4 - 2005.3   

  76. 電気学会 システム集積プロセス調査専門委員会   委員  

    2003.3 - 2006.3   

  77.   国際会議実行委員  

    2003.1 - 2003.12   

  78. e-Journal of Surf. Sci. and Nanotechnology, Ed. Board Member   学術論文編集委員  

    2003   

  79. 日本学術振興会 半導体界面制御技術第154委員会   企画幹事  

    2001.4 - 2003.3   

  80.   プログラム委員  

    2000.4   

  81. 応用物理学会    代議員  

    2000.4 - 2003.3   

  82. 電気学会 グローバルインテグレーションプロセス調査専門委員会   委員  

    2000.3 - 2003.3   

  83. 応用物理学会 シリコンテクノロジー分科会   幹事  

    1999.4 - 2010.3   

  84. 日本学術振興会 薄膜第131委員会   庶務幹事  

    1999.4 - 2003.3   

  85. 応用物理学会    第59回応用物理学会学術講演会 現地実行委員  

    1998.9   

  86. (一般社団法人)電子情報通信学会 シリコン材料・デバイス研究専門委員会   SDM研究専門委員会 専門委員  

    1998.5 - 2021.6   

  87. 電気情報通信学会 シリコン材料・デバイス研究専門委員会   専門委員  

    1998.5 - 2013.5   

  88. 日本学術振興会 プラズマ材料科学第153委員会   委員  

    1998.4 - 2002.3   

  89. 応用物理学会 薄膜・表面分科会   常任幹事  

    1998.4 - 1999.3   

  90. 応用物理学会 薄膜・表面分科会   幹事  

    1997.4 - 1998.3   

  91. 電気学会 プロセス・インテグレーション調査専門委員会   委員  

    1997.3 - 2000.3   

  92. 応用物理学会 中国四国支部   幹事  

    1995.4 - 2010.3   

  93. 日本学術振興会 薄膜第131委員会   委員  

    1993.3 - 2011.3   

  94. (独立行政法人)日本学術振興会 薄膜第131委員会   委員  

    1993 - 2020.6   

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Awards 6

  1. ISPlasma2012 Best Presentation Award

    2011.3   ISPlasma2012 Organizing Committee Chair  

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    Country:Japan

  2. 応用物理学会 中国四国支部 貢献賞

    2010.7   (社)応用物理学会 中国四国支部  

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    Country:Japan

  3. JSAP Fellow Award

    2009.9   The Japan Society of Applied Physics  

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    Country:Japan

  4. Selete Achievement Award

    2004.5   Semiconductor Leading Edge Technologies, Inc.  

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    Country:Japan

  5. Jpn. J. Appl. Phys. Editorial Contribution Award

    2003.4   The Japan Society of Applied Physics  

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    Country:Japan

  6. Inoue Research Award for Young Scientists

    1987.2   Inoue Foundation for Science  

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    Country:Japan

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Papers 270

  1. Segregation control for ultrathin Ge layer in Al/Ge(111) system Reviewed International journal

    A. Ohta, M. Kobayashi, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 61 ( SA ) page: SA1014 (7 pages)   2022.1

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ac19ff

  2. Effect of substrate temperature on plasma-enhanced self-assembling formation of high-density FePt nanodots Reviewed International journal

    S. Honda, K. Makihara, N. Taoka, H. Furuhata, A. Ohta, D. Oshima, T. Kato, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 61 ( SA ) page: SA1008 (5 pages)   2022.1

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ac2036

  3. Single germanene phase formed by segregation through Al(111) thin films on Ge(111) Reviewed International coauthorship International journal

    J. Yuhara, H. Muto, M. Araidai, M. Kobayashi, A. Ohta, S. Miyazaki, S. Takakura, M. Nakatake, and G. L. Lay

    2D Materials   Vol. 8 ( 4 ) page: 045039   2021.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/2053-1583/ac2bef

  4. Epitaxial growth of massively parallel germanium nanoribbons by segregation through Ag(1 1 0) thin films on Ge(1 1 0) Reviewed

    J. Yuhara, H. Shimazu, M. Kobayashi, A. Ohta, S. Miyazaki, S. Takakura, M. Nakatake, and G. L. Lay

    Appl. Surf. Sci.   Vol. 550   page: 149236 (7 pages)   2021.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.apsusc.2021.149236

  5. Surface flattening and Ge crystalline segregation of Ag/Ge structure by thermal anneal Reviewed

    A. Ohta, K. Yamada, H. Sugawa, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 60 ( SB ) page: SBBK05 (6 pages)   2021.5

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/abdad0

  6. Energy band diagram for SiO2/Si system as evaluated from UPS analysis under vacuum ultraviolet with variable incident photon energy Reviewed

    A. Ohta, T. Imagawa, N. Taoka, M. Ikeda, K. Makihara and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 60 ( SA ) page: SAAC02 (6 pages)   2021.1

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/abb75b

  7. Impact of Boron Doping and H2 Annealing on Light Emission from Ge/Si Core-Shell Quantum Dots Invited Reviewed

    S. Miyazaki, and K. Makihara

    ECS Transactions   Vol. 104 ( 4 ) page: 105 - 112   2021

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1149/10404.0105ecst

  8. Effect of B-doping on photoluminescence properties of Si quantum dots with Ge core Reviewed

    K. Makihara, S. Fujimori, M. Ikeda, A. Ohta, and S. Miyazaki

    Materials Science in Semiconductor Processing   Vol. 120   page: 105250 (5 pages)   2020.12

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mssp.2020.105250

    Web of Science

  9. Characterization of photoluminescence from Si quantum dots with B δ-doped Ge core Reviewed

    T. Maehara, S. Fujimori, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki

    Materials Science in Semiconductor Processing   Vol. 119 ( 15 ) page: 105215 (4 pages)   2020.11

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mssp.2020.105215

    Web of Science

  10. Electron Field Emission from Multiply-Stacked Si Quantum Dots Structures with Graphene Top-Electrode Reviewed

    T. Niibayashi, T. Takemoto, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ECS Transactions   Vol. 98 ( 5 ) page: 429-434   2020.9

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    DOI: 10.1149/09805.0429ecst

  11. Crystallization of Ge Thin Films on Sapphire(0001) by Thermal Annealing Reviewed

    H. Sugawa, A. Ohta, M. Kobayashi, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki

    ECS Transactions   Vol. 98 ( 5 ) page: 505-511   2020.9

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    DOI: 10.1149/09805.0505ecst

  12. Characterization of Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots by Using a Magnetic AFM Probe Reviewed

    J. Wu, H. Zhang, H. Furuhata, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    ECS Transactions   Vol. 98 ( 5 ) page: 493-498   2020.9

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    DOI: 10.1149/09805.0493ecst

  13. Complex dielectric function of Si oxide as evaluated from photoemission measurements Reviewed

    A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 59 ( SM ) page: SMMB04 (8 pages)   2020.7

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    DOI: 10.35848/1347-4065/ab8c99

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  14. Formation of ultrathin segregated-Ge crystal on Al/Ge(111) surface Reviewed

    M. Kobayashi, A. Ohta, M. Kurosawa, M. Araidai, N. Taoka, T. Simizu, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 59 ( SG ) page: SGGK15 (6 pages)   2020.4

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    DOI: 10.35848/1347-4065/ab69de

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  15. Comparative study of photoluminescence properties obtained from SiO2/GaN and Al2O3/GaN structures Reviewed

    N. Takada, N. Taoka, A. Ohta, T. Yamamoto, N. X. Truyen, H. Yamada, T. Takahashi, M. Ikeda, K. Makihara, M. Shimizu, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 58 ( SI ) page: SIIB22 (5 pages)   2019.8

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    DOI: 10.7567/1347-4065/ab26ac

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  16. Impact of surface pre-treatment on Pt-nanodot formation induced by remote H2-plasma exposure Reviewed

    S. Fujimori, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 58 ( SI ) page: SIIA15 (4 pages)   2019.8

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    DOI: 10.7567/1347-4065/ab23f9

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  17. Effect of H2-dilution in Si-cap formation on photoluminescence intensity of Si quantum dots with Ge core Reviewed

    S. Fujimori, R. Nagai, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 58 ( SI ) page: SIIA01 (4 pages)   2019.8

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    DOI: 10.7567/1347-4065/ab0c7a

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  18. Characterization of Electron Field Emission from Multiple-Stacking Si-Based Quantum Dots Reviewed

    Y. Futamura, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E102.C ( 6 ) page: 458 - 461   2019.6

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    DOI: 10.1587/transele.2018FUP0007

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  19. Impact of remote plasma oxidation of a GaN surface on photoluminescence properties Reviewed

    N. Takada, N. Taoka, T. Yamamoto, A. Ohta, N. X. Truyen, H. Yamada, T. Takahashi, M. Ikeda, K. Makihara, M. Shimizu, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 58 ( SE ) page: SEEC02 (4 pages)   2019.6

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    DOI: 10.7567/1347-4065/ab09c9

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  20. Evaluation of the potential distribution in a multiple stacked Si quantum dots structure by hard X-ray photoelectron spectroscopy Reviewed

    Y. Futamura, Y. Nakashima, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 58 ( SA ) page: SAAE01 (4 pages)   2019.2

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    DOI: 10.7567/1347-4065/aaeb38

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  21. Photoemission-Based Characterization of Gate Dielectrics and Stack Interfaces Invited Reviewed

    S. Miyazaki, and A. Ohta

    ECS Transactions   Vol. 92 ( 4 ) page: 11 - 19   2019

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    DOI: 10.1149/09204.0011ecst

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  22. Characterization of electron charging and transport properties of Si-QDs with phosphorus doped Ge core Reviewed

    R. Nagai, K. Yamada, S. Fujimori, M. Ikeda, K. Makihara, A. Ohta, and S. Miyazaki

    Semiconductor Science and Technology   Vol. 33 ( 12 ) page: 124021   2018.12

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    DOI: 10.1088/1361-6641/aaebbc

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  23. Activation mechanism of TiOx passivating layer on crystalline Si Reviewed

    T. Mochizuki, K. Gotoh, A. Ohta, S. Ogura, Y. Kurokawa, S. Miyazaki, K. Fukutani, and N. Usami

    Applied Physics Express   Vol. 11 ( 10 ) page: 102301 (4 pages)   2018.10

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    DOI: 10.7567/APEX.11.102301

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  24. Energy band structure and electrical properties of Ga-oxide/GaN interface formed by remote oxygen plasma Reviewed

    T. Yamamoto, N. Taoka, A. Ohta, N. X. Truyen, H. Yamada, T. Takahashi, M. Ikeda, K. Makihara, O. Nakatsuka, M. Shimizu, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 6S3 ) page: 06KA05 (5 pages)   2018.6

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    DOI: 10.7567/JJAP.57.06KA05

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  25. Low-temperature formation of Ga-oxide/GaN interface with remote oxygen plasma and its interface properties Reviewed

    T. Yamamoto, N. Taoka, A. Ohta, N. X. Truyen, H. Yamada, T. Takahashi, M. Ikeda, K. Makihara, M. Shimizu, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 6S2 ) page: 06JE01 (5 pages)   2018.6

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    DOI: 10.7567/JJAP.57.06JE01

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  26. Interface properties of SiO2/GaN structures formed by chemical vapor deposition with remote oxygen plasma mixed with Ar or He Reviewed

    N. X. Truyen, N. Taoka, A. Ohta, K. Makihara, H. Yamada, T. Takahashi, M. Ikeda, M. Shimizu, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 6S3 ) page: 06KA01 (7 pages)   2018.6

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    DOI: 10.7567/JJAP.57.06KA01

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  27. Growth of two-dimensional Ge crystal by annealing of heteroepitaxial Ag/Ge(111) under N2 ambient Reviewed

    K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 6S1 ) page: 06HD08 (5 pages)   2018.6

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    DOI: 10.7567/JJAP.57.06HD08

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  28. Evaluation of resistive switching properties of Si-rich oxide embedded with Ti nanodots by applying constant voltage and current Reviewed

    A. Ohta, Y. Kato, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 6S1 ) page: 06HD05 (4 pages)   2018.6

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    DOI: 10.7567/JJAP.57.06HD05

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  29. Total photoelectron yield spectroscopy of energy distribution of electronic states density at GaN surface and SiO2/GaN interface Reviewed

    A. Ohta, N. X. Truyen, N. Fujimura, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 6S3 ) page: 06KA08 (6 pages)   2018.6

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    DOI: 10.7567/JJAP.57.06KA08

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  30. Direct evaluation of electrical dipole moment and oxygen density ratio at high-k dielectrics/SiO2 interface by X-ray photoelectron spectroscopy analysis Reviewed

    N. Fujimura, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 4S ) page: 04FB07 (5 pages)   2018.4

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    DOI: 10.7567/JJAP.57.04FB07

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  31. High thermal stability of abrupt SiO2/GaN interface with low interface state density Reviewed

    N. X. Truyen, N. Taoka, A. Ohta, K. Makihara, H. Yamada, T. Takahashi, M. Ikeda, M. Shimizu, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 4S ) page: 04FG11 (5 pages)   2018.4

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    DOI: 10.7567/JJAP.57.04FG11

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  32. Segregated SiGe ultrathin layer formation and surface planarization on epitaxial Ag(111) by annealing of Ag/SiGe(111) with different Ge/(Si + Ge) compositions Reviewed

    K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 4S ) page: 04FJ05 (6 pages)   2018.4

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    DOI: 10.7567/JJAP.57.04FJ05

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  33. Characterization of remote O2-plasma-enhanced CVD SiO2/GaN(0001) structure using photoemission measurements Reviewed

    N. X. Truyen, A. Ohta, K. Makihara, M. Ikeda, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 1S ) page: 01AD02 (5 pages)   2018.1

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    DOI: 10.7567/JJAP.57.01AD02

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  34. Formation of Mn-germanide nanodots on ultrathin SiO2 induced by remote hydrogen plasma Reviewed

    Y. Wen, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 57 ( 1S ) page: 01AF05 (4 pages)   2018.1

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    DOI: 10.7567/JJAP.57.01AF05

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  35. Electroluminescence of superatom-like Ge-core/Si-shell quantum dots by alternate field-effect-induced carrier injection Reviewed

    K. Makihara, M. Ikeda, N. Fujimura, K. Yamada, A. Ohta, and S. Miyazaki

    Applied Physics Express   Vol. 11 ( 1 ) page: 011305 (4 pages)   2018.1

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    DOI: 10.7567/APEX.11.011305

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  36. High Density Formation and Magnetoelectronic Transport Properties of Fe3Si Nanodots Reviewed

    H. Zhang, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    ECS Transactions   Vol. 86 ( 7 ) page: 131 - 138   2018

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    DOI: 10.1149/08607.0131ecst

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  37. Impact of phosphorus doping to multiple-stacked Si quantum dots on electron emission properties Reviewed

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    Materials Science in Semiconductor Processing   Vol. 70   page: 183 - 187   2017.11

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    DOI: 10.1016/j.mssp.2016.12.015

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  38. Magnetoelectronic transport of double stack FePt nanodots Reviewed

    K. Makihara, T. Kawase, A. Ohta, M. Ikeda, and S. Miyazaki

    Appl. Phys. Lett   Vol. 111 ( 5 ) page: 052403 (4 pages)   2017.7

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    DOI: 10.1063/1.4985603

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  39. Evaluation of energy distribution of filled defects of Si oxide thin films from total photoelectron yield spectroscopy Reviewed

    A. Ohta, M. Ikeda, K. Makihara, and S. Miyazakia

    Microelectronic Engineering   Vol. 178   page: 85 - 88   2017.6

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    DOI: 10.1016/j.mee.2017.05.001

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  40. Potential changes and chemical bonding features for Si-MOS structure as evaluated from HAXPES analysis Reviewed

    A. Ohta, H. Murakami, M. Ikeda, K. Makihara, E. Ikenaga, and S. Miyazaki

    Microelectronic Engineering   Vol. 178   page: 80 - 84   2017.6

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    DOI: 10.1016/j.mee.2017.05.002

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  41. Low-temperature formation of crystalline Si:H/Ge:H heterostructures by plasma-enhanced CVD in combination with Ni-nanodots seeding nucleation Reviewed

    Y. Lu, K. Makihara, D. Takeuchi, M. Ikeda, A. Ohta, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 56 ( 6S1 ) page: 06GG07 (4 pages)   2017.6

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    DOI: 10.7567/JJAP.56.06GG07

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  42. Embedding of Ti Nanodots into SiOx and Its Impact on Resistance Switching Behaviors Reviewed

    Y. Kato, A. Ohta, M. Ikeda, K. Makihara, S. Miyazaki

    IEICE Transactions on Electronics   Vol. E100.C ( 5 ) page: 468 - 474   2017.5

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    DOI: 10.1587/transele.E100.C.468

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  43. Photoemission study on electrical dipole at SiO2/Si and HfO2/SiO2 interfaces Reviewed

    N. Fujimura, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 56 ( 4S ) page: 04CB04 (6 pages)   2017.4

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    DOI: 10.7567/JJAP.56.04CB04

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  44. Effects of remote hydrogen plasma on chemical bonding features and electronic states of 4H-SiC(0001) surface Reviewed

    N. X. Truyen, A. Ohta, K. Makihara, M. Ikeda, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 56 ( 1S ) page: 01AF01 (5 pages)   2017.1

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    DOI: 10.7567/JJAP.56.01AF01

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  45. High-density formation of Ta nanodot induced by remote hydrogen plasma Reviewed

    Y. Wang, D. Takeuchi, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 56 ( 1S ) page: 01AE01 (4 pages)   2017.1

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    DOI: 10.7567/JJAP.56.01AE01

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  46. Characterization of Interfacial Dipoles at Dielectric Stacks by XPS Analysis Invited Reviewed

    S. Miyazaki, A. Ohta, and N. Fujimura

    ECS Transactions   Vol. 80 ( 1 ) page: 229 - 235   2017

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    DOI: 10.1149/08001.0229ecst

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  47. Photoemission Study of Gate Dielectrics on Gallium Nitride Invited Reviewed

    S. Miyazaki, N. X. Truyen, A. Ohta, and T. Yamamoto

    ECS Transactions   Vol. 79 ( 1 ) page: 119 - 127   2017

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    DOI: 10.1149/07901.0119ecst

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  48. Processing and Characterization of High Density Si/Ge Quantum Dots for Electroluminescent Devices Invited Reviewed

    S. Miyazaki, K. Yamada, K. Makihara, and M. Ikeda

    ECS Transactions   Vol. 80 ( 4 ) page: 167 - 172   2017

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    DOI: 10.1149/08004.0167ecst

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  49. Nano spin-diodes using FePt-NDs with huge on/off current ratio at room temperature Reviewed

    K. Makihara, T. Kato, Y. Kabeya, Y. Mitsuyuki, A. Ohta, D. Oshima, S. Iwata, Y. Darma, M. Ikeda, and S. Miyazaki

    Scientific Reports   Vol. 6   page: 33409 (7 pages)   2016.9

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    DOI: 10.1038/srep33409

  50. Evaluation of valence band top and electron affinity of SiO2 and Si-based semiconductors using X-ray photoelectron spectroscopy Reviewed

    N. Fujimura, A. Ohta, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 55 ( 8S2 ) page: 08PC06 (5 pages)   2016.8

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    DOI: 10.7567/JJAP.55.08PC06

  51. Impact of embedded Mn nanodots on resistive switching characteristics of Si-rich oxides as measured in Ni-electrode metal–insulator–metal diodes Reviewed

    T. Arai, A. Ohta, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 55 ( 6S1 ) page: 06GH07 (5 pages)   2016.6

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    DOI: 10.7567/JJAP.55.06GH07

  52. Bonding and Electron Energy-Level Alignment at Metal/TiO2 Interfaces: A Density Functional Theory Study Reviewed

    H. Chen, P. Li, N. Umezawa, H. Abe, J. Ye, K. Shiraishi, A. Ohta, and S. Miyazaki

    The Journal of Physical Chemistry   Vol. 120 ( 10 ) page: 5549 - 5556   2016.3

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    DOI: 10.1021/acs.jpcc.5b12681

  53. Evaluation of field emission properties from multiple-stacked Si quantum dots Reviewed

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    Thin Solid Films   Vol. 602   page: 68 - 71   2016.3

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    DOI: 10.1016/j.tsf.2015.10.070

  54. Study on electroluminescence from multiply-stacking valency controlled Si quantum dots Reviewed

    T. Yamada, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    Thin Solid Films   Vol. 602   page: 48 - 51   2016.3

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    DOI: 10.1016/j.tsf.2015.10.007

  55. Photoluminescence study of high density Si quantum dots with Ge core Reviewed

    K. Kondo, K. Makihara, M. Ikeda, and S. Miyazaki

    Journal of Applied Physics   Vol. 119 ( 3 ) page: 033103 (5 pages)   2016.1

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    DOI: 10.1063/1.4940348

  56. Formation and characterization of high-density FeSi nanodots on SiO2 induced by remote H2 plasma Reviewed

    H. Zhang, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 55 ( 1S ) page: 01AE20 (4 pages)   2016.1

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    DOI: 10.7567/JJAP.55.01AE20

  57. The interface analysis of GaN grown on 0° off 6H-SiC with an ultra-thin buffer layer Reviewed

    Z. Sun, A. Ohta, S. Miyazaki, K. Nagamatsu, H. Lee, M. Olsson, Z. Ye, M. Deki, Y. Honda, and H. Amano

    Jpn. J. Appl. Phys.   Vol. 55 ( 1 ) page: 010303 (3 pages)   2016.1

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    DOI: 10.7567/JJAP.55.010303

  58. Evaluation of Dielectric Function of Thermally-grown SiO2 and GeO2 from Energy Loss Signals for XPS Core-line Photoelectrons Reviewed

    T. Yamamoto, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    ECS Transactions   Vol. 75 ( 8 ) page: 777 - 783   2016

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    DOI: 10.1149/07508.0777ecst

  59. Processing and characterization of Si/Ge quantum dots Reviewed

    S. Miyazaki, K. Makihara, A. Ohta, and M. Ikeda

    2016 IEEE International Electron Devices Meeting (IEDM)     page: 826 (33.2.1) - 830 (33.2.4)   2016

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    DOI: 10.1109/IEDM.2016.7838532

  60. Effect of Ge Core Size on Photoluminescence from Si Quantum Dots with Ge Core Reviewed

    K. Yamada, K. Kondo, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    ECS Transactions   Vol. 75 ( 8 ) page: 695 - 700   2016

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    DOI: 10.1149/07508.0695ecst

  61. High Density Formation of FePt Alloy Nanodots Induced by Remote Hydrogen Plasma and Characterization of their Magnetic Properties Reviewed

    R. Fukuoka, K. Makihara, H. Zhang, A. Ohta, T. Kato, S. Iwata, M. Ikeda, and S. Miyazaki

    Transactions of the Materials Research Society of Japan   Vol. 40 ( 4 ) page: 347-350   2015.12

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    DOI: 10.14723/tmrsj.40.347

  62. Electronic defect states in thermally-grown SiO2/4H-SiC structure measured by total photoelectron yield spectroscopy Reviewed

    A. Ohta, K. Makihara, and S. Miyazaki

    Microelectronic Engineering   Vol. 147   page: 264-268   2015.11

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    DOI: 10.1016/j.mee.2015.04.093

  63. Progress in determination method for ultrathin Si-based oxide bandgaps from analysis of energy loss signals for photoelectrons Reviewed

    A. Ohta, H. Murakami, K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 54 ( 6S1 ) page: 06FH08 (5 pages)   2015.6

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    DOI: 10.7567/JJAP.54.06FH08

  64. Resistance-Switching Characteristics of Si-rich Oxide Evaluated by Using Ni Nanodots as Electrodes in Conductive AFM Measurements Reviewed

    A. Ohta, C. Liu, T. Arai, D. Takeuchi, H. Zhang, K. Makihara, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E98.C ( 5 ) page: 406-410   2015.5

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    DOI: 10.1587/transele.E98.C.406

  65. High-Resolution Photoemission Study of High-k Dielectric Bilayer Stack on Ge(100) Invited Reviewed

    S. Miyazaki, and A. Ohta

    ECS Transactions   Vol. 69 ( 10 ) page: 165-170   2015

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    DOI: 10.1149/06910.0165ecst

  66. Resistive Switching Characteristics of Si-Rich Oxides with Embedding Ti Nanodots Reviewed

    Y. Kato, T. Arai, A. Ohta, K. Makihara, and S. Miyazaki

    ECS Transactions   Vol. 69 ( 10 ) page: 291-298   2015

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    DOI: 10.1149/06910.0291ecst

  67. Photoemission Study on Chemical Bonding Features and Electronic Defect States of Thermally-Grown SiO2/4H-SiC Structure Reviewed

    H. Watanabe, A. Ohta, K. Makihara, and S. Miyazaki

    ECS Transactions   Vol. 69 ( 10 ) page: 179-186   2015

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    DOI: 10.1149/06910.0179ecst

  68. Application of remote hydrogen plasma to selective processing for Ge-based devices: Crystallization, etching, and metallization Reviewed

    K. Makihara, M. Ikeda, T. Okada, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 53 ( 11S ) page: 11RA02 (4 pages)   2014.11

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    DOI: 10.7567/JJAP.53.11RA02

  69. Effect of electric field concentration using nanopeak structures on the current–voltage characteristics of resistive switching memory Reviewed

    S. Otsuka, T. Shimizu, S. Shingubara, K. Makihara, S. Miyazaki, A. Yamasaki, Y. Tanimoto, and K. Takase

    AIP Advances   Vol. 4 ( 8 ) page: 087110 (7 pages)   2014.8

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    DOI: 10.1063/1.4892823

  70. Selective Growth of Self-Assembling Si and SiGe Quantum Dots Reviewed

    K. Makihara, M. Ikeda, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E97.C ( 5 ) page: 393-396   2014.5

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    DOI: 10.1587/transele.E97.C.393

  71. High-Sensitive Detection of Electronic Emission through Si-Nanocrystals/Si-Nanocolumnar Structures by Conducting-Probe Atomic Force Microscopy Reviewed

    D. Takeuchi, K. Makihara, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    IEICE Transactions on Electronics   Vol. E97.C ( 5 ) page: 397-400   2014.5

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    DOI: 10.1587/transele.E97.C.397

  72. Characterization of Electron Emission from High Density Self-aligned Si-based Quantum Dots by Conducting-Probe Atomic Force Microscopy Reviewed

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ECS Transactions   Vol. 64 ( 6 ) page: 923-928   2014

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    DOI: 10.1149/06406.0923ecst

  73. Pre-Amorphization and Low-Temperature Implantation for Efficient Activation of Implanted As in Ge(100) Reviewed

    H. Murakami, S. Hamada, T. Ono, K. Hashimoto, A. Ohta, H. Hanafusa, S. Higashi, and S. Miyazaki

    ECS Transactions   Vol. 64 ( 6 ) page: 423-429   2014

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    DOI: 10.1149/06406.0423ecst

  74. Photoluminescence Study of Si Quantum Dots with Ge Core Reviewed

    K. Makihara, K. Kondo, M. Ikeda, A. Ohta, and S. Miyazaki

    ECS Transactions   Vol. 64 ( 6 ) page: 365-370   2014

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    DOI: 10.1149/06406.0365ecst

  75. Characterization of Chemical Bonding Features and Interfacial Reactions in Ge-MIS Structure with HfO2/TaGexOy Dielectric Stack Reviewed

    A. Ohta, H. Murakami, K. Hashimoto, K. Makihara, and S. Miyazaki

    ECS Transactions   Vol. 64 ( 6 ) page: 241-248   2014

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    DOI: 10.1149/06406.0241ecst

  76. Characterization of Resistive Switching Behaviors of RF Sputtered Si Oxide Resistive Random Access Memories with Ti-Based Electrodes Reviewed

    A. Ohta, M. Fukusima, K. Makihara, H. Murakami, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys   Vol. 52 ( 11S ) page: 11NJ06 (5 pages)   2013.11

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    DOI: 10.7567/JJAP.52.11NJ06

  77. Highly-Crystallized Ge:H Film Growth from GeH4 Very High Frequency Inductively-Coupled Plasma: Crystalline Nucleation Initiated by Ni Nanodots Reviewed

    K. Makihara, J. Gao, K. Sakaike, S. Hayashi, H. Deki, M. Ikeda, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys   Vol. 52 ( 11S ) page: 11NA04 (3 pages)   2013.11

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    DOI: 10.7567/JJAP.52.11NA04

  78. Temporal Changes of Charge Distribution in High Density Self-aligned Si-based Quantum Dots as Evaluated by AFM/KFM Reviewed

    N. Tsunekawa K. Makihara, M. Ikeda, and S. Miyazaki

    Trans. of MRS-J   Vol. 38 ( 3 ) page: 393 - 396   2013.9

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    DOI: 10.14723/tmrsj.38.393

  79. XPS Study of Energy Band Alignment between Hf-La Oxides and Si(100) Reviewed

    A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki

    Trans. of MRS-J   Vol. 38 ( 3 ) page: 353 - 357   2013.9

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    DOI: 10.14723/tmrsj.38.353

  80. High Density Formation of Iron Nanodots on SiO2 Induced by Remote Hydrogen Plasma Reviewed

    H. Zhang, R. Fukuoka, Y. Kabeya, K. Makihara, and S. Miyazaki

    Advanced Materials Research   Vol. 750-752   page: 1011 - 1015   2013.8

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    DOI: 10.4028/www.scientific.net/AMR.750-752.1011

  81. Photoexcited Carrier Transfer in a NiSi-Nanodots/Si-Quantum-Dots Hybrid Floating Gate in MOS Structures Reviewed

    M. Ikeda, K. Makihara, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E96-C ( 5 ) page: 694 - 698   2013.5

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    DOI: 10.1587/transele.E96.C.694

  82. Control of Interfacial Reaction of HfO2/Ge Structure by Insertion of Ta Oxide Layer Reviewed

    K. Hashimoto, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E96-C ( 5 ) page: 674 - 679   2013.5

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    DOI: 10.1587/transele.E96.C.674

  83. X-ray Photoemission Study of SiO2/Si/Si0.55Ge0.45/Si Heterostructures Reviewed

    A. Ohta. K. Makihara, S. Miyazaki, M. Sakuraba, and J. Murota

    IEICE Transactions on Electronics   Vol. E96-C ( 5 ) page: 680 - 685   2013.5

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    DOI: 10.1587/transele.E96.C.680

  84. Evaluation of Chemical Composition and Bonding Features of Pt/SiOx/Pt MIM Diodes and Its Impact on Resistance Switching Behavior Reviewed

    A. Ohta, K. Makihara, M. Ikeda, H. Murakamis, S. Higashi, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E96-C ( 5 ) page: 702 - 707   2013.5

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    DOI: 10.1587/transele.E96.C.702

  85. Characterization of Resistive Switching of Pt/Si-Rich Oxide/TiN System Reviewed

    M. Fukushima, A. Ohta, K. Makihara, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E96-C ( 5 ) page: 708 - 713   2013.5

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    DOI: 10.1587/transele.E96.C.708

  86. Characterization of Local Electronic Transport through Ultrathin Au/Highly-Dense Si Nanocolumnar Structures by Conducting-Probe Atomic Force Microscopy Reviewed

    D. Takeuchi, K. Makihara, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    IEICE Transactions on Electronics   Vol. E96-C ( 5 ) page: 718 - 721   2013.5

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    DOI: 10.1587/transele.E96.C.718

  87. Characterization of Electroluminescence from One-dimensionally Self-Aligned Si-based Quantum Dots Reviewed

    H. Takami, K. Makihara, M. Ikeda, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 52 ( 4S ) page: 04CG08 (4 pages)   2013.4

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    DOI: 10.7567/JJAP.52.04CG08

  88. Determination of Energy Band Alignment in Ultrathin Hf-based Oxide/Pt System Reviewed

    A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki

    Journal of Physics: Conference Series   Vol. 417 ( 15th International Conference on Thin Films (ICTF-15) 8–11 November 2011, Kyoto, Japan ) page: 012012 (6 pages)   2013.3

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    DOI: 10.1088/1742-6596/417/1/012012

  89. Characterization of Ultrathin Ta-oxide Films Formed on Ge(100) by ALD and Layer-by-Layer Methods Reviewed

    K. Mishima, H. Murakami, A. Ohta, S. K. Sahari, T. Fujioka, S. Higashi, and S. Miyazaki

    Journal of Physics: Conference Series   Vol. 417 ( 15th International Conference on Thin Films (ICTF-15) 8–11 November 2011, Kyoto, Japan ) page: 012013 (6 pages)   2013.3

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    DOI: 10.1088/1742-6596/417/1/012013

  90. Kinetics of thermally oxidation of Ge(100) surface Reviewed

    S. K. Sahari, A. Ohta, M. Matsui, K. Mishima, H. Murakami, S. Higashi, and S. Miyazaki

    Journal of Physics: Conference Series   Vol. 417 ( 15th International Conference on Thin Films (ICTF-15) 8–11 November 2011, Kyoto, Japan ) page: 012014 (6 pages)   2013.3

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    DOI: 10.1088/1742-6596/417/1/012014

  91. Formation and Characterization of Hybrid Nanodots Floating Gate for Optoelectronic Application Reviewed

    S. Miyazaki

    MRS Online Proceedings Library   Vol. 1510 ( 2 )   2013.2

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    DOI: 10.1557/opl.2013.272

  92. Study on Charge Storage and Optical Response of Hybrid Nanodots Floating Gate MOS Devices for Their Optoelectronic Application Invited Reviewed

    S. Miyazaki, M. Ikeda, and K. Makihara

    ECS Transactions   Vol. 58 ( 9 ) page: 231 - 237   2013

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    DOI: 10.1149/05809.0231ecst

  93. Resistive Switching Properties of SiOx/TiO2 Multi-Stack in Ti-electrode MIM Diodes Reviewed

    A. Ohta, K. Makihara, M. Fukusima, H. Murakami, S. Higashi, and S. Miyazaki

    ECS Transactions   Vol. 58 ( 9 ) page: 293 - 300   2013

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    DOI: 10.1149/05809.0293ecst

  94. Study of electron transport characteristics through self-aligned Si-based quantum dots Reviewed

    K. Makihara, M. Ikeda, and S. Miyazaki

    J. Appl. Phys.   Vol. 112 ( 10 ) page: 104301 (5 pages)   2012.11

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    DOI: 10.1063/1.4766383

  95. Evaluation of Charge Trapping Properties of Microcrystalline Germanium Thin Films by Kelvin Force Microscopy Reviewed

    K. Makihara, H. Deki, M. Ikeda, and S. Miyazaki

    Journal of Non-Crystalline Solids   Vol. 358 ( 17 ) page: 2086-2089   2012.9

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    DOI: 10.1016/j.jnoncrysol.2011.12.035

  96. Evaluation of Chemical Bonding Features and Resistance Switching Behaviors of Ultrathin Si Oxide Dielectric Sandwiched Between Pt Electrodes Reviewed

    A. Ohta, Y. Goto, S. Nishigaki, H. Murakami, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 51 ( 6S ) page: 06FF02 (6 pages)   2012.6

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    DOI: 10.1143/JJAP.51.06FF02

  97. Characterization of Resistance-Switching of Si Oxide Dielectrics Prepared by RF Sputtering Reviewed

    A. Ohta, Y. Goto, S. Nishigaki, G. Wei, H. Murakami, S. Higashi, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E95.C ( 5 ) page: 879-884   2012.5

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    DOI: 10.1587/transele.E95.C.879

  98. Electroluminescence from One-dimensionally Self-Aligned Si-based Quantum Dots with High Areal Dot Density Reviewed

    K. Makihara, H. Deki, M Ikeda, and S, Miyazaki

    Jpn. J. Appl. Phys   Vol. 51 ( 4S ) page: 04DG08 (5 pages)   2012.4

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    DOI: 10.1143/JJAP.51.04DG08

  99. Control of Schottky Barrier Height at Al/p-Ge Junctions by Ultrathin Layer Insertion Reviewed

    A. Ohta, M. Matsui, H. Murakami, S. Higashi, and S. Miyazaki

    ECS Transactions   Vol. 50 ( 9 ) page: 449-457   2012

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    DOI: 10.1149/05009.0449ecst

  100. Characterization of Resistance-Switching Properties of SiOx Films Using Pt Nanodots Electrodes Reviewed

    K. Makihara, M. Fukushima, A. Ohta, M. Ikeda, and S. Miyazaki

    ECS Transactions   Vol. 50 ( 9 ) page: 459-464   2012

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    DOI: 10.1149/05009.0459ecst

  101. X-ray Photoelectron Spectroscopy Study of Interfacial Reactions between Metal and Ultrathin Ge Oxide Reviewed International journal

    A. Ohta, T. Fujioka, H. Murakami, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 50 ( 10S ) page: 10PE01 (6 pages)   2011.10

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    DOI: 10.1143/JJAP.50.10PE01

  102. Evaluation of Chemical Structure and Resistance Switching Characteristics of Undoped Titanium Oxide and Titanium–Yttrium Mixed Oxide Reviewed International journal

    A. Ohta, Y. Goto, G. Wei, H. Murakami, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 50 ( 10S ) page: 10PH02 (6 pages)   2011.10

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    DOI: 10.1143/JJAP.50.10PH02

  103. Formation of High-Density Pt Nanodots on SiO2 Induced by Millisecond Rapid Thermal Annealing Using Thermal Plasma Jet for Floating Gate Memory Reviewed International journal

    K. Makihara, K. Matsumoto, M. Yamane, T. Okada, N. Morisawa, M. Ikeda, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 50 ( 8S2 ) page: 08KE06 (4pages)   2011.8

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    DOI: 10.1143/JJAP.50.08KE06

  104. Characterization of chemical bonding features at metal/GeO2 Interfaces by X-ray photoelectron spectroscopy Reviewed International journal

    M. Matsui, H. Murakami, T. Fujioka, A. Ohta, S. Higashi, and S. Miyazaki

    Microelectronic Engineering   Vol. 88 ( 7 ) page: 1549-1552   2011.7

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    DOI: 10.1016/j.mee.2011.03.032

  105. Impact of insertion of ultrathin TaOx layer at the Pt/TiO2 interface on resistive switching characteristics Reviewed International journal

    G. Wei, H. Murakami, T. Fujioka, A. Ohta, Y. Goto, S. Higashi, and S. Miyazaki

    Microelectronic Engineering   Vol. 88 ( 7 ) page: 1152-1154   2011.7

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    DOI: 10.1016/j.mee.2011.03.114

  106. The Impact of Y Addition into TiO2 on Electronic States and Resistive Switching Characteristics Reviewed International journal

    A. Ohta, Y. Goto, M. F. Kazalman, G. Wei, H. Murakami, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 50 ( 6S ) page: 06GG01 (5 pages)   2011.6

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    DOI: 10.1143/JJAP.50.06GG01

  107. High-density formation of Ge quantum dots on SiO2 Reviewed International journal

    K. Makihara, M. Ikeda, A. Ohta, S. Takeuchi, Y. Shimura, S. Zaima, and S. Miyazaki

    Solid-State Electronics   Vol. 60 ( 1 ) page: 65-69   2011.6

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    DOI: 10.1016/j.sse.2011.01.035

  108. Characterization of Mg Diffusion into HfO2/SiO2/Si(100) Stacked Structures and Its Impact on Detect State Densities Reviewed International journal

    A. Ohta, D. Kanme, H. Murakami, S. Higashi, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E94.C ( 5 ) page: 717-723   2011.5

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    DOI: 10.1587/transele.E94.C.717

  109. Impact of Annealing Ambience on Resistive Switching in Pt/TiO2/Pt Structure Reviewed International journal

    G. Wei, Y. Goto, A. Ohta, K. Makihara, H. Murakami, S. Higashi, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E94.C ( 5 ) page: 699-704   2011.5

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    DOI: 10.1587/transele.E94.C.699

  110. Study on Collective Electron Motion in Si-Nano Dot Floating Gate MOS Capacitor Reviewed International journal

    M. Muraguchi, Y. Sakurai, Y. Takada, S. Nomura, K. Shiraishi, M. Ikeda, K. Makihara, S. Miyazaki, Y. Shigeta, and T. Endoh

    IEICE Transactions on Electronics   Vol. E94.C ( 5 ) page: 730-736   2011.5

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    DOI: 10.1587/transele.E94.C.730

  111. Native Oxidation Growth on Ge(111) and (100) Surfaces Reviewed International journal

    S. K. Sahari, H. Murakami, T. Fujioka, T. Bando, A. Ohta, K. Makihara, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 50 ( 4S ) page: 04DA12 (4 pages)   2011.4

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    DOI: 10.1143/JJAP.50.04DA12

  112. Activation of As Atoms in Ultrashallow Junction during Milli- and Microsecond Annealing Induced by Thermal-Plasma-Jet Irradiation Reviewed International journal

    K. Matsumoto, A. Ohta, S. Miyazaki, and S. Higashi

    Jpn. J. Appl. Phys.   Vol. 50 ( 4S ) page: 04DA07 (4 pages)   2011.4

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    DOI: 10.1143/JJAP.50.04DA07

  113. Collective Tunneling Model in Charge-Trap-Type Nonvolatile Memory Cell Reviewed International journal

    M. Muraguchi, Y. Sakurai, Y. Takada, Y. Shigeta, M. Ikeda, K. Makihara, S. Miyazaki, S. Nomura, K. Shiraishi, and T. Endoh

    Jpn. J. Appl. Phys.   Vol. 50 ( 4S ) page: 04DD04 (4 pages)   2011.4

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    DOI: 10.1143/JJAP.50.04DD04

  114. Application of Thermal Plasma Jet Irradiation to Crystallization and Gate Insulator Improvement for High-Performance Thin-Film Transistor Fabrication Reviewed International journal

    S. Higashi, S. Hayashi, Y. Hiroshige, Y. Nishida, H. Murakami, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 50 ( 3S ) page: 03CB10 (8 pages)   2011.3

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    DOI: 10.1143/JJAP.50.03CB10

  115. Optical Response of Si-Quantum-Dots/NiSi-Nanodots Stack Hybrid Floating Gate in MOS Structures Reviewed International journal

    N. Morisawa, M. Ikeda, K. Makihara, and S. Miyazaki

    Key Engineering Materials   Vol. 470   page: 135-139   2011.2

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    DOI: 10.4028/www.scientific.net/KEM.470.135

  116. Formation and Characterization of Silicon-Quantum-Dots/Metal-Silicide-Nanodots Hybrid Stack and its Application to Floating Gate Functional Devices Invited Reviewed International journal

    S. Miyazaki

    ECS Transactions   Vol. 41 ( 7 ) page: 93-98   2011

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    DOI: 10.1149/1.3633288

  117. Importance of Electronic State of Two-Dimensional Electron Gas for Electron Injection Process in Nano-Electronic Devices Reviewed International journal

    M. Muraguchi, T. Endoh, Y. Takada, Y. Sakurai, S. Nomura, K. Shiraishi, M. Ikeda, K. Makihara, S. Miyazaki, and Y. Shigeta

    Physica E: Low-dimensional Systems and Nanostructures   Vol. 42 ( 10 ) page: 2602 - 2605   2010.9

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    DOI: 10.1016/j.physe.2009.12.025

  118. Formation of Cobalt and Cobalt-silicide Nanodots on Ultrathin SiO2 Induced by Remote Hydrogen Plasma Reviewed International journal

    A. Kawanami, K. Makihara, M. Ikeda, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 49 ( 8S1 ) page: 08JA04 (4 pages)   2010.8

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    DOI: 10.1143/JJAP.49.08JA04

  119. Contribution of Carbon to Growth of Boron-Containing Cluster in Heavily Boron-Doped Silicon Reviewed International journal

    H. Itokawa, A. Ohta, M. Ikeda, I. Mizushima, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 49 ( 8R ) page: 081301 (5 pages)   2010.8

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    DOI: 10.1143/JJAP.49.081301

  120. Formation of High Crystallinity Silicon Films by High Speed Scanning of Melting Region Formed by Atmospheric Pressure DC Arc Discharge Micro-Thermal-Plasma-Jet and Its Application to Thin Film Transistor Fabrication Reviewed International journal

    S. Hayashi, S. Higashi, H. Murakami and S. Miyazaki

    Applied Physics Express   Vol. 3 ( 6 ) page: 061401 (3 pages)   2010.6

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    DOI: 10.1143/APEX.3.061401

  121. Characterization of Electronic Charged States of Impurity Doped Si Quantum Dots Using Atomic Force Microsope/Kelvin Probe Technique Reviewed International journal

    K. Makihara, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 49 ( 6R ) page: 065002 (4 pages)   2010.6

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    DOI: 10.1143/JJAP.49.065002

  122. Random Telegraph Signals in Two-Dimensional Array of Si Quantum Dots Reviewed International journal

    K. Makihara, M. Ikeda, A. Kawanami and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E93.C ( 5 ) page: 569 - 572   2010.5

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    DOI: 10.1587/transele.E93.C.569

  123. Activation of B and As in Ultrashallow Junction During Millisecond Annealing Induced by Thermal Plasma Jet Irradiation Reviewed International journal

    K. Matsumoto, S. Higashi, H. Murakami, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 49 ( 4S ) page: 04DA02 (4 pages)   2010.4

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    DOI: 10.1143/JJAP.49.04DA02

  124. Effect of Chemical Composition of SiOx Films on Rapid Formation of Si Nanocrystals Induced by Thermal Plasma Jet Irradiation Reviewed International journal

    T. Okada, S. Higashi, H. Kaku, K. Makihara, H. Furukawa, Y. Hiroshige and S. Miyazaki

    Phys. Status Solidi C   Vol. 7 ( 3-4 ) page: 732 - 734   2010.4

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    DOI: 10.1002/pssc.200982804

  125. Light-Induced Carrier Transfer in NiSi-Nanodots/Si-Quantum-Dots Hybrid Floating Gate in Metal–Oxide–Semiconductor Structures Reviewed International journal

    N. Morisawa, M. Ikeda, S. Nakanishi, A. Kawanami, K. Makihara and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 49 ( 4S ) page: 04DJ04 (4 pages)   2010.4

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    DOI: 10.1143/JJAP.49.04DJ04

  126. Characterization of Microcrystalline Silicon Thin Film Transistors Fabricated by Thermal Plasma Jet Crystallization Technique Reviewed International journal

    S. Higashi, K. Sugakawa, H. Kaku, T. Okada, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 49 ( 3S ) page: 03CA08 (4 pages)   2010.3

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    The electrical characteristics of thin-film transistors (TFTs) fabricated by thermal plasma jet (TPJ)-crystallized microcrystalline Si (µc-Si) films have been investigated. Amorphous Si (a-Si) films were crystallized with the TPJ under the scanning speed (v) of 350 to 550 mm/s, and µc-Si TFTs were successfully fabricated with a 300 °C process. By reducing v, µFE increases from 3.2 to 17.1 cm2 V-1 s-1, and Vth and S decrease from 9.2 to 5.2 V and 1.3 to 0.6 V/decade, respectively. The variations of µFE, Vth, and S were kept within small values of 1.06 (±4.4%), 0.14 (±1.1%), and 0.04 (±4.0%), respectively. The µc-Si is formed with ∼20-nm-sized randomly oriented small grains, and this isotropic nature results in very small variation of TFT performance. With decreasing v, the fraction of nano sized grains and disordered bonds at the grain boundary decreases, which results in improved TFT performance.

    DOI: 10.1143/JJAP.49.03CA08

  127. Formation Mechanism of Metal nanodots Induced by Remote Plasma Exposure Reviewed International journal

    K. Makihara, K. Shimanoe, A. Kawanami, M. Ikeda, S. Higashi and S. Miyazaki

    Journal of Optoelectronics and Advanced Materials   Vol. 12 ( 3 ) page: 626 - 630   2010.3

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  128. Anomalous temperature dependence of electron tunneling between a two-dimensional electron gas and Si dots Reviewed International journal

    Y. Sakurai, S. Nomura, Y. Takada, J. Iwata, K. Shiraishi, M. Muraguchi, T. Endoh, Y. Shigeta, M. Ikeda, K. Makihara, and S. Miyazaki

    Physica E: Low-dimensional Systems and Nanostructures   Vol. 42 ( 4 ) page: 918 - 921   2010.2

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    DOI: 10.1016/j.physe.2009.11.120

  129. Formation and Characterization of Hybrid Nanodot Stack Structure for Floating Gate Application Reviewed International journal

    S. Miyazaki, K. Makihara, and M. Ikeda

    Thin Solid Films   Vol. 518 ( 6 ) page: S30 - S34   2010.1

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    DOI: 10.1016/j.tsf.2009.10.049

  130. Temperature Dependence of Electron Tunneling between Two Dimensional Electron Gas and Si Quantum Dots Reviewed International journal

    Y. Sakurai, J. Iwata, M. Muraguchi, Y. Shigeta, Y. Takada, S. Nomura, T. Endoh, S. Saito, K. Shiraishi, M. Ikeda, K. Makihara, and S. Miyazaki

      Vol. 49 ( 1R ) page: 014001 (4 pages)   2010.1

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    Quantum mechanical electron tunneling has potential applications in both science and technology, such as flash memories in modern LSI technologies and electron transport chains in biosystems. Although it is known that one-dimensional quantum electron tunneling lacks temperature dependence, the behavior of electron tunneling between different dimensional systems is still an open question. Here, we investigated the electron tunneling between a two-dimensional electron gas (2DEG) and zero-dimensional Si quantum dots and discovered an unexpected temperature dependence: At high temperature, the gate voltage necessary for electron injection from 2DEG to Si quantum dots becomes markedly small. This unusual tunneling behavior was phenomenologically explained by considering the geometrical matching of wave functions between different dimensional systems. We assumed that electron tunneling would occur within a finite experimental measurement time. Then, the observed electron tunneling is explained only by the contributions of wave packets below the quantum dot with a finite lifetime rather than the ordinary thermal excited states of 2DEG.

    DOI: 10.1143/JJAP.49.014001

  131. Formation of High Density Metal Silicide Nanodots on Ultrathin SiO2 for Floating Gate Memory Application Reviewed International journal

    S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe and R. Matsumoto

    J. of Materials Science Forum   Vol. 638-642   page: 1725 - 1730   2010.1

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    DOI: 10.4028/www.scientific.net/MSF.638-642.1725

  132. Characterization of Interfaces between Chemically Cleaned or Thermally Oxidized Germanium and Metals Reviewed International journal

    H. Murakami, T. Fujioka, A. Ohta, T. Bando, S. Higashi and S. Miyazaki

    ECS Trans.   Vol. 33 ( 6 ) page: 253 - 262   2010

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    DOI: 10.1149/1.3487556

  133. Self-Align Formation of Si Quantum Dots Reviewed International journal

    K. Makihara, M. Ikeda, H. Deki, A. Ohta and S. Miyazaki

    ECS Trans.   Vol. 33 ( 6 ) page: 661 - 667   2010

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    DOI: 10.1149/1.3487596

  134. Formation of Pseudo-Expitaxial Ge Films on Si(100) by Droplet of Ge Microliquid Reviewed International journal

    T. Matsumoto, S. Higashi, K. Makihara, M. Akazawa and S. Miyazaki

    ECS Trans.   Vol. 33 ( 6 ) page: 165 - 170   2010

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    DOI: 10.1149/1.3487545

  135. Characterization of Interfacial Reaction and Chemical Bonding Features of LaOx/HfO2 Stack Structure Formed on Thermally-grown SiO2/Si(100) Reviewed International journal

    A. Ohta, D. Kanme, H. Murakami, S. Higashi, and S. Miyazaki

    Microelectronic Engineering   Vol. 86 ( 7-9 ) page: 1650 - 1653   2009.7

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    DOI: 10.1016/j.mee.2009.03.114

  136. Electron Charged States of Pt-silicide Nanodots as Evaluated by Using an AFM/Kelvin Probe Technique Reviewed International journal

    K. Makihara, K. Shimanoe, M. Ikeda, A. Ohta, S. Higashi, and S. Miyazaki

    Transactions of the Materials Research Society of Japan   Vol. 34 ( 2 ) page: 309 - 312   2009.6

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    DOI: 10.14723/tmrsj.34.309

  137. Photoemission study of fully silicided Pd2Si gates with interface modification induced by dopants Reviewed International journal

    T. Hosoi, A. Ohta, S. Miyazaki, H. Shiraish, K. Shibahara

    Appl. Phys. Lett.   Vol. 94 ( 19 ) page: 192102 (3 pages)   2009.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.3133337

  138. Formation of Pd Nanodots Induced by Remote Hydrogen Plasma and Its Application to Floating Gate MOS Memories Reviewed International journal

    K. Shimanoe K. Makihara, M. Ikeda, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E92.C ( 5 ) page: 616 - 619   2009.5

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    DOI: 10.1587/transele.E92.C.616

  139. Electroluminescence from Si Quantum Dots/SiO2 Multilayers with Ultrathin Oxide Layers due to Bipolar Injection Reviewed International journal

    J. Xu, K. Makihara, H. Dek, and S. Miyazaki

    Solid State Communications   Vol. 149 ( 19-20 ) page: 739 - 742   2009.5

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    DOI: 10.1016/j.ssc.2009.03.013

  140. Effective-Work-Function Control by Varying the TiN Thickness in Poly-Si/TiN Gate Electrodes for Scaled High-k CMOSFETs Reviewed International journal

    M. Kadoshima, T. Matsuki, S. Miyazaki, K. Shiraishi, T. Chikyo, K. Yamada, T. Aoyama, Y. Nara, and Y. Ohji

    IEEE Electron Device Letters   Vol. 30 ( 5 ) page: 466 - 468   2009.5

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    DOI: 10.1109/LED.2009.2016585

  141. Formation of Metal Silicide Nanodots on Ultrathin SiO2 for Floating Gate Application Reviewed International journal

    S. Miyazaki, M. Ikeda, K. Makihara, K. Shimanoe and R. Matsumoto

    Solid State Phenomena   Vol. 154   page: 95 - 100   2009.4

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    We demonstrated a new fabrication method of Pt- and Ni-silicide nanodots with an areal density of the order of ~1011 cm-2 on SiO2 through the process steps of ultrathin metal film deposition on pre-grown Si-QDs and subsequent remote H2 plasma treatments at room temperature.
    Verification of electrical separation among silicide nanodots was made by measuring surface potential changes due to electron injection and extraction using an AFM/Kelvin probe technique.
    Photoemission measurements confirm a deeper potential well of silicide nanodots than Si-QDs and a resultant superior charge retention was also verified by surface potential measurements after charging to and discharging. Also, the advantage in many electron storage per silicide nanodot was demonstrated in C-V characteristics of MIS capacitors with silicide nanodots FGs.

    DOI: 10.4028/www.scientific.net/SSP.154.95

  142. Millisecond Rapid Thermal Annealing of Si Wafer Induced by High-Power-Density Thermal Plasma Jet Irradiation and Its Application to Ultrashallow Junction Formation Reviewed International journal

    H. Furukawa, S. Higashi, T. Okada, H. Murakami, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 48 ( 4S ) page: 04C011 (4 pages)   2009.4

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    We have investigated the generation of high-power-density thermal plasma jet (TPJ) as a heat source for the annealing of a Si wafer surface in a millisecond period and the formation of an ultrashallow junction. The power density of DC arc discharge thermal plasma jet markedly increased from 11.0 to 32.3 kW/cm2 with increasing spacing between an anode and a cathode (ES) from 1.0 to 3.0 mm. The increase in TPJ power density with ES was mainly due to the increase in plasma temperature from about 16000 to 23000 K. By applying this high-power-density TPJ, the Si wafer was heated by more than 700 K within 10 ms. Using this annealing technique, we demonstrated the dopant activation of an arsenic-implanted Si wafer and successfully obtained a low sheet resistance of 262 Ω/sq at an annealing temperature as high as 1207 K without a significantly enhanced diffusion of the implantation profile.

    DOI: 10.1143/JJAP.48.04C011

  143. Temperature Dependence of Capacitance of Si Quantum Dot Floating Gate MOS Capacitor Reviewed International journal

    Y. Sakurai, S. Nomura, K. Shiraishi, M. Ikeda, K. Makihara, and S. Miyazaki

    Journal of Physics: Conference Series   Vol. 150 ( Electronic Quantum Transport ) page: 022071 (4 pages)   2009.3

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    DOI: 10.1088/1742-6596/150/2/022071

  144. Surface Potential Changes Induced by Physisorption of Si-tagged Protein A on HF-last Si(100) and Thermally Grown SiO2 surfaces Reviewed International journal

    S. Mahboob, K. Makihara, A. Ohta, S. Higashi, Y. Hata, A. Kuroda, and S. Miyazaki

    ECS Trans.   Vol. 19 ( 22 ) page: 35 - 43   2009

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    DOI: 10.1149/1.3245167

  145. Charge Storage Characteristics of Hybrid Nanodots Floating Gate Reviewed International journal

    S. Miyazaki, K. Makihara, and M. Ikeda

    ECS Trans.   Vol. 25 ( 7 ) page: 433 - 439   2009

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    DOI: 10.1149/1.3203980

  146. Physics of Nano-contact between Si Quantum Dots and Inversion Layer Reviewed International journal

    Y. Sakurai, S. Nomura, Y. Takada, J. Iwata, K. Shiraishi, M. Muraguchi, T. Endoh, Y. Shigeta, M. Ikeda, and K. Makihara

    ECS Trans.   Vol. 25 ( 7 ) page: 463 - 469   2009

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    DOI: 10.1149/1.3203984

  147. The Influence of Defects and Impurities on Electrical Properties of High-k Dielectrics Reviewed International coauthorship International journal

    J. Dąbrowski, S. Miyazaki, S. Inumiya, G. Kozłowski, G. Lippert, G. Łupina, Y. Nara, H. J. Müssig, A. Ohta, and Y. Pei

    Materials Science Forum   Vol. 608   page: 55 - 109   2008.12

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    Electrical properties of thin high-k dielectric films are influenced (or even governed)
    by the presence of macroscopic, microscopic and atomic-size defects. For most applications,
    a structurally perfect dielectric material with moderate parameters would have sufficiently
    low leakage and sufficiently long lifetime. But defects open new paths for carrier
    transport, increasing the currents by orders of magnitude, causing instabilities due to charge
    trapping, and promoting the formation of defects responsible for electrical breakdown events
    and for the failure of the film. We discuss how currents flow across the gate stack and how
    damage is created in the material. We also illustrate the contemporary basic knowledge on
    hazardous defects (including certain impurities) in high-k dielectrics using the example of a
    family of materials based on Pr oxides. As an example of the influence of stoichiometry on
    the electrical parameters of the dielectric, we analyze the effect of nitrogen incorporation into
    ultrathin Hf silicate films.

    DOI: 10.4028/www.scientific.net/MSF.608.55

  148. Impact of impurity Doping into Si Quantum Dots with Ge Core on Their Electrical Charging Characteristics Reviewed International journal

    K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki

    Thin Solid Films   Vol. 517 ( 1 ) page: 306 - 308   2008.11

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    DOI: 10.1016/j.tsf.2008.08.103

  149. Control of Electronic Charged States of Si-Based Quantum Dots for Floating Gate Application Reviewed International journal

    S. Miyazaki, K. Makihara, and M. Ikeda

    Thin Solid Films   Vol. 517 ( 1 ) page: 41 - 44   2008.11

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    DOI: 10.1016/j.tsf.2008.08.101

  150. Low Temperature High-rate Growth of Crystalline Ge Films on Quartz and Crystalline Si Substrates from VHF Inductively-Coupled Plasma of GeH4 Reviewed International journal

    T. Sakata, K. Makihara, H. Deki, S. Higashi, and S. Miyazaki

    Thin Solid Films   Vol. 517 ( 1 ) page: 216 - 218   2008.11

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    DOI: 10.1016/j.tsf.2008.08.027

  151. Formation of Low-Defect-Concentration Polycrystalline Silicon Films by Thermal Plasma Jet Crystallization Technique Reviewed International journal

    T. Yorimoto, S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki, T. Matsui, A. Masuda, and M. Kondo

    Jpn. J. Appl. Phys.   Vol. 47 ( 8S2 ) page: 6949 - 6952   2008.8

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    Defect concentration in polycrystalline silicon (poly-Si) films formed by thermal plasma jet (TPJ) annealing and excimer laser annealing (ELA) has been investigated on basis of the electrical property and spin density (Ns). Phosphorus-doped Si films with an average concentration of 4.3 ×1017 cm-3 and crystallized by TPJ annealing showed electrical conductivity (σ) values of 2.0 ×10-3–7.8 ×10-2 S/cm, whereas ELA Si films show much lower σ values of (1.6–4.5) ×10-6 S/cm regardless of irradiated laser energy density. Ns values in TPJ annealed Si films were (2.3–4.5) ×1017 cm-3, which are roughly one order of magnitude lower than those of ELA films. These results indicate that dangling bonds in crystallized films are the predominant traps and they strongly govern the electrical property. TPJ crystallization offers the possibility of fabricating poly-Si films with a low defect concentration presumably owing to the much lower cooling rate (∼105 K/s) during crystalline growth than that of ELA (∼1010 K/s). By treating TPJ annealed films with hydrogen plasma for 10 min at 250 °C, a defect density as low as 5.0 ×1016 cm-3 is achieved.

    DOI: 10.1143/JJAP.47.6949

  152. Interface Properties and Effective Work Function of Sb-Predoped Fully Silicided NiSi Gate Reviewed International journal

    T. Hosoi, K. Sano, A. Ohta, K. Makihara, H. Kaku, S. Miyazaki, and K. Shibahara

    Surface and Interface Analysis   Vol. 40 ( 6-7 ) page: 1126 - 1130   2008.6

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    DOI: 10.1002/sia.2827

  153. Progress on Charge Distribution in Multiply-Stacked Si Quantum Dots/SiO2 Structure as Evaluated by AFM/KFM Reviewed International journal

    K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki

    IEICE Transactions on Electronics   Vol. E91.C ( 5 ) page: 712 - 715   2008.5

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    DOI: 10.1093/ietele/e91-c.5.712

  154. Cathode Electron Injection Breakdown Model and Time Dependent Dielectric Breakdown Lifetime Prediction in High-k/Metal Gate Stack p-Type Metal–Oxide–Silicon Field Effect Transistors Reviewed International journal

    M. Sato, C. Tamura, K. Yamabe, K. Shiraishi, S. Miyazaki, K. Yamada, R. Hasunuma, T. Aoyama, Y. Nara, and Y. Ohji

    Jpn. J. Appl. Phys.   Vol. 47 ( 5R ) page: 3326 - 3331   2008.5

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    We have investigated the time dependent dielectric breakdown (TDDB) for a high-k/metal gate p-type metal–oxide–semiconductor field effect transistors (pMOSFETs) under inversion stress. We have found that electrons, injected from the cathode, are minority carriers in the gate leakage current and play an important role in determining TDDB lifetime and that the existence of oxygen vacancies in HfSiON, decide the electron current mechanism in HfSiON. Since electrons from the cathode flow as a tunneling current with the effective barrier height determined by the energy level of the oxygen vacancies in the HfSiON, electron current is strongly dependent on the effective work function of the metal gate. That implies that a higher work function should be effective to suppress of electron current, due to the elevated barrier height for electrons. Therefore, the formation of a high work function metal gate is essential, not only for low threshold voltage of pMOSFETs but also to achieve long TDDB lifetimes.

    DOI: 10.1143/JJAP.47.3326

  155. Effect of He Addition on the Heating Characteristics of Substrate Surface Irradiated by Ar Thermal Plasma Jet Reviewed International journal

    T. Okada, S. Higashi, H. Kaku, N. Koba, H. Murakami, and S. Miyazaki

    Thin Solid Films   Vol. 516 ( 11 ) page: 3680 - 3683   2008.4

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    DOI: 10.1016/j.tsf.2007.08.090

  156. Crystallization of Amorphous Ge Films Induced by Semiconductor Diode Laser Annealing Reviewed International journal

    K. Sakaike, S. Higashi, H. Murakami, and S. Miyazaki

    Thin Solid Films   Vol. 516 ( 11 ) page: 3595 - 3600   2008.4

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    DOI: 10.1016/j.tsf.2007.08.028

  157. Nucleation Study of Hydrogenated Microcrystalline Silicon (μc-Si:H) Films Deposited by VHF-ICP Reviewed International journal

    T. Karakawa, S. Higashi, H. Murakami, and S. Miyazaki

    Thin Solid Films   Vol. 516 ( 11 ) page: 3497 - 3501   2008.4

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    DOI: 10.1016/j.tsf.2007.08.087

  158. Characterization of Multistep Electron Charging and Discharging of a Silicon Quantum Dots Floating Gate by Applying Pulsed Gate Biases Reviewed International journal

    R. Matsumoto, M. Ikeda, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 47 ( 4S ) page: 3103 - 3106   2008.4

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    DOI: 10.1143/JJAP.47.3103

  159. Self-Assembling Formation of Ni Nanodots on SiO2 Induced by Remote H2 Plasma Treatment and Their Electrical Charging Characteristics Reviewed International journal

    K. Makihara, K. Shimanoe, M. Ikeda, S. Higashi, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 47 ( 4S ) page: 3099 - 3102   2008.4

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    We fabricated nanometer-scale Ni dots and NiSi dots on an ultrathin SiO2 layer using remote H2 plasma and demonstrated the feasibility of remote H2 plasma treatment for controlling the areal density of the dots. 1.8-nm-thick-Ni/SiO2 and Ni/Si-quantum dots (QDs)/SiO2 layer were treated with remote H2 plasma generated by the inductive coupling between an external single-turn antenna and a 60 MHz generator. When a Ni/SiO2 was treated with remote H2 plasma at room temperature, Ni nanodot density could be controlled in the range of 109 to 1012 cm-2 by adjusting the plasma conditions. After the remote H2 plasma treatment of the Ni/Si-QDs, the formation of electrically isolated NiSi dots with an areal density of ∼1011 cm-2 was confirmed. These results imply that hydrogen radicals generated in H2 plasma play an important role in improving surface diffusion caused by energy reduction at the Ni/SiO2 interface. The surface potential of the Ni nanodots changes stepwise with the tip bias. This is due to the multistep electron injection into and extraction of Ni nanodots. The minimum tip biases for electron injection into Ni nanodots, NiSi dots and Si-QDs were -0.2, -0.7, and -1.0 V, respectively. This reflected the difference in electron affinity among Ni, NiSi and Si.

    DOI: 10.1143/JJAP.47.3099

  160. Comprehensive Analysis of Positive and Negative Bias Temperature Instabilities in High-k/Metal Gate Stack Metal–Oxide–Silicon Field Effect Transistors with Equivalent Oxide Thickness Scaling to Sub-1 nm Reviewed International journal

    M. Sato, K. Yamabe, K. Shiraishi, S. Miyazaki, K. Yamada, C. Tamura, R. Hasunuma, S. Inumiya, T. Aoyama, Y. Nara, and Y. Ohji

    Jpn. J. Appl. Phys.   Vol. 47 ( 4S ) page: 2354 - 2359   2008.4

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    We have undertaken a comprehensive analysis of the positive bias temperature instability (PBTI) and negative bias temperature instability (NBTI) reliabilities of high-k/metal gate stacks. In the case of PBTI, electron traps constituted the main factor in drain current degradation resulting in an initial jump in threshold voltage shift due to fast transient electron traps, which depended only on stress voltage, because of the formation of positive oxygen vacancies near the cathode. However, in the case of NBTI, both interface state degradation (including interface hole traps) and hole traps in bulk HfSiON should be considered. We have clarified that the interface layer quality is related to not only the high transconductance but also the hole traps. The use of a high-quality interfacial layer, such as a wet oxide interface, represents a promising solution for the improvement of NBTI lifetime.

    DOI: 10.1143/JJAP.47.2354

  161. In-situ Measurement of Temperature Variation in Si Wafer during Millisecond Rapid Thermal Annealing Induced by Thermal Plasma Jet Irradiation Reviewed International journal

    H. Furukawa, S. Higashi, T. Okada, H. Kaku, H. Murakami, and S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 47 ( 4S ) page: 2460 - 2463   2008.4

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    An in-situ measurement technique for the temperature profile of a Si wafer during millisecond rapid thermal annealing has been developed. By analyzing the oscillation observed in transient reflectivity of the Si wafer during annealing, we obtain a transient temperature profile with a millisecond time resolution. Since this measurement is based on optical interference, a highly sensitive temperature measurement with an accuracy of 2 K is expected. Using this measurement technique, we controlled Si wafer surface temperature during thermal plasma jet irradiation with the heating and cooling rates in the order of 104–105 K/s.

    DOI: 10.1143/JJAP.47.2460

  162. Growth of Si crystalline in SiOx films induced by millisecond rapid thermal annealing using thermal plasma jet Reviewed International journal

    T. Okada, S. Higashi, H. Kaku, T. Yorimoto, H. Murakami, and S. Miyazaki

    Solid-State Electronics   Vol. 52 ( 3 ) page: 377 - 380   2008.3

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    DOI: 10.1016/j.sse.2007.10.007

  163. Nucleation Control for High Density Formation of Si-based Quantum Dots on Ultrathin SiO2 Reviewed International journal

    K. Makihara, A. Kawanami, M. Ikeda, S. Higashi, and S. Miyazaki

    ECS Trans.   Vol. 16 ( 10 ) page: 255 - 260   2008

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    DOI: 10.1149/1.2986779

  164. Formation of Si Nanocrystals in SiOx Films Induced by Thermal Plasma Jet Annealing and Its Application to Floating Gate Memory Reviewed International journal

    T. Okada, S. Higashi, H. Kaku, H. Furukawa, and S. Miyazaki

    ECS Trans.   Vol. 16 ( 9 ) page: 177 - 182   2008

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    DOI: 10.1149/1.2980548

  165. In-situ Monitoring of Si Wafer Temperature during Millisecond Rapid Thermal Annealing Reviewed International journal

    H. Furukawa, S. Higashi, T. Okada, H. Kaku, H. Murakami, and S. Miyazaki

    ECS Trans.   Vol. 13 ( 1 ) page: 31 - 36   2008

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    DOI: 10.1149/1.2911482

  166. Theory of Metal/Dielectric Interfaces -Breakdown of Schottky Barrier Limits- Reviewed International journal

    K. Shiraishi, T. Nakayama, T. Nakaoka, A. Ohta, and S. Miyazaki

    ECS Trans.   Vol. 13 ( 2 ) page: 21 - 27   2008

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    DOI: 10.1149/1.2908612

  167. Photoemission Study of Metal/HfSiON Gate Stack Reviewed International journal

    S. Miyazaki, H. Yoshinaga, A. Ohta, Y. Akasaka, K. Shiraishi, K. Yamada, S. Inumiya, M. Kadoshima, and Y. Nara

    ECS Trans.   Vol. 13 ( 2 ) page: 67 - 73   2008

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    DOI: 10.1149/1.2908618

  168. Effect of Annealing on Electronic Characteristics of HfSiON Films fabricated by Damascene Gate Process Reviewed International journal

    K. Yamabe, K. Murata, T. Hayashi, T C. Tamura, M. Sato, A. Uedono, K. Shiraishi, N. Umezawa, T. Chikyow, H. Watanabe, Y. Nara, Y. Ohji, S. Miyazaki, K. Yamada, and R. Hasunuma

    ECS Trans.   Vol. 16 ( 5 ) page: 521 - 526   2008

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    DOI: 10.1149/1.2981633

  169. Practical dual-metal-gate dual-high-k CMOS integration technology for hp 32 nm LSTP utilizing process-friendly TiAlN metal gate

    M. Kadoshima, T. Matsuki, M. Sato, T. Aminaka, E. Kurosawa, A. Ohta, H. Yoshinaga, S. Miyazaki, K. Shiraishi, K. Yamabe, K. Yamada, T. Aoyama, Y. Nara, Y. Ohji

    International Electron Device Meeting 2007 (IEDM)(Washington DC)   Vol. 20.4   page: 531-534   2007.12

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  170. Performance Improvement of HfAlOxN n-Channel Metal–Oxide–Semiconductor Field-Effect Transistors by Controlling the Bonding Configuration of Nitrogen Atoms Coordinated to Hf Atoms Reviewed

    K. Iwamoto, T. Nishimura1, A. Ohta2, K. Tominaga, T. Nabatame, S. Miyazaki2, and A. Toriumi1,3

    Jpn. J. Appl. Phys.   Vol. 46   page: 7666-7670   2007.12

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    A high-temperature oxygen annealing (HiTOA) process has been developed to recover the degradation of the electrical characteristics due to the nitrogen incorporation into the HfAlOx film. The HiTOA process was carried out after the introduction of the nitrogen atoms. This process affected the bonding configuration of the nitrogen atom coordinated to the hafnium atom, and reconverted the nitrogen atom into an oxygen one. Therefore, this substitution markedly recovered the gate leakage current through the HfAlOxN film with a slight increase in the equivalent oxide thickness. Additionally, it significantly improved the effective mobility of n+ polycrystalline silicon (poly-Si) gate n-channel metal–oxide–semiconductor field-effect transistors (nMOSFETs).

  171. Formation of Low-Defect-Concentration Polycrystalline Si Films by Thermal Plasma Jet Crystallization Technique

    T. Yorimoto, S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki, T. Matsui, A. Masuda, M. Kondo

    2007 Int. Symposium on Dry Process (DPS2007)(Tokyo)   Vol. 8-03   page: 157-158   2007.11

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  172. Charge Injection Characteristics of NiSi-Dots/Silicon-Quantum-Dots Stacked Floating Gate in MOS Capacitors

    M. Ikeda, R. Matsumoto, K. Shimanoe, T. Okada, K. Makihara, S. Higashi, S. Miyazaki

    3rd International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2007)(Sendai)   Vol. P-08   page: 35-36   2007.11

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  173. High Rate Growth of Crystalline Ge Films at Low Temperatures by Controlling 60MHz Inductively-Coupled Plasma of H2-diluted GeH4

    S. Miyazaki, T. Sakata, K. Makihara, M. Ikeda

    3rd International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2007)(Sendai)   Vol. P-07   page: 33-34   2007.11

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  174. Formation of PtSi Nanodots Induced by Remote H2 Plasma

    K. Shimanoe, K. Makihara, A. Ohta, M. Ikeda, S. Higashi, S. Miyazaki

    3rd International Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2007), Sendai   Vol. P-09   page: 37-38   2007.11

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  175. Impact of Low Temperature Anneal on Effective Work Function and Chemical Bonding Features for Ru/HfSiON/SiON Gate Stack

    A. Ohta, H. Yoshinaga, H. Murakami, S. Higashi, S. Miyazaki, M. Kadoshima, Y. Nara

    Fifth International Symposium on Control of Semiconductor Interfaces (ISCSI-V)(Tokyo)   Vol. OA3-1   page: 215-216   2007.11

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  176. Evaluation of Effective Work Function in Ru/HfSiON/SiO2 Gate Stack Structures – Thickness Dependence in Bottom SiO2 layer

    H. Yoshinaga, A. Ohta, H. Murakami, S. Higashi, S. Miyazaki, M. Kadoshima, Y. Nara,

    Fifth International Symposium on Control of Semiconductor Interfaces (ISCSI-V)(Tokyo)   Vol. P.-47   page: 181-182   2007.11

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  177. The Impact of Post Deposition NH3-Anneal on La Oxide Films Formed by MOCVD Using La(DPM)3

    R. Yougauchi, A. Ohta, Y. Munetaka, H. Murakami, S. Higashi, S. Miyazaki

    Fifth International Symposium on Control of Semiconductor Interfaces, (ISCSI-V)(Tokyo)   Vol. OA3-8   page: 227-228   2007.11

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  178. High Efficiency Dopant Activation Induced by Thermal Plasma Jet Crystallization of Heavily-Phosphorus-Doped Amorphous Si Films

    H. Kaku, S. Higashi, H. Furukawa, T. Okada, T. Yorimoto, H. Murakami, S. Miyazaki

    5th International Symposium on Control of Semiconductor Interfaces (ISCSI-V)(Tokyo)   Vol. OA1   page: 51-52   2007.11

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  179. High Rate Growth of Highly-Crystallized Ge Films on Quartzfrom VHF Inductively-Coupled Plasma of GeH4 + H2 Reviewed

    T. Sakata, K. Makihara, H. Deki, S. Higashi and S. Miyazaki

    Materials Science Forum   Vol. 561-565   page: 1209-1212   2007.10

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    We have studied uniform growth of crystalline Ge films on quartz plate from VHF(60MHz)-ICP of 10% GeH4 diluted with H2 in the temperature range from 150 to 350ºC. By
    optimizing total gas flow rate, gas pressure, VHF power and antenna-substrate distance, the growth
    rate as high as 7.4nm/s was obtained at 150ºC and increased gradually up to ~7.9nm/s at 350ºC. The
    crystallinity, which was evaluated by Raman scattering measurements as an integrated intensity ratio
    of TO phonons in crystalline phase to those in disordered phase, reached a value as high as ~93 % at350ºC, but degraded down to 64% at 150ºC as a result of the formation of a 60~70nm-thick amorphous incubation (A. I.) layer on quartz. By applying a two-step deposition method at 150ºC, in which the GeH4 concentration was selected to be 0.6% for the crystalline nucleation in the first 10s
    deposition, being as thin as 10nm in thickness, and then changed to 10% GeH4 for the high rate growth, the crystallinity was improved to 78% with keeping an effective growth rate as high as 7.5nm/s, because of a significant increase in the growth rate after the crystalline nucleation.

  180. Characterization of Electronic Charged States of Nickel Silicide Nanodots Using AFM/ Kelvin Probe Technique Reviewed

    R. Nishihara, K. Makihara, Y. Kawaguchi, M. Ikeda,H. Murakami, S. Higashi and S. Miyazaki

    Materials Science Forum   Vol. 561-565   page: 1213-1216   2007.10

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    We have formed high density nanodots of nickel silicide (NiSi) on ultrathin SiO2 and characterized their electronic charged states by using an AFM/Kelvin probe technique. Si quantum dots (Si-QDs) with an areal dot density of ~2.5x1011cm-2 were self-assembled on
    ~3.6nm-thick thermally-grown SiO2 by controlling the early stages of LPCVD using pure SiH4 gas. Subsequently, electron beam evaporation of Ni was carried out as thin as ~1.7nm in equivalent thickness at room temperature and followed by 300ºC anneal for 5min in vacuum.
    XPS and AFM measurements confirm the formation of NiSi dots with an average dot height of ~8nm. After removal of Ni residue on SiO2 by a dilute HCl solution, bias conditions required for electron charging to NiSi dots were compared with those to pure Si-QDs dots and Ni dots.
    The surface potential changes stepwise with respect to the tip bias due to multistep electron injection and extraction of NiSi nanodots. In addition, it is confirmed that charge retention characteristics of NiSi dots are superior to those of Si-QDs with the almost same size.

  181. Self-Assembling Formation of Ninanodots on SiO2 Induced by Remote H2-Plasma Treatment and Their Electrical Charging Characteristics

    K. Makihara, K. Shimanoe, M. Ikeda, S. Higashi, S. Miyazaki

    2007 International Conference on Solid State Devices and Materials (SSDM2007)(Tsukuba)   Vol. I-8-1   page: 1108-1109   2007.9

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  182. In-situ Measurement of Temperature Variation in Si Wafer During Millisecond Rapid Thermal Annealing Induced by Thermal Plasma Jet Irradiation

    H. Furukawa, S. Higashi, T. Okada, H. Kaku, H. Murakami, S. Miyazaki

    Solid State Device and Materials (SSDM2007)(Tsukuba)   Vol. P-1-27L   page: 376-377   2007.9

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  183. Characterization of Multistep Electron Charging and Discharging of Silicon-Quantum-Dots Floating Gate by Applying Pulsed Gate Biases

    R. Matsumoto, M. Ikeda, S. Higashi, S. Miyazaki

    2007 International Conference on Solid State Devices and Materials (SSDM2007)(Tsukuba)   Vol. I-8-3   page: 1112-1113   2007.9

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  184. Electroluminescence from Multiple-Stacked Structures of Impurity Doped Si Quantum Dots

    K. Okuyama, K. Makihara, M. Ikeda, S. Higashi, S. Miyazaki

    2007 International Conference on Solid State Devices and Materials (SSDM2007)(Tsukuba)   Vol. E-1-4   page: 106-107   2007.9

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  185. Dopant Activation Induced by Thermal Plasma Jet Crystallization of Heavily-Phosphorus-Doped Amorphous Si films

    H. Kaku, S. Higashi, H. Furukawa, T. Okada, T. Yorimoto, H. Murakami, S. Miyazaki

    The Fourteenth International Workshop on ACTIVE-MATRIX FLATPANEL DISPLAY AND DEVICES(Awaji)   Vol. 3-3   page: 33-36   2007.7

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  186. Progress on Charge Distribution in Multiply-Stacked Si Quantum Dots/SiO2 Structure as Evaluated by AFM/KFM

    K. Makihara, M. Ikeda, S. Higashi, S. Miyazaki

    2007 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2007) (Korea)   Vol. J-R22W   page: 251-254   2007.6

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  187. Phosphorus Doping to Si Quantum Dots for Floating Gate Application

    K. Makihara, M. Ikeda, A. Ohta, H. Murakami, R. Matsumoto, E. Ikenaga, M. Kobata, J. Kim, S. Higashi, S. Miyazaki

    2007 Silicon Nanoelectronics Workshop(Kyoto)   Vol. 5-3   page: 161-162   2007.6

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  188. Fermi-level pinning position modulation by Al-containing metal gate for cost-effective dual-metal/dual-high-k CMOS

    M. Kadoshima, Y. Sugita, K. Shiraishi, H. Watanabe, A. Ohta, S. Miyazaki, K. Nakajima, T. Chikyow, K. Yamada, T. Aminaka, E. Kurosawa, T. Matsuki, T. Aoyama, Y. Nara, Y. Ohji

    The 2008 Symposium on VLSI Technology(Kyoto)   Vol. 5A-1   page: 66-67   2007.6

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  189. Characterization of Chemical Bonding Features and Defect State Density in HfSiOxNy/SiO2 Gate Stack

    A. Ohta, Y. Munetaka, A. Tsugou, K. Makihara, H. Murakami, S. Higashi, S. Miyazaki, S. Inumiya, Y. Nara

    15th biannual Conference on Insulating Films on Semiconductors 2007 (INFOS2007)(Greece)   Vol. session7 7.36   page: 251-254   2007.6

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  190. Impact of Boron Doping to Si Quantum Dots on Light Emission Properties

    K. Okuyama, K. Makihara, A. Ohta, H. Murakami, M. Ikeda, S. Higashi, S. Miyazaki

    2007 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2007) (Korea)   Vol. J-R23M   page: 135-138   2007.6

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  191. Hafnium 4f Core-level Shifts Caused by Nitrogen Incorporation in Hf-based High-k Gate Dielectrics Reviewed

    N. Umezawa1, K. Shiraishi2,1, S. Miyazaki3, T. Ohno1, T. Chikyow1, K. Yamada4,1, and Y. Nara5

    Jpn. J. Appl. Phys.   Vol. 46   page: 3507-3509   2007.6

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    Hafnium (Hf) 4f core-level binding energy shifts caused by Hf–N bond formation in hafnium oxynitride (HfOxNy) have been studied by first-principles calculations. Our computational results clearly showed that the Hf 4f core-level binding energies are reduced by 0.36 and 0.65 eV for Hf–N and N–Hf–N bond formation, respectively. These results are in good agreement with chemical shifts observed in the X-ray photoelectron spectroscopy (XPS) of HfOxNy films deposited on a Si(100) substrate. In the present work, we demonstrate that the first-principles calculation is a useful tool to clarify chemical environments of Hf-based high-k gate dielectrics.

  192. Impact of impurity Doping into Si Quantum Dots with Ge Core on Their Electrical Charging Characteristics

    K. Makihara, M. Ikeda, S. Higashi, S. Miyazaki

    5th International Conference on Silicon Epitaxy and Heterostructures(France)   Vol. 22P 2-15   page: 313-314   2007.5

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  193. Characterization of Metal/High-k Structures Using Monoenergetic Positron Beams Reviewed

    Akira Uedono, Tatsuya Naito, Takashi Otsuka, Kenichi Ito, Kenji Shiraishi, Kikuo Yamabe, Seiichi Miyazaki1, Heiji Watanabe2, Naoto Umezawa3, Toyohiro Chikyow3, Toshiyuki Ohdaira4, Ryoichi Suzuki4, Yasushi Akasaka5,, Satoshi Kamiyama5, Yasuo Nara5, and Keisaku Yamada6

    Jpn. J. Appl. Phys.   Vol. 46   page: 3214-3218   2007.5

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    The impact of TiN deposition on thin high-k (HfO2 and HfSiON) films formed on Si substrates was studied using monoenergetic positron beams. For the predeposition sample, the positrons implanted into Si diffuse toward the high-k/Si interface under the influence of the electric field, suggesting the presence of negative charges in the high-k films. After TiN was deposited on HfO2, positive charges were introduced at the TiN/HfO2 interface, which were associated with the incorporation of nitride into HfO2, resulting in the formation of positively charged oxygen vacancies (VOs). From the isochronal annealing experiments for TiN/HfSiON/Si, it was found that positively charged defects (such as VO) were introduced into HfSiON after annealing at 700–900 °C. These defects were introduced by the interaction between TiN and HfSiON, resulting in the formation of polycrystalline TiO2 at the interface. The positively charged defects were annealed out at 1100 °C, but the dielectric properties of HfSiON degraded.

  194. Low Temperature High-rate Growth of Crystalline Ge Films on Quartz and Crystalline Si Substrates from VHF Inductively-Coupled Plasma of GeH4

    T. Sakata, K. Makihara, H. Deki, S. Higashi, S. Miyazaki

    5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5)(France)   Vol. 21P1-7   page: 214-215   2007.5

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  195. Light Emitting Diode with MOS Structures Containing Multiple-Stacked Si Quantum Dots Reviewed

    J. Xu, K. Makihara, H. Deki, Y. Kawaguchi, H. Murakami, S. Higashi and S. Miyazaki

    Solid State Phenomena   Vol. 121-123   page: 557-560   2007.5

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    Light emitting diode with MOS structures containing multiple-stacked Si quantum dots(QDs)/SiO2 was fabricated and the visible-infrared light emission was observed a room temperature when the negative gate bias exceeded the threshold voltage. The luminescence intensity was
    increased linearly with increasing the injected current density. The possible luminescence mechanism was briefly discussed and the delta P doping was performed to obtain the doped Si QDsand the improvement of EL intensity was demonstrated.

  196. Luminescence Study of Multiply-Stacked Structures Consisting of Impurity-Doped Si Quantum Dots and Ultrathin SiO2

    K. Makihara, Y. Kawaguchi, M. Ikeda, S. Higashi, S. Miyazaki,

    The 2007 International Meeting for Future of Electron Devices, Kansai (IMFEDK)(Osaka)   Vol. PB-5   page: 121-122   2007.4

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  197. Guiding Principle of Energy Level Controllability of Silicon Dangling Bonds in HfSiON Reviewed

    Naoto Umezawa, Kenji Shiraishi1, Seiichi Miyazaki2, Akira Uedono1, Yasushi Akasaka3, Seiji Inumiya3, Ryu Hasunuma1, Kikuo Yamabe1, Hiroyoshi Momida4, Takahisa Ohno4, Kenji Ohmori, Toyohiro Chikyow, Yasuo Nara3, and Keisaku Yamada5

    Jpn. J. Appl. Phys.   Vol. 46   page: 1891-1894   2007.4

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    Silicon dangling bonds (Si-DBs) in HfSiOx have been studied using first-principles calculations. Interestingly, our computational result revealed that the Si-DB-related gap state in HfSiOx locates in a much lower energy region than that in SiOx. This is because Hf atoms enhance the ionic character of the HfSiOx film, which in turn induces a positive charge at the Si site. We consider that the low-lying Si-DB level, which is now very near the N 2p state, contributes to the formation of strong Si–N bonds in HfSiON. The lower shift of the Si-DB level upon cation metal inclusion can be useful information not only for improving the electric properties of high-k gate stacks but also for developing prominent silicon–oxide–nitride–oxide–silicon (SONOS) nonvolatile memories where controllability of the charge trap level is a crucial issue.

  198. Melting and Solidification of Microcrystalline Si Films Induced by Semiconductor Diode Laser Irradiation Reviewed

    Kohei Sakaike, Seiichiro Higashi, Hirotaka Kaku, Hideki Murakami, and Seiichi Miyazaki

    Jpn. J. Appl. Phys.   Vol. 46   page: 1276-1279   2007.3

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    Rapid thermal annealing of microcrystalline Si (µc-Si) films induced by cw semiconductor diode laser (SDL) irradiation has been investigated. Owing to the higher absorption coefficient of µc-Si than that of amorphous Si (a-Si), 1.2-µm-thick µc-Si films are melted and recrystallized within 3 ms, whereas no phase transformation of a-Si films is observed under the same annealing condition. The annealed Si films show a high crystalline volume fraction of 97% and [111] preferential orientation. Characteristic triangle surface structures aligned to the laser scanning direction, which suggests that the lateral solidification from molten Si is observed.

  199. Ultrarapid Thermal Annealing Induced by DC Arc Discharge Plasma Jet Its Application

    S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki

    5th International Symposium Nanotechnology (JAPAN NANO 2007)(Tokyo)   Vol. P3-2   page: 144-145   2007.2

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  200. Comparison of Defect Densities in Excimer Laser and Thermal Plasma Jet Crystallized Si Films

    S. Higashi, T. Yorimoto, T. Okada, H. Kaku, H. Murakami, S. Miyazaki

    3rd International TFT Conference(Italy)   Vol. P21   page: 204-207   2007.1

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  201. Comparison of Defect Densities in Excimer Laser and Thermal Plasma Jet Crystallized Si Films, 3rd International TFT Conference, Rome, Italy, Jan.

    S. Higashi, T. Yorimoto, T. Okada, H. Kaku, H. Murakami, S. Miyazaki,

    3rd International TFT Conference, Rome, Italy, Jan. 25-26, 2007, P21, pp     page: 204-207.   2007.1

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  202. Growth of Si Crystalline in SiOx Films Induced by Millisecond Rapid Thermal Annealing Using Thermal Plasma Jet

    T. Okada, S. Higashi, H. Kaku, T. Yorimoto, H.Murakami, S. Miyazaki

    3rd International TFT Conference(Italy)   Vol. 5a.3   page: 82-85   2007.1

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  203. Theoretical Studies on Metal/High-k Gate Stacks

    K. Shiraishi, Y. Akasaka, G. Nakamura, T. Nakayama, S. Miyazaki, H. Watanabe, A. Ohta, K. Ohmori, T. Chikyow, Y. Nara, K. Yamabe, K. Yamada

    ECS Trans.   Vol. 6 ( 1 ) page: 191-204   2007

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  204. Electrical Characteristics of Lightly-Doped Si Films Crystallized by Thermal Plasma Jet Irradiation

    T. Yorimoto, S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki, M. Maki, T. Sameshima

    Trans. of MRS-J   Vol. 32 ( 2 ) page: 465-468   2007

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  205. Performance Improvement of HfAlOxN n-Channel Metal-Oxide-Semiconductor Field-Effect Transistors by Controlling the Bonding Configuration of Nitrogen Atoms Coordinated to Hf Atoms

    K. Iwamoto, T. Nishimura, A. Ohta, K. Tominaga, T. Nabatame, S. Miyazaki, A. Toriumi

    Jpn. J. Appl. Phys.   Vol. 46 ( 12 ) page: 7666-7670   2007

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  206. Control of Substrate Surface Temperature in Millisecond Annealing Technique Using Thermal Plasma Jet

    T. Okada, S. Higashi, H. Kaku, N. Koba, H. Murakami, S. Miyazaki

    Thin Solid Films   Vol. 515   page: 4897-4900   2007

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  207. Melting and Solidification of Microcrystalline Si Films Induced by Semiconductor Diode Laser Irradiation

    K. Sakaike, S. Higashi, H. Kaku, H. Murakami, S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 46 ( 3B ) page: 1276-1279   2007

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  208. Vacancy-fluorine complexes and their impact on the properties of metal-oxide transistors with high-k gate dielectrics studied using monoenergetic positron beams

    A. Uedono, S. Inumiya, T. Matsuki, T. Aoyama, Y. Nara, S. Ishibashi, T. Ohdaira, R. Suzuki, S. Miyazaki, K. Yamada

    J. Appl. Phys   Vol. 102   page: 054511-1 – 054511-7   2007

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  209. Improvement in Fermi-Level Pinning of p-MOS Metal Gate Electodes on HfSiON by Employing Ru Gate Electrodes

    M. Kadoshima, Y. Suginta, K. Shiraishi, H. Watanabe, A. Ohta, S. Miyazaki, K. Nakajima, T. Chikyow, K. Yamada, T. Aminaka, E. Kurosawa, T. Matsuki, T. Aoyama, Y. Nara, Y. Ohji

    ECS Trans.   Vol. 11 ( 4 ) page: 169-180   2007

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  210. Characterization of Chemical Bonding Features and Defect State Density in HfSiOxNy/SiO2 Gate Stack

    A. Ohta, Y. Munetaka, A. Tsugou, K. Makihara, H. Murakami, S. Higashi, S. Miyazaki, S. Inumiya, Y. Nara

    Microelec. Eng.   Vol. 84   page: 2386-2389   2007

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  211. Characterization of Electronic Charged States of Si-Based Quantum Dots for Floating Gate Application

    S. Miyazaki, M. Ikeda, K. Makihara

    ECS Trans.   Vol. 11 ( 6 ) page: 233-243   2007

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  212. Characterization of Electronic Charged States of Nickel Silicide Nanodots Using AFM/Kelvin Probe Technique

    R. Nishihara, K. Makihara, Y. Kawaguchi, M. Ikeda, H. Murakami, S. Higashi, S. Miyazaki

    Materials Science Forum   Vol. 561-565   page: 1213-1216   2007

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  213. Light Emitting Diode with MOS Structures Containing Multiple-Stacked Si Quantum Dots

    J. Xu, K. Makihara, H. Deki, Y. Kawaguchi, H. Murakami, S. Higashi, S. Miyazaki

    Solid State Phenomena   Vol. 121-123   page: 557-560   2007

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  214. Vacancy-Type Defects in MOSFETs with High-k Gate Dielectrics Probed by Monoenergetic Positron Beams

    A. Uedono, R. Hasumuma, K. Shiraishi, K. Yamabe, S. Inumiya, Y. Akasaka, S. Kamiyama, T. Matsuki, T. Aoyama, Y. Nara, S. Miyazaki, H. Watanab, N. Umezawa, T. Chikyow, S. Ishibashi, T. Ohdaira, R. Suzuki, K. Yamada

    ECS Trans.   Vol. 11 ( 4 ) page: 81-90   2007

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  215. Role of the Ionicity in Defect Formation in Hf-based Dielectrics

    N. Umezawa, K. Shiraishi, S. Miyazaki, A. Uedono, Y. Akasaka, S. Inumiya, A. Oshiyama, R. Hasunuma, K. Yamabe, H. Momida, T. Ohno, K. Ohmori, T. Chikyow, Y. Nara, K. Yamada

    ECS Trans.   Vol. 11 ( 4 ) page: 199-211   2007

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  216. Tight distribution of dielectric characteristics of HfSiON in metal gate devices

    R. Hasumuma, T. Naito, C. Tamura, A. Uedono, K. Shiraishi, N. Umezawa, T. Chikyow, S. Inumiya, M. Sato, Y. Tamura, H. Watanabe, Y. Nara, Y. Ohji, S. Miyazaki, K. Yamada, K. Yamabe

    ECS Trans.   Vol. 11 ( 4 ) page: 3-11   2007

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  217. Introduction of defects into HfO2 gate dielectrics by metal-gate deposition studied using x-ray photoelectron spectroscopy and positron annihilation

    1. A. Uedono, T. Naito, T. Otsuka, K. Shiraishi, K. Yamabe, S. Miyazaki, H. Watanabe

    J. Appl. Phys.   Vol. 100   page: 064501-1 – 064501-5   2006

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    Language:English   Publishing type:Research paper (scientific journal)  

  218. Depth Profiling of Chemical and Electronic Structures and Defects of Ultrathin HfSiON on Si(100)

    S. Miyazaki, A. Ohta, S. Inumiya, Y. Nara, K. Yamada

    ECS Trans.   Vol. 3 ( 3 ) page: 171-180   2006

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  219. Physics of Metal/High-k Interfaces

    T. Nakayama, K. Shiraishi, S. Miyazaki, Y. Akasaka, K. Torii, P. Ahmet, K. Ohmori, N. Umezawa, H. Watanabe, T. Chikyow, Y. Nara, A. Ohta, H. Iwai, K. Yamada, T. Nakaoka

    Physics of Metal/High-k Interfaces   Vol. 3 ( 3 ) page: 129-140   2006

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  220. Multistep Electron Charging to and Discharging from Silicon-Quantum-Dots Floating Gate in nMOSFETs

    T. Nagai, M. Ikeda, Y. Shimizu, S. Higashi, S. Miyazaki

    Trans. of MRS-J   Vol. 31 ( 1 ) page: 137-140   2006

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  221. Study of Charged States of Si Quantum Dots with Ge Core

    K. Makihara, M. Ikeda, S. Higashi, S. Miyazaki

    ECS Trans.   Vol. 3 ( 7 ) page: 257-262   2006

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  222. Characterization of Electronic Charged States of Si-Based Quantum Dots and Their Application to Floating Gate Memories

    S. Miyazaki, M. Ikeda and K. Makihara

    ECS Trans.   Vol. 2 ( 1 ) page: 157-164   2006

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  223. Fabrication of Multiply-Stacked Si Quantum Dots for Floating Gate MOS Devices

    K. Makihara, M. Ikeda, T. Nagai, H. Murakami, S. Higashi, S. Miyazaki

    Trans. of MRS-J   Vol. 31 ( 1 ) page: 133-136   2006

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  224. Decay Characteristics of Electronic Charged States of Si Quantum Dots as Evaluated by an AFM/Kelvin Probe Technique

    J. Nishitani, K. Makihara, M. Ikeda, H. Murakami, S. Higashi, S. Miyazaki

    Thin Solid Films   Vol. 508 ( 1-2 ) page: 190-194   2006

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  225. Characterization of Electronic Charged States of P-doped Si Quantum Dots Using AFM/Kelvin Probe

    K. Makihara, J. Xu, M. Ikeda, H. Murakami, S. Higashi, S. Miyazaki

    Thin Solid Films   Vol. 508 ( 1-2 ) page: 186-189   2006

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  226. Characterization of HfSiON gate dielectrics using monoenergetic positron beams

    1. A. Uedono, K. Ikeuchi, T. Otsuka, K. Shiraishi, K. Yamabe, S. Miyazaki, N. Umezawa, A. Hamid, T. Chikyow

    J. Appl. Phys.   Vol. 99   page: 054507-1 – 054507-6   2006

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  227. Characterization of FUSI-PtSi Formed on Ultrathin HfO2/Si(100) by Photoelectron Spectroscopy

    Y. Munetaka, F. Takeno, A. Ohta, H. Murakami, S. Higashi, S. Miyazaki

    Trans. of the Mat. Res. Soc. of Japan   Vol. 31 ( 1 ) page: 145-148   2006

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  228. Crystallization of Si in Millisecond Time Domain Induced by Thermal Plasma Jet Irradiation

    S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 45 ( 5B ) page: 4313-4320   2006

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  229. Analysis of Transient Temperature Profile During Thermal Plasma Jet Annealing of Si Films on Quartz Substrate

    T. Okada, S. Higashi, H. Kaku, N. Koba, H. Murakami, S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 45 ( 5B ) page: 4355-4357   2006

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  230. In-Situ Observation of Rapid Crystalline Growth Induced by Excimer Laser Irradiation to Ge/Si Stacked Structure

    A. Yamashita, Y. Okamoto, S. Higashi, S. Miyazaki, H. Watakabe, T. Sameshima

    Thin Solid Films   Vol. 508   page: 53-56   2006

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  231. High-rate Growth of Highly-crystallized Si Films from VHF Inductively-Coupled Plasma CVD

    N. Kosku, S. Miyazaki

    Thin Solid Films   Vol. 511-512   page: 265-270   2006

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  232. The Application of Very High Frequency Inductively-coupled Plasma to High-Rate Growth of Microcrystalline Silicon Films

    N. Kosku, S. Miyazaki

    J. Non-Cryst. Solid   Vol. 352   page: 911-914   2006

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  233. Growth of Crystallized Ge Films from VHF-Inductively Coupled Plasma of H2-Diluted GeH4

    T. Sakata, K. Makihara, S. Higashi, S. Miyazaki

    Thin Solid Films   Vol. 515 ( 12 ) page: 4971-4974   2006

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  234. An Unfavorable Effect of Nitrogen Incorporation on Reduction in the Oxygen Vacancy Formation Energy

    N. Umezawa, K. Shiraishi, Y. Akasaka, S. Inumiya, A. Uedono, S. Miyazaki, T. Chikyow, T.Ohno, Y. Nara, K. Yamada

    Trans. of the Mat. Res. Soc. of Japan   Vol. 31 ( 1 ) page: 129-132   2006

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  235. Photoemission Study of Ultrathin HfSiON/Si(100) Systems

    A. Ohta, H. Nakagawa, H. Murakami, S. Higashi, S. Miyazaki, S. Inumiya, Y. Nara

    Trans. of the Mat. Res. Soc. of Japan   Vol. 31 ( 1 ) page: 125-128   2006

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  236. Photoemission Study of Ultrathin GeO2/Ge Heterostructures Formed by UV-O3 Oxidation

    A. Ohta, H. Murakami, S. Higashi, S. Miyazaki

    Jour. of Sur. Sci. and Nanotech.   Vol. 4   page: 174-179   2006

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  237. Impact of Nitrogen Incorporation into Yittrium Oxide on Chemical Bonding Features and Electrical Properties

    H. Abe, H. Nakagawa, M. Taira, A. Ohta, S. Higashi, S. Miyazaki

    Trans. of the Mat. Res. Soc. of Japan   Vol. 31 ( 1 ) page: 157-160   2006

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  238. Nitridation of Ge(100) Surfaces by Vacuum-ultra violet (VUV) Irradiation in NH3 Ambience

    H. Nakagawa, A. Ohta, M. Taira, H. Abe, H. Murakami, S. Higashi, S. Miyazaki

    Trans. of the Mat. Res. Soc. of Japan   Vol. 31 ( 1 ) page: 153-156   2006

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  239. Influence of thermal annealing on defect states and chemical structures in ultrathin Al2O3/SiN/poly-Si

    M. Taira, A. Ohta, H. Nakagawa, S. Miyazaki, K. Yoneda, M. Horikawa, K. Koyama

    Trans. of the Mat. Res. Soc. of Japan   Vol. 31 ( 1 ) page: 149-152   2006

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  240. Control of the Nucleation Density of Si Quantum Dots by Remote Hydrogen Plasma Treatment

    K. Makihara, H. Deki, H. Murakami, S. Higasi, S. Miyazaki

    Appl. Surf. Sci.   Vol. 244 ( 1-4 ) page: 75-78   2005

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  241. Crystallization of Si Films on Glass Substrate Using Thermal Plasma Jet

    S. Higashi, H. Kaku, H. Taniguchi, H. Murakami, S. Miyazaki

    Thin Solid Films   Vol. 487   page: 122-125   2005

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  242. Crystallization of Si Films on Glass Substrate Using Thermal Plasma Jet

    S. Higashi, H. Kaku, H. Taniguchi, H. Murakami, S. Miyazaki

    Thin Solid Films   Vol. 487   page: 122-125   2005

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  243. High-Rate Growth of Highly-Crystallized Si Films from VHF Inductively-Coupled Plasma CVD

    N. Kosku, S. Miyazaki

    Trans. of MRS-J   Vol. 30 ( 1 ) page: 279-282   2005

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  244. Fabrication of Polycrystalline Si Thin Film Transistor Using Plasma Jet Crystalliztion Technique

    H. Kaku, S. Higashi, S. Miyazaki, M. Asami, H. Watakabe, N. Andoh, T. Sameshima

    Trans. of MRS-J   Vol. 30 ( 1 ) page: 283-286   2005

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  245. Application of Plasma Jet Crystallization Technique to Fabrication of Thin-Film Transistor

    S. Higashi, H. Kaku, H. Murakami, S. Miyazaki, H. Watakabe, N. Ando, T. Sameshima

    Jpn. J. Appl. Phys.   Vol. 44 ( 3 ) page: L108-L110   2005

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  246. Influence of Substrate dc Bias on Crystallinity of Silicon Films Grown at a High Rate from Inductively-coupled Plasma CVD

    N. Kosku, H. Murakami, S. Higashi, S. Miyazaki

    Appl. Surf. Sci.   Vol. 244 ( 1-4 ) page: 39-42   2005

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  247. A New Crystallization Technique of Si Films on Glass Substrate Using Thermal Plasma Jet

    H. Kaku, S. Higashi, H. Taniguchi, H. Murakami, S. Miyazaki

    Appl. Surf. Sci.   Vol. 244 ( 1-4 ) page: 8-11   2005

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  248. Characterization of Germanium Nanocrystallites Grown on SiO2 by a Conductive AFM Probe Technique

    K. Makihara, Y. Okamoto, H. Murakami, S. Higashi, S. Miyazaki

    IEICE Trans. on Electronics   Vol. E88-C ( 4 ) page: 705-708   2005

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  249. Formation of Microcrystalline Germanium (mc-Ge:H) Films From Inductively-Coupled Plasma CVD

    Y. Okamoto, K. Makihara, H. Murakami, S. Higasi, S. Miyazaki

    Appl. Surf. Sci.   Vol. 244 ( 1-4 ) page: 12-15   2005

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  250. Electrical Characterization of HfAlOx/SiON Dielectric Gate Capacitors

    Y. Pei, S. Nagamachi, H. Murakami, S. Higashi, S. Miyazaki, T. Kawahara, K. Torii

    Trans. of the Mat. Res. Soc. of Japan   Vol. 30 ( 1 ) page: 205-208   2005

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  251. Analysis of Leakage Current through Al/HfAlOx/SiONx/Si(100) MOS Capacitors

    S. Nagamachi, A. Ohta, F. Takeno, H. Nakagawa, H. Murakami, S. Miyazaki, T. Kawahara, K. Torii

    Trans. of the Mat. Res. Soc. of Japan   Vol. 30 ( 1 ) page: 197-200   2005

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  252. The Role of Oxygen-related Defects on the Reliabilities of HfO2-based High-k Gate Insulators

    K. Torii, K. Shiraishi, S. Miyazaki, K. Yamabe, M. Boero, T. Chikyow, K. Yamada, H. Kitajima, T. Arikado

    Trans. of the Mat. Res. Soc. of Japan   Vol. 30 ( 1 ) page: 191-195   2005

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  253. Impact of Rapid Thermal Anneal on ALCVD-Al2O3/Si3N4/Si(100) Stack Structures-Photoelectron Spectroscopy

    F. Takeno, A. Ohta, S. Miyazaki, K. Komeda, M. Horikawa, K. Koyama

    Trans. of the Mat. Res. Soc. of Japan   Vol. 30 ( 1 ) page: 213-217   2005

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  254. Characterization of Charge Trapping and Dielectric Breakdown of HfAlOX/SiON Dielectric Gate Stack

    Y. Pei, S. Nagamachi, H. Murakami, S. Higashi, S. Miyazaki, T. Kawahara, K. Torii, Y. Nara

    ECS Trans.   Vol. 1 ( 1 ) page: 163-172   2005

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  255. Characterization of Aluminum-Oxynitride Stacked Gate Dielectrics Prepared by a Layer-by-Layer Process of Chemical Vapor Deposition and Rapid Thermal Nitridation

    H. Murakami, W. Mizubayashi, H. Yokoi, A. Suyama, S. Miyazaki

    IEICE Trans. on Electronics   Vol. E88-C ( 4 ) page: 640-645   2005

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  256. Characterization of Atom Diffusion in Polycrystalline Si/SiGe/Si Stacked Gate

    H. Murakami, Y. Moriwaki, M. Fujitake, D. Azuma, S. Higashi, S. Miyazaki

    IEICE Trans. on Electronics   Vol. E88-C ( 4 ) page: 646-650   2005

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  257. Impact of Rapid Thermal Anneal on ALCVD-Al2O3/Si3N4/Si(100) Stack Structures-Photoelectron Spectroscopy

    F. Takeno, A. Ohta, S. Miyazaki, K. Komeda, M. Horikawa, K. Koyama

    Trans. of the Mat. Res. Soc. of Japan   Vol. 30 ( 1 ) page: 213-217   2005

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  258. Analysis of Leakage Current through Al/HfAlOx/SiONx/Si(100) MOS Capacitors

    S. Nagamachi, A. Ohta, F. Takeno, H. Nakagawa, H. Murakami, S. Miyazaki, T. Kawahara, K. Torii

    Trans. of the Mat. Res. Soc. of Japan   Vol. 30 ( 1 ) page: 197-200   2005

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  259. Characterization of Electronic Charged States of Silicon Nanocrystals as a Floating Gate in MOS Structures

    S. Miyazaki, T. Shibaguchi, M. Ikeda

    Mat. Res. Soc. Symp. Proc.   Vol. 830   page: 249-254   2005

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  260. Charging and Discharging Characteristics of Stacked Floating Gates of Silicon Quantum Dots

    T. Shibaguchi, M. Ikeda, H. Murakami, S. Miyazaki

    IEICE Trans. on Electronics   Vol. E88-C ( 4 ) page: 709-712   2005

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  261. Influence of Thermal Annealing on Compositional Mixing and Crystallinity of Highly-Selective Grown Si Dots with Ge Core

    Y. Darma, Hideki Murakami, S. Miyazaki

    Appl. Surf. Sci.   Vol. 224   page: 156-159   2004

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  262. New Analytical Modeling for Photoinduced Discharge Characteristics of Photoreceptors

    A. Teshima, S. Miyazaki,

    Jpn. J. Appl. Phys.   Vol. 43 ( 8A ) page: 5129-5133   2004

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  263. Electrical Characterization of Ge Microcrystallites by Atomic Force Microscopy Using a Conducting Probe

    K. Makihara, Y. Okamoto, H. Nakagawa, M. Ikeda, H. Murakami, S. Higashi, S. Miyazaki

    Thin Solid Films   Vol. 457   page: 103-108   2004

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  264. Analysis of Soft Breakdown of 2.6-4.9nm-Thick Gate Oxides

    W. Mizubayashi, S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 43 ( 10 ) page: 6925-6929   2004

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  265. Statistical Analysis of Soft and Hard Breakdown in 1.9-4.8nm-thick Gate Oxides, IEEE Electron Device Lett.

    W. Mizubayashi, Y. Yoshida, H. Murakami, S. Miyazaki, M. Hirose

    IEEE Electron Device Lett   Vol. 25 ( 5 ) page: 305-307   2004

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  266. Praseodymium silicate formed by postdeposition high-temperature annealing

    A. Sakai, S. Sakashita, M. Sakashita, S. Zaima, S. Miyazaki

    Appl. Phys. Lett.   Vol. 85 ( 22 ) page: 5322-5324   2004

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  267. Impact of Rapid Thermal O2 Anneal on Dielectric Stack Structures of Hafnium Aluminate and Silicon Dioxide Formed on Si(100)

    A. Ohta, H. Nakagawa, H. Murakami, S. Higashi, T, Kawahara, K. Torii, S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 43 ( 11B ) page: 7831-7836   2004

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  268. Photoelectron Spectroscopy of ultrathin yttrium oxide films on Si(100)

    A. Ohta, M. Yamaoka, S. Miyazaki

    Microelec. Eng.   Vol. 72   page: 154-159   2004

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  269. Characterization of Interfacial Oxide Layers in Heterostructures of Hafnium Oxides Formed on NH3-nitrided Si(100)

    H. Nakagawa, A. Ohta, F. Takeno, S. Nagamachi, H. Murakami, S. Higashi, S. Miyazaki

    Jpn. J. Appl. Phys.   Vol. 43 ( 11B ) page: 7890-7894   2004

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  270. Influence of Boron and Fluorine Incorporation on the Network Structure of Ultrathin SiO2 Reviewed

    S. Miyazaki, K. Morino and M. Hirose

      Vol. 76-77   page: 149-152   2001

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    Incorporation of boron and fluorine atoms in to an ultrathin SiO2 layer during a p+-polySi gate fabrication process with BF2+ or B+ implantation and its influence on the SiO2 bonding network have been studied by FT-IR and XPS in conjunction with SiO2 thinning by dilute HF etching. The analysis of F1s core spectrum measured at each SiO2 thinning step shows that fluorine atoms pile up in the SiO2 network near the SiO2/Si interface in bonding forms of mainly F-SiO3 or F-BO3 units and partly F-O units. Also, boron pile-up near the interface has been confirmed from the depth profiling of the IR absorption bands due to B-F and B-O bonds. The thickness dependence of the LO phonon frequency for the oxides with B or B/F incorporation indicates that not only fluorine atoms but also three-coordinate boron atoms in the interfacial region relax built-in compressive stress in the oxide network near the interface

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Books 12

  1. 化学便覧 第7版 応用化学編

    宮崎誠一( Role: Joint author)

    日本化学会編,丸善出版(株)  2014 

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    Ⅱ基礎的化学技術/材料,7章 電子・光材料プロセス技術
    7.3.2 CVD技術

  2. 薄膜工学(第2版)分担執筆 第2章3節「化学気相成長法」

    宮崎誠一( Role: Sole author)

    丸善出版  2011.6 

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    Language:Japanese

  3. マイクロ・ナノ領域の超精密技術第3章2節「半導体デバイス」ⅠSi系(極微細化の観点を中心にして)

    宮崎誠一( Role: Sole author)

    オーム社  2011.3 

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    Language:Japanese

  4. 実用薄膜プロセス―機能創製・応用展開― 第1編「創製技術」第5章「CVD」

    宮崎誠一( Role: Sole author)

    技術教育出版社  2009 

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    Language:Japanese

  5. 次世代半導体メモリの最新技術 第6章

    ( Role: Joint author)

    シーエムシー出版  2009 

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    シリコン系ナノ構造集積と機能メモリデバイス開発

  6. プラズマ・核融合学会誌 熱プラズマによるアモルファスシリコンの結晶化,「講座 熱流を伴う反応性プラズマを用いた材料合成プロセス 3.結晶化・相変化制御への応用」

    東 清一郎, 宮崎 誠一( Role: Joint author)

    2009 

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    Language:Japanese

  7. 次世代半導体メモリの最新技術 第6章分担執筆:「シリコン系ナノ構造集積と機能メモリデバイス開発」

    ( Role: Sole author)

    シーエムシー出版  2009 

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    Language:Japanese

  8. プラズマ・核融合学会誌85(3) 熱プラズマによるアモルファスシリコンの結晶化,「講座 熱流を伴う反応性プラズマを用いた材料合成プロセス 3.結晶化・相変化制御への応用」

    東 清一郎, 宮崎 誠一( Role: Joint author)

    プラズマ・核融合学会  2009 

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  9. 実用薄膜プロセス―機能創製・応用展開― 第1編「創製技術」第5章「CVD」

    ( Role: Sole author)

    技術教育出版社  2009 

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    Language:Japanese

  10. 究極のかたちをつくる 第1章分担執筆:「ナノサイズのかたちをつくる」

    ( Role: Sole author)

    日刊工業新聞社  2009 

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    Language:Japanese

  11. 薄膜ハンドブック 第II編 第1章 1.3.4 CVD(編集・分担執筆 )

    宮崎 誠一( Role: Sole author)

    Ohmsha  2008 

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    Language:Japanese

  12. 表面科学の基礎と応用(第3編、第1章・第2節)

    ( Role: Joint author)

    エヌ・ティー・エス  2004 

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    Siの熱酸化機構、Si表面の熱酸化、Si酸化膜の構造、極薄Si酸化膜およびSi/SiO2界面の分析

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Presentations 769

  1. Effects of HCl cleaning on Al2O3/GaN interface and electrical properties

    2022.1.28 

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    Event date: 2022.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  2. Controls of Crystallinity and Surface Flatness of Al/Ge(111) by Substrate Heating and Ge Surface Segregation by Annealing

    2022.1.28 

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    Event date: 2022.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  3. Fe ナノドットへのSiH4 照射による Fe シリサイドナノドットの高密度・一括形成と室温PL 特性評価

    斎藤 陽斗、古幡 裕志、牧原 克典、志村 洋介、大田 晃生、田岡 紀之、宮﨑 誠一

    第21回日本表面真空学会中部支部学術講演会(若手講演会)  2021.12.18  日本表面真空学会中部支部

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    Event date: 2021.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催   Country:Japan  

    11:15 - 11:30 2

  4. AFM/KFM による超高密度一次元連結 Si 系量子ドットの局所帯電電荷分布計測

    今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一

    第21回日本表面真空学会中部支部学術講演会(若手講演会)  2021.12.18  日本表面真空学会中部支部

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    Event date: 2021.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催   Country:Japan  

    11:30 - 11:45 3

  5. Electroluminescence Study of Si Quantum Dots with Ge Core Invited

    2021年度ナノ構造・物性-ナノ機能・応用部会合同シンポジウム  2021.12.1  ナノ学会

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    Event date: 2021.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:ハイブリット開催(対面(松江テルサ(島根県松江市))、オンライン併用)   Country:Japan  

    12/1 13:30-14:10

  6. Roles for Si, Oxygen atoms and Oxygen Vacancy in Crystalline Phase Stabilization of HfZr-oxide Layer International conference

    N. Taoka, R. Hasegawa, A. Ohta, K. Makihara, and S. Miyazaki

    2021 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY (2021 IWDTF)  2021.11.15 

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    Event date: 2021.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:On-line virtual   Country:Japan  

  7. Impact of Substrate Heating on Surface Flattening and Ge Segregation of Al/Ge(111) International conference

    K. Matsushita, A. Ohta, N. Taoka, S. Hayashi, K. Makihara, and S. Miyazaki

    2021 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY (2021 IWDTF)  2021.11.14 

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    Event date: 2021.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:On-line virtual   Country:Japan  

  8. Characterization of Electronic Charged States of High Density Self-aligned Si-based Quantum Dots Evaluated with AFM/Kelvin Probe Technique International conference

    Y. Imai, K. Makihara, A. Ohta, N. Taoka, and S. Miyazaki

    34th International Microprocesses and Nanotechnology Conference (MNC 2021)  2021.10.27 

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    Event date: 2021.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online and On-Demand Conference   Country:Japan  

  9. Study on Silicidation Reaction of Fe-NDs with SiH4 International conference

    H. Furuhata, K. Makihara, A. Ohta, N. Taoka, and S. Miyazaki

    34th International Microprocesses and Nanotechnology Conference (MNC 2021)  2021.10.26 

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    Event date: 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online and On-Demand Conference   Country:Japan  

  10. Impact of Boron Doping and H2 Annealing on Light Emission from Ge/Si Core-Shell Quantum Dots Invited International conference

    S. Miyazaki, K. Makihara

    240th ECS Meeting (Symposium G02 - Semiconductor Process Integration 12)  2021.10.14 

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    Event date: 2021.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Digital Platform   Country:United States  

  11. Remote Hydrogen Plasma-Assisted Formation and Characterization of High-Density Fe-Silicide Nanodots International conference

    J. Wu, Z. He, H. Furuhata, A. Ohta, N. Taoka, K. Makihara, and S. Miyazaki

    The 2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021)  2021.9.24 

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    Event date: 2021.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:ALL-VIRTUAL conference   Country:Japan  

  12. High Density Formation and Light Emission Characterization of Si Quantum Dots with Ge Core Invited International conference

    K. Makihara, and S. Miyazaki

    The 2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021)  2021.9.24 

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    Event date: 2021.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:ALL-VIRTUAL conference   Country:Japan  

  13. Study on Silicidation Reaction of Fe-NDs with SiH4 for Light Emission Devices International conference

    H. Furuhata, K. Makihara, A. Ohta, N. Taoka, and S. Miyazaki

    The 2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021)  2021.9.24 

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    Event date: 2021.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:ALL-VIRTUAL conference   Country:Japan  

  14. Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots International coauthorship

    J. Wu, K. Makihara, H. Zhang, H. Furuhata, N. Taoka, A. Ohta, and S. Miyazaki

    2021.9.23 

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    Event date: 2021.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  15. High Density Formation of Fe-based Silicide Nanodots Induced by Remote H2 Plasma International coauthorship

    Z. He, J. Wu, K. Makihara, H. Zhang, H. Furuhata, N. Taoka, A. Ohta, and S. Miyazaki

    2021.9.23 

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    Event date: 2021.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  16. Si量子ドット多重集積構造へのP添加による内部ポテンシャル変調と電子放出特性評価

    尾林 秀治、牧原 克典、竹本 竜也、田岡 紀之、大田 晃生、宮﨑 誠一

    第82回応用物理学会秋季学術講演会  2021.9.13 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

    講演番号:13p-N323-5

  17. 後酸化によって形成したHf酸化物の結晶構造に基板面方位が与える影響

    安田 航、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一

    第82回応用物理学会秋季学術講演会  2021.9.12 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

    講演番号:12p-N301-13

  18. 基板加熱がAl/Ge(111)構造の表面平坦化とGe偏析に及ぼす影響

    松下 圭吾、大田 晃生、田岡 紀之、林 将平、牧原 克典、宮﨑 誠一

    第82回応用物理学会秋季学術講演会  2021.9.10 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

    講演番号:10p-N202-18

  19. 高密度FeナノドットへのSiH4照射によるシリサイド化反応制御

    古幡 裕志、牧原 克典、大田 晃生、田岡 紀之、宮﨑 誠一

    第82回応用物理学会秋季学術講演会  2021.9.10 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

    講演番号:10p-N302-10

  20. AFM/KFMによる超高密度一次元連結Si系量子ドットの局所帯電電荷計測

    今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一

    第82回応用物理学会秋季学術講演会  2021.9.10 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

    講演番号:10p-N304-5

  21. Study on Electron Emission from Phosphorus delta-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures International conference

    K. Makihara, T. Takemoto, S. Obayashi, A. Ohta, N. Taoka, and S. Miyazaki

    2021 International Conference on Solid State Devices and Materials (SSDM 2021)  2021.9.7 

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    Event date: 2021.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:All-VIRTUAL conference   Country:Japan  

  22. Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots International coauthorship International conference

    J. Wu. K. Makihara, H. Zhang, N. Taoka, A. Ohta, and S. Miyazaki

    2021 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2021)  2021.8.26 

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    Event date: 2021.8

    Language:English   Presentation type:Oral presentation (general)  

    Venue:VIRTUAL conference   Country:Japan  

  23. [チュートリアル]組成・状態評価 Invited

    宮﨑 誠一

    日本学術振興会 R025先進薄膜界面機能創成委員会 リトリート学習会  2021.7.31 

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    Event date: 2021.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催   Country:Japan  

  24. Fabrication and Characterization of Multiple Stack Si/Ge Quantum Dots for Light/Electron Emission Devices Invited International conference

    S. Miyazaki

    13th International Conference And Expo On Nanotechnology & Nanomaterials (iNanotech 2021)  2021.7.13 

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    Event date: 2021.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Spain  

  25. 熱処理による金属/Ge構造上の極薄Ge結晶形成

    大田 晃生、松下 圭吾、田岡 紀之、牧原 克典、宮﨑 誠一

    電子情報通信学会 シリコン材料・デバイス研究会(SDM)「MOSデバイス・メモリ高性能化-材料・プロセス技術」(応用物理学会 シリコンテクノロジー分科会との合同開催)  2021.6.22 

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    Event date: 2021.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

    信学技報, vol. 121, no. 71, SDM2021-29, pp. 27-31, 2021年6月

  26. Photoemission-based Characterization of Interface Dipoles and Defect States for Gate Dielectrics Invited International conference

    S. Miyazaki

    11th International Conference on Processing and Manufacturing of Advanced Materials (Thermec'2021)  2021.6 

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    Event date: 2021.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Virtual Conference   Country:Austria  

  27. ナノドットによる量子物性制御デバイスの開発 Invited

    牧原 克典、宮﨑 誠一

    放射線科学とその応用第186委員会 第38回研究会  2021.5.18  日本学術振興会産学協力研究委員会 放射線科学とその応用第186委員会

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    Event date: 2021.5

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催   Country:Japan  

  28. リモート水素プラズマ支援FePt合金ナノドット自己組織化形成プロセスにおける基板温度が磁化特性に与える影響

    本田 俊輔、古幡 裕志、大田 晃生、池田 弥央、大島 大輝、加藤 剛志、牧原 克典、宮﨑 誠一

    第68回応用物理学会春季学術講演会  2021.3.19 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

  29. 低温水素アニール処理がGeコアSi量子ドットのPL特性に及ぼす影響

    前原 拓哉、池田 弥央、大田 晃生、牧原 克典、宮﨑 誠一

    第68回応用物理学会春季学術講演会  2021.3.17 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

  30. XANAMにより測定したGe量子ドット像のX線エネルギー依存性

    鈴木 秀士、向井 慎吾、田 旺帝、野村 昌治、藤森 俊太郎、池田 弥央、牧原 克典、宮﨑 誠一、朝倉 清高

    第68回応用物理学会春季学術講演会  2021.3.17 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催   Country:Japan  

  31. HCl前洗浄がAl2O3/GaN界面特性に与える影響

    長井 大誠、田岡 紀之、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    第68回応用物理学会春季学術講演会  2021.3.16 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

  32. XANAMによるSi-Ge量子ドットにおけるX線誘起力変化の調査

    鈴木 秀士、向井 慎吾、田 旺帝、野村 昌治、藤森 俊太郎、池田 弥央、牧原 克典、宮﨑 誠一、朝倉 清高

    第68回応用物理学会春季学術講演会  2021.3.16 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

  33. Segregation Control for Ultrathin Ge Layer in Al/Ge(111) system International conference

    A. Ohta, M. Kobayashi, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki

    13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 14th International Conference on Plasma-Nano Technology and Science (ISPlasma 2021 / IC-PLANTS 2021)  2021.3.10 

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    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  34. Characterization of Electron Field Emission from Phosphorus δ-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures International conference

    T. Takemoto, T. Niibayashi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 14th International Conference on Plasma-Nano Technology and Science (ISPlasma 2021 / IC-PLANTS 2021)  2021.3.9 

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    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  35. Influence of Substrate Temperature on Plasma-Enhanced Self-Assembling Formation of High Density FePt-Nanodot International conference

    S. Honda, K. Makihara, H. Furuhata, A. Ohta, M. Ikeda, T. Kato, D. Oshima, and S. Miyazaki

    13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 14th International Conference on Plasma-Nano Technology and Science (ISPlasma 2021 / IC-PLANTS 2021)  2021.3.9 

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    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  36. High-Density Formation of FeSi2 Nanodots on Ultrathin SiO2 Induced by Remote Hydrogen Plasma International conference

    H. Zhixue, H, Zhang, A. Ohta, M. Ikeda, N. Taoka, K. Makihara, and S. Miyazaki

    13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 14th International Conference on Plasma-Nano Technology and Science (ISPlasma 2021 / IC-PLANTS 2021)  2021.3.9 

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    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  37. Magnetoelectronic Transport Characteristics of Fe3Si Nanodots on Ultrathin SiO2 Induced by Remote Hydrogen Plasma International conference

    W. Jialin, H. Zhang, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides Nanomaterials / 14th International Conference on Plasma-Nano Technology and Science (ISPlasma 2021 / IC-PLANTS 2021)  2021.3.9 

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    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  38. [チュートリアル]組成・状態評価 Invited

    宮﨑 誠一

    日本学術振興会 R025先進薄膜界面機能創成委員会 リトリート学習会  2021.3.6 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催   Country:Japan  

  39. Impacts of Thermal Oxidation Process of Hf/Zr Stacks on Crystalline Phases and Ferroelectric Property

    R. Hasegawa, N. Taoka, A. Ohta, K. Makihara, M. Ikeda, and S. Miyazaki

    2021.1.22 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  40. Solid Phase Crystallization of Amorphous Ge Thin Films on Sapphire(0001)

    H. Sugawa, A. Ohta, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki

    2021.1.22 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  41. Growth of Ultrathin Ge Crystal Layer by Surface Segregation and Flattening of Ag/Ge Structure

    A. Ohta, K. Yamada, H. Sugawa, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki

    2021.1.22 

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    Event date: 2021.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  42. グラフェン電極を用いたSi量子ドット多重集積構造からの電子放出特性評価

    新林 智文、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第20回日本表面真空学会中部支部学術講演会  2020.12.19  日本表面真空学会中部支部

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催   Country:Japan  

  43. Electron Field Emission from Multiply-Stacked Si Quantum Dots Structures with Graphene Top-Electrode International conference

    Tomofumi Niibayashi, Tatsuya Takemoto, Katsunori Makihara, Akio Ohta, Mitsuhisa Ikeda, and Seiichi Miyazaki

    PRiME 2020 (238th Meeting of The Electrochemical Society (ECS)) 

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    Event date: 2020.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:All-VIRTUAL conference   Country:United States  

  44. Crystallization of Ge Thin Films on Sapphire(0001) by Thermal Annealing International conference

    Hibiki Sugawa, Akio Ohta, Masato Kobayashi, Noriyuki Taoka, Mitsuhisa Ikeda, Katsunori Makihara and Seiichi Miyazaki

    PRiME 2020 (238th Meeting of The Electrochemical Society (ECS)) 

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    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Venue:All-VIRTUAL conference   Country:United States  

  45. Characterization of Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots by Using a Magnetic AFM Probe International conference

    Jialin Wu, Hai Zhang, Hiroshi Furuhata, Katsunori Makihara, Mitsuhisa Ikeda, Akio Ohta and Seiichi Miyazaki

    PRiME 2020 (238th Meeting of The Electrochemical Society (ECS)) 

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    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Venue:All-VIRTUAL conference   Country:United States  

  46. Growth of Ultrathin Ge Crystal Layer by Surface Segregation and Flattening of Ag/Ge Structure International conference

    Akio Ohta, Kenzou Yamada, Hibiki Sugawa, Noriyuki Taoka, Mitsuhisa Ikeda, Katsunori Makihara, an Seiichi Miyazaki

    2020 International Conference on Solid State Devices and Materials (SSDM 2020)  2020.9.28 

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    Event date: 2020.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:All-VIRTUAL conference   Country:Japan  

  47. 金属Zr/Hf構造の熱酸化によるZrHf酸化物の形成と結晶相制御

    2020.9.10 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  48. グラフェン上部電極を用いたSi量子ドット多重集積構造からの電界電子放出 ―コレクタ電極電圧依存性評価

    2020.9.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  49. XANAMによるGe量子ドット像の1次元 元素マッピング

    2020.9.9 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  50. Si-Ge系ナノドットの高密度集積と光・電子物性制御 Invited

    牧原 克典、宮﨑 誠一

    阪大CSRN 第二回異分野研究交流会 ~半導体ナノカーボン系~  2020.8.28 

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    Event date: 2020.8

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催   Country:Japan  

  51. Photoemission Study of Chemically-Cleaned GaN Surfaces and GaN-SiO2 Interfaces Formed by Remote Plasma CVD Invited International conference

    S. Miyazaki, and A. Ohta

    Material Research Meeting 2019 (MRM 2020) 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Yokohama   Country:Japan  

  52. Light Emission from Multiple Stack Si/Ge Quantum Dots Invited International conference

    S. Miyazaki

    7th Global Nanotechnology Congress and Expo: Nanotechnology 2019 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Kuala Lumpur   Country:Malaysia  

  53. Formation of High Density Fe-silicide Nanodots Induced by Remote Hydrogen Plasma and Characterization of Their Magnetic Properties Invited International conference

    J. Wu, H. Furuhata, H. Zhang, Y. Hashimoto, M. Ikeda, A. Ohta, A. Kohno, K. Makihara, and S. Miyazaki

    8th International Symposium on Control of Semiconductor Interfaces (ISCSI-8) 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Venue:Sendai   Country:Japan  

  54. Fabrication of Impurity Doped Si Quantum Dots with Ge Core for Light Emission Devices Invited International conference

    K. Makihara, M. Ikeda, and S. Miyazaki

    8th International Symposium on Control of Semiconductor Interfaces (ISCSI-8) 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Sendai   Country:Japan  

  55. Application of Surface Chemical Imaging by XANAM to Ge Surfaces Invited International conference

    S. Suzuki, S. Mukai, W. J. Chun, M. Nomura, S. Fujimori, M. Ikeda, K. Makihara, S. Miyazaki, and K. Asakura

    8th International Symposium on Control of Semiconductor Interfaces (ISCSI-8) 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Sendai   Country:Japan  

  56. Characterization of Photoluminescence from Si-QDs with B δ-Doped Ge Core Invited International conference

    T. Maehara, S. Fujimori, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki

    8th International Symposium on Control of Semiconductor Interfaces (ISCSI-8) 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Sendai   Country:Japan  

  57. High Density Formation and Magnetoelectronic Transport Properties of Magnetic Fe-silicide Nanodots Invited International conference

    H. Zhang, X. Liu, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    8th International Symposium on Control of Semiconductor Interfaces (ISCSI-8) 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Venue:Sendai   Country:Japan  

  58. Formation of High Density PtAl Nanodots Induced by Remote Hydrogen Plasma Exposure Invited International conference

    S. Miyazaki

    41st International Symposium on Dry Process (DPS 2019) 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Venue:Hiroshima   Country:Japan  

  59. Fabrication and Characterization of Multiple Stack Si/Ge Quantum Dots for Light Emission Invited International conference

    S. Miyazaki

    2nd Int. Conf. on Photonics Research: InterPhotonics 2019 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Antalya   Country:Turkey  

  60. Operand Study of Multiple Stacked Si Quantum Dots by Hard X-ray Photoelectron Spectroscopy Invited International conference

    M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki

    International Conference on Materials and Systems for Sustainability 2019 (ICMaSS 2019) 

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    Event date: 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Nagoya   Country:Japan  

  61. Impact of Boron Doping into Si Quantum Dots with Ge Core on Their Photoluminescence Properties Invited International conference

    S. Fujimori, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki

    International Conference on Materials and Systems for Sustainability 2019 (ICMaSS 2019) 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Venue:Nagoya   Country:Japan  

  62. Determination of Complex Dielectric Function of Oxide Film from Photoemission Measurements Invited International conference

    A. Ohata, M. Ikeda, K. Makihara, and S. Miyazaki

    International Conference on Materials and Systems for Sustainability 2019 (ICMaSS 2019) 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Venue:Nagoya   Country:Japan  

  63. Impact of Boron Doping into Si Quantum Dots with Ge Core on Their Photoluminescence Properties Invited International conference

    K. Makihara, S. Fujimori, M. Ikeda, A. Ohta, and S. Miyazaki

    32nd International Microprocesses and Nanotechnology Conference (MNC 2019) 

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    Event date: 2019.10

    Language:English   Presentation type:Poster presentation  

    Venue:Hiroshima   Country:Japan  

  64. Growth of Hetero-epitaxial Al on Ge(111) and Segregation of Ge Crystal by Annealing Invited International conference

    M. Kobayashi, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, N. Taoka, T. Shimizu, K. Makihara, and S. Miyazaki

    32nd International Microprocesses and Nanotechnology Conference (MNC 2019) 

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    Event date: 2019.10

    Language:English   Presentation type:Poster presentation  

    Venue:Hiroshima   Country:Japan  

  65. Study on Light Emission from Multiple Stack Si/Ge Quantum Dots Invited International conference

    S. Miyazaki

    World Congress on Lasers, Optics and Photonics 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Barcelona   Country:Spain  

  66. Impact of Post Deposition Annealing on Chemical Bonding Features and Filled Electronic Defects of AlSiO/GaN(0001) Structure Invited International conference

    A. Ohta, D. Kikuta, T. Narita, K. Itoh, K. Makihara, T. Kachi, and S. Miyazaki

    2019 International Conference of Solid State of Device and Materials (SSDM 2019) 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Nagoya University   Country:Japan  

  67. Characterization of Electron Field Emission from Si Quantum Dots with Ge Core/Si Quantum Dots Hybrid Stacked Structures Invited International conference

    T. Takemoto, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    2019 International Conference of Solid State of Device and Materials (SSDM 2019) 

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    Event date: 2019.9

    Language:English   Presentation type:Poster presentation  

    Venue:Nagoya University   Country:Japan  

  68. Characterization of Ni/GaN(0001) Interfaces by Photoemission Measurements Invited International conference

    K. Watanabe, A. Ohta, N. Taoka, H. Yamada, M. Ikeda, K. Makihara, M. Shimizu, and S.Miyazaki

    2019 International Conference of Solid State of Device and Materials (SSDM 2019) 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Nagoya University   Country:Japan  

  69. Growth of Ultrathin Segregated-Ge Crystal on Al/Ge(111) Surface Invited International conference

    M. Kobayashi, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, N. Taoka, T. Shimizu, K. Makihara, and S. Miyazaki

    2019 International Conference of Solid State of Device and Materials (SSDM 2019) 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Nagoya University   Country:Japan  

  70. Formation of high density Fe-silicide nanodots induced by remote H2 plasma and their magnetic properties Invited International conference

    Y. Hashimoto, K. Makihara, M. Ikeda, A. Ohta, A. Kohno, and S. Miyazaki

    The 5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials, 2019 (APAC-Silicide 2019) 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Seagaia Convention Center, Miyazaki   Country:Japan  

  71. [チュートリアル] 薄膜評価法-組成・状態評価 Invited

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    Event date: 2019.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  72. Characterization of Electron Field Emission of Multiply-Stacked Si-QDs/SiO2 Structures Invited International conference

    T. Takemoto, Y. Futamura, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki

    2019 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2019) 

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    Event date: 2019.7

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Busan   Country:Korea, Republic of  

  73. Effect of B-doping on Photoluminescence Properties of Si-QDs with Ge Core Invited International conference

    S. Fujimori, R. Nagai, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki

    2nd Joint ISTDM / ICSI 2019 Conference; 10th International SiGe Technology and Device Meeting (ISTDM)/ 12th International Conference on Silicon Epitaxy and Heterostructures (ICSI) 

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    Event date: 2019.6

    Language:English   Presentation type:Poster presentation  

    Venue:University of Wisconsin-Madison   Country:United States  

  74. Fabrication and Characterization of Multiple Stack Si/Ge Quantum Dots for Light and Electron Emissions International conference

    S. Miyazaki

    World Chemistry Forum 2019 (WCF-2019) 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Catalonia Barcelona Plaza, Barcelona   Country:Spain  

  75. Formation and Characterization of Si Quantum Dots with Ge Core for Electroluminescent Devices Invited International conference

    K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    2019 COMPOUND SEMICONDUCTOR WEEK (CSW2019) 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Nara   Country:Japan  

  76. Photoemission Characterization of Interface Dipoles and Electronic Defect States for Gate Dielectrics Invited International conference

    S. Miyazaki and A. Ohta

    2019 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT 7) 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Kyoto   Country:Japan  

  77. 電子デバイス・材料開発に向けたナノスケールスタック構造・界面の光電子分光分析 Invited

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    Event date: 2019.1

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  78. Photoemission Study of Gate Dielectrics and Stack Interfaces Invited International conference

    S. Miyazaki, and A. Ohta

    2018 International Conference of Solid State of Device and Materials (SSDM 2018) 

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    Event date: 2018.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Tokyo   Country:Japan  

  79. Formation and Characterization of Si/Ge Quantum Dots for Optoelectronic Application Invited International conference

    S. Miyazaki, K. Makihara, M. Ikeda, and A. Ohta

    International Conference on Processing & Manufacturing of Advanced Materials (Thermec' 2018) 

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    Event date: 2018.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Paris   Country:France  

  80. Si-Geスーパーアトム構造の高密度集積と光・電子物性制御 Invited

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    Event date: 2018.6

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  81. Local Structure of High Performance TiOx Passivating Layer Revealed by Electron Energy Loss Spectroscopy International conference

    T. Mochizuki, K. Gotoh, A. Ohta, Y. Kurokawa, S. Miyazaki, T. Yamamoto, N. Usami

    2018 IEEE 7TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION (WCPEC-7) (A JOINT CONFERENCE OF 45TH IEEE PVSC, 28TH PVSEC & 34TH EU PVSEC) 

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    Event date: 2018.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:WAIKOLOA, HAWAII   Country:United States  

  82. Si-Ge系コア・シェル量子構造の高密度集積と光・電子物性制御 Invited

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  83. Oxidation of GaN surface by remote oxygen plasma International conference

    T. Yamamoto, N. Taoka, A. Ohta, N. X. Truyen, H. Yamada, T. Takahashi, M. Ikeda, K. Makihara, M. Shimizu, and S. Miyazaki

    The 39th International Symposium on Dry Process (DPS 2017)  

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    Event date: 2017.11

    Language:English   Presentation type:Poster presentation  

    Venue:Tokyo Tech Front (Kuramae Kaikan)   Country:Japan  

  84. Ultrathin Ge Growth on Flat Ag Surface in Hetero-Epitaxial Ag/Ge Structure by Annealing International conference

    K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    The 30th International Microprocesses and Nanotechnology Conference (MNC 2017) 

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    Event date: 2017.11

    Language:English   Presentation type:Poster presentation  

    Venue:The Ramada Plaza Jeju Hotel (Jeju, Korea)   Country:Korea, Republic of  

  85. Evaluation of Resistive Switching Properties of Si-rich Oxide Embedded with Ti Nanodots by Applying Constant Voltage and Constant Current International conference

    A. Ohta, Y. Kato, M. Ikeda, K. Makihara, and S. Miyazaki

    The 30th International Microprocesses and Nanotechnology Conference (MNC 2017) 

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    Event date: 2017.11

    Language:English   Presentation type:Poster presentation  

    Venue:The Ramada Plaza Jeju Hotel (Jeju, Korea)   Country:Korea, Republic of  

  86. GaN-MOSデバイス開発に向けたゲート絶縁膜及び界面の光電子分光分析

    宮﨑 誠一

    応用物理学会 先進パワー半導体分科会 第4回講演会 

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    Event date: 2017.11

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:名古屋国際会議場   Country:Japan  

  87. 硬 X 線光電子分光法による Si 量子ドット多重集積構造のオペランド分析

    中島 裕太、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  88. Ge コア Si 量子ドットの EL 特性評価

    山田 健太郎、池田 弥央、牧原 克典、大田 晃生、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  89. 熱処理によるエピタキシャル Ag 上への Ge 二次元結晶の合成指針の構築

    伊藤 公一、大田 晃生、黒澤 昌志、洗平 昌晃、池田 弥央、牧原 克典、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  90. 熱処理がリモートプラズマ CVD SiO2/GaN 構造の化学結合状態及び電気特性に与える影響

    グェンスァン チュン、田岡 紀之、大田 晃生、山田 永、高橋 言緒、池田 弥央、牧原 克典、清水 三聡、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  91. リモートプラズマ酸化した GaN の表面構造と電子状態

    山本 泰史、田岡 紀之、大田 晃生、グェンスァン チュン、山田 永、高橋 言緒、池田 弥央、牧原 克典、清水 三聡、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  92. 入射エネルギー可変の真空紫外光電子分光による固体表面の価電子帯上端位置の計測

    今川 拓哉、大田 晃生、田岡 紀之、藤村 信幸、グェンスァン チュン、池田 弥央、牧原 克典、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  93. 高誘電率絶縁膜/SiO2積層構造の光電子分光分析 -界面ダイポールと酸素密度の相関-

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    第5回応用物理学会名古屋大学スチューデントチャプター東海地区学術講演会 

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    Event date: 2017.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学IB電子情報館   Country:Japan  

  94. Ultrathin Ge Growth on Ag Surface by Annealing of Hetero-Epitaxial Ag/Ge(111) International conference

    A. Ohta, K. Ito, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    The 8th International Symposium on Surface Science (ISSS-8) 

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    Event date: 2017.10

    Language:English   Presentation type:Poster presentation  

    Venue:Tsukuba International Congress Center   Country:Japan  

  95. Processing and Characterization of High Density Si/Ge Quantum Dots for Electroluminescent Devices Invited International conference

    S. Miyazaki, K. Yamada, K. Makihara, and M. Ikeda

    The 232nd Meeting of The Electrochemical Society (ECS Meeting) 

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    Event date: 2017.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:National Harbor MD   Country:United States  

  96. Characterization of Interfacial Dipoles at Dielectric Stacks by XPS Analysis Invited International conference

    S. Miyazaki, A. Ohta, and N. Fujimura

    The 232nd Meeting of The Electrochemical Society (ECS Meeting) 

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    Event date: 2017.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:National Harbor MD   Country:United States  

  97. Direct Observation of Electrical Dipole and Atomic Density at High-k Dielectrics/SiO2 Interface International conference

    N. Fujimura, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    SSDM2017 

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    Event date: 2017.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  98. High Thermal Stability of Abrupt SiO2/GaN Interface with Low Interface State Density International conference

    T. X. Nguyen, N. Taoka, A. Ohta , K. Makihara, H. Yamada, T. Takahashi, M. Ikeda, M. Shimizu, and S. Miyazaki

    SSDM2017 

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    Event date: 2017.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  99. Growth of 2D Crystal of Group-IV Elements on Epitaxial Ag (111) International conference

    K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    SSDM2017 

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    Event date: 2017.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  100. Challenges in Si-Based Nanotechnology:Fabrication and Characterization of Multistack Si/Ge Quantum Dots for Novel Functional Devices Invited International conference

    S. Miyazaki

    The 5th International Conference on Advanced Materials Science and Technology 2017 (ICAMST 2017) 

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    Event date: 2017.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Makassar   Country:Indonesia  

  101. 熱処理によるAg/Ge構造の表面平坦化とGe析出量制御

    伊藤 公一、大田 晃生、黒澤 昌志、洗平 昌晃、池田 弥央、牧原 克典、宮﨑 誠一

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡国際会議場・国際センター・福岡サンパレス   Country:Japan  

  102. Study of Wet Chemical Treatments of Epitaxial GaN(0001) Surface

    L. Peng, A. Ohta, N. X. Truyen, M. Ikeda, K. Makihara, N. Taoka, T.Narita, K. Itoh, D. Kikuta, K. Shiozaki, T.Kachi, S. Miyazaki

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    Event date: 2017.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  103. 電子・正孔交互注入によるGeコアSi量子ドット多重集積構造の発光特性

    牧原 克典、池田 弥央、藤村 信幸、大田 晃生、宮﨑 誠一

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡国際会議場・国際センター・福岡サンパレス   Country:Japan  

  104. 真空紫外光電子分光によるGaNの電子親和力評価

    今川 拓哉、大田 晃生、藤村 信幸、グェン スァン チュン、池田 弥央、牧原 克典、加地 徹、塩崎 宏司、宮﨑 誠一

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡国際会議場・国際センター・福岡サンパレス   Country:Japan  

  105. XPSによるHigh-k/SiO2界面のダイポール定量と酸素密度比との相関

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡国際会議場・国際センター・福岡サンパレス   Country:Japan  

  106. リモート酸素プラズマで形成したGa酸化物/GaN構造のエネルギーバンド構造と電気的特性

    山本 泰史、田岡 紀之、大田 晃生、グェン スァチュン、山田 永、高橋 言緒、池田 弥央、牧原 克典、清水 三聡、宮﨑 誠一

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:福岡国際会議場・国際センター・福岡サンパレス   Country:Japan  

  107. Thermal Stability of SiO2/GaN Interface Formed by Remote Plasma CVD

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  108. グリーンナノエレクトロニクスのための材料・プロセスインテグレーション - 超低消費電力次世代トランジスタ開発 -

    宮﨑 誠一

    SPring-8シンポジウム2017 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:広島大学 東千田未来創生センター   Country:Japan  

  109. 高誘電率絶縁膜の電子親和力の決定およびSiO2との界面で生じる電位変化の定量

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    2017年真空・表面科学合同講演会 

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    Event date: 2017.8

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:横浜市立大学金沢八景キャンパス   Country:Japan  

    第37回表面科学学術講演会要旨集 第58回真空に関する連合講演会予稿集, 発行日20170817, pp. 28, セッションID: 1Dp10S

    DOI: 10.14886/sssj2008.37.0_55

  110. リモート酸素プラズマ支援CVDによる急峻SiO2/GaN界面の形成とその電気的特性

    N. X. Truyen、田岡 紀之、大田 晃生、 山田 永、高橋 言緒、池田 弥央、牧原 克典、清水 三聡、宮﨑 誠一

    2017年真空・表面科学合同講演会 

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    Event date: 2017.8

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:横浜市立大学金沢八景キャンパス   Country:Japan  

    第37回表面科学学術講演会要旨集 第58回真空に関する連合講演会予稿集, 発行日20170817, pp. 28, セッションID:1Dp11S

    DOI: 10.14886/sssj2008.37.0_56

  111. [チュートリアル] 組成・状態分析 Invited

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    Event date: 2017.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  112. Fabrication of Multiple Stack Si/Ge Quantum Dots for Light/Electron Emission Devices Invited International conference

    S. Miyazaki, K. Yamada, Y. Nakashima, K. Makihara, A. Ohta, and M. Ikeda

    The 1st International Semiconductor Conference for Global Challenges (ISCGC-2017) 

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    Event date: 2017.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Nanjing   Country:China  

  113. Study of Light Emission from Si Quantum Dots with Ge Core Invited International conference

    S. Miyazaki, K. Yamada, M. Ikeda, and K. Makihara

    Frontiers in Materials Processing Applications, Research and Technology (FiMPART'17) 

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    Event date: 2017.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Bordeaux   Country:France  

  114. Magnetoelectronic Transport of Double Stack FePt Nanodots International conference

    K. Makihara, T. Kawase, A. Ohta, M. Ikeda, and S. Miyazaki

    AWAD2017(2017 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices) 

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    Event date: 2017.7

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Hotel Hyundai (Gyeongju), Gyeongju-si, Korea   Country:Korea, Republic of  

  115. Abrupt SiO2/GaN Interface Properties Formed by Remote Plasma Assisted CVD International conference

    N. X. Truyen, N. Taoka, A. Ohta, K. Makihara, H. Yamada, T. Takahashi, M. Ikeda, M. Shimizu, and S. Miyazaki

    2017 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2017) 

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    Event date: 2017.7

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Hotel Hyundai (Gyeongju), Gyeongju-si, Korea   Country:Korea, Republic of  

  116. Evaluation of Energy Distribution of Filled Defects of Si Oxide Thin Films from Total Photoelectron Yield Spectroscopy International conference

    A. Ohta

    20th Conference on Insulating Films on Semiconductors (INFOS 2017) 

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    Event date: 2017.6

    Language:English   Presentation type:Poster presentation  

    Venue:Seminaris SeeHotel Potsdam(Potsdam, Germany)   Country:Germany  

  117. Potential Changes and Chemical Bonding Features for Si-MOS Diodes as Evaluated from HAXPES Analysis International conference

    A. Ohta, H. Murakami, M. Ikeda, K. Makihara, E. Ikenaga, and S. Miyazaki

    20th Conference on Insulating Films on Semiconductors (INFOS 2017) 

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    Event date: 2017.6

    Language:English   Presentation type:Poster presentation  

    Venue:Seminaris SeeHotel Potsdam(Potsdam, Germany)   Country:Germany  

  118. 定電圧および定電流印加によるSi酸化薄膜の電気抵抗変化特性評価

    大田 晃生、加藤 祐介、池田 弥央、牧原 克典、宮﨑 誠一

    シリコン材料・デバイス(SDM)研究会 

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    Event date: 2017.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:キャンパス・イノベーションセンター東京   Country:Japan  

    信学技報 IEICE Technical Report, Vol. 117, No. 101, pp. 25-29, 発行日20170613

  119. XPSによるHigh-k/SiO2界面の化学構造およびダイポールの評価

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    シリコン材料・デバイス(SDM)研究会 

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    Event date: 2017.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:キャンパス・イノベーションセンター東京   Country:Japan  

    信学技報 IEICE Technical Report, vol. 117, no. 101, pp. 19-23, 資料番号 SDM2017-25, 発行日 20170613

  120. エピタキシャルAg(111)上の極薄IV族結晶形成

    伊藤 公一、大田 晃生、黒澤 昌志、洗平 昌晃、池田 弥央、牧原 克典、宮﨑 誠一

    シリコン材料・デバイス(SDM)研究会 

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    Event date: 2017.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:キャンパス・イノベーションセンター東京   Country:Japan  

    信学技報 IEICE Technical Report, vol. 117, no. 101, pp. 43-48, 資料番号 SDM2017-30, 発行日20170613

  121. Photoemission study of gate dielectrics on gallium nitride Invited International conference

    S. Miyazaki, N. X. Truyen, and A. Ohta

    ULSIC vs TFT: 6th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors 

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    Event date: 2017.5

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Schloss Hernstein Seminar Hotel, Schloss Hernstein, Hernstein   Country:Austria  

  122. Characterization of Electroluminescence from Si-QDs with Ge Core International conference

    K. Yamada, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ICSI-10(The 10th International Conference on Silicon Epitaxy and heterostructures) 

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    Event date: 2017.5

    Language:English   Presentation type:Oral presentation (general)  

    Venue:The University of Warwick(Coventry, UK)   Country:United Kingdom  

  123. Fabrication and Magnetoelectronic Transport Fe3Si-Nanodots on Ultrathin SiO2 International conference

    K. Makihara, H. Zhang, A. Ohta, M. Ikeda, and S. Miyazaki

    ICSI-10(The 10th International Conference on Silicon Epitaxy and heterostructures) 

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    Event date: 2017.5

    Language:English   Presentation type:Poster presentation  

    Venue:The University of Warwick(Coventry, UK)   Country:United Kingdom  

  124. Evaluation of Potential Distribution in Multiple Stacked Si Quantum Dots Structure by Hard X-ray Photoelectron Spectroscopy International conference

    Y. Nakashima, D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ICSI-10(The 10th International Conference on Silicon Epitaxy and heterostructures) 

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    Event date: 2017.5

    Language:English   Presentation type:Oral presentation (general)  

    Venue:The University of Warwick(Coventry, UK)   Country:United Kingdom  

  125. High Density Formation of and Light Emission from Si Quantum Dots with Ge Core International conference

    S. Miyazaki, K. Yamada, M. Ikeda, and K. Makihara

    2017MRS SPRING MEETING 

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    Event date: 2017.4

    Language:English   Presentation type:Oral presentation (general)  

    Venue:PHOENIX CONVENTION CENTER   Country:United States  

  126. Si 細線構造への高密度 Si 量子ドット形成と発光特性

    高 磊、池田 弥央、山田 健太郎、牧原 克典、大田 晃生、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  127. XPSによるHfO2の電子親和力と界面ダイポールの定量

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮崎 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  128. ドライおよびN2O酸化により形成したSiO2/4H-SiCの電 子占有欠陥評価

    渡辺 浩成、大田 晃生、池田 弥央、牧原 克典、森 大輔、寺尾 豊、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  129. Ge上にエピタキシャル成長したAg(111)表面の平坦化お よび化学構造評価

    伊藤 公一、大田 晃生、黒澤 昌志、洗平 昌晃、池田 弥央、牧原 克典、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  130. リモートプラズマ支援 CVD SiO2/GaN の界面特性

    グェン スァン チュン、田岡 紀之、大田 晃生、山本 泰史、山田 永、高橋 言緒、池田 弥央、牧原 克典、清水 三聡、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  131. リモート酸素プラズマによるGaN表面酸化

    山本 泰史、田岡 紀之、大田 晃生、グェンスァ ン チュン、山田 永、高橋 言緒、池田 弥央、牧原 克典、清水 三聡、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  132. 硬X線光電子分光法によるSi-MOSダイオードのオペラ ンド分析 -電位変化および化学結合状態評価-

    大田 晃生、村上 秀樹、池田 弥央、牧原 克典、池永 英司、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  133. Ge コアSi 量子ドットの発光特性評価

    山田 健太郎、牧原 克典、池田 弥央、大田 晃生、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  134. 硬X線光電子分光を用いたSi量子ドット多重集積構造の 電位分布評価

    中島 裕太、竹内 大智、 牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:パシフィコ横浜   Country:Japan  

  135. Impact of Thermal Annealing on Mophology and Chemical Bonding Features at Epitaxial Ag(111) Surface Grown on Ge(111) Invited International conference

    K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    ISPlasma2017/IC-PLANTS2017 

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    Event date: 2017.3

    Language:English   Presentation type:Poster presentation  

    Venue:Kasugai   Country:Japan  

  136. Total Photoelectron Yield Spectroscopy of Electronic States of GaN Surface International conference

    A. Ohta

    ISPlasma2017/IC-PLANTS2017 

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    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  137. Evaluation of Dielectric Function of Oxide Thin Films from Photoemission Measurements International conference

    T. Yamamoto, A. Ohta, M.Ikeda, K. Makihara, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  138. Potential Change and Electrical Dipole at Ultrathin Oxide/Semiconductor Interfaces as Evaluated by XPS International conference

    N. Fujimura, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  139. Characterization of Remote Plasma CVD SiO2 on GaN(0001) International conference

    N. X. Truyen, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  140. Formation of Si-based Quantum Dots on Sub-micron patterned Si Substrates International conference

    M. Ikeda, L. Gao, K. Yamada, K. Makihara, A. Ohta, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  141. Total Photoelectron Yield Spectroscopy of Electronic States of Oxide Thin Films and Wide Bandgap Semiconductors International conference

    A. Ohta, T. Yamamoto, N. X. Truyen, M. Ikeda, K. Makihara, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  142. Characterization of Field Electron Emission from Multiply-Stacking Si Quantum Dots International conference

    Y. Nakashima, D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  143. Chemical Analysis of Epitaxial Ag(111) Surface formed on Group-IV Semiconductors International conference

    K. Ito, A. Ohta, M. Kurosawa, M. Araidai, M. Ikeda, K. Makihara, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  144. Luminescence Studies of High Density Si Quantum Dots with Ge core International conference

    K. Yamada, M. Ikeda, K. Makihara, and S. Miyazaki

    10th International Workshop on New Group IV Semiconductor Nanoelectronics and JSJP Core-to-Core Program Joint Seminar 

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    Event date: 2017.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  145. Photoemission Study of Chemical Bonding Features and Electronic Defect States of Remote Plasma CVD SiO2/GaN Structure

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    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  146. Evaluation of Inner Potential Change and Electrical Dipole in Ultrathin Oxide Stacked Structure Using XPS Measurements

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    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  147. 熱酸化SiO₂/4H-SiCSi面およびC面の電子専有欠陥および化学構造評価

    渡辺 浩成、大田 晃生、池田 弥央、牧原 克典、森 大輔、寺尾 豊、宮﨑 誠一

    第16回 日本表面科学会中部支部学術講演会 

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    Event date: 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  148. HfO₂/SiO₂/Si構造の光電子分光分析ー界面ダイポールの定量ー

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    第16回 日本表面科学会中部支部学術講演会 

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    Event date: 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  149. Characterization of Magnetoelectronic Transport through Double Stack FePt Nanodots on Ultrathin SiO2/c-Si by Conductive-probe AFM International conference

    S. Miyazaki

    ICSPM24 

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    Event date: 2016.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  150. Processing and Characterization of Si/Ge Quantum Dots Invited International conference

    S. Miyazaki, K. Makihara, A. Ohta, and M. Ikeda

    2016 IEDM(IEEE International Electron Devices Meeting) 

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    Event date: 2016.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Hilton San Francisco Union Square(San Francisco, CA)   Country:United States  

  151. シリコン酸化薄膜の電気抵抗スイッチングおよび欠陥準位密度評価 International conference

    加藤 祐介、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    2016 真空・表面科学合同講演会 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Poster presentation  

    Venue:名古屋国際会議場 (名古屋市熱田区)   Country:Japan  

  152. Si細線構造への高密度Si量子ドット形成 International conference

    高 磊、竹内 大智、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    2016 真空・表面科学合同講演会 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Poster presentation  

    Venue:名古屋国際会議場 (名古屋市熱田区)   Country:Japan  

  153. Si系量子ドット多重集積構造からの電界電子放出特性 International conference

    中島 裕太、竹内 大智、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    2016 真空・表面科学合同講演会 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋国際会議場 (名古屋市熱田区)   Country:Japan  

  154. HAXPESによるSi-MOSキャパシタの化学結合状態および内部電位の深さ方向分析 International conference

    大田 晃生、村上 秀樹、池田 弥央、牧原 克典、池永 英司、宮﨑 誠一

    2016 真空・表面科学合同講演会 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Poster presentation  

    Venue:名古屋国際会議場 (名古屋市熱田区)   Country:Japan  

  155. IV族半導体上に蒸着したAg薄膜の化学構造評価と反応制御 International conference

    伊藤 公一、大田 晃生、黒澤 昌志、洗平 昌晃、池田 弥央、牧原 克典、宮﨑 誠一

    2016 真空・表面科学合同講演会 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Poster presentation  

    Venue:名古屋国際会議場 (名古屋市熱田区)   Country:Japan  

  156. Magnetoelectronic Transport and Resistive Switching in Double Stack FePt Nanodots on Ultrathin SiO2/c-Si Invited International conference

    S. Miyazaki

    JSPS Core-to-Core Program Workshop 

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    Event date: 2016.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Julich   Country:Germany  

  157. High Density Formation of Ta/TaOxide Core-Shell Nanodots International conference

    Y. Wang, D. Takeuchi, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    29th International Microprocesses and Nanotechnology Conference (MNC 2016) 

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    Event date: 2016.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:ANA Crowne Plaza, Kyoto, Japan   Country:Japan  

  158. Low Temperature Formation of Crystalline Si:H/Ge:H Heterostructures by Plasma Enhanced CVD in Combination with Ni-NDs Seeding Nucleation International conference

    K. Makihara, D. Takeuchi, M. Ikeda, A. Ohta, and S.Miyazaki

    29th International Microprocesses and Nanotechnology Conference (MNC 2016) 

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    Event date: 2016.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:ANA Crowne Plaza, Kyoto, Japan   Country:Japan  

  159. Evaluation of Potential Change and Electrical Dipole in HfO2/ SiO2/Si Structure International conference

    N. Fujimura, A. Ohta, K. Makihara, and S. Miyazaki

    SSDM 2016 

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    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Tsukuba   Country:Japan  

  160. Formation and Characterization of Si Quantum Dots with Ge Core for Functional Devices Invited International conference

    S. Miyazaki, D. Takeuchi, M. Ikeda, and K. Makihara

    SSDM 2016 

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    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Tsukuba   Country:Japan  

  161. Magnetotransport Properties of FePt Alloy-NDs Stacked Structures Invited International conference

    K. Makihara, T. Kawase, A. Ohta, M. Ikeda, and S. Miyazaki

    SSDM 2016 

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    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Tsukuba   Country:Japan  

  162. 4H-SiCSi面およびC面上に成長した熱酸化膜の光電子収率分光法による電子占有欠陥評価

    渡辺 浩成、大田 晃生、 池田 弥央、牧原 克典、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  163. GeコアSi量子ドット/Si量子ドット多重集積構造のEL特性

    竹内 大智、山田 健太郎、牧原 克典、池田 弥央、大田 晃生、 宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  164. FePtナノドットスタック構造における磁場印加後の電気伝導特性評価

    河瀬 平雅、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  165. Ta酸化物ナノドットの高密度・一括形成(II)

    王 亜萍、竹内 大智、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  166. GeコアSi量子ドットのエレクトロルミネッセンス特性

    山田 健太郎、池田 弥央、牧原 克典、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  167. HfO2/SiO2/Si(100)構造における内部電位分布、界面ダイポールの定量評価

    藤村 信幸、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  168. X線光電子分光法による熱酸化SiO2およびGeO2薄膜の誘電関数評価

    山本 泰史、大田 晃生、池田 弥央、牧原 克典、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  169. リモートプラズマCVDSiO2/GaN界面の光電子分光分析

    グェン スァン チュン、大田 晃生、牧原 克典、池田 弥央、宮﨑 誠一

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:朱鷺メッセ(新潟県新潟市)   Country:Japan  

  170. Formation of Fe3Si-Nanodots on Ultrathin SiO2 Induced by H2-plasma Treatment and Their Magnetic-Field Dependent Electron Transport Properties International conference

    H. Zhang, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

    APAC Silicide 2016  

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    Event date: 2016.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  171. Embedding of Ti nanodots into SiOx and its impact on resistance switching behaviors International conference

    Y. Kato, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

    AWAD2016(2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices) 

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    Event date: 2016.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  172. Formation and electron transport properties of Fe3Si nanodots on ultrathin SiO2 International conference

    H. Zhang, M. Ikeda, K. Makihara, A. Ohta, and S. Miyazaki

    AWAD2016(2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices) 

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    Event date: 2016.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  173. XPSによるSiO2/半導体界面の電位変化およびダイポールの定量

    藤村 信幸、大田 晃生、渡辺 浩成、牧原 克典、宮﨑 誠一

    シリコン材料・デバイス研究会(SDM) 

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    Event date: 2016.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:キャンパス・イノベーションセンター東京   Country:Japan  

    信学技報, vol. 116, no. 118, pp. 43-47, 資料番号 SDM2016-40, 発行日 20160622

  174. リモート酸素プラズマ支援CVDによる低温SiO2薄膜形成

    グェンスァン チュン、藤村 信幸、竹内 大智、大田 晃生、牧原 克典、池田 弥央、宮﨑 誠一

    シリコン材料・デバイス研究会(SDM) 

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    Event date: 2016.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:キャンパス・イノベーションセンター東京   Country:Japan  

    信学技報, vol. 116, no. 118, pp. 49-52, 資料番号 SDM2016-41, 発行日 20160622

  175. High Density Formation of and Light Emission from Silicon Quantum Dots with Ge Core Invited International conference

    S. Miyazaki

    11th Workshop on Si-based Optoelectronic Materials and Devices 

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    Event date: 2016.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:China  

  176. Determination of Energy Band Profile of Thermally-grown SiO2/4H-SiC Structure Using XPS International conference

    H. Watanabe, A. Ohta, K. Makihara, and S. Miyazaki

    ISCSI-VII/ISTDM 2016 

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    Event date: 2016.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  177. Impact of Phosphorus Doping to Multiply-Stacking Si Quantum Dots on Electron Emission Properties International conference

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ISCSI-VII/ISTDM 2016 

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    Event date: 2016.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  178. Electron Transport Properties of High Density FePt-NDs Stacked Structures International conference

    T. Kawase, Y. Mitsuyuki, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ISCSI-VII/ISTDM 2016 

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    Event date: 2016.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  179. [チュートリアル]組成・状態分析

    宮﨑 誠一

    薄膜工学セミナー2016~薄膜の基礎から応用まで~ 

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    Event date: 2016.6

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:キャンパスイノベーションセンター東京   Country:Japan  

  180. Characterization of light emission from Si quantum dots with Ge core Invited International conference

    S. Miyazaki

    Intern. Conf. on Processing and Manufacturing of Advanced Materials 2016 (THERMEC'2016) 

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    Event date: 2016.5 - 2016.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Granz   Country:Austria  

  181. Evaluation of Resistive Switching Properties of Si-rich Oxide Embedded with Ti Based Thin Films and Ti Nano-dots

    Y. Kato, A. Ohta, K. Makihara, and S. Miyazaki

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  182. Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots by Using a Magnetic AFM Probe

    H. Zhang, Y. Mitsuyuki, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  183. Evaluation of Electronic States of Thermally-grown SiO2/4H-SiC (II)

    H. Watanabe, A. Ohta, N. Fujimura, K. Makihara and S. Miyazaki

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  184. Effect of Ge Core Size on Photoluminescence from Si Quantum Dots with Ge Core

    K. Yamada, K. Kondo, M. Ikeda, K. Makihara, and S. Miyazaki

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  185. Photoluminescence Mechanism of Si Quantum Dots with Ge Core

    K. Kondo, M. Ikeda, K. Makihara, and S. Miyazaki

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    Event date: 2016.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  186. Magnetotransport Properties of FePt Alloy-NDs Stacked Structures

    Y. Mitsuyuki, T. Kawase, A. Ohta, M. Ikeda, K. Makihara, and S. Miyazaki

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    Event date: 2016.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  187. Cleaning of 4H-SiC(0001) Surface by using Remote Hydrogen Plasma International conference

    T. xuan Nguyen, D. Takeuchi, A. Ohta, K. Makihara, and S. Miyazaki

    ISPlasma2016 & IC-PLANTS2016 

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    Event date: 2016.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  188. Characterization of Chemical Bonding Features of Ultrathin Ge Layer Grown by Ag-Induced Layer-Exchange Method International conference

    A. Ohta, M. Kurosawa, M. Araidai, and S. Miyazaki

    ISPlasma2016 & IC-PLANTS2016 

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    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  189. Self-assembling Formation of Ta Nanodots Induced by Remote Hydrogen Plasma from Ge/Ta Bi-layer Stack International conference

    Y. Wang, D. Takeuchi, A. Ohta, K. Makihara, M. Ikeda, and S. Miyazaki

    ISPlasma2016 & IC-PLANTS2016 

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    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  190. Impact of Magnetic-Field Application on Electron Charging Characteristics of FePt Nanodots International conference

    T. Kawase, Y. Mitsuyuki, A. Ohta, K. Makihara, T. Katou, S. Iwata, and S. Miyazaki

    ISPlasma2016 & IC-PLANTS2016 

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    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  191. Formation of High Density Ta Oxide Nanodots International conference

    Y. Wang, D. Takeuchi, A. Ohta, K. Makihara, and S. Miyazaki

    ISPlasma2016 & IC-PLANTS2016 

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    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  192. Effect of Ge Stacked Layer on Ti Nanodots Formation From Metal Thin Films by Remote Hydrogen Plasma Exposure International conference

    Y. Kato, A. Ohta, K. Makihara, and S. Miyazaki

    ISPlasma2016 & IC-PLANTS2016 

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    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  193. High Density Formation and Light Emission Properties of Silicon Quantum Dots with Ge Core Invited International conference

    S. Miyazaki

    BIT's 2nd Annual World Congress of Smart Materials-2016 

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    Event date: 2016.3

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Singapore  

  194. Evaluation of Energy Band Diagram and Depth Profile of Electronic Defect State Density for SiO2/4H-SiC Structures

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    Event date: 2016.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  195. 4H-SiC(0001) Surface Modification by Remote Hydrogen Plasma Exposur

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    Event date: 2016.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  196. Evaluation of Valence Band Top and Electron Affinity of Si, 4H-SiC, and SiO2 Using X-ray Photoelectron Spectroscopy

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    Event date: 2016.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  197. Effect of Embedding Ti Nanodots into SiOx Film on Its Resistive Switching Properties

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    Event date: 2016.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  198. Fabrication and Magnetoelectronic Transport of Double Stack FePt Nanodots on Ultrathin SiO2 International conference

    S. Miyazaki, Y. Kabeya, Y. Mitsuyuki, and K. Makihara

    2015 MRS Fall Meeting & Exhibit 

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    Event date: 2015.11 - 2015.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  199. Impact of Embedded MnNanodots on Resistive Switching Properties of Si-rich Oxides International conference

    T. Arai, A. Ohta, K. Makihara, and S. Miyazaki

    28th International Microprocesses and Nanotechnology Conference(MNC2015) 

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    Event date: 2015.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  200. Formation of High Density Ti Nanodots and Evaluation of Resistive Switching Properties of SiOx-ReRAMs with Ti Nanodots International conference

    Y. Kato, A. Ohta, T. Arai, K. Makihara, and S. Miyazaki

    The 2015 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (2015 IWDTF) 

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    Event date: 2015.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  201. Evaluation of Valence Band Maximum and Electron Affinity of SiO2 and Si-based Semiconductors Using XPS International conference

    N. Fujimura, A. Ohta, K. Makihara, and S. Miyazaki

    The 2015 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (2015 IWDTF) 

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    Event date: 2015.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  202. Photoemission Study of Thermally-Grown SiO2/4H-SiC Structure. International conference

    H. Watanabe, A. Ohta, N. Fujimura, K. Makihara, and S. Miyazaki

    The 2015 International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology (2015 IWDTF) 

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    Event date: 2015.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  203. High Density Formation of Ta Nanodots Induced by Remote Hydrogen Plasma International conference

    Y. Wang, D. Takeuchi, K. Makihara, A. Ohta, and S. Miyazaki

    68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing 

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    Event date: 2015.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  204. Photoemission Study on Chemical Bonding Features and Electronic Defect States of Thermally-Grown SiO2/4H-SiC Structure International conference

    H. Watanabe, A. Ohta, K. Makihara, and S. Miyazaki

    The 228th ECS Meeting  

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    Event date: 2015.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  205. Resistive Switching Characteristics of Si-Rich Oxides with Embedding Ti Nanodots International conference

    Y. Kato, T. Arai, A. Ohta, K. Makihara, and S. Miyazaki

    The 228th ECS Meeting  

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    Event date: 2015.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  206. High-Resolution Photoemission Study of High-k Dielectric Bilayer Stack on Ge(100) International conference

    S. Miyazaki

    The 228th ECS Meeting  

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    Event date: 2015.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:United States  

  207. グリーンナノエレクトロニクスのための材料・プロセスインテグレーション ~超低消費電力次世代トランジスタ開発~ Invited

    宮﨑 誠一、大田 晃生、他

    SPring-8シンポジウム2015 放射光が先導するグリーンイノベーション ~グローバルな視点からの発信~ 

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    Event date: 2015.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:九州大学 伊都キャンパス カーボンニュートラル・エネルギー国際研究所/I2CNER(アイスナー) 大ホール他   Country:Japan  

  208. [チュートリアル] CVD1(シリコン系) Invited

    宮﨑 誠一

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    Event date: 2015.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:サンパーク犬山   Country:Japan  

  209. Electronic Defect States in Thermally-grown SiO2/4H-SiC Structure Measured by Total Photoelectron Yield Spectroscopy International conference

    A. Ohta, K. Makihara, and S. Miyazaki

    The 19th Conference on "Insulating Films on Semiconductors"(INFOS 2015) 

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    Event date: 2015.6 - 2015.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Italy  

  210. Effect of P-doping on Photoluminescence Properties of Si Quantum Dots with Ge Core International conference

    K. Kondo

    2015 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2015)  

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    Event date: 2015.6 - 2015.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  211. Electron Transport Properties of High Density FePt-NDs Stacked Structures International conference

    Y. Mitsuyuki, K. Makihara, A. Oota, and S. Miyazaki

    2015 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2015)  

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    Event date: 2015.6 - 2015.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  212. High Density Formation and Characterization of CoPt and FePt Nanodots on SiO2 International conference

    S. Miyazaki

    International Conference on Frontiers in Materials Processing Applications Research & Technology (FiMPART'15) 

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    Event date: 2015.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:India  

  213. Impact of Phosphorus Doping to Multiply-Stacking Si Quantum Dots on Electron Field Emission Properties International conference

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    The 9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9) 

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    Event date: 2015.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Canada  

  214. Study on Electroluminescence from Multiply-Stacking Valency Controlled Si Quantum Dots International conference

    T. Yamada, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    The 9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9) 

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    Event date: 2015.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Canada  

  215. Study on Light Emission from Si Quantum Dots with Ge Core International conference

    S. Miyazaki, K. Kondo, and K. Makihara

    The 9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9) 

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    Event date: 2015.5

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Canada  

  216. Formation and Characterization of High Density FeSi Nanodots on SiO2 Induced by Remote H2 Plasma International conference

    K. Makihara, H. Zhang, A. Ohta, and S. Miyazaki

    ISPlasma2015/IC-PLANTS2015 

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    Event date: 2015.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  217. Characterization of Electron Field Emission from High Density Self-Aligned Si-Based Quantum Dots International conference

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    ISPlasma2015/IC-PLANTS2015 

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    Event date: 2015.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  218. 不純物添加がSi量子ドット多重集積構造のEL特性に及ぼす影響

    山田 敬久、牧原 克典、池田 弥央、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  219. リモート水素プラズマ支援によるTaナノドットの高密度一括形成

    王 亜萍、牧原 克典、大田 晃生、竹内 大智、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  220. Si量子ドット多重集積構造の電界電子放出特性評価

    竹内 大智、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  221. リモートH2プラズマ処理した4H-SiC表面の化学構造および電子状態分析

    グェンスァン チュン、大田 晃生、竹内 大智、張 海牧原 克典、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  222. 光電子収率分光法によるSiO2/SiC構造の電子状態計測(2)

    大田 晃生、渡邉 浩成、グェンスァン チュン、牧原 克典、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  223. リモート水素プラズマ支援によるFeシリサイドナノドットの高密度一括形成と磁化特性評価

    張 海、牧原 克典、大田 晃生、壁谷 悠希、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  224. 外部磁場がFePt合金ナノドットへの電子注入特性に及ぼす影響

    満行 優介、壁谷 悠希、張 海、大田 晃生、牧原 克典、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  225. 高密度FePtナノドットスタック構造の電子輸送特性

    壁谷 悠希、満行 優介、張 海、大田 晃生、牧原 克典、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  226. P添加がGeコアSi量子ドットのPL特性に及ぼす影響

    近藤 圭悟、牧原 克典、宮﨑 誠一

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学(神奈川県平塚市)   Country:Japan  

  227. Impact of Embedded Mn Nanodots on Resistive Switching Characteristics of Si-rich Oxides as Measured in Ni-Electrodes MIM Diodes

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    Event date: 2015.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  228. Formation and Characterization of High Density FePt Nanodots on SiO2 Induced by Remote Hydrogen Plasma International conference

    S. Miyazaki, Y. Kabeya, R. Fukuoka, H. Zhang, K. Makihara, T. Kato, and S. Iwata

    2014 MRS Fall Meeting&Exhibit 

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    Event date: 2014.11 - 2014.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  229. Photoemission Study of High-k Dielectrics Stack on Ge(100) - Determination of Energy Bandgaps and Band Alignments International conference

    S. Miyazaki

    JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration (imec) 

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    Event date: 2014.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Belgium  

  230. Luminescence Studies of High Density Si-based Quantum Dots International conference

    K. Makihara

    JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration (imec) 

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    Event date: 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Belgium  

  231. Study of Electron Field Emission from High Density Self-aligned Si-based Quantum Dots International conference

    D. Takeuchi

    JSPS International Core-to-Core Program Workshop on Atomically Controlled Processing for Ultra-large Scale Integration (imec) 

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    Event date: 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Belgium  

  232. High Density formation of Fe-Silicide Nanodots on SiO2 Induced by Remote H2 Plasma International conference

    H. Zhang, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    MNC 2014  

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    Event date: 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  233. Characterization of Chemical Bonding Features and Interfacial Reactions in Ge-MIS Structure with HfO2/TaGexOy Dielectric Stack International conference

    A. Ohta, H. Murakami, K. Hashimoto, K. Makihara, and S. Miyazaki

    The 2014 ECS and SMEQ (Sociedad Mexicana de Electroquímica) Joint International Meeting  

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Mexico  

  234. Characterization of Electron Emission from High Density Self-aligned Si-based Quantum Dots by Conducting-Probe Atomic Force Microscopy International conference

    D. Takeuchi, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    The 2014 ECS and SMEQ (Sociedad Mexicana de Electroquímica) Joint International Meeting  

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Mexico  

  235. Pre-Amorphization and Low-Temperature Implantation for Efficient Activation of Implanted As in Ge(100) International conference

    H. Murakami, S. Hamada, T. Ono, K. Hashimoto, A. Ohta, H. Hanafusa, S. Higashi, and S. Miyazaki

    The 2014 ECS and SMEQ (Sociedad Mexicana de Electroquímica) Joint International Meeting  

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Mexico  

  236. Photoluminescence Study of Si Quantum Dots with Ge Core International conference

    K. Makihara, K. Kondo, M. Ikeda, A. Ohta, and S. Miyazaki

    The 2014 ECS and SMEQ (Sociedad Mexicana de Electroquímica) Joint International Meeting  

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    Event date: 2014.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Mexico  

  237. Materials and Interfaces Characterization for Advanced Ge-Channel Devices: Soft and Hard X-ray Photoemission Measurements Invited International conference

    S. Miyazaki

    The 1st Material Research Society of Indonesia (MRS-Id) Meeting 2014  

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    Event date: 2014.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Indonesia  

  238. Mnナノドット埋め込みSiリッチ酸化膜の抵抗変化特性

    荒井 崇、大田 晃生、牧原 克典、宮﨑 誠一

    第75回応用物理学会秋季学術講演会 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道大学   Country:Japan  

  239. 光電子収率分光法によるSiO2/SiC界面の電子状態計測

    大田 晃生、竹内 大智、チュン グェンスァン、牧原 克典、宮﨑 誠一

    第75回応用物理学会秋季学術講演会 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:北海道大学   Country:Japan  

  240. 不純物添加Si量子ドット多重集積構造のエレクトロルミネッセンス

    山田 敬久、牧原 克典、池田 弥央、宮﨑 誠一

    第75回応用物理学会秋季学術講演会 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:北海道大学   Country:Japan  

  241. P添加Si量子ドット多重集積構造の電界電子放出特性

    竹内 大智、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第75回応用物理学会秋季学術講演会 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:北海道大学   Country:Japan  

  242. FePtナノドット/極薄SiO2層における電子輸送特性の外部磁場依存性

    壁谷 悠希、牧原 克典、大田 晃生、宮﨑 誠一

    第75回応用物理学会秋季学術講演会 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:北海道大学   Country:Japan  

  243. リモート水素プラズマ支援によるMn-Ge系ナノドットの高密度一括形成

    温 映輝、牧原 克典、大田 晃生、宮﨑 誠一

    第75回応用物理学会秋季学術講演会 

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    Event date: 2014.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:北海道大学   Country:Japan  

  244. Electroluminescence from Multiply-Stack of Doped Si Quantum Dots International conference

    T. Yamada, K. Makihara, M. Ikeda, and S. Miyazaki

    international conference on SOLID STATE DEVICES AND MATERIALS (SSDM2014) 

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    Event date: 2014.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  245. Impact of Magnetic-Field Application on Electron Transport Through CoPt Alloy Nanodots International conference

    Y. Kabeya

    The 15th IUMRS-ICA (International Union of Materials Research Societies, International Conference in Asia)  

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    Event date: 2014.8

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  246. Characterization of Resistance-Switching of Ni Nano-dot/SiOx/Ni Diodes International conference

    A. Ohta

    The 15th IUMRS-ICA (International Union of Materials Research Societies, International Conference in Asia)  

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    Event date: 2014.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  247. Impact of Remote H2 Plasma on Surface Roughness of 4H-SiC(0001) International conference

    T. Nguyen

    The 15th IUMRS-ICA (International Union of Materials Research Societies, International Conference in Asia)  

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    Event date: 2014.8

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  248. High Density Formation of Mn and Mn-germanide Nanodots International conference

    Y. WEN

    The 15th IUMRS-ICA (International Union of Materials Research Societies, International Conference in Asia)  

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    Event date: 2014.8

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  249. Local Electrical Properties of Si-rich Oxides with Embedding Mn-nanodots by Atomic Force Microscopy Using Conducting-Probe International conference

    T. Arai

    The 15th IUMRS-ICA (International Union of Materials Research Societies, International Conference in Asia)  

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    Event date: 2014.8

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  250. Resistance-Switching Characteristics of Si-rich Oxide as Evaluated by Using Ni Nanodots as Electrodes in Conductive AFM Measurements International conference

    A. Ohta, C. Liu, T. Arai, D. Takeuchi, H. Zhang, K. Makihara, and S. Miyazaki

    2014 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2014) 

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    Event date: 2014.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  251. Impact of embedded Mn-nanodots on resistive switching in Si-rich oxides International conference

    T. Arai, C. Liu, A. Ohta, K. Makihara, and S. Miyazaki

    7th International Silicon-Germanium Technology and Device Meeting (2014 ISTDM) 

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    Event date: 2014.6

    Language:English   Presentation type:Poster presentation  

    Country:Singapore  

  252. Characterization of electronic charged states of self-aligned coupled Si quantum dots by AFM/KFM Probe Technique International conference

    K. Makihara, N. Tsunekawa, M. Ikeda, and S. Miyazaki

    7th International Silicon-Germanium Technology and Device Meeting (2014 ISTDM) 

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    Event date: 2014.6

    Language:English   Presentation type:Poster presentation  

    Country:Singapore  

  253. XPS Study of Energy Band Alignment of High-k Dielectric Gate Stack on Ge(100) International conference

    S. Miyazaki, and A. Ohta

    2014 MRS Spring Meetings & Exhibit 

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    Event date: 2014.4

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:United States  

  254. 磁性AFM探針を用いたCoPt合金ナノドットの電子輸送特性評価-外部磁場依存性

    壁谷 悠希、張 海、福岡 諒、牧原 克典、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  255. Mnナノドットを埋め込んだSiOx膜の抵抗変化特性

    荒井 崇、劉 冲、大田 晃生、牧原 克典、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  256. 導電性AFM探針による高密度一次元連結Si系量子ドットからの電子放出特性評価(II)

    竹内 大智、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  257. P/N制御Si量子ドット多重集積構造のエレクトロルミネッセンス

    山田 敬久、牧原 克典、鈴木 善久、池田 弥央、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  258. P添加GeコアSi量子ドットのフォトルミネッセンス特性評価

    近藤 圭悟、鈴木 善久、牧原 克典、池田 弥央、小山 剛史、岸田 英夫、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  259. リモート水素プラズマ支援によるMnおよびMnジャーマナイドナノドットの高密度一括形成

    温 映輝、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  260. リモート水素プラズマ支援によるFeシリサイドナノドットの高密度形成

    張 海、牧原 克典、大田 晃生、池田 弥央、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  261. AFM/KFMによる自己整合一次元連結Si量子ドットの局所帯電評価

    恒川 直輝、牧原 克典、池田 弥央、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  262. Mnナノドットを埋め込んだSiOxMIM構造の局所電気伝導解析

    荒井 崇、劉冲、大田 晃生、牧原 克典、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Poster presentation  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  263. FePt合金ナノドットの構造および磁化特性評価

    福岡 諒、張 海、牧原 克典、大田 晃生、徳岡 良浩、加藤 剛志、岩田 聡、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  264. Niナノドット電極を用いたSiOx薄膜の抵抗変化特性

    劉 冲、荒井 崇、大田 晃生、竹内 大智、張 海、牧原 克典、宮﨑 誠一

    第61回応用物理学会春季学術講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Poster presentation  

    Venue:青山学院大学相模原キャンパス(神奈川県)   Country:Japan  

  265. Study on Formation of High Density Fe-Nanodots on Ultrathin SiO2 Induced by Remote H2 Plasma Exposure International conference

    H. Zhang, K. Makihara, R. Fukuoka, Y. Kabeya, and S. Miyazaki

    ISPlasma2014/IC-PLANTS2014 

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    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  266. Study on Si/Ge Heterodtructures Formed by PECVD in Combination with Ni-Nds Seeding Nucleation International conference

    Y. Lu, K. Makihara, D. Takeuchi, K. Sakaike, M. Akazawa, S. Higashi, and S. Miyazaki

    ISPlasma2014/IC-PLANTS2014 

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    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  267. Selective Crystallization and Metallizatioin of a-Ge:H Thin Films by Pt-coating and Exposing to Remote H2 Plasma International conference

    K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014) 

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    Event date: 2014.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  268. 金属合金化反応制御による強磁性ナノドットの高密度・自己組織化形成

    牧原 克典、宮﨑 誠一

    名古屋大学ナノテクノロジープラットフォーム第1回合同シンポジウム~中部ものづくりは名大から~ 

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    Event date: 2014.2

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  269. High Density Formation of FePt Alloy Nanodots Induced by Remote Hydrogen Plasma and Characterization of Their Magnetic Properties International conference

    R. Fukuoka, H. Zhang, K. Makihara, Y. Tokuoka, T. Kato, S. Iwata, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  270. Electroluminescence from Multiply-Stacking B-doped Si Quantum Dots International conference

    T. Yamada, K. Makihara, Y. Suzuki, M. Ikeda, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  271. Evaluation of Chemical Bonding Features and Resistive Switching in TiOx/SiOx Stack in Ti Electrode MIM Diodes International conference

    T. Arai, C. Liu, A. Ohta, K. Makihara, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  272. Impact of Pulsed Bias Application on Electroluminescence Properties from One-dimensionally Self-Aligned Si-based Quantum Dots International conference

    Y. Suzuki, K. Makihara, M. Ikeda, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  273. Characterization of Local Electronic Transport through Si-Nanocrystals/ Si-Nanocolumnar Structures by Non-contact Conductive Atomic ForceMicroscopy International conference

    D. Takeuchi, K. Makihara, M. Ikeda, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  274. Formation of High-Density Magnetic Nanodots on Ultrathin SiO2 Induced by Remote H2 Plasma International conference

    Y. Kabeya, H. Zhang, R. Fukuoka, K. Makihara, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  275. Alignment Control and Electrical Coupling of Si-based Quantum Dots International conference

    K. Makihara, and S. Miyazaki

    7th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2014.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  276. Progress in Determination Method of Ultrathin Oxide Bandgaps from Analysis of Energy Loss Signals for Photoelectrons

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    Event date: 2014.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  277. Fabrication of Low-Resistance Shallow Juntion by Low Temperature As+-Ion Implantation to Ge(100)

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    Event date: 2014.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  278. Impact of Post-Metallization Annealing on Chemical Structures in Ge-MIS Capacitors with HfO2/TaGexOy Dielectrics

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    Event date: 2014.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  279. SiOx/TiO₂積層したTi電極MIMダイオードの抵抗スイッチング

    荒井 崇、大田 晃生、福嶋 太紀、牧原 克典、宮﨑 誠一

    第12回日本表面科学会中部支部・学術講演会 

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    Event date: 2013.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋工業大学   Country:Japan  

  280. リモート水素プラズマ支援によるSiO₂上へのFeナノドットの高密度・一括形成

    張 海、福岡 涼、壁谷 悠希、牧原 克典、宮﨑 誠一

    第12回日本表面科学会中部支部・学術講演会 

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    Event date: 2013.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋工業大学   Country:Japan  

  281. 半導体ーメタル接触界面の構造について

    宮﨑 誠一

    第13回日本表面科学会中部支部・学術講演会 

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    Event date: 2013.12

    Language:Japanese  

    Venue:名古屋工業大学   Country:Japan  

  282. Optoelectronic Response of Metal-Semiconductor Hybrid Nanodots Floating Gate International conference

    S. Miyazaki

    2013 Energy Materials Nanotechnology Fall Meeting (2013 EMN Fall Meeting) 

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    Event date: 2013.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:United States  

  283. Formation and characterization of hybrid nanodots embedded in gate dielectric for optoelectronic application International conference

    S. Miyazaki

    International Conference on Processing and Manufacturing of Advanced Materials 2013 (THERMEC'2013) 

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    Event date: 2013.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:United States  

  284. High density formation of FePt alloy nanodots on SiO2 induced by remote hydrogen plasma International conference

    R. Fukuoka, H. Zhang, K. Makihara, Y. Tokuoka, T. Kato, S. Iwata, and S. Miyazaki

    MORIS2013 

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    Event date: 2013.12

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  285. Study on As+ Ion Implantation into Ge at Different Substrate Temperatures International conference

    T. Ono, K. Hashimoto, A. Ohta, H. Murakami, H. Hanafusa, S. Higashi, and S. Miyazaki

    2013 International Workshop on Dielectric Thin Films for Future ULSI Devices (IWDTF 2013) 

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    Event date: 2013.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  286. Impact of Post-Metallization Annealing on Chemical Bonding Features in Ge-MIS Structure with HfO2/TaGexOy Stack International conference

    K. Hashimoto, T. Ono, A. Ohta, H Murakami, S. Higashi, and S. Miyazaki

    2013 International Workshop on Dielectric Thin Films for Future ULSI Devices (IWDTF 2013) 

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    Event date: 2013.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  287. Formation of One-dimensionally Self-Aligned Si-based Quantum Dots and Its Application to Light Emitting Diodes International conference

    K. Makihara, and S. Miyazaki

    26th International Microprocesses and Nanotechnology Conference 

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    Event date: 2013.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  288. Characterization of Electron Emission from Si-Nanocrystals/Si-Nanocolumnar Structures by Non-contact Conductive Atomic Force Microscopy International conference

    D. Takeuchi, K. Makihara, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    ACSIN-12&ICSPM21 

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    Event date: 2013.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  289. B添加Si量子ドット多重集積構造のエレクトロルミネッセンス

    山田 敬久、牧原 克典、鈴木 善久、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  290. 導電性AFM探針によるSiナノ結晶/柱状Siナノ構造からの電子放出特性評価

    竹内 大智、牧原 克典、池田 弥央、宮﨑 誠一、可貴 裕和、林 司

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  291. AFM/KFMによる一次元連結・高密度Si系量子ドットにおける帯電電荷の経時変化計測

    恒川 直輝、牧原 克典、池田 弥央、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  292. リモート水素プラズマ支援によるFePt合金ナノドットの高密度・一括形成と磁化特性評価

    福岡 諒、張 海、牧原 克典、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  293. リモート水素プラズマ支援によるSiO2上へのFeナノドットの高密度・一括形成

    張 海、福岡 諒、壁谷 悠希、牧原 克典、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  294. ゲルマニウムへの低温As+イオン注入による活性化率向上

    恒川 直輝、牧原 克典、池田 弥央、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  295. 一次元連結Si系量子ドットの電界発光減衰特性

    鈴木 善久、牧原 克典、池田 弥央、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  296. 外部磁場印加がCoPt合金ナノドットの電気伝導特性に及ぼす影響

    壁谷 悠希、張 海、福岡 諒、牧原 克典、宮﨑 誠一

    応用物理学会SC東海地区学術講演会2013 

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    Event date: 2013.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

  297. Study On Charge Storage and Optical Response of Hybrid Nanodots Floating Gate Mos Devices for Their Optoelectronic Application International conference

    S. Miyazaki

    The 224th Electrochemical Society (ECS) Meeting 

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    Event date: 2013.10 - 2013.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:United States  

  298. Resistive Switching Properties of SiOx/TiO2 Multi-Stack in Ti-Electrode MIM Diodes International conference

    A. Ohta

    224th ECS Meeting 

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    Event date: 2013.10 - 2013.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  299. Characterization of Charge Storage and Optical Response of Hybrid Nanodots Floating Gate MOS Devices for Their Optoelectronic Application International conference

    S. Miyazaki

    JSPS Core-to-Core Program Workshop "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2013.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  300. Study on Electronic Emission through Si-Nanocrystals/ Si-Nanocolumnar Structures by Conducting-Probe Atomic Force Microscopy International conference

    D. Takeuchi

    JSPS Core-to-Core Program Workshop "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2013.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  301. Transient Characteristics of Electroluminescence from Self-aligned Si-based Quantum Dots International conference

    Y. Suzuki, K. Makihara, M. Ikeda, and S. Miyazaki

    2013 International Conference on Solid State Devices and Materials 

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    Event date: 2013.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  302. Characterization of Electron Transport Through Ultra High Density Array of One- dimensionally Aligned Si-based Quantum Dots International conference

    H. Niimi, K. Makihara, M. Ikeda, and S. Miyazaki

    2013 International Conference on Solid State Devices and Materials 

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    Event date: 2013.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  303. HfO2/TaGexOyを用いたGe-MIS構造の熱処理による化学構造変化

    橋本 邦明、大田 晃生、村上 秀樹、東 清一郎、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:同志社大学(京都)   Country:Japan  

  304. ゲルマニウムへの低温As+イオン注入による活性化率向上

    小野 貴寛、大田 晃生、花房 宏明、村上 秀樹、東 清一郎、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:同志社大学(京都)   Country:Japan  

  305. 導電性AFM探針による高密度一次元連結Si系量子ドットからの電子放出特性評価

    竹内 大智、牧原 克典、池田 弥央、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:同志社大学(京都)   Country:Japan  

  306. バイアス印加が一次元連結Si系量子ドットのPL特性に及ぼす影響

    鈴木 善久、牧原 克典、池田 弥央、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:同志社大学(京都)   Country:Japan  

  307. リモート水素プラズマ支援によるSiO2上へのFeナノドットの高密度形成

    張 海、福岡 諒、壁谷 悠希、牧原 克典、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:同志社大学(京都)   Country:Japan  

  308. 外部磁場印加がCoPt合金ナノドットの電子輸送特性に及ぼす影響

    壁谷 悠希、福岡 諒、張 海、牧原 克典、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:同志社大学(京都)   Country:Japan  

  309. リモート水素プラズマ支援によるFePt合金ナノドットの高密度形成と磁化特性評価

    福岡 諒、張 海、壁谷 悠希、恒川 直輝、牧原 克典、大田 晃生、宮﨑 誠一

    第74回応用物理学会秋季学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:同志社大学(京都)   Country:Japan  

  310. 次世代MISトランジスタ実現に向けた材料プロセスインテグレーション~金属/高誘電率絶縁膜/Geチャネルゲートスタック構造の硬X線光電子分光~

    宮﨑 誠一

    SPring-8シンポジウム2013 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:京都大学宇治おうばくプラザ   Country:Japan  

  311. Formation of High Density Fe-Nanodots on Ultrathin SiO2 Induced by Remote H2 Plasma International conference

    H. Zhang, R. Fukuoka, Y. Kabeya, K. Makihara, and S. Miyazaki

    2013 International Symposium on Dry Process (DPS 2013) 

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    Event date: 2013.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  312. Low Temperature Formation of Crystalline Si/Ge Heterostructures by Plasma Enhanced CVD in Combination with Ni-NDs Seeding Nucleation International conference

    Y. Lu, K. Makihara, D. Takeuchi, K. Sakaike, M. Akazawa, M. Ikeda, S. Higashi, and S. Miyazaki

    The 25th International Conference on Amorphous and Nano-crystalline Semiconductors (ICANS 25) 

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    Event date: 2013.8

    Language:English   Presentation type:Oral presentation (general)  

    Country:Canada  

  313. Characterization of Ultrathin Ta-oixde Films as an Interfacial Control Layer Formed on Ge(100) by ALD and Layer-by-layer Methods International conference

    H. Murakami, K. Hashimoto, A. Ohta, K. Mishima, S. Higashi, and S. Miyazaki

    2013 NIMS Conference -Structure Control of Atomic/ Molecular Thin Films and Their Applications- 

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    Event date: 2013.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  314. Selective Growth of Self-Assembling Si and SiGe Quantum Dots International conference

    K. Makihara, M. Ikeda, and S. Miyazaki

    2013 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2013) 

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    Event date: 2013.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  315. High-Sensitive Detection of Electronic Emission through Si-Nanocrystals/Si-Nanocolumnar Structures by Conducting-Probe Atomic Force Microscopy International conference

    D. Takeuchi, Makihara,M,Ikeda, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    2013 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2013) 

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    Event date: 2013.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  316. High Density Formation of CoPt Alloy Nanodots Induced by Remote Hydrogen Plasma and Charging and Magnetizing Characteristics

    Science and Technology for Dielectric Thin Films for Electron Devices  

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    Event date: 2013.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  317. SiOx/TiO2積層したMIMダイオードにおける抵抗変化特性評価

    大田 晃生、福嶋 太紀、牧原 克典、村上 秀樹、東 清一郎、宮﨑 誠一

    SDM研究会「ゲート絶縁薄膜、容量膜、機能膜およびメモリ技術」(応用物理学会、シリコンテクノロジー分科会との合同開催)  

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    Event date: 2013.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue: 機械振興会館   Country:Japan  

    信学技報, vol. 113, no. 87, pp. 61-66, 発行日 20130611, 資料番号 SDM2013-56

  318. HAXPES Studies of Chemical Bonding Features of Buried Interfaces for Advanced Ge-channel MIS Devices International conference

    S. Miyazaki

    5th International conference on hard X-ray photoelectron spectroscopy(HAXPES 2013) 

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    Event date: 2013.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Sweden  

  319. Characterization of Electroluminescence from Self-Aligned Si-Based Quantum Dots Stack by Intermittent Bias Application International conference

    K. Makihara, H. Takami, Y. Suzuki, M. Ikeda, and S. Miyazaki

    The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and 

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    Event date: 2013.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  320. High Density Formation of CoPt Alloy Nanodots Induced by Remote H2 Plasma International conference

    R. Fukuoka, H. Zhang, Y. Kabeya, K. Makihara, A. Ohta, M. Ikeda, and S. Miyazaki

    The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and 

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    Event date: 2013.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  321. Determination of Bandgap Energy of Thermally-Grown Si- and Ge- Oxides from Energy Loss Spectra of Photoelectrons International conference

    A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki

    The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and 

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    Event date: 2013.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  322. Characterization of Electroluminescence from Multiply-Stacked B-doped Si Quantum Dots International conference

    T. Yamada, K. Makihara, H. Takami, Y. Suzuki, M. Ikeda, and S. Miyazaki

    The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and 

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    Event date: 2013.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  323. Formation and Characterization of Hybrid Nanodots Floating Gate for Optoelectronic Devices International conference

    S. Miyazaki, K. Makihara, and M. Ikeda

    JSPS Core-to Core Program Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2013.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  324. High Density Formation of Iron Nanodots on SiO2 Induced by Remote Hydrogen Plasma International conference

    H. Zhang, R. Fukuoka, Y. Kabeya, K. Makihara, and S. Miyazaki

    3rd International Conference on Advanced Engineering Materials and Technology(2013) 

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    Event date: 2013.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  325. 多重集積したB添加量子ドットのエレクトロルミネッセンス特性評価

    山田 敬久、牧原 克典、高見 弘貴、鈴木 善久、池田 弥央、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  326. 導電性AFM探針を用いたSiナノ結晶/柱状Siナノ構造の電子放出特性評価

    竹内 大智、牧原 克典、池田 弥央、宮﨑 誠一、可貴 裕和、林 司

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  327. リモート水素プラズマ支援によるCoPt合金ナノドットの高密度形成

    福岡 諒、張 海、壁谷 悠希、牧原 克典、大田 晃生、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  328. CoPt合金ナノドットの帯磁特性評価

    壁谷 悠希、張 海、福岡 諒、牧原 克典、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  329. Ti電極MIMダイオードにおけるSiOx/TiO2多重積層の抵抗変化特性評価

    福嶋 太紀、大田 晃生、牧原 克典、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  330. Niナノドットによる初期核発生制御を活用した高結晶性Si:H/Ge:Hヘテロ結合の低温堆積

    盧 義敏、高 金、牧原 克典、酒池 耕平、藤田 悠二、池田 弥央、大田 晃生、東 清一郎、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  331. 非接触AFMによるSiナノ結晶/柱状Siナノ構造からの電子放出メカニズム解析

    竹内 大智、牧原 克典、池田 弥央、宮﨑 誠一、可貴 裕和、林 司

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  332. パルスバイアス印加が一次元連結Si系量子ドットの電界発光に及ぼす影響

    鈴木 善久、牧原 克典、高見 弘貴、池田 弥央、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  333. 自己組織化形成Si系量子ドットの選択成長

    牧原 克典、池田 弥央、宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  334. 縦積み連結Si系量子ドットの超高密度集積構造における電子輸送特性

    新美 博久、 牧原 克典、 池田 弥央、 宮﨑 誠一

    第60回春季応用物理学会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:神奈川工科大学   Country:Japan  

  335. Characterization of Electron Emission from Si-Nanocrystals/Si-Nanocolumnar Structures by Conductive-Probe Atomic Force Microscopy International conference

    D. Takeuchi, K. Makihara, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  336. High-density Formation and Characterization of Nanodots for Their Electron Device Application International conference

    K. Makihara, and S. Miyazaki

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  337. Electronic and Optoelectronic Response of Hybrid Nanodots Floating Gate MOS Devices International conference

    S. Miyazaki, K. Makihara, M. Ikeda, and H. Murakami

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  338. Electroluminescence Study of Self-aligned Si-based Quantum Dots International conference

    H. Takami, K. Makihara, M. Ikeda, and S. Miyazaki

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  339. Transient Characteristics of Electroluminescence from Self-aligned Si-based Quantum Dots International conference

    Y. Suzuki, K. Makihara, H. Takami, M. Ikeda, and S. Miyazaki

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  340. Spatially-controlled Charge Storage and Charge Dispersion in High Density Self-aligned Si-based Quantum Dots International conference

    N. Tsunekawa, K. Makihara, M. Ikeda, and S. Miyazaki

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  341. High Density Formation and Characterization of CoPt Alloy Nanodots as Memory Nodes International conference

    R. Fukuoka, H. Zhang, Y. Kabeya, K. Makihara, A. Ohta, and S. Miyazaki

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  342. Characterization of Resistive Switching of Si-rich Oxides International conference

    M. Fukusima, A. Ohta, K. Makihara, and S. Miyazaki

    6th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration"  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  343. Evaluation of Resistance-Switching Behaviors and Chemical Bonding Features of Si-rich Oxide ReRAMs with TiN Electrode International conference

    M. Fukusima, A. Ohta, K. Makihara, and S. Miyazaki

    The 6th International Conference on Plasma-Nano Technology & Science  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  344. Study on Electronic Emission through Ultrathin Au/High-Dense Si-Nanocolumnar Structures Accompanied with Si-Nanocrystals by Conductive Atomic Force Microscopy International conference

    D. Takeuchi, K. Makihara, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    The 6th International Conference on Plasma-Nano Technology & Science  

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  345. Characterization of Chemical Bonding Features of As+-Implanted Ge by X-ray Photoemission Spectroscopy

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    Event date: 2013.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  346. Characterization of Resistive Switching of Ultrathin Si-rich Oxide Contacted with TiN Electrodes

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    Event date: 2013.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  347. Photoemission Study of Rt/SiOx/Pt Structures

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    Event date: 2013.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  348. Study of Chemical Bonding Features of Impurities Implanted into SiC and Their High-Efficient Activation

    2013.1.26 

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    Event date: 2013.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  349. Resistive Switching of Si-rich Oxide Dielectric with Ti based Electrodes International conference

    A. Ohta, M. Fukusima, K. Makihara, S. Higashi, and S. Miyazaki

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 

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    Event date: 2013.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  350. Highly-crystallized Ge:H Film Growth from GeH4 Very High Frequency Inductively-coupled Plasma -Crystalline Nucleation Initiated by Ni-nanodots- International conference

    K. Makihara, J. Gao, D. Takeuchi, K. Sakaike, S. Hayashi, M. Ikeda, S. Higashi, and S. Miyazaki

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 

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    Event date: 2013.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  351. Characterization of Electronic Emission Through Au/Si-Nanocolumnar Structures by Conductive-Probe Atomic Force Microscopy International conference

    D. Takeuchi, K. Makihara, M. Ikeda, S. Miyazaki, H. Kaki, and T. Hayashi

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 

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    Event date: 2013.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  352. Charging and Magnetizing Characteristics of Co Nanodots Formed by Remote H2-Plasma Induced Migration International conference

    R. Fukuoka, K. Makihara, M. Ikeda, and S. Miyazaki

    5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 

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    Event date: 2013.1

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  353. 導電性AFM探針を用いたSiナノ結晶/柱状Siナノ構造からの電子放出検出

    竹内大智、牧原克典、池田弥央、宮崎誠一、可貴裕和、林司

    第12回日本表面科学会中部支部研究会 

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    Event date: 2012.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名城大学   Country:Japan  

  354. Formation and Characterization of Hybrid Nanodots Floating Gate for Optoelectronic Application International conference

    S. Miyazaki

    2012 MRS Fall Meeting & Exhibit 

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    Event date: 2012.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  355. ナノ構造制御で展開する電子デバイス開発―機能進化・高度化への挑戦 Invited

    宮﨑 誠一

    薄膜材料デバイス研究会 第9回研究集会「薄膜デバイスの未来」 

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    Event date: 2012.11

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:なら100年会館(奈良市)   Country:Japan  

    2T01, pp.1-26

  356. Control of Schottky Barrier Height at Al/p-Ge Junctions by Ultrathin Layer Insertion International conference

    A. Ohta, M. Matsui, H. Murakami, S. Higashi, S. Miyazaki

    222nd Electrochemical Society (ECS) Meeting : SiGe & Ge Materials, Processing and Device Symposium 

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    Event date: 2012.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  357. Characterization of Resistance-Switching Properties of SiOx Films Using Pt Nanodots Electrodes International conference

    K. Makihara, M. Fukushima, A. Ohta, M. Ikeda, S. Miyazaki

    222nd Electrochemical Society (ECS) Meeting : SiGe & Ge Materials, Processing and Device Symposium 

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    Event date: 2012.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  358. Impact of Ni-nanodots on Crystalline Ge:H Film Growth from GeH4 Very High Frequency Inductively-Coupled Plasma International conference

    J. Gao, K. Makihara, M. Ikeda, S. Hayashi, K. Sakaike, S. Higashi, S. Miyazaki

    11th Asia-Pacific Conference on Plasma Science and Technology and 25th Symposium on Plasma Science for Materials (APCPST & SPSM) 

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    Event date: 2012.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  359. Characterization of As Implanted and Annealed Ge by Photoemission and Electrical Measurements International conference

    T. Ono, A. Ohta, H. Murakami, S. Higashi, S. Miyazaki

    2012 International Conference on Solid State Devices and Materials (SSDM) 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  360. Dry Oxidation of Germanium (100) and (111) Surfaces - Impact of Oxidation Temperature on Ge Oxide Growth International conference

    A. Ohta, S. K. Sahari, M. Ikeda, H. Murakami, S. Higashi, S. Miyazaki

    2012 International Conference on Solid State Devices and Materials (SSDM) 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  361. Characterization of Electroluminescence from One-dimensionally Self-Aligned Si-based Quantum Dots International conference

    H. Takami, K. Makihara, M. Ikeda, S. Miyazaki

    2012 International Conference on Solid State Devices and Materials (SSDM) 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  362. Ti系電極を用いたSiOx膜の化学構造分析と抵抗スイッチング特性評価

    福島太紀、大田晃生、牧原克典、宮崎誠一

    応用物理学会・東海支部第19回基礎セミナー [透明導電膜-基礎から応用-] 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:岐阜大学   Country:Japan  

  363. 溶液ペーストによる無機材料を用いた太陽電池の作製

    張海、市村正也、牧原克典、宮崎誠一

    応用物理学会・東海支部第19回基礎セミナー [透明導電膜-基礎から応用-] 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:岐阜大学   Country:Japan  

  364. 導電性AFM探針による極薄Au/柱状Siナノ構造からの電子放出検出

    竹内大智、牧原克典、池田弥央、宮崎誠一、可貴裕和、林司

    応用物理学会・東海支部第19回基礎セミナー [透明導電膜-基礎から応用-] 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:岐阜大学   Country:Japan  

  365. Temporal Changes of Charge Distribution in High Density Self-Aligned Si-Based Quantum Dots as Evaluated by AFM/KFM International conference

    N. Tsunekawa, K. Makihara, M. Ikeda, S. Miyazaki

    International Union Materials Research Societies - International Conference on Electronic Materials 2012 (IUMRS-ICEM 2012) 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  366. Photoemission Study of GeO2/Ge Structure Formed by Thermal Oxidation International conference

    H. Murakami, Y.Ono,A.Ohta, S.Higashi, S.Miyazaki

    International Union Materials Research Societies - International Conference on Electronic Materials 2012 (IUMRS-ICEM 2012) 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  367. XPS Study of Energy Band Alignment between Hf-La Oxides and Si(100) International conference

    A. Ohta, H. Murakami, S. Higashi, S. Miyazaki

    International Union Materials Research Societies - International Conference on Electronic Materials 2012 (IUMRS-ICEM 2012) 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  368. パルスバイアス印加による一次元連結Si系量子ドットの電界発光評価

    鈴木善久,牧原克典,高見弘貴,池田弥央,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  369. 導電性AFM探針によるSiナノ結晶/柱状Siナノ構造からの電子放出検出

    竹内大智,牧原克典,池田弥央,宮崎誠一,可貴裕和,林  司

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  370. AFM/KFMによる一次元連結・高密度Si系量子ドットの帯電電荷分布計測

    恒川直輝,牧原克典,池田弥央,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  371. TaOx/p-Ge(100)界面のエネルギーバンドアライメント評価とAl電極ショットキーダイオードの伝導制御

    橋本邦明,大田晃生,村上秀樹,東清一郎,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  372. Ti系電極を用いたSiリッチ酸化層の抵抗変化特性評価

    福嶋太紀,大田晃生,牧原克典,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  373. 電圧パルス幅が一次元連結Si系量子ドット発光ダイオードのEL特性に及ぼす影響

    高見弘貴,牧原克典,池田弥央,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  374. 導電性AFM短針によるNiナノドット上に形成した高結晶性Ge:H薄膜も局所伝導評価

    高  金,牧原克典,高見弘貴,竹内大智,酒池耕平,林 将平,池田弥央,東清一郎,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  375. NiナノドットがGe:H薄膜堆積および電気伝導特性に及ぼす影響

    高  金,牧原克典,池田弥央,福嶋太紀,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  376. As+イオン注入した4H-SiC基板の化学結合状態評価

    村上秀樹,大田晃生,芦原龍平,雨宮嘉照,田部井哲夫,横山 新,吉川公麿,宮崎誠一,東清一郎

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  377. 溶液ペーストによるCuO/ZnOヘテロ構造太陽電池の作製

    張  海,市村正也,牧原克典,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  378. As+イオン注入したGe(100)の光電子分光分析

    小野貴寛,大田晃生,村上秀樹,東清一郎,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  379. ゲルマニウムドライ酸化における基板面方位依存性

    大田晃生,Siti Kudnie Sahari,池田弥央,村上秀樹,東清一郎,宮崎誠一

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松山大学   Country:Japan  

  380. Charge Storage and Optoelectronic Response of Silicide-Nanodots/Si-Quantum-Dots Hybrid-Floating-Gate MOS Devices International conference

    Seiichi Miyazaki, Katsunori Makihara, Mitsuhisa Ikeda

    University of Vigo and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing for Ultralarge Scale Integration" 

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    Event date: 2012.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Spain  

  381. Characterization of Resistive Switching of Pt/Si-rich Oxide/TiN System International conference

    M. Fukusima, A. Ohta, K. Makihara, S. Miyazaki

    2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  382. Control of Interfacial Reaction of HfO2/Ge Structure by Insertion of Ta Oxide Layer International conference

    K.Hashimoto, A.Ohta, H.Murakami,S.Higashi, S.Miyazaki

    2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  383. Photoexcited Carrier Transfer in NiSi-Nanodots/Si-Quantum-Dots Hybrid Floating Gate in MOS Structures International conference

    M.Ikeda, K.Makihara, S.Miyazaki

    2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  384. Characterization of Local Electronic Transport through Ultrathin Au/Highly-dense Si Nanocolumar structures by Conducting-Probe Atomic Force Microscopy International conference

    D.Takeuchi, A.Ohta, K.Makihara, M.Ikeda, S.Miyazaki, H.Kaki, T. Hayashi

    2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  385. Evaluation of Chemical Composition and Bonding Features of Pt/SiOx/Pt MIM Diodes and Its Impact on Resistance Switching Behavior International conference

    A. Ohta, K. Makihara, M. Ikeda, H. Murakami,S. Higashi, S. Miyazaki

    2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  386. Pt/SiOx/TiNダイオード構造の化学構造分析と電気抵抗スイッチング特性評価

    福嶋太紀、大田晃生、牧原克典、宮崎誠一

    電気情報通信学会 シリコン材料・デバイス(SDM)研究会 

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    Event date: 2012.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    SDM2012-43, 信学技報 Vol. 112, No. 92, pp. 1-6

  387. As+イオン注入したゲルマニウム層の化学分析

    小野貴寛、大田晃生、村上秀樹、東 清一郎、宮崎誠一

    電気情報通信学会 シリコン材料・デバイス(SDM)研究会 

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    Event date: 2012.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    SDM2012-55, 信学技報 vol.112, No. 92, pp. 63-67

  388. 極薄層挿入によるAl/Ge接合の伝導特性制御

    大田晃生、松井真史、村上秀樹、東 清一郎、宮崎誠一

    電気情報通信学会 シリコン材料・デバイス(SDM)研究会 

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    Event date: 2012.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    SDM2012-53, 信学技報 Vol. 112, No. 92, pp. 53-58

  389. TaOx層挿入によるHfO2/Ge界面反応制御

    村上秀樹、三嶋健斗、大田晃生、橋本邦明、東 清一郎、宮崎誠一

    電気情報通信学会 シリコン材料・デバイス(SDM)研究会 

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    Event date: 2012.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    SDM2012-7, 信学技報 Vol. 112, No. 92, pp. 33-36

  390. Si量子ドット/NiSiナノドットハイブリッド積層フローティングゲートMOS構造における光励起キャリア移動

    池田弥央、牧原克典、宮崎誠一

    電気情報通信学会 シリコン材料・デバイス(SDM)研究会 

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    Event date: 2012.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    SDM2012-45, 信学技報 Vol. 112, No. 92, pp. 13-16

  391. Formation and Characterization of Hybrid Nanodots Floating Gate for Optoelectronic Application Invited International conference

    S. Miyazaki

    CNSE and JSPS Core-to-Core Program Joint Seminar "Atomically Controlled Processing/Nanotechnology for Ultralarge Scale Integration"  2012.6.8 

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    Event date: 2012.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:United States  

  392. Highly-crystallized Ge:H Film Growth from GeH4 VHF-ICP -Crystalline Nucleation Initiated by Ni-nanodots- International conference

    K. Makihara, J. Gao, K. Sakaike, S. Hayashi, H. Deki, M. Ikeda, S. Higashi, S.Miyazaki

    the 6th International SiGe Technology and Device Meeting (ISTDM 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  393. Study of Electron Transport Characteristics Through Self-Aligned Si-Based Quantum Dots International conference

    K.Makihara, C. Liu, M. Ikeda, S. Miyazaki

    the 6th International SiGe Technology and Device Meeting (ISTDM 2012) 

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    Event date: 2012.6

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  394. 一次元縦積連結みシリコン系量子ドットの形成と発光ダイオードへの応用

    牧原克典・宮崎誠一

    電子デバイス研究会(ED)電子部品・材料研究会(CPM)シリコン材料・デバイス研究会(SDM)  

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    Event date: 2012.5

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  395. 柱状Siナノ構造における局所電気伝導と電子放出特性評価

    竹内大智,牧原克典,池田弥央,宮崎誠一,可貴裕和,林 司

    電子デバイス研究会(ED)電子部品・材料研究会(CPM)シリコン材料・デバイス研究会(SDM)  

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    Event date: 2012.5

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  396. 熱プラズマジェットを用いたミリ秒熱処理によるPtおよびPtシリサイドナノドットの形成とフローティングゲートメモリ応用 Invited

    牧原克典,山根雅人,池田弥央,東清一郎,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:早稲田大学   Country:Japan  

    講演奨励賞受賞記念講演, 18a-B3-1

  397. Si量子ドット/NiSiナノドットハイブリッドフローティングゲートにおける光励起電子のパルス電圧応答

    池田弥央,牧原克典,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18a-GP6-11

  398. 高濃度As+イオン注入ゲルマニウム層における化学結合状態評価

    小野貴寛,大田晃生,村上秀樹,東清一郎,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18a-A6-9

  399. AFM/KFMによる一次元連結・高密度Si系量子ドットの帯電状態の経時変化計測

    牧原克典,恒川直輝,池田弥央,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18p-A1-8

  400. 一次元縦積み連結Si系量子ドットの室温共鳴トンネル伝導

    牧原克典,池田弥央,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18p-A1-7

  401. 一次元連結Si系量子ドットのEL特性評価

    高見弘貴,牧原克典,出木秀典,池田弥央,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18p-A1-5

  402. 極薄層挿入によるAl/p-Ge接合のショットキー障壁制御

    松井真史,大田晃生,村上秀樹,小野貴寛,橋本邦明,東清一郎,宮崎誠一

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18p-A1-3

  403. 導電性AFM探針による極薄Au/柱状Siナノ構造の局所電気伝導評価

    竹内大智,牧原克典,池田弥央,宮崎誠一,可貴裕和,林  司

    第59回応用物理学会関係連合  2012.3.18 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    18a-A1-4

  404. Pt/SiOx/Pt構造における抵抗変化特性

    大田晃生,牧原克典,池田弥央,村上秀樹,東清一郎,宮崎誠一

    第59回応用物理学会関係連合講演会  2012.3.16 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    16p-F6-10

  405. 走査プローブ顕微鏡によるカーボンナノウォールの初期成長過程の解明

    近藤博基,安田幸司,牧原克典,宮崎誠一,平松美根男,関根 誠,堀  勝

    第59回応用物理学会関係連合  2012.3.16 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    16a-A3-11

  406. GeH4 VHF-ICP からの高結晶性Ge:H 薄膜堆積 -Ni ナノドットを用いた結晶核発生制御-

    高金,牧原克典,酒池耕平,林 将平,出木秀典,池田弥央,東清一郎,宮崎誠一

    第59回応用物理学会関係連合  2012.3.16 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    16a-B6-5

  407. ゲルマニウムドライ酸化における温度依存性

    大田晃生,Siti Kudnie Sahari,池田弥央,村上秀樹,東清一郎,宮崎誠一

    第59回応用物理学会関係連合  2012.3.16 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    16a-A5-4

  408. Ptナノドット電極を用いたSiOx膜の抵抗変化特性評価

    福嶋太紀,大田晃生,牧原克典,宮崎誠一

    第59回応用物理学会関係連合  2012.3.16 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    16p-F6-12

  409. Pt/SiOx/TiNダイオード構造の抵抗変化特性評価

    福嶋太紀,大田晃生,牧原克典,宮崎誠一

    第59回応用物理学会関係連合  2012.3.16 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    16p-F6-11

  410. 酸化アルミニウムを用いた抵抗変化メモリのスイッチング電圧のばらつき抑制 1

    大塚慎太郎,古屋沙絵子,清水智弘,新宮原正三,牧原克典,宮崎誠一,渡辺忠孝,高野良紀,高瀬浩一

    第59回応用物理学会関係連合講演会  2012.3.15 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:早稲田大学   Country:Japan  

    15a-GP3-11

  411. X-ray Photoemission Study of SiO2/Si/SiGe Heterostructures on Si(100) International conference

    A. Ohta, K. Makihara, S. Miyazaki, M. Sakuraba, J. Murota

    The 5th International Conference on PLAsma-Nano Technology & Science (IC-PLANTS 2012) 

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    Event date: 2012.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan   </