Nagoya University   Researcher

2015.4 - 2017.4

ISPlasma / IC-PLANTS　実行委員会   実行委員  

2017.4   

IWOPA2 実行委員会   実行委員  

2017.4 - 2018.3   

40th DPS2018 実行委員会   実行委員  

2017.3 - 2018.11   

DPS40周年記念事業準備委員会   実行委員  

2017.3 - 2018.11   

応用物理学会講演奨励賞

2012.11   応用物理学会  

Development of an experimental system for cell viability assays of yeasts using gas-temperature controllable plasma jets

Yoshimura, S; Otsubo, Y; Yamashita, A; Johzuka, K; Tsutsumi, T; Ishikawa, K; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 62 ( SL )   2023.9

Plasma processing and annealing for defect management at SiO₂/Si interface

Nunomura, S; Tsutsumi, T; Sakata, I; Hori, M

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   Vol. 41 ( 5 )   2023.9

Manipulation of etch selectivity of silicon nitride over silicon dioxide to a-carbon by controlling substate temperature with a CF4/H2 plasma

Hsiao, SN; Britun, N; Nguyen, TTN; Tsutsumi, T; Ishikawa, K; Sekine, M; Hori, M

VACUUM   Vol. 210   2023.4

Area-selective plasma-enhanced atomic layer etching (PE-ALE) of silicon dioxide using a silane coupling agent

Osonio, AP; Tsutsumi, T; Oda, Y; Mukherjee, B; Borude, R; Kobayashi, N; Hori, M

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   Vol. 40 ( 6 )   2022.12

Indoor Floor Heel Mark Removal Using Spark Discharges and Pressurized Airflow

Sakamoto, Y; Tsutsumi, T; Tanaka, H; Ishikawa, K; Hashizume, H; Hori, M

COATINGS   Vol. 12 ( 12 )   2022.12

Effects of deposition precursors of hydrogenated amorphous carbon films on the plasma etching resistance based on mass spectrometer measurements and machine learning analysis

Kurokawa, J; Kondo, H; Tsutsumi, T; Ishikawa, K; Sekine, M; Hori, M

VACUUM   Vol. 205   2022.11

Study of optical emission spectroscopy using modified Boltzmann plot in dual-frequency synchronized pulsed capacitively coupled discharges with DC bias at low-pressure in Ar/O₂/C₄F₈ plasma etching process

Sahu, BB; Nakane, K; Ishikawa, K; Sekine, M; Tsutsumi, T; Gohira, T; Ohya, Y; Ohno, N; Hori, M

PHYSICAL CHEMISTRY CHEMICAL PHYSICS   Vol. 24 ( 22 ) page： 13883 - 13896   2022.6

Ion-induced interface defects in a-Si:H/c-Si heterojunction: possible roles and kinetics of hot mobile hydrogens

Nunomura, S; Tsutsumi, T; Nakane, K; Sato, A; Sakata, I; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( 5 )   2022.5

Low-temperature reduction of SnO2 by floating wire-assisted medium-pressure H-2/Ar plasma

Thi-Thuy-Nga Nguyen, Sasaki Minoru, Hsiao Shih-Nan, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru

PLASMA PROCESSES AND POLYMERS     2022.2

Nitrogen Atom Density Measurements in NAGDIS-T Using Vacuum Ultraviolet Absorption Spectroscopy

Nishio, R; Kajita, S; Tanaka, H; Asaoka, K; Tsutsumi, T; Hori, M; Ohno, N

PLASMA AND FUSION RESEARCH   Vol. 17   2022.1

Functional nitrogen science based on plasma processing: quantum devices, photocatalysts and activation of plant defense and immune systems

Kaneko Toshiro, Kato Hiromitsu, Yamada Hideaki, Yamamoto Muneaki, Yoshida Tomoko, Attri Pankaj, Koga Kazunori, Murakami Tomoyuki, Kuchitsu Kazuyuki, Ando Sugihiro, Nishikawa Yasuhiro, Tomita Kentaro, Ono Ryo, Ito Tsuyohito, Ito Atsushi M., Eriguchi Koji, Nozaki Tomohiro, Tsutsumi Takayoshi, Ishikawa Kenji

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( SA )   2022.1

On the Etching Mechanism of Highly Hydrogenated SiN Films by CF₄/D₂ Plasma: Comparison with CF₄/H₂

Hsiao, SN; Nguyen, TTN; Tsutsumi, T; Ishikawa, K; Sekine, M; Hori, M

COATINGS   Vol. 11 ( 12 )   2021.12

Reaction Mechanism and Selectivity Control of Si Compound ALE Based on Plasma Modification and F-Radical Exposure

Vervuurt R. H. J., Mukherjee B., Nakane K., Tsutsumi T., Hori M., Kobayashi N.

LANGMUIR   Vol. 37 ( 43 ) page： 12663 - 12672   2021.11

Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H-2 plasma at different substrate temperatures Reviewed

Hsiao Shih-Nan, Britun Nikolay, Thi-Thuy-Nga Nguyen, Tsutsumi Takayoshi, Ishikawa Kenji, Sekine Makoto, Hori Masaru

PLASMA PROCESSES AND POLYMERS     2021.8

Influences of substrate temperatures on etch rates of PECVD-SiN thin films with a CF4/H-2 plasma Reviewed

Hsiao Shih-Nan, Nakane Kazuya, Tsutsumi Takayoshi, Ishikawa Kenji, Sekine Makoto, Hori Masaru

APPLIED SURFACE SCIENCE   Vol. 542   2021.3

Selective etching of SiN against SiO2 and poly-Si films in hydrofluoroethane chemistry with a mixture of CH2FCHF2, O-2, and Ar Reviewed

Hsiao Shih-Nan, Ishikawa Kenji, Hayashi Toshio, Ni Jiwei, Tsutsumi Takayoshi, Sekine Makoto, Hori Masaru

APPLIED SURFACE SCIENCE   Vol. 541   2021.3

Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature Reviewed

Sugiura Hirotsugu, Kondo Hiroki, Higuchi Kimitaka, Arai Shigeo, Hamaji Ryo, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru

CARBON   Vol. 170   page： 93 - 99   2020.12

Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H-2/Ar plasma at atmospheric pressure Reviewed

Thi-Thuy-Nga Nguyen, Sasaki Minoru, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru

SCIENTIFIC REPORTS   Vol. 10 ( 1 )   2020.10

Measurements of nitrogen atom density in a microwave-excited plasma jet produced under moderate pressures Reviewed

Kim Jaeho, Takeda Keigo, Itagaki Hirotomo, Wang Xue-lun, Hirose Shingo, Ogiso Hisato, Shimizu Tetsuji, Kumagai Naoto, Tsutsumi Takayoshi, Kondo Hiroki, Hori Masaru, Sakakita Hajime

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   Vol. 15 ( 9 ) page： 1281 - 1287   2020.9

Numerical analysis of coaxial dielectric barrier helium discharges: three-stage mode transitions and internal bullet propagation Reviewed

Sato Yosuke, Ishikawa Kenji, Tsutsumi Takayoshi, Hori Masaru

APPLIED PHYSICS EXPRESS   Vol. 13 ( 8 ) page： .   2020.8

Atomic nitrogen density measurements by actinometry method in the toroidal device NAGDIS-T Reviewed

Kajita Shin, Asaoka Koji, Tanaka Hirohiko, Nishio Ryosuke, Tsutsumi Takayoshi, Hori Masaru, Ohno Noriyasu

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 59 ( 8 ) page： .   2020.8

In situ surface analysis of an ion-energy-dependent chlorination layer on GaN during cyclic etching using Ar+ ions and Cl radicals Reviewed

Hasegawa Masaki, Tsutsumi Takayoshi, Tanide Atsushi, Nakamura Shohei, Kondo Hiroki, Ishikawa Kenji, Sekine Makoto, Hori Masaru

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   Vol. 38 ( 4 )   2020.7

Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity Reviewed

Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi, Akio Ui, Masato Akita, Shotaro Oka, Masaru Hori

Journal of Physics D: Applied Physics     2020.4

Generation and Diagnostics of Ambient Air Glow Discharge in Centimeter-Order Gaps Reviewed

Gamaleev Vladislav, Tsutsumi Takayoshi, Hiramatsu Mined, Ito Masafumi, Hori Masaru

IEEE ACCESS   Vol. 8   page： 72607 - 72619   2020.4

Electron and negative ion dynamics in a pulsed 100 MHz capacitive discharge produced in an O-2 and Ar/O-2/C4F8 gas mixture Reviewed

Sirse N, Tsutsumi T, Sekine M, Hori M, Ellingboe A. R

PLASMA SOURCES SCIENCE & TECHNOLOGY   Vol. 29 ( 3 )   2020.3

Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study Reviewed

Fukunaga Yusuke, Longo Roberto C, Ventzek Peter L. G, Lane Barton, Ranjan Alok, Hwang Gyeong S, Hartmann Greg, Tsutsumi Takayoshi, Ishikawa Kenji, Kondo Hiroki, Sekine Makoto, Hori Masaru

JOURNAL OF APPLIED PHYSICS   Vol. 127 ( 2 )   2020.1

Etching characteristics of PECVD-prepared SiN films with CF₄/D₂ and CF₄/H₂ plasmas at different temperatures

Hsiao, SN; Nguyen, TTN; Tsutsumi, T; Ishikawa, K; Sekine, M; Hori, M

2020 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM)     2020

Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures Reviewed

Hirotsugu Sugiura, Yasuyuki Ohashi, Kenji Ishikawa, Hiroki Kondo, Toshiaki Kato, Toshiro Kaneko, Keigo Takeda, Takayoshi Tsutsumi, Toshio Hayashi, Makoto Sekine, Masaru Hori

Diamond and Related Materials   Vol. 104   page： 107651   2019.12

In Situ Monitoring of Surface Reactions during Atomic Layer Etching of Silicon Nitride Using Hydrogen Plasma and Fluorine Radicals Reviewed

Nakane Kazuya, Vervuurt Rene H. J., Tsutsumi Takayoshi, Kobayashi Nobuyoshi, Hori Masaru

ACS APPLIED MATERIALS & INTERFACES   Vol. 11 ( 40 ) page： 37263 - 37269   2019.10

Gene Expression of Osteoblast-like Cells on Carbon-Nanowall as Scaffolds during Incubation with Electrical Stimulation Reviewed

Tomonori Ichikawa, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Hiromasa Tanaka, Makoto Sekine, Masaru Hori

ACS Applied Bio Materials   Vol. 2 ( 7 ) page： 2698 - 2702   2019.7

Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? Reviewed

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Applied Physics   Vol. 58   2019.6

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation Reviewed

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Applied Physics   Vol. 58   2019.6

Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development Reviewed

Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

Japanese Journal of Applied Physics   Vol. 58   2019.6

Facile synthesis of SnO2-graphene composites employing nonthermal plasma and SnO2 nanoparticles-dispersed ethanol Reviewed

Borude Ranjit R, Sugiura Hirotsugu, Ishikawa Kenji, Tsutsumi Takayoshi, Kondo Hiroki, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   Vol. 52 ( 17 )   2019.4

Effects of 3D structure on electrochemical oxygen reduction characteristics of Pt- nanoparticle-supported carbon nanowalls

Imai Shun, Naito Kenichi, Kondo Hiroki, Cho Hyung Jun, Ishikawa Kenji, Tsutsumi Takayoshi, Sekine Makoto, Hiramatsu Mineo, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   Vol. 52 ( 10 ) page： 105503 - 105503   2019.3

Real-time control of a wafer temperature for uniform plasma process

T. Tsutsumi, Y. Fuknaga, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

2018 International Symposium on Semiconductor Manufacturing     2019.2

Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass

Thi-Thuy-Nga Nguyen, Sasaki Minoru, Odaka Hidefumi, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru

JOURNAL OF APPLIED PHYSICS   Vol. 125 ( 6 ) page： 063304 - 063304   2019.2

Liquid dynamics in response to an impinging low-temperature plasma jet

Brubaker T. R, Ishikawa K, Kondo H, Tsutsumi T, Hashizume H, Tanaka H, Knecht S. D, Bilen S. G, Hori M

JOURNAL OF PHYSICS D-APPLIED PHYSICS   Vol. 52 ( 7 )   2019.2

Control of sp2-C cluster incorporation of amorphous carbon films grown by H-radical-injection CH4/H2 plasma-enhanced chemical vapor deposition Reviewed

Hirotsugu Sugiura, Lingyun Jia, Yasuyuki Ohashi, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Toshio Hayashi, Keigo Takeda, Makoto Sekine, Masaru Hori

Japanese Journal of Applied Physics   Vol. 58 ( 3 ) page： 030912   2019.2

Single-Step, Low-Temperature Simultaneous Formations and in Situ Binding of Tin Oxide Nanoparticles to Graphene Nanosheets by In-Liquid Plasma for Potential Applications in Gas Sensing and Lithium-Ion Batteries Reviewed

Ranjit R. Borude, Hirotsugu Sugiura, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Nobuyuki Ikarashi, Masaru Hori

ACS Appplied Nano Materials   Vol. 2 ( 2 ) page： 649-654   2019.2

Narrow free-standing features fabricated by top-down self-limited trimming of organic materials using precisely temperature-controlled plasma etching system

Fukunaga Yusuke, Tsutsumi Takayoshi, Kondo Hiroki, Ishikawa Kenji, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 58 ( 2 )   2019.2

Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma Reviewed

Borude Ranjit R., Sugiura Hirotsugu, Ishikawa Kenji, Tsutsumi Takayoshi, Kondo Hiroki, Han Jeon Geon, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 58 ( SA )   2019.2

Effect of electrical stimulation on proliferation and bone-formation by osteoblast-like cells cultured on carbon nanowalls scaffolds

Ichikawa Tomonori, Tanaka Suiki, Kondo Hiroki, Ishikawa Kenji, Tsutsumi Takayoshi, Sekine Makoto, Hori Masaru

APPLIED PHYSICS EXPRESS   Vol. 12 ( 2 )   2019.2

Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition Reviewed

H. Sugiura, H. Kondo, T. Tsutsumi, K. Ishikawa, M. Hori

C   Vol. 5 ( 1 ) page： 8   2019.1

Electrochemical Reaction in Hydrogen Peroxide and Structural Change of Platinum Nanoparticle-Supported Carbon Nanowalls Grown Using Plasma-Enhanced Chemical Vapor Deposition Reviewed

Masakazu Tomatsu , Mineo Hiramatsu, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori

C   Vol. 5 ( 1 ) page： 7   2019.1

Polyethylene terephthalate (PET) surface modification by VUV and neutral active species in remote oxygen or hydrogen plasmas Reviewed

Yan Zhang, Kenji Ishikawa, Miran Mozetič, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Masaru Hori

Plasma Processes and Polymers     2019.1

Pt nanoparticle-supported carbon nanowalls electrode with improved durability for fuel cell applications using C2F6/H-2 plasma-enhanced chemical vapor deposition

Imai Shun, Kondo Hiroki, Hyungjun Cho, Ishikawa Kenji, Tsutsumi Takayoshi, Sekine Makoto, Hiramatsu Mineo, Hori Masaru

APPLIED PHYSICS EXPRESS   Vol. 12 ( 1 )   2019.1

Reaction mechanisms between chlorine plasma and a spin-on-type polymer mask for high-temperature plasma etching Reviewed

Zhang Yan, Imamura Masato, Ishikawa Kenji, Tsutsumi Takayoshi, Kondo Hiroki, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 57 ( 10 )   2018.10

Temperature dependence on plasma-induced damage and chemical reactions in GaN etching processes using chlorine plasma Reviewed

Zecheng Liu, Kenji Ishikawa, Masato Imamura, Takayoshi Tsutsumi, Hiroki Kondo, Osamu Oda, Makoto Sekine, Masaru Hori

Japanese Journal of Applied Physics   Vol. 57 ( 6 )   2018.6

Effects of gas residence time of CH4/H2 on sp2 fraction of amorphous carbon films and dissociated methyl density during radical-injection plasma-enhanced chemical vapor deposition Reviewed

Hirotsugu Sugiura, Lingyun Jia, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Toshio Hayashi, Keigo Takeda, Makoto Sekine, Masaru Hori

Japanese Journal of Applied Physics   Vol. 57 ( 6 )   2018.6

Nanographene synthesis employing in-liquid plasmas with alcohols or hydrocarbons Reviewed

Atsushi Ando, Kenji Ishikawa, Hiroki Kondo, Takayoshi Tsutsumi, Keigo Takeda, Takayuki Ohta, Masafumi Ito, Mineo Hiramatsu, Makoto Sekine, Masaru Hori

Japanese Journal of Applied Physics   Vol. 57 ( 2 )   2018.2

Rapid growth of micron-sized graphene flakes using in-liquid plasma employing iron phthalocyanine-added ethanol Reviewed

Tomoki Amano, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Keigo Takeda, Mineo Hiramatsu, Makoto Sekine, Masaru Hori

Applied Physics Express   Vol. 11 ( 1 )   2018.1

Real-time control of a wafer temperature for uniform plasma process

Tsutsumi T., Fuknaga Y., Ishikawa K., Kondo H., Sekine M., Hori M.

2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM)     page： .   2018

Measurement of F-, O- and CF3- densities in 60 and 100 MHz asymmetric capacitively coupled plasma discharge produced in an Ar/O2/C4F8 gas mixture Reviewed

N. Sirse, T. Tsutsumi, M. Sekine, M. Hori, A. R. Ellingboe

Journal of Physics D: Applied Physics   Vol. 50 ( 33 ) page： 335205   2017.7

Temperature dependence of protection layer formation on organic trench sidewall in H2/N2 plasma etching with control of substrate temperature Reviewed

Y. Fukunaga, T. Tsutsumi, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Hori

Japanese Journal of Applied Physics   Vol. 56 ( 7 ) page： 076202   2017.6

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials Reviewed

T. Tsutsumi, A. Greb, A. R. Gibson, M. Hori, D. O'Connell, T. Gans

Journal of Applied Physics   Vol. 121 ( 14 ) page： 143301   2017.4

Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas Reviewed

T. Ueyama, Y. Fukunaga, T. Tsutsumi, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, M. Iwata, Y. Ohya, H. Sugai, M. Hori

Japanese Journal of Applied Physics   Vol. 56 ( 6S2 ) page： 06HC03   2017.3

Absolute density of precursor SiH₃ radicals and H atoms in H2-diluted SiH₄ gas plasma for deposition of microcrystalline silicon films Reviewed

Y. Abe, K. Ishikawa, K. Takeda, T. Tsutsumi, A. Fukushima, H. Kondo, M. Sekine, M. Hori

Applied Physics Letters   Vol. 110 ( 4 ) page： 043902   2017.1

Advanced Plasma Etching Processing: Atomic Layer Etching for Nanoscale Devices Reviewed

T. Tsutsumi, M. Zaitsu, A. Kobayashi, N. Kobayashi, M. Hori

PLASMA NANO SCIENCE AND TECHNOLOGY   Vol. 77 ( 3 ) page： 25 - 28   2017

Atomic layer etching of SiO₂ by alternating an O₂ plasma with fluorocarbon film deposition Reviewed

T. Tsutsumi, H. Kondo, M. Hori, M. Zaitsu, A. Kobayashi, T. Nozawa, N. Kobayashi

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films   Vol. 35 ( 1 ) page： 01A103   2016.11

The role of plasma chemistry on functional silicon nitride film properties deposited at low-temperature by mixing two frequency powers using PECVD Reviewed

B. B. Sahu, Y. Y. Yin, T. Tsutsumi, M. Hori, Jeon G. Han

Physical Chemistry Chemical Physics   Vol. 18 ( 18 ) page： 13033   2016.4

Control of Internal Plasma Parameters Toward Atomic Level Processing Reviewed

M. Sekine, T. Tsutsumi, Y. Fukunaga, K. Takeda, H. Kondo, K. Ishikawa, M. Hori

ECS Transactions   Vol. 75 ( 6 ) page： 21   2016

Real-time temperature-monitoring of Si substrate during plasma processing and its heat-flux analysis Reviewed

T. Tsutsumi, K. Ishikawa, K. Takeda, H. Kondo, T. Ohta, M. Ito, M. Sekine, M. Hori

Japanese Journal of Applied Physics   Vol. 55 ( 1S ) page： 01AB04   2015.11

Feedback Control System of Wafer Temperature for Advanced Plasma Processing and its Application to Organic Film Etching Reviewed

T. Tsutsumi, Y. Fukunaga, K. Ishikawa, K. Takeda, H. Kondo, T. Ohta, M. Ito, M. Sekine, M. Hori

IEEE Transactions on Semiconductor Manufacturing   Vol. 28 ( 4 ) page： 515   2015.8

Wavelength Dependence for Silicon-Wafer Temperature Measurement by Autocorrelation-type Frequency-Domain Low-Coherence Interferometry Reviewed

T. Tsutsumi, T. Ohta, K Takeda, M. Ito, M. Hori

Applied Optics   Vol. 54 ( 23 ) page： 7088   2015.8

Robust characteristics of semiconductor-substrate temperature-measurement method using auto-correlation type frequency-domain low-coherence interferometry Reviewed

T. Tsutsumi, T. Ohta, K. Ishikawa, K. Takeda, H. Kondo, M. Sekine, M. Hori, M. Ito

Japanese Journal of Applied Physics   Vol. 54 ( 1S ) page： 01AB03   2014.11

Rapid measurement of substrate temperatures by frequency-domain low-coherence interferometry Reviewed

T. Tsutsumi, T. Ohta, K. Ishikawa, K. Takeda, H. Kondo, M. Sekine, M. Hori, M. Ito

Applied Physics Letters   Vol. 103 ( 18 ) page： 182102   2013.10

In-situ observation of plasma-induced damage and radical adsorption for Atomic Layer Etching Invited

SPP-41  2024.1.25 

Control of etching profile by bias supply timing in cyclic process using C4F8/SF6 gas modulated plasma International conference

T. Yoshie, K. Ishikawa, T. Tsutsumi, M. Sekine, M. Hori

The 44th International Symposium on Dry Process (DPS2023)   2023.11.22 

Defect characterization at SiO2/Si interface throughout plasma processing and annealing International conference

S.Nunomura, T.Tsutsumi, I. Sakata and M Hori

The 44th International Symposium on Dry Process (DPS2023)   2023.11.22 

A pseudo-wet cryogenic plasma etching of SiO2 investigated with in-situ surface monitoring International conference

S-N Hsiao, M. Sekine, K. Ishikawa, T.Tsutsumi, and M. Hori Y Iijima, R. Suda, Y. Kihara

The 44th International Symposium on Dry Process (DPS2023)   2023.11.22 

Electron-Beam-Assisted Self-limiting fluorination of GaN surface using XeF2 for Atomic Layer Etching International conference

Y. Izumi, T. Tsutsumi, H Kondo, M. Sekine, M. Hori, K. Ishikawa

The 44th International Symposium on Dry Process (DPS2023)   2023.11.21 

Compositions of Ions Related with Electrode Materials in Pulsed Plasma for High-Aspect-Ratio Hole Etching International conference

K. Toji, T. Tsutsumi, S-N. Hsiao, M. Sekine, M. Hori, K. Ishikawa

The 44th International Symposium on Dry Process (DPS2023)   2023.11.21 

Etch selectivities of SiO2 and SiN against a-C films using CF4/H2 plasma at low temperature International conference

Y. Imai, S-N. Hsiao, M. Sekine, K. Ishikawa, T. Tsutsumi, M. Iwata, M. Tomura, Y. Iijima, K. Matsushima, M. Hori

The 44th International Symposium on Dry Process (DPS2023)   2023.11.21 

ドライエッチングと原子層エッチングの基礎と応用 Invited

堤 隆嘉

第34回 プラズマエレクトロニクス講習会  2023.11.17 

Etching Selectivities of SiO2 and SiN Against a-C Films Using CF4/H2 with a Pseudo-Wet Plasma Etching Mechanism International conference

Yusuke Imai, S. Hsiao, M. Sekine, T. Tsutsumi, K. Ishikawa, M. Iwata, M. Tamura, Y. Iijima, T. Gohira, K. Matsushima, Y. Ohya, M. Hori,

AVS 69th International Symposium and Exhibition (AVS 69)  2023.11.6 

Transient behavior of cycle process in Ar plasma with alternately injected C4F8 and SF6 International conference

T. Yoshie, K. Ishikawa, TTN Nguyen, S. Hsiao, T. Tsutsumi, M. Sekine, M. Hori

13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)  2023.11.8 

Plasma-based pseudo-wet mechanism for cryogenic SiO2 etching using hydrogen-contained fluorocarbon gases with an in-situ surface analysis International conference

S. Hsiao, M. Sekine, T. Tsutsumi, K. Ishikawa, M. Iwata, M. Tomura, Y. Iijima, T. Gohira, K. Matsushima, Y. Ohya, M. Hori

The 76th Annual Gaseous Electronics Conference (GEC76)  2023.10.11 

Plasma-Enhanced Deposition Mechanism of Hydrogenated Amorphous Carbon Analyzed ByCombining Reactive Species Measurement and Machine Learning Invited International conference

H. Kondo, T. Tsutsumi, K. Ishikawa, M. Sekine, H. Kousaka, M. Hori

244th ECS Meeting  2023.10.11 

Selective removal of graphene by irradiation of remote oxygen plasma International conference

L. Hu, K. Ishikawa, T. Tsutsumi, TTN Nguyen, S. Hsiao, H. Kondo, M. Sekine, M. Hori

Global Plasma Forum in Aomori  2023.10.16 

カーボンハードマスクのプラズマエッチング耐性に対する，成膜過程におけるイオン照射効果

安藤 悠介、近藤 博基、堤 隆嘉、石川 健治、関根 誠、堀 勝

第84回応用物理学会秋季学術講演会  2023.9.21 

CF4/H2プラズマによるSiO2,SiN,a-C膜の低温エッチング

今井 祐輔、蕭 世男、関根 誠、飯島 祐樹、須田 隆太郎、大矢 欣伸、木原 嘉英、堤 隆嘉、石川 健治、堀 勝

第84回応用物理学会秋季学術講演会  2023.9.22 

低温における絶縁膜の擬ウェットプラズマエッチング

蕭 世男、関根 誠、飯島 祐樹、須田 隆太郎、大矢 欣伸、木原 嘉英、堤 隆嘉、石川 健治、堀 勝

第84回応用物理学会秋季学術講演会  2023.9.22 

容量結合型パルスプラズマにおける負イオンの電極材料依存性

都地 一輝、堤 隆嘉、蕭 世男、関根 誠、石川 健治、堀 勝

第84回応用物理学会秋季学術講演会  2023.9.22 

プラズマ誘起欠陥の発生と修復 ～酸素プラズマがSiO2/Si界面に及ぼす影響～

布村 正太、堤 隆嘉、堀 勝

第84回応用物理学会秋季学術講演会  2023.9.21 

原子層エッチングにおけるプラズマ誘起欠陥へのラジカル吸着挙動

オソニオ アイラ ペラロ、堤 隆嘉、石川 健治、堀 勝

第84回応用物理学会秋季学術講演会  2023.9.21 

In-liquid plasma synthesis, morphological control, and functionalization of nanographene materials International conference

H. Kondo, T. Tsutsumi, M. Hiramatsu, M. Hori

THERMEC'2023  2023.7.3 

Plasma Synthesis of Graphene-Based Materials: Functionalization and Applications Invited International coauthorship International conference

H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, and M.Hori

THERMEC'2023  2023.7.3 

Recent Progress in the Synthesis of Functional and Three-Dimensional Carbon Nano-Composites By Gas-Liquid Interface Plasma International conference

H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, and M.Hori

243rd ECS Meeting 

A comparative study on the CF4/H2 and HF/H2 plasmas for etching of highly hydrogenated SiN films International conference

Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

25th International Symposium on Plasma Chemistry (ISPC25) 

Global and local contribution analysis of process parameters in Plasma enhanced chemical vapor deposition of amorphous carbon har International conference

Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

The 4th International Conference on Data Driven Plasma Sciences ( ICDDPS-4 ) 

熱酸化膜/シリコン界面でのプラズマ誘起欠陥の発生と修復

布村 正太、坂田 功、堤 隆嘉、堀 勝

第70回応用物理学会春季学術講演会 

成膜パラメータの寄与度解析に基づく、 水素化アモルファスカーボン薄膜のエッチ耐性の向上

安藤 悠介、近藤 博基、石川 健治、堤 隆嘉、関根 誠、堀 勝

第70回応用物理学会春季学術講演会 

Characterization of Plasmas and Polymerized Hydrofluorocarbon Films in Capacitively Coupled CF4/H2 Plasmas International conference

Yusuke Imai, Shih-Nan Hsiao, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Self-Limited Fluorination of Electron Beam-Irradiated GaN Surface International conference

Yusuke Izumi, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Contribution Analysis of Process Parameters in Plasma-Enhanced Chemical Vapor Deposition of Amorphous Carbon International conference

Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Positive and Negative Ion Behaviors in DC-Imposed Ar/SF6 Pulsed Plasma International conference

Kazuki Toji, Takayoshi Tsutsumi, Kenji Ishikawa, Shih-Nan Hsiao, Makoto Sekine and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Etching Behavior of Lamellar Poly(styrene-b-2-vinylpyridine) Block Copolymer under N2/H2 Plasma Process International conference

Ma. Shanlene Dela Vega, Ayane Kitahara, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Atsushi Takano, Yushu Matsushita and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Study on Plasma Process Using Adsorbed C7F14 as an Etchant International conference

Kohei Masuda, Makoto Sekine, Kenji Ishikawa, Shih-Nan Hsiao, Takayoshi Tsutsumi, Hiroki Kondo and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Morphological Effect of Carbon Nanowalls on Exosome Capture International conference

Takumi Hashimoto, Hiroki Kondo, Hiromasa Tanaka, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Takao Yasui, Yoshinobu Baba, Mineo Hiramatsu and Masaru Hori

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

MEMS Nozzle for Capturing Lily Pollen in Array and Fixing on Culture Media International conference

Sachiko Sugiyama, Gang Han, Takayoshi Tsutsumi, Hiromasa Tanaka and Minoru Sasaki

15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023） 

Plasma diagnostics and characteristics of hydrofluorocarbon films in capacitively coupled CF4/H2 plasmas International conference

Shih-Nan Hsiao, Yusuke Imai, Nicolay Britun, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

International Symposium on Semiconductor Manufacturing 2022 

Ion Induced Damage in Plasma Enhanced Atomic Layer Etching Processing International conference

Takayoshi TSUTSUMI, Hiroki KONDO, Kenji ISHIKAWA, Makoto SEKINE, Masaru HORI

Time-resolved measurement of ion energy distribution in pulsed Ar/SF6 plasma International conference

Kazuki TOJI, Kenji ISHIKAWA, Takayoshi TSUTSUMI, Shih nan HSIAO, Makoto SEKINE, Masaru HORI

Isotropic Plasma-enhanced Atomic Layer Etching of SiO2 using F radicals and Ar plasma International conference

A. Osonio, T. Tsutsumi, B. Mukherjee, R. Borude, N. Kobayashi, and M. Hori

The 43rd International Symposium on Dry Process (DPS2022) 

Synthesis, Functionalization, and Three-Dimensional Structuring of Carbon Nanomaterials By Gas-Liquid Interface Plasma Invited International conference

H. Kondo, T. Tsutsumi, K. Ishikawa, M. Sekine, and M. Hori

242nd ECS Meeting 

Achieving selective etching of SiN and SiO2 over amorphous carbon during CF4/H2 by controlling substrate temperature International conference

Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022)  

Langmuir probe and Laser Photodetachment Study of Afterglow Phase in Dual RF Frequency Pulsed Plasma Etching Processes Operated with Synchronized DC Bias International conference

Makoto Sekine, Bibhuti B Sahu, Shogo Hattori, Takayoshi Tsutsumi, Nikolay Britun, Kenji Ishikawa, Hirohiko Tanaka, Taku Gohira, Noriyasu Ohno, Masaru Hori

11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022)  

Topographically-selective atomic layer etching of SiO2 using fluorine-containing plasma International conference

Airah Osonio, Takayoshi Tsutsumi, Bablu Mukherjee, Ranjit Borude, Nobuyoshi Kobayashi, and Masaru Hori

11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022)  

Development of an experimental system for cell viability assays of yeasts using gas-temperature controllable plasma jets International conference

Shinji Yoshimura, Yoko Otsubo, Akira Yamashita, Katsuki Johzuka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

11th International Conference on Reactive Plasmas/2022 Gaseous Electronics Conference (ICRP-11/GEC2022)  

水素化アモルファスカーボン薄膜の合成機構における活 性種の寄与度の機械学習を用いた解析

近藤 博基, 黒川 純平, 堤 隆嘉, 関根 誠, 石川 健治, 堀 勝

2022年　第83回　応用物理学会　秋季学術講演 

イオン照射角制御によるカーボンナノウォールの配向成長

射場 信太朗, 近藤 博基, 石川 健治, 堤 隆嘉, 平松 美根男, 関根 誠, 堀 勝

2022年　第83回　応用物理学会　秋季学術講演 

Machine learning and contribution analysis of radicals to the properties of hydrogenated amorphous carbon films grown by a plasma-enhanced chemical vapor deposition International conference

Hiroki Kondo, Jumpei Kurokawa, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori

THE 22ND INTERNATIONAL VACUUM CONGRESS IVC-22 

In situ monitoring hydrogen fluoride molecular density and its effects on etch selectivity of SiN over SiO2 films with hydrogen-contained fluorocarbon down-flow plasmas International conference

Shih-Nan Hsiao, Nicolay Britun, Thi-Thuy-Naga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

THE 22ND INTERNATIONAL VACUUM CONGRESS IVC-22 

Nanostructure Control and Modification of Poly(styrene-b-2-vinylpyridine) Block Copolymer in H2/N2 Plasma Process Invited International conference

Ma. shanlene Dela Cruz DELA VEGA, Ayane KITAHARA, Thi-thuy-nga NGUYEN, Takayoshi TSUTSUMI, Atsushi TAKANO, Yushu MATSUSHITA, Masaru HORI

The 5th International Union of Materials Research Societies International Conference of Young Researchers on Advanced Materials (IUMRS-ICYRAM2022) 

Interfacial reaction of gas-liquid plasma in the synthesis of functional carbon nanomaterials Invited International conference

Hiroki KONDO, Takayoshi TSUTSUMI, Kenji ISHIKAWA, Masaru HORI

The 5th International Union of Materials Research Societies International Conference of Young Researchers on Advanced Materials (IUMRS-ICYRAM2022) 

Study of etching process using CHF3 gas condensed layer in cryogenic region International conference

Kuangda Sun, Chieh-Ju Liao, Shih-Nan Hsiao, Makoto Sekine, Toshiyuki Sasaki, Chihiro Abe, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

1st International Workshop on Plasma Cryo Etching Processes（PlaCEP2022） 

Transient Behaviors of Gaseous and Surface Reactions in a Cycle of Pasivation and Etch Steps Using Ar-Based C4F8 and SF6 Plasma International conference

Kenji Ishikawa, Taito Yoshie, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Masaru Hori

MRS Spring Meetings & Exhibits 

C4F8/SF6ガス変調サイクルにおいてバイアス印加位相がエッチング形状に及ぼす影響

吉江 泰斗、堤 隆嘉、石川 健治、近藤 博基、関根 誠、堀 勝

第69回応用物理学会春季学術講演会 

窒化ガリウムの基板昇温時サイクルエッチング特性

南 吏玖、中村 昭平、谷出 敦、石川 健治、堤 隆嘉、近藤 博基、関根 誠、堀 勝

第69回応用物理学会春季学術講演会 

プラズマ励起化学気相堆積法におけるカーボンナノウォールの配向成長に対するイオン照射角度の効果

射場 信太朗、近藤 博基、石川 健治、堤 隆嘉、平松 美根男、関根 誠、堀 勝

第69回応用物理学会春季学術講演会 

高効率エクソソーム解析に向けたカーボンナノウォールテンプレートの 表面電位制御

橋本 拓海、近藤 博基、田中 宏昌、石川 健治、堤 隆嘉、関根 誠、安井 隆雄、馬場 嘉信、平松 美根男、堀 勝

第69回応用物理学会春季学術講演会 

ラジカル注入型プラズマ励起化学気相堆積法で成長したカーボンナノウォールの3次元構造解析

近藤 博基、尾崎 敦士、堤 隆嘉、関根 誠、石川 健治、堀 勝、平松 美根男

第69回応用物理学会春季学術講演会 

C3H6 / H2プラズマを用いた水素化アモルファスカーボン成膜における成膜前駆体と膜特性の相関関係

黒川 純平、光成 正、近藤 博基、堤 隆嘉、関根 誠、石川 健治、堀 勝

第69回応用物理学会春季学術講演会 

In-Liquid Plasma Coating of Graphite Films on Metal Surface Immersed in Ethanol International conference

Ma. Shanlene D.C. Dela Vega, Hiroki Kondo, Takayoshi Tsutsumi, Thi-Thuy-Nga Nguyen, Kenji Ishikawa, Makoto Sekine, Magdaleno R. Vasquez Jr., and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Manipulation of etch selectivity of silicon nitride over silicon dioxide by controlling substrate temperature with a CF4/H2 plasma International conference

Shih-Nan Hsiao, Nicolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Feature profiles in cyclic etch using C4F8 and SF6 gas-modulated plasma International conference

Taito Yoshie, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Correlation analysis between radicals in gas phase and etch resistance of hydrogenated amorphous carbon film International conference

Jumpei Kurokawa, Tadashi Mitsunari, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Kenji Ishikawa, and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Effect of Air Introduction between Electrodes on Rapid Removal Process of Polymer Contamination on Floor by Atmospheric Pressure Plasma International conference

Yoshihiro Sakamoto, Takayoshi Tsutsumi, and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Simple external filter and tuning for operation in dual radio frequency plasmas using compensated Langmuir probe International conference

B. B. Sahu, M. Sekine, T. Tsutsumi, K. Ishikawa, H. Shogo, H. Tanaka, N. Ohno, and M. Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Effect of Substrate Temperature on Morphology of Carbon Nanowalls Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition Using C2F6 /H2 Mixture Gas International conference

Takumi Hashimoto, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Spectroscopy of H2/CH4/N2 Plasma for Carbon Nanowalls Growth International conference

Dennis Christy, Takayoshi Tsutsumi, Ngo Van Nong, Osamu Oda, Masaru Hori and Nikolay Britun

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Three-Dimensional Morphological Analysis of Carbon Nanowalls International conference

Hiroki Kondo, Atsushi Ozaki, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Uroš Cvelbar and Mineo Hiramatsu

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

Effect of RF Stage-Bias on Morphology of Carbon Nanowalls Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition International conference

Shintaro Iba, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori

14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma Nanotechnology and Science 

真空紫外原子吸光分光法による大気圧マイクロ波Ar/O2プラズマのO原子密度計測

岩田悠揮、小笠原知裕、鈴木陽香、堤隆嘉、堀勝、豊田浩孝

C2F6/H2混合ガスを用いてラジカル注入型プラズマ励起化学気相堆積法により成長されたカーボンナノウォールのモフォロジー制御

橋本拓海、近藤博基、石川健治、堤隆嘉、関根誠、平松美根男、堀勝

液中プラズマプロセスを用いたメタノール内金属基板上へのナノグラフェンの成膜

デラヴェガマリアシャンリン、近藤博基、堤隆嘉、グエン ティ・トゥイーンガ、石川健治、関根誠、ヴァスケズマグダレノジュニア、堀勝

カーボンナノウォールの形態と高さが光透過率に及ぼす影響

射場 信太朗、近藤 博基、石川 健治、関根 誠、堤 隆嘉、平松 美根男、堀 勝

Optical transmission of carbon nanowalls from ultra-violet region to infra-red region International conference

S. Iba, H. Kondo, K. Ishikawa, T. Tsutsumi, M. Sekine, M. Hiramatsu, and M. Hori

Material Research Meeting (MRM2021) 

Three-dimensional structural analysis of carbon nanowalls synthesized by a radical-injection plasma-enhanced chemical vapor deposition system International conference

Hiroki Kondo, Atsushi Ozaki, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Uroš Cvelbar, Mineo Hiramatsu

Material Research Meeting (MRM2021) 

Spatial Distribution Measurement of Atomic Oxygen from Atmospheric-Pressure Microwave Line Plasma by Atomic Absorption Spectroscopy International conference

Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori and Hirotaka Toyoda

12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12) 

Comparison of CF4/H2 and HF/H2 Plasmas for Etching of PECVD-Prepared SiN Films International conference

Shih-Nan Hsiao, Nicolay Britun, Thi-Thuy-Nga Nga, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12) 

Behavior of Hydrogen Atom in Atmospheric Pressure Micro-Hollow Cathode Discharge International conference

Keigo Takeda, Takayoshi Tsutsumi, Mineo Hiramatsu, Masaru Hori

12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12) 

Random forest model for property control of plasma International conference

J. Kurokawa, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori

The 42nd International Symposium on Dry Process (DPS2021) 

Selective plasma-enhanced atomic layer etching of SiO using a silane coupling agent International conference

A. Osonio, T. Tsutsumi, B. Mukherjee, R. Borude, N. Kobayashi, M. Hori

The 42nd International Symposium on Dry Process (DPS2021) 

Transient effects in cyclic processes on fabrications of high-aspect-ratio trenches International conference

T. Yoshie, T. Tsutsumi, K. Ishikawa, M. Hori

The 42nd International Symposium on Dry Process (DPS2021) 

Control of Interface Layers for Selective Atomic Layer Etching Invited International conference

Takayoshi Tsutsumi, R. Vervuurt, N. Kobayashi, and Masaru Hori

67th AVS International Symposium and Exhibitio 

Ar/C4F8/SF6を用いたガス変調サイクルプロセスにおける活性種の挙動2

吉江 泰斗、堤 隆嘉、石川 健治、堀 勝

第82回　応用物理学会秋季学術講演会 

原子層エッチングの反応素過程とその設計、制御

石川 健治、Nguyen Thi-Thuy-Nga、堤 隆嘉、蕭 世男、近藤 博基、関根 誠、堀 勝

第82回　応用物理学会秋季学術講演会 

螺旋状窒素プラズマ中の窒素原子密度計測

西尾 亮佑、梶田 信、大野 哲靖、田中 宏彦、浅岡 晃次、堤 隆嘉、堀 勝

第82回　応用物理学会秋季学術講演会 

C3H6 / H2プラズマを用いたアモルファスカーボン成膜において水素ガス流量比が膜特性に与える影響

黒川 純平、光成 正、堤 隆嘉、近藤 博基、関根 誠、石川 健治、堀 勝

第82回　応用物理学会秋季学術講演会 

プラズマ誘起欠陥の発生と修復 ～モバイル水素の役割と考察～

布村 正太、坂田 功、堤 隆嘉、堀 勝

第82回　応用物理学会秋季学術講演会 

窒化ガリウムのプラズマエッチング中その場分光エリプソメトリー観測

南 吏玖、石川 健治、堤 隆嘉、近藤 博基、関根 誠、小田 修、堀 勝

第82回　応用物理学会秋季学術講演会 

カーボンナノウォールの光透過率に対する壁密度および高さの効果

射場 信太朗、近藤 博基、石川 健治、堤 隆嘉、平松 美根男、関根 誠、堀 勝

第82回　応用物理学会秋季学術講演会 

Development of the nanocarbon coating process on metal surfaces via in-liquid plasma International conference

Ma. Shanlene D.C. Dela Vega, Hiroki Kondo, Takayoshi Tsutsumi, Thi-Thuy-Nga Nguyen, Kenji Ishikawa, Makoto Sekine, Masaru Hori

Interfinish 2020 World Congress 

Application of Atmospheric Pressure Plasma to Rapid Dry Etching of Polymer Contamination on Floor International conference

Y Sakamoto, T Tsutsumi, M Hori

Interfinish 2020 World Congress 

Numerical analysis of effects of applying voltage polarity on atmospheric pressure argon streamer discharge under pin-to-plane electrode geometry International conference

Y. Sato, K. Ishikawa, T. Tsutsumi, A. Ui, M. Akita, S. Oka and M. Hori

47th Conference on Plasma Physics 

塩素吸着による窒化ガリウム原子層エッチングの表面反応の理想と現実

堤 隆嘉, 長谷川 将希, 中村 昭平, 谷出 敦，近藤 博基, 関根 誠, 石川 健治, 堀 勝

第227回　シリコンテクノロジー分科会　研究集会  2021.3.25 

液中プラズマを用いたナノグラフェン合成における活性種の効果[II]

近藤 博基、濱地 遼、堤 隆嘉、石川 健治、関根 誠、堀 勝

第68回応⽤物理学会春季学術講演会 

塩素吸着を用いた窒化ガリウムの原子層エッチングプロセス特性のArイオンエネルギー依存性

堤 隆嘉、長谷川 将希、中村 昭平、谷出 敦、近藤 博基、関根 誠、石川 健治、堀 勝

2021年第68回応⽤物理学会春季学術講演会 

リモート酸素ラジカルによるグラフェンのエッチング反応の分析

胡 留剛、堤 隆嘉、蕭 世男、近藤 博基、石川 健治、関根 誠、堀 勝

2021年第68回応⽤物理学会春季学術講演会 

マイクロ放電ホローカソードプラズマを用いた真空紫外吸収分光用自己吸収光源の分光診断

竹田 圭吾、堤 隆嘉、平松 美根男、堀 勝

2021年第68回応⽤物理学会春季学術講演会 

Ar/C4F8/SF6を用いたガス変調サイクルプロセスにおける活性種の挙動

吉江 泰斗、三好 康史、堤 隆嘉、釘宮 克尚、石川 健治、堀 勝

2021年第68回応⽤物理学会春季学術講演会 

プラズマ誘起欠陥の発生と修復 ～少数キャリアライフタイムによる定量評価～

布村 正太、坂田 功、堤 隆嘉、堀 勝

2021年第68回応⽤物理学会春季学術講演会 

Design of removal process of SnO2 on glass by H2/Ar plasma at atmospheric pressure and medium pressure International conference

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.9 

Crystalline structures and local electrical conductivity at crossing points of carbon nanowalls International conference

Atsushi Ozaki, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Ion-attachment mass spectrometric analysis of odorous gas decomposition by atmospheric pressure plasma International conference

Tatsuyuki Moriyama, Yosuke Sato, Akio Ui, Shotaro Oka,Kenji Ishikawa, Takayoshi Tsutsumi and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Initial growth kinetics of hydrogenated amorphous carbon films observed by real-time ellipsometry International conference

Jumpei Kurokawa, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi,Makoto Sekine and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Quantitative analyses of graphene layer etching using oxygen radicals generated in remote plasma for realization of atomic layer etching International conference

Liugang Hu, Takayoshi Tsutsumi, Thi-Thuy-Nga Nguyen, Shih-Nan Hsiao, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Pressure and flow rate dependence of active species in gas modulation cycle process using Ar/C4F8/SF6 International conference

Taito Yoshie, Takayoshi Tsutsumi, Kenji Ishikawa, and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Measurements of negative ion density and plasma parameters in Ar/O2/C4F8 etching plasmas by Langmuir probe-assisted laser photodetachment International conference

B. B. Sahu, S.Hattori, T. Tsutsumi, N. Britun, M. Sekine, K. Ishikawa, H. Tanaka,T. Gohira, Y. Ohya, N. Ohno and M. Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Study of etching process using gas condensed layer at cryogenic temperature 2. Evaluation of cycle etching using gas condensed layer International conference

M. Hazumi, S. Selvaraj, S. N. Hsiao, C. Abe, T. Sasaki, H. Hayashi, T. Tsutsumi, K. Ishikawa, M. Sekine and M. Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Dependence of nitrogen concentrations on cytotoxicity of air-free Ar-N2 mixed atmospheric pressure plasma-activeted lactated solutions International conference

Daiki Ito, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Study of etching process using gas condensed layer at cryogenic temperature 1. Evaluation of CHF3 condensed layer thickness on SiO2 surface International conference

S. Selvaraj, M. Hazumi, S. N. Hsiao, C. Abe, T. Sasaki, H. Hayashi, T. Tsutsumi, K. Ishikawa, M. Sekine, and M. Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Effects on substrate temperature on the etching behaviors of PECVD- and LPCVD-prepared SiN thin films with CF4/H2 plasmas International conference

Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Microwave Nitrogen Plasma Jets under the Moderate Gas Pressure Region International conference

Jaeho Kim, Keigo Takeda, Hirotomo Itagaki, Xue-lun Wang, Shingo Hirose, Hisato Ogiso, Tetsuji Shimizu, Naoto Kumagai, Takayoshi Tsutsumi, Hiroki Kondo, Masaru Hori and Hajime Sakakita

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Comparison of Nitrogen Atom Densities Measured with VUVAS and Actinometry in Spiral Shape Plasma International conference

Ryosuke Nishio, Noriyasu Ohno, Shin Kajita, Hirohiko Tanaka, Koji Asaoka, Takayoshi Tsutsumi and Masaru Hori

13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science （ISPlasma2021/IC-PLANTS2021）  2021.3.8 

Etching characteristics of PECVD prepared SiN films with CF4/H2 and CF4/D2 plasmas at different substrate temperatures International conference

Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

International Symposium on Semiconductor Manufacturing 2020 (ISSM2020)  2020.12.15 

Antitumor effect of plasma-activated Ringer’s acetate solution International conference

Yuki SudaU, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Masaru Hori

2020.12.10 

Nitrogen Atom Density Measurements from Vacuum Ultraviolet Absorption Spectroscopy and Actinometry in Spiral Shape Plasma International conference

Ryosuke Nishio, Noriyasu Ohno, Shin Kajita, Hirohiko Tanaka, Koji Asaoka, Takayoshi Tsutsumi and Masaru Hori

The 29th International Toki Conference on Plasma and Fusion Research  2020.10.28 

Time resolved measurements of electron density and temperature by an electrostatic probe with conditional averaging method in pulsed capacitively coupled plasmas International conference

S. Hattori, B. B. Sahu, H. Tanaka, T. Tsutsumi, S. Kajita, M. Sekine, M. Hori, N. Ohno

The 29th International Toki Conference on Plasma and Fusion Research  2020.10.28 

Interactions of floating-wire-assisted atmospheric-pressure H2/Ar plasma with SnO2 film on glass substrate forming spherical Sn particles International conference

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

73th Annual Gaseous Electronics Virtual Conference  2020.10.8 

Penetration of hydrogen atoms and termination of dangling bonds in amorphous carbon films International conference

Hiroki Kondo, Yasuyuki Ohashi, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

73th Annual Gaseous Electronics Virtual Conference  2020.10.9 

カーボンナノウォールの局所電気伝導特性の解明

尾崎 敦士、近藤 博基、石川 健治、堤 隆嘉、平松 美根男、関根 誠、堀 勝

第81回応用物理学会秋季学術講演会 

液中プラズマを用いたナノグラフェン合成における活性種の効果

近藤 博基、濱地 遼、堤 隆嘉、石川 健治、関根 誠、堀 勝

第81回応用物理学会秋季学術講演会 

Analysis of Ion Energy Dependence of Depth Profile of GaN by In-situ Surface Analysis International conference

Masaki Hasagawa‚ Takayoshi Tsutsumi, Atsushi Tanide‚ Shohei Nakamura, Hiroki Kondo‚ Kenji Ishikawa‚ Masaru Hori

20th International Conference on Atomic Layer Deposition  2020.6.29 

プラズマプロセス中の基板温度分布の経時変化の解析

堤 隆嘉、石川 健治、近藤 博基、関根 誠、堀 勝

2020年第67回応用物理学会春季学術講演会 

Arイオン照射窒化ガリウム表面の塩素吸着層のイオンエネルギー依存性 (2)

長谷川 将希、堤 隆嘉、谷出 敦、近藤 博基、関根 誠、石川 健治、堀 勝

2020年第67回応用物理学会春季学術講演会 

液中プラズマを用いたナノグラフェン合成における照射時間依存性 [II]

近藤 博基、濱地 遼、 堤 隆嘉,、石川 健治、関根 誠、堀 勝

2020年第67回応用物理学会春季学術講演会 

液中プラズマを用いたナノグラフェン合成における照射時間依存性[Ⅰ]

濱地 遼、近藤 博基、堤 隆嘉、石川 健治、関根 誠、堀 勝

2020年第67回応用物理学会春季学術講演会 

プラズマ誘起欠陥の発生と修復 ～Arイオン照射の効果～

布村 正太、中根 一也、堤 隆嘉、松原 浩司、堀 勝

2020年第67回応用物理学会春季学術講演会 

極低温領域におけるCHF3ガス凝縮層を用いたエッチングプロセスの研究

羽澄 匡広, スガンサマラー セルヴァラジ, 蕭 世男, 関根 誠, 林 久貴, 佐々木 俊行, 阿部 知央, 堤 隆嘉, 石川 健治, 堀 勝

2020年第67回応用物理学会春季学術講演会 

プラズマ表面処理が自己集積化膜の分子配向に及ぼす影響

織田 祥成、堤 隆嘉、石川 健治、堀 勝

2020年第67回応用物理学会春季学術講演会 

Termination of Dangling Bonds in Amorphous Carbon Films by Hydrogen Atoms International conference

Yasuyuki Ohashi, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Formation of Spherical Sn Particles from SnO2 Film by Atmospheric-Pressure Plasma International conference

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Etching Process Using CHF3 Gas Condensed Layer in Cryogenic Region International conference

Masahiro Hazumi, Suganthamalar Selvaraj, Shih-Nan Hsiao, Chihiro Abe, Toshiyuki Sasaki, Hisataka Hayashi, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Influence of Temperature on Etch Rate of SiN Films with CF4/H2 Plasma International conference

Shin-Nan Hsiao, Kazuya Nakane, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Measurement of Spatial Distribution of Absolute Hydrogen Radical Density in Non Equilibrium Atmospheric Pressure Plasma by Vacuum Ultraviolet Absorption Spectroscopy International conference

Kaede Katsuno, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Hiroki Kondo, Makoto Sekine and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Self-Absorbing Effect of Micro-Discharge Hollow Cathode Plasma as Light Source for Vacuum Ultraviolet Absorption Spectroscopy International conference

Sho Shimizu, Keigo Takeda, Takayoshi Tsutsumi, Mineo Hiramatsu and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Generation of Repulsing Glow Discharge in Centimeter Order Air Gaps International conference

Vladislav Gamaleev, Takayoshi Tsutsumi and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

In-Liquid Plasma Synthesis of Iron-Nitrogen-Doped Carbon Nanoflakes with Highly Catalytic Activity International conference

Ryo Hamaji, Tomoki Amano, Hiroki Kondo, Takayoshi Tsutsumi, 1Kenji Ishikawa, Makoto Sekine, Keigo Takeda, Mineo Hiramatsu and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Fluctuation of Local Electrical Conductivity in Carbon Nanowalls Observed by Conductive Atomic Force Microscopy International conference

Atsushi Ozaki, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science (ISPlasma2020/IC-PLANTS2020) 

Analysis and Control of Surface Reaction in Plasma Enhanced Atomic Layer Etching Processes Invited International conference

Takayoshi Tsutsumi

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020 4th International Symposium on Energy Research and Application 

In-plane distribution of electrical conductivity of carbon nanowalls perpendicular to substrate measured by conductive atomic force microscopy International conference

Atsushi Ozaki, Hiroki Kondo, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori, Mineo Hiramatsu

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020 4th International Symposium on Energy Research and Application 

Improvement of wool surface charging properties by plasma surface modification process International conference

T. Moriyama, T. Tsutsumi, H. Kondo, M. Sekine, K. Ishikawa, and M. Hori

7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020 4th International Symposium on Energy Research and Application 

Nano-scale pattern formation of organic material with precisely wafer-temperature-controlled plasma etch system International conference

Yusuke Fukunaga, Makoto Sekine, Takayoshi Tsutsumi, Hiroki Kondo, Kenji Ishikawa, and Masaru Hori

The 11th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-11)  

Synthesis and crystallinity of nanographene using in-liquid plasma of ethanol International conference

Ryo Hamaji, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Keigo Takeda, Mineo Hiramatsu, and Masaru Hori

MATERIALS RESEARCH MEETING 2019 

Modification of lipid metabolism in Coccomyxa sp. treated by non-equilibrium atmosphere pressure plasma International conference

Takumi Kato, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, and Masaru Hori

MATERIALS RESEARCH MEETING 2019 

Changes of resistive elements during degradation of carbon nanowalls electrodes for fuel cell synthesized employing a CH4/H2 mixture gas plasma Invited International conference

Hiroki Kondo, Shun Imai, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Mineo Hiramatsu, and Masaru Hori

MATERIALS RESEARCH MEETING 2019 

Atomic hydrogen exposures of radical-injection CH4/H2 plasma-enhanced chemical vapor deposited amorphous carbon films International conference

Yasuyuki Ohashi, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori

MATERIALS RESEARCH MEETING 2019 

In-situ analyses of GaN surfaces irradiated by a Cl2 plasma for atomic layer etching Invited

Masaki Hasegawa, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Hiroki Kondo, Atsushi Tanide, and Masaru Hori

第16回　赤﨑記念研究センターシンポジウム 第21回　CIRFEセミナー「窒化物半導体研究の新展開：新規デバイスの創出をめざして」 

Surface functionalization of wool fabrics using plasma process International conference

T. Moriyama, T. Tsutsumi, H. Kondo, M. Sekine, K. Ishikawa, and M. Hori

29th Annual Meeting of MRS-Japan 2019  

Electrical, optical, and physicochemical behaviors of atmospheric pressure plasma jet generated in open air Invited International conference

Keigo Takeda, Kenji Ishikawa, Takayuki Tsutsumi, Hiroki Kondo, Makoto Sekine, Masaru Hori

3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2019) 

Time-resolved diagnosis of afterglow phase in synchro-bias of negative direct current on pulsed plasmas International conference

K. Nakane, T. Tsutsumi, S.-N. Hsiao, K. Ishikawa, M. Sekine, T. Gohira, Y. Ohya, M. Hori

The 41st International Symposium on Dry Process (DPS2019) 

ALE of SiC by Plasma Modification and F-radical Etching Studied by in-situ Surface Spectroscopy International conference

R. H. J. Vervuurt, K. Nakane, T. Tsutsumi, M. Hori, N. Kobayashi

The 41st International Symposium on Dry Process (DPS2019) 

Etching characteristics of silicon nitride film in plasma of fluoroethane (CH2FCHF2), Ar, and O2 mixture International conference

J. Ni, S.-N. Hsiao, T. Hayashi, K. Ishikawa, T. Tsutsumi, M. Sekine, M. Hori

The 41st International Symposium on Dry Process (DPS2019) 

Suppression of etch pit formation in GaN etching using H2-added Cl2 plasma at 400°C International conference

T. Omichi, A. Tanide, K. Ishikawa, T. Tsutsumi, H. Kondo, M. Sekine, M. Hor

The 41st International Symposium on Dry Process (DPS2019) 

Effects of functional groups in raw material molecules on synthesis rate and structures of nanographene materials synthesized by in-liquid plasma using alcohols International conference

H. Kondo, A. Ando, T. Tsutsumi, K. Takeda, T. Ohta, K. Ishikawa, M. Sekine, M. Ito, M. Hiramatsu, M. Hori

The 41st International Symposium on Dry Process (DPS2019) 

Plasma Processing with Feedback Control of Wafer Temperature By Non-Contact Temperature Measurement System Invited International conference

T. Tsutsumi, H. Kondo, K. Ishikawa , K. Takeda, T. Ohta, M. Sekine, M. Ito, and M. Hori

236th ECS meeting 

High-aspect-ratio organic-pattern formation with self-limiting manner by controlling plasma process based on substrate temperature measurement. International conference

Makoto Sekine,Yusuke Fukunaga,Takayoshi Tsutsumi,Kenji Ishikawa,Hiroki Kondo,Masaru Hori

The 72nd Annual Gaseous Electronics Conference 

Effect of mixing alcohol source on synthesis of nanographene by in-liquid plasma International conference

Hiroki Kondo, Atsushi Ando, Takayoshi Tsutsumi, Keigo Takeda, Takayuki Ohta, Kenji Ishikawa, Makoto Sekine, Masafumi Ito, Mineo Hiramatsu, Masaru Hori

The 72nd Annual Gaseous Electronics Conference 

Mechanism of Aqueous Reactions in Non-equilibrium Atmospheric Pressure Plasma-activated Lactec Solutions

Yang Liu、Kenji Ishikawa、Hiroshi Hashizumi、Hiromasa Tanaka、Takayoshi Tsutsumi、Hiroki Kondo、Makoto Sekine、Masaru Hori

2019年　第80回応用物理学会秋季学術講演会 

非平衡大気圧Ar プラズマ源における放電形状の経時変化および水素ラジカル密度空間分布計測

勝野 楓、堤 隆嘉、石川 健治、竹田 圭吾、橋爪 博司、田中 宏昌、近藤 博基、関根 誠、堀 勝

2019年　第80回応用物理学会秋季学術講演会 

SiNx の ALE におけるフッ素ラジカルの In-situ エッチング反応解析

中根 一也、ルネイ　ヘリンカス　ヨセフ フェーフィート、堤 隆嘉、小林 伸好、堀 勝

2019年　第80回応用物理学会秋季学術講演会 

Composition of ion species in pulsed dual frequency CCP with synchronized dc bias using fluorocarbon gases International conference

Kazuya Nakane, Shin-Nan Hsiao , Takayoshi Tsutsumi, Taku Gohira, Kenji Ishikawa, Makoto Sekin, Yoshinobu Ohya and Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

Intracellular responses of Coccomyxa sp. during culture in plasma-treated nutrient solution International conference

Takumi Kato, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, and Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

H2-added Cl2 plasma etching of GaN at high temperature International conference

Takahiro Omichi, Atsushi Tanide, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, and Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

Intracellular response of HeLa cells treated by plasma- activated Ringer's lactate solution International conference

Shogo Maeda, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Fumitaka Kikkawa, Masaaki Mizuno and Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

In situ surface analysis of Ga dangling sites and chlorination layers for determining atomic layer etching properties of GaN International conference

Masaki Hasegawa, Takayoshi Tsutsumi, Atsushi Tanide, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

Disordering in crystallinity induced by intermediates in synthesis of nanographene using in-liquid plasma International conference

Ryo Hamaji, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Keigo Takeda, Mineo Hiramatsu, and Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

Hydrogen atom exposure for termination of dangling bonds in amorphous carbon films International conference

Yasuyuki Ohashi, Hirotsugu Sugiura, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

Vacuum Ultraviolet Absorption Spectroscopy with Self-absorbing Micro-discharge Hollow Cathode Lamp International conference

S. Shimizu, N. Kishi, K. Takeda, T. Tsutsumi, M. Hiramatsu, and M. Hori

The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2019) 

In-liquid plasma synthesis of iron-nitrogen-doped carbon nanosheets with highly electro- catalytic activity for fuel cell application International conference

R. Hamaji, T. Amano, H. Kondo, T. Tsutsumi, K. Ishikawa, M. Sekine, K. Takeda, M. Hiramatsu, M. Hori

International Conference on Solid State Devices and Materials 2019 

Highly-durable carbon nanowalls electrodes for fuel cell synthesized employing a C2F6/H2 mixture gas plasma International conference

H. Kondo, S. Imai, T. Tsutsumi, K. Ishikawa, M.Sekine, M. Hiramatsu, M.Hori

International Conference on Solid State Devices and Materials 2019 

自己吸収型マイクロ放電ホローカソード光源を用いた水素プラズマの真空紫外吸収分光計測

清水 奨、竹田 圭吾、堤 隆嘉、平松 美根男、堀 勝

2019年　第80回応用物理学会秋季学術講演会 

Arイオン照射窒化ガリウム表面の塩素吸着層のイオンエネルギー依存性

長谷川 将希、堤 隆嘉、近藤 博基、関根 誠、石川 健治、堀 勝

2019年　第80回応用物理学会秋季学術講演会 

Selectivity during Plasma ALE of Si-Compounds: Reaction Mechanism Studied by in-situ Surface Spectroscopy International conference

René Vervuurt, Kazuya Nakane, Takayoshi Tsutsumi, Masaru Hori, Nobuyoshi Kobayashi

AVS 19th International Conference on Atomic Layer Deposition (ALD 2019)/6th International Atomic Layer Etching Workshop (ALE 2019) 

Electrical conductivity for vertical direction of radical injection plasma enhanced chemical vapor deposited carbon nanowalls (RI-PECVD-CNW) International conference

Atsushi Ozaki, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori

XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG)/10th International Conference on Reactive Plasmas(ICRP-10) 

Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition International conference

Hitotsugu Sugiura, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG)/10th International Conference on Reactive Plasmas(ICRP-10) 

Effects of fluorine introduction and termination of CNWs on their electrochemical reactions International conference

Hiroki Kondo, Masakazu Tomatsu, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Mineo Hiramatsu

XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG)/10th International Conference on Reactive Plasmas(ICRP-10) 

Electron loss process in afterglow of pulsed magnetic neutral loop discharge using Ar/O2/ CF4 or C4F8 International conference

X. Xie, J. Ni, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori

XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG)/10th International Conference on Reactive Plasmas(ICRP-10) 

Control of the Interface Layer in ALE Process by Alternating O2 Plasma with Fluorocarbon Deposition for High Selectivity Etching International conference

Takayoshi Tsutsumi, Akiko Kobayashi, Nobuyoshi Kobayashi, Masaru Hori

AVS 19th International Conference on Atomic Layer Deposition (ALD 2019)/6th International Atomic Layer Etching Workshop (ALE 2019) 

Chlorinated Surface Layer of GaN in Quasi Atomic Layer Etching of Cyclic Processes of Chlorine Adsorption and Ion Irradiation International conference

Masaki Hasegawa, Takayoshi Tsutsumi, Atsushi Tanide, Hiroki Kondo, Makoto Sekine, Kenji Ishikawa, Masaru Hori

AVS 19th International Conference on Atomic Layer Deposition (ALD 2019)/6th International Atomic Layer Etching Workshop (ALE 2019) 

プラズマ支援原子層プロセスにおける表界面反応層制御・診断 Invited

堤　隆嘉，近藤 博基，石川 健治，関根 誠，堀 勝

第４回 Atomic Layer Process (ALP) Workshop 

Plasma-assisted Synthesis and Modification of Carbon Nanowalls for Emerging Applications Invited International conference

Hiroki Kondo, Takayoshi Tsutsumi, Keigo Takeda, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Mineo Hiramatsu

International Conference NANO-M&D2019 Fabrication, Properties and Applications of Nano-Materials and Nano-Devices 

Gene expression dynamics of glioblastoma cells in plasma-activated medium and plasma-activated Ringer's lactate solution International conference

Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Makoto Sekine, Hiroki Kondo, Hiroshi Hashizume, Takayoshi Tsutsumi, Kae Nakamura, Nobuhisa Yoshikawa, Hiroaki Kajiyama, Shinya Toyokuni, Fumitaka Kikkawa, Masaru Hori

24th International Symposium on Plasma Chemistry (ISPC24) 

Precisely wafer-temperature-controlled plasma etching and its application for nano-scale pattern fabrication of organic material International conference

Makoto Sekine, Yusuke Fukunaga, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Masaru Hori

24th International Symposium on Plasma Chemistry (ISPC24) 

In-liquid plasma formation at low temperature of in situ binding SnO2/Graphene International conference

Kenji Ishikawa, Rajit R.Borude, Hirotsugu Sugiura, Takayoshi Tsusumi, Hiroki Kondo, Nobuyuki Ikarashi, and Masaru Hori

10th International Workshop on Microplasmas IWM-10 

Synthesis mechanism and electrochemical properties of nanographene materials obtained by in-liquid plasma method Invited International conference

Hiroki Kondo, Keigo Takeda, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu, and Masaru Hori

2019 Global Conference on Carbon Nanotubes and Graphene Technologies 

Floating-Wire-Assisted Atmospheric Pressure Plasma for High-Speed and Large-Area Glass Treatment International conference

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

High-Speed Atomic Force Microscopy of Dynamical Changes of Supported Lipid Bilayers Containing Cholesterol in Plasma-Activated Lactec International conference

Sotaro Yamaoka, Hiroki Kondo, Hiroshi Hashizume, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Hiromasa Tanaka and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Electrochemical Impedance Analysis of Pt Nanoparticles-Supported Carbon Nanowalls for Fuel Cell Application International conference

Shun Imai, Hiroki Kondo, Hyungjun Cho, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Mineo Hiramatsu and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Ligh Source Wavelength Characteristics for Silicon-Wafer Temperature Measurement by Frequency-Domain Lowcoherence Interferometry International conference

Takayoshi Tsutsumi, Kenji Ishikawa, Takayuki Ohta, Masafumi Ito, Hiroki Kondo, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Effects of Hydroxy Group on Synthesis Rate and Crystallinity of Nanographene by In-liquid Plasma International conference

Hiroki Kondo, Keigo Takeda, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Synthesis, Characterization, and Study of Electrical Properties of Tin oxide-Graphene Composite Synthesized by Liquid Phase Plasma International conference

Ranjit Borude, Hirotsugu Sugiura, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

GaN film Etching at H-added Chlorine Plasma at High Temperature at 400 degree C International conference

Takahiro Omichi, Atsushi Tanide, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Control of sp2-C Fraction and Hardness of Amorphous Carbon Films by Formation of Precursor Radicals Depending on a Residence Time International conference

Hirotsugu Sugiura, Yasuyuki Ohashi, Lingyun Jia, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Toshio Hayashi, Keigo Takeda, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Aqueous Reactions in Non-equilibrium Atmospheric Pressure Plasma-activated Ringer s Lactate Solutions International conference

Yang Liu, Kenji Ishikawa, Hiromasa Tanaka, Hiroshi Hashizume, Takyoshi Tsutsumi, Fumitaka Kikkawa, Kae Nakamura, Masaaki Mizuno, Shinya Toyokuni and Hiroki Kondo

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Organic High Aspect Ratio Pattern Formation with Self-Limitation Manner by Plasma-Controlled Process based on Substrate Temperature Measurement International conference

Yusuke Fukunaga, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Lipid Accumulation of Pseudochoricystis Ellipsoidea by Irradiation of Nonequilibrium Atmospheric Pressure Plasma to Nourishing Solution International conference

Takumi Kato, Yugo Hosoi, Sotaro Yamaoka, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Intracellular Reactive Oxygen Species Responses of HeLa Cells Treated with PlasmaActivated Organics International conference

Shogo Maeda, Yugo Hosoi, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Elucidation of Electron Extinction Mechanism during Afterglow of Fluorocarbon Pulsed Plasma with Synchronized DC Bias International conference

Kazuya Nakane, Toshinari Ueyama, Xie Xitong, Takayoshi Tsutsumi, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Yoshinobu Ohya and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Regulation of Cell Proliferation Changing Duty Ratio of an Electrical Stimulation on Carbon Nanowalls Scaffold International conference

Tomonori Ichikawa, Hiroki Kondo, Hiroshi Hashizume, Hiromasa Tanaka, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Electrical Characterizations of Non-equilibrium Atmospheric Pressure Plasma International conference

Kaede Katsuno, Kenji Ishikawa, Takayoshi Tsutsumi, Keigo Takeda, Hiroshi Hashizume, Hiromasa Tanaka, Hiroki Kondo, Makoto Sekine and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Carbon Nanoflakes Involving Fe-N-C Bonds by Growth of In-liquid Plasma of Ethanol and Iron Phthalocyanine Mixture International conference

Ryo Hamaji, Tomoki Amano, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Keigo Takeda, Mineo Hiramatsu and Masaru Hori

11th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 12th International Conference on Plasma Nanotechnology and Science 

Nano-composite innovation based on carbon nanowalls and advanced plasma processes Invited International conference

Hiroki Kondo, Takayoshi Tsutsumi, Makoto Sekine, Kenji Ishikawa, Masaru Hori, Mineo Hiramatsu

7th International Conference on Advanced Plasma Technologies 

フルオロカーボンガスを用いた２周波容量結合型パルスプラズマに おける粒子密度のDC重畳効果 Invited

中根 一也、植山 稔正、解　錫同、堤　隆嘉、竹田 圭吾、近藤 博基、石川 健治、関根　誠、大矢 欣伸、堀　勝

第215回Siテクノロジー分科会研究会 

Trimming Process with Feedback Control of Wafer Temperature for Organic Material Invited International conference

T. Tsutsumi, Y. Fukunaga, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori

28th Annual Meeting of MRS-J 

Cell responses of Pseudochoricystis ellipsoidea on atmospheric pressure plasma treatments International conference

T. Kato, Y. Hosoi, S.Yamaoka, H.Hashizume, K.Ishikawa, H.Tanaka, T.Tsutsumi, H.Kondo, M.Sekine and M.Hori

28th Annual Meeting of MRS-J 

Effects and Mechanism of Electric Stimulation Through Carbon Nanowalls Scaffold on Proliferation and Differentiation of Cultured Cells International conference

Hiroki Kondo, Tomonori Ichikawa, Kenji Ishikawa, Hiromasa Tanaka, Takayoshi Tsutsumi, Keigo Takeda, Makoto Sekine, Masaru Hori, Mineo Hiramatsu

A Meeting of the Materials Research Society 

In situ analysis of ion-irradiated and chlorinated GaN surface during cyclic etching processes International conference

M. Hasegawa, T. Tsutsumi, A. Tanide, H. Kondo, M. Sekine, K. Ishikawa, M. Hori

The 40th International Symposium on Dry Process 

Defect termination mechanism in amorphous carbon films by atomic hydrogen radicals International conference

The 40th International Symposium on Dry Process 

High temperature etching of GaN with H2-added Cl2 plasma International conference

T. Omichi, A. Tanide, K. Ishikawa, T. Tsutsumi, H. Kondo, M. Sekine, M. Hori

The 40th International Symposium on Dry Process 

Fundamental study of the interaction of plasma species with organic materials by experimental and computational approaches International conference

Y. Fukunaga, P. Ventzek, B. Lane, A. Ranjan, G. S. Hwang, G. Hartmann, R. Upadhyay, L. L. Raja, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori

The 40th International Symposium on Dry Process 

Floating-Wire-Assisted Atmospheric Pressure Plasma for High-Speed Glass Etching International conference

Thi-Thuy-Nga Nguyen, M. Sasaki, H. Odaka, T. Tsutsumi, K. Ishikawa and M. Hori

The 40th International Symposium on Dry Process 

Effects of synchronized DC bias on densities of charged species in pulsed plasmas of fluorocarbon gases International conference

K. Nakane, T. Ueyama, T. Tsutsumi, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, Y. Ohya, and M. Hori

The 40th International Symposium on Dry Process 

Plasma Modification of Si-compound Surfaces: Opportunities for Atomic Layer Etching International conference

R.H.J. Vervuurt, K. Nakane, T. Tsutsumi, A. Kobayashi, M. Hori and N. Kobayashi

The 40th International Symposium on Dry Process 

Synthesis of composite of tin oxide particles and graphene sheets employing the in-liquid plasma process International conference

Ranjit R. Borude , Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo and Masaru Hori

The 40th International Symposium on Dry Process 

Effects of electrical and spectroscopic properties of nonequilibrium atmospheric pressure plasma source on adhesion strengths of a polymeric resin International conference

K. Katsuno, T. Tsutsumi, K. Ishikawa, K. Takeda, T. Jindo, S. Takikawa, A. Niwa, S. Takashima, Y. Nonoyama, H. Hashizume, H. Tanaka, H. Kondo, M. Sekine, and M. Hori

The 40th International Symposium on Dry Process 

Etch Characteristics of Atomic Layer Etching by Alternating Fluorocarbon Deposition and Oxygen Plasma Etching International conference

T. Tsutsumi, A. Kobayashi, T. Nozawa, N. Kobayashi and M. Hori

The 40th International Symposium on Dry Process 

Spatiotemporal behavior of OH radical in AC-excited atmospheric pressure Ar plasma jet generated in open air International conference

Keigo Takeda, Ren Kuramashi, Kenji Ishikawa ,Takayuki Tsutsumi, Masaru Hori

71st Annual Gaseous Electronics Conference 

Floating-wire-assisted remote generation of high-density atmospheric pressure inductively coupled plasma International conference

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

71st Annual Gaseous Electronics Conference 

Behaviors of Charged Species in Afterglow of Dual Frequency Pulsed Capacitively Coupled Plasma with a Synchronous Negative DC-bias International conference

T. Tsutsumi, T. Ueyama, K. Ishikawa, H. Kondo, M. Sekine, Y. Ohya, M. Hori

AVS 65th INTERNATIONAL SYMPOSIUM & EXHIBITION 2018 

Fundamental Studies of Plasma Species with Organic Materials of Varying Hydrogen and Oxygen Composition by Computational and Experimental Approaches International conference

Y. Fukunaga, P. Ventzek, B. Lane, A. Ranjan, M. Sekine, T. Tsutsumi, H. Kondo, K. Ishikawa, R. Upadhyay, L. L. Raja, G. Hartmann, G. S. Hwang, M. Hori

AVS 65th INTERNATIONAL SYMPOSIUM & EXHIBITION 2018 

Fine Temperature Monitoring of Si Wafer for Plasma Processing Invited International conference

Masafumi Ito, Takayuki Ohta, Takayoshi Tsutsumi, Masaru Hori

AIMES2018 

Si系材料のフルオロカーボンプラズマ支援原子層エッチング Invited

堤 隆嘉、近藤 博基、石川 健治、関根 誠、小林 伸好、堀 勝

第79回応用物理学会秋季学術講演会 

Cl2プラズマによるGaN高温エッチングのH2添加効果

大道貴裕、 谷出敦、 石川健治、 堤隆嘉、 近藤博基、 関根誠、 堀勝

第79回　応用物理学会秋季学術講演会 

原子状水素によるアモルファスカーボン膜の欠陥終端機構

大橋 靖之, 杉浦 啓嗣, 近藤 博基, 石川 健治, 堤 隆嘉, 関根 誠, 堀 勝

第79回　応用物理学会秋季学術講演会 

蓚酸カルシウム結晶化過程のプラズマ照射単糖溶液中活性有機物質

岡部 萌、石川 健治、田中 宏昌、橋爪 博司、堤 隆嘉、近藤 博基、関根 誠、堀 勝

第79回　応用物理学会秋季学術講演会 

高電位試験時における白金微粒子担持カーボンナノウォール電極の分極特性の変化

今井 駿, 近藤 博基, 石川 健治, 堤 隆嘉, 平松 美根男, 関根 誠, 堀 勝

第79回　応用物理学会秋季学術講演会 

カーボンナノウォール足場上での電気刺激下細胞培養における分化制御機構

市川 知範, 近藤 博基, 橋爪 博司, 田中 宏昌, 堤 隆嘉, 石川 健治, 堀 勝

第79回　応用物理学会秋季学術講演会 

In-situ表面解析手法による水素プラズマのSiNx表面改質機構

中根一也、ルネイ ヘリンカス ヨセフ フェーフィート、堤隆嘉、小林明子、小林伸好、堀勝

第79回　応用物理学会秋季学術講演会 

シュードコリシスティス藻培養への大気圧プラズマ処理効果

加藤拓海，細井祐吾, 山岡壮太郎, 橋爪博司, 石川健治, 田中宏昌, 堤隆嘉，近藤博基, 関根誠, 堀勝

第79回　応用物理学会秋季学術講演会 

液中プラズマによるナノグラフェン合成におけるヒロドキシル基の効果

近藤 博基、安藤 睦、石川 健治、堤 隆嘉、平松 美根男、関根 誠、堀 勝

第79回　応用物理学会秋季学術講演会 

プラズマ活性ラクテック（PAL）で培養したHeLa細胞応答メカニズム

前田 昌吾、細井 祐吾、石川 健治、橋爪 博司、田中 宏昌、堤 隆嘉、近藤 博基、関根 誠、堀 勝

第79回　応用物理学会秋季学術講演会 

プラズマプロセス制御による線幅10 nmの高アスペクト有機薄膜パターン形成

福永 裕介、堤 隆嘉、石川 健治、近藤 博基、関根 誠、堀 勝

第79回　応用物理学会秋季学術講演会 

ガス滞在時間に依存した成膜前駆体の生成に基づくアモルファスカーボン膜中のsp2炭素結合の制御

杉浦 啓嗣、大橋 靖之、賈 凌雲、近藤 博基、石川 健治、堤 隆嘉、竹田 圭吾、関根 誠、堀 勝

第79回　応用物理学会秋季学術講演会 

Etching of glass by floating-wire assisted atmospheric pressure plasma

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

Arイオン照射窒化ガリウム表面の塩素吸着挙動

長谷川将希，堤隆嘉，谷出敦，近藤博基，関根誠，石川健治，堀勝

第79回　応用物理学会秋季学術講演会 

Liquid phase plasma assisted synthesis of Tin oxide - Graphene composite

Ranjit Borude, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Masaru Hori

Aqueous Reactions of Radicals in Non-equilibrium Atmospheric Pressure Plasma-activated Lactec Solutions

Yang Liu,Kaede Katsuno,Yugo Hosoi,Kenji Ishikawa,Hiroshi Hashizume,Hiromasa Tanaka,Takayoshi Tsutsumi,Hiroki Kondo,Makoto Sekine,Masaru Hori

In situ Quantitative Analysis of Chlorine Adsorption on Ion-irradiated GaN for Atomic Layer Etching International conference

Masaki Hasegawa, Takayoshi Tsutsumi, Hiroki Kondo, Kenji Ishikawa, Masaru Hori

5th International Atomic Layer Etching Workshop 

Mechanisms of plasma jets impinging upon liquids International conference

T. Brubaker, K. Ishikawa, H. Hashizume, H. Tanaka, T. Tsutsumi, H. Kondo, S. Knecht, S. Bilén, and M. Hori

ICPM7 

パルス変調プラズマ中の準安定 Ar 密度変化と光ダメージの相関

武田 直己、三好 康史、石川 健治、堤 隆嘉、竹田 圭吾、太田 貴之、近藤 博基、深沢 正永、辰巳 哲也、堀 勝

第65回応用物理学会春季学術講演会 

ラジカル注入型プラズマ励起化学気相堆積法において間欠水素プラズマ処理がアモルファスカーボン膜の結合構造に及ぼす効果

杉浦 啓嗣、近藤 博基、石川 健治、堤 隆嘉、竹田 圭吾、関根 誠、堀 勝

第65回応用物理学会春季学術講演会 

液中プラズマで合成した鉄含有カーボンナノフレークの酸素還元特性

天野 智貴、近藤 博基、堤 隆嘉、石川 健治、平松 美根男、堀 勝

第65回応用物理学会春季学術講演会 

窒化ガリウムの原子層エッチングに向けたラジカル吸着機構の解明

長谷川 将希、堤 隆嘉、谷出 敦、近藤 博基、石川 健治、堀 勝

第65回応用物理学会春季学術講演会 

AC励起非平衡大気圧Arプラズマ生成活性種の時空間分布計測

倉増 廉，竹田 圭吾，石川 健治，堤 隆嘉，橋爪 博司，田中 宏昌，近藤 博基，関根 誠，堀 勝

第65回応用物理学会春季学術講演会 

カーボンナノウォール足場上の細胞増殖に及ぼす電気刺激効果

市川 知範、近藤 博基、橋爪 博司、田中 宏昌、堤 隆義、石川 健治、堀 勝

第65回応用物理学会春季学術講演会 

アルゴンイオン照射によるフッ素化Si(111)表面の形態変化

浅野 敦紀, 堤 隆嘉，近藤 博基, 石川 健治, 関根 誠, 堀 勝

第65回応用物理学会春季学術講演会 

SUBSTRATE TEMPERATURE MEASURMENT AND CONTROL FOR FABRICATION OF ORGANIC DEVICES WITH NANOSTRUCTURE Invited International conference

T. Tsutsumi

International workshop on plasma synthesis of nanomaterials and its applications for sensor devices 

Plasma Surface Treatment of Carbon Films Deposited by Magnetron Sputtering International conference

Visualization of Advection in Plasma-liquid Interactions: Flow Due to an Impinging Plasma Jet International conference

Polycarbonate Surface after Atmospheric Pressure Plasma Treatments International conference

High Temperature Damegeless Etching of GaN Employing BCl3-Cl2 plasma International conference

BEHAVIOR OF THE ELECTRON AND RONS IN GAS AND LIQUID PHASE OF LASER GENERATED PLASMA ACTIVATED MEDIUM International conference

Y. Kurokawa, T. Tsutsumi, K. Takeda, K. Ishikawa, H. Hashizume, H. Tanaka, H. Kondo, M. Hori

2nd International Workshop On Plasma Agriculture 

A Novel Designed High-density Atomospheric Pressure Inductively Coupled Plasma Remotely Generated at the Downstream Side of a Quartz Tube Using a Floating Wire International conference

Thi-Thuy-Nga Nguyen, Minoru Aasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori

2nd International Workshop On Plasma Agriculture 

Understanding morphology and chemical bonds of Si surface in cyclic CF4/Ar plasma process by surface analysis without air exposure International conference

A. Asano, T. Tsutsumi, H. Kondo, K. Ishikawa, M. Hori

10th Anniversary International Symposium on Advanced Plasma Science 

Cytotoxic substances in the laser generated plasma activated medium (LPAM) International conference

Y. Kurokawa, K. Takeda, K. Ishikawa, H. Hashizume, H. Tanaka, T. Tsutsumi, H. Kondo, M. Hori

10th Anniversary International Symposium on Advanced Plasma Science 

REACTIVE SPECIES DENSITY PROFILES IN EFFULUENT OF THE ATMOSPHERIC PRESSURE PLASMA SOURCE International conference

R. Kuramashi, K. Takeda, K. Ishikawa, T. Tsutsumi, H. Hashizume, H. Tanaka, H. Kondo, M. Sekine, M. Hori

10th Anniversary International Symposium on Advanced Plasma Science 

Behavior of negative ions in asymmetric capacitively coupled plasma discharge produced in Ar/O2/C4F8 gas mixture at 100 MHz International conference

H. Sugiura, L. Jia, H. Kondo, K. Ishikawa, T. Tsutsumi, M. Sekine, M. Hori 

The 39th International Symposium on Dry Process 

Behavios of electrons and fluorocarbon radicals in synchronized dc-imposed pulsed plasma International conference

T. Tsutsumi, N. Sirse, M. Sekine, A. R. Ellingboe, M. Hori

The 39th International Symposium on Dry Process 

Effects of residence time on dissociation of precursors at deposition of amorphous carbon film by H2/CH4 plasma International conference

T. Ueyama, T. Tsutsumi, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, Y. Ohya, M. Hori

The 39th International Symposium on Dry Process 

非平衡大気圧プラズマ源における誘電体壁の放電特性への影響

勝野 楓、石川 健治、堤 隆嘉、武田 圭吾、橋爪 博司、田中 宏昌、近藤 博基、関根 誠、堀 勝

第78回応用物理学会秋季学術講演会 

ガラスの絶縁破壊微細貫通加工と絶縁性液体塗布の効果

村上開士、吉武尚輝、石川健治、裏地啓一郎、龍腰健太郎、堤隆嘉、近藤博基、堀勝

第78回応用物理学会秋季学術講演会 

酸素プラズマ中の解離度および電子温度空間分布の表面材料依存性

堤 隆嘉，Andrew R.Gibson，Deborah O’Connell，Timo Gans，堀 勝

第78回応用物理学会秋季学術講演会 

高温での窒化ガリウム低損傷塩素エッチング

石川 健治, 劉 沢成, 今村 真人, 堤 隆嘉, 近藤 博基, 小田 修, 関根 誠, 堀 勝

第78回応用物理学会秋季学術講演会 

ポリカーボネート表面のプラズマ処理による接着力増強効果

高橋 美香, 倉家 尚之, 石川 健治, 近藤 真悟, 青木 孝司, 堤 隆嘉, 近藤 博基, 関根 誠, 堀 勝

第78回応用物理学会秋季学術講演会 

ラジカル注入型プラズマ励起化学気相堆積法においてRFバイアス時間変調がアモルファスカーボン膜の結合構造に及ぼす効果

杉浦 啓嗣、近藤 博基、石川 健治、堤 隆嘉、竹田 圭吾、関根 誠、堀 勝

第78回応用物理学会秋季学術講演会 

Etch profile control of ALD-SiO2 film assisted by alternating ALE process of fluorocarbon deposition and O2 plasma etching International conference

M. Zaitsu, T. Tsutsumi, A. Kobayashi, H. Kondo, M. Hori, T. Nozawa, N. Kobayashi

4th International Workshop on Atomic Layer Etching 

Advanced Plasma Etching Processing: Atomic Layer Etching for Nanoscale Devices Invited International conference

T. Tsutsumi, M. Zaitsu, A. Kobayashi, N. Kobayashi, M. Hori

231st Electrochemical Society 

Energy Balance Analysis by High-Precise Wafer Temperature Monitoring in Plasma Processing Invited International conference

T. Tsutsumi

The 15th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics and The 9th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 

Behavior of Electron and Negative Ion Density in Very High Frequency Capacitively Coupled Plasma

T. Takayoshi, N. Sirse, A. R Ellingboe, M. Sekine, M. Hori

酸素プラズマによる新規原子層エッチングプロセス Invited

堤 隆嘉, 財津 優, 小林 明子, 小林 伸好, 堀 勝

第199回Siテクノロジー分科会研究会 

Advanced Plasma Etching Processing with Feedback Control of Wafer Temperature for Fabrication of Atomic-Scale Organic Devices International conference

T. Tsutsumi, Y. Fukunaga, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori

26th Annual Meeting of MRS-J 

Phase-resolved measurement of electron density in afterglow of synchronized dc-imposed pulsed plasmas of fluorocarbon based gases International conference

T. Ueyama, M. Iwata, Y. Fukunaga, T. Tsutsumi, K. Takeda, K. Ishikawa, M. Sekine, Y. Ohya, M. Hori, and H. Sugai

2016 International Symposium on Dry Process, G-3 

Electron and negative ion densities in a CW and pulsed 100 MHz capacitively coupled plasma discharge International conference

N. Sirse, A. Ellingboe, T. Tsutsumi, S. Makoto, M. Hori

69th Annual Gaseous Electronics Conference 

Control of Internal Plasma Parameters Toward Atomic Level Processing Invited International conference

M. Sekine, T. Tsutsumi, Y. Fukunaga, K. Takeda, H. Kondo, K. Ishikawa, M. Hori

PRiME 2016 

Electron and negative ion diagnostic in a CW and pulsed, 100 MHz, capacitively coupled plasma discharge International conference

N. Sirse, T. Tsutsumi, M. Sekine, M. Hori, A. Ellingboe

The 6th International Conference on Microelectronics and Plasma Technology 

DCシンクロパルスプラズマを用いた最先端絶縁膜エッチングプロセスにおける電子の電極間密度分布およびアフターグローでの挙動

植山 稔正, 岩田 学, 福永 裕介, 堤 隆嘉, 竹田 圭吾, 近藤 博基, 石川 健治, 関根 誠, 大矢 欣伸, 堀 勝, 菅井 秀郎

第77回秋季応用物理学会秋季学術講演会 

Vertical distribution measurement of electron density and optical emission in afterglow of pulsed fluorocarbon plasma International conference

T. Ueyama, M. Iwata, Y. Fukunaga, T. Tsutsumi, K. Takeda, , K. Ishikawa, M. Sekine, Y. Ohya, M. Hori, H. Sugai

7th International Workshop on Plasma Spectroscopy 

A novel atomic layer etching of SiO2 with alternating O2 plasma with fluorocarbon film deposition International conference

T. Tsutsumi, M. Zaitsu, A. Kobayashi, H. Kondo, T. Nozawa, N. Kobayashi, M. Hori

3rd International Workshop on Atomic Layer Etching 

有機膜表面における活性種によるエッチング反応の基板温度依存性

福永 裕介, 堤 隆嘉, 竹田 圭吾, 石川 健治, 近藤 博基, 関根 誠, 堀 勝

第63回応用物理学会春季学術講演会 

Low-temperature PECVD process of silicon nitride film with radical and plasma diagnostics International conference

B. B. Sahu, Jeon G. Han, Y. Y. Yin, J. S. Lee, Su. B. Lee, T. Tsutsumi, K. Ishikawa, M. Hori

8th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 9th International Conference on Plasma Nanotechnology and Science 

Control of Radial Distribusion of Wafer Temperature during Plasma Process International conference

T. Tsutsumi, K. Ishikawa, K. Takeda, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori

8th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 9th International Conference on Plasma Nanotechnology and Science 

Evaluation of Substrate Temperature Effect on Etch Profile Development by Intermittent Plasma Generation for Substrate Temperature Control International conference

Y. Fukunaga, T. Tsutsumi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

8th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 9th International Conference on Plasma Nanotechnology and Science 

Plasma Etching Process based on Teal-time Monitoring of Radical Density and Substrate Temperature Invited International conference

K. Takeda, Y. Fukunaga, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

The 50th Winter Annual Conference of the Korean Vacuum Society 

Atomic-scale plasma process based on substrate-temperature control system Invited International conference

T. Tsutsumi, Y. Fukunaga, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori

Asia international workshop in plasma science 

Wafer temperature dependence of organic film etch reaction in H2/N2 plasma International conference

Y. Fukunaga, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

The 37th International Symposium on Dry Process 

Highly Precise Control of Substrate Temperature During Plasma Etching and the Effect on Etched Profile International conference

Y. Fukunaga, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

The 21st Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 

Role Of RF/UHF Hybrid Plasmas On The Low Temperature Deposition Of The SiNx: H Film In PECVD Process International conference

J. Han, B. Sahu, K. Shin, T. Tsutsumi, M. Hori

The 10th Asian-European International Conference On Plasma Surface Engineering 

Silicon Substrate Temperature Measurement In Sputtering Processes Using Optical Low-coherence Interferometry International conference

K. Hattori, T. Ohta, M. Ito, T. Tsutsumi, K. Takeda, M. Hori

The 10th Asian-European International Conference On Plasma Surface Engineering 

Prediction of Radial Distribution from Temporal Variation of Wafer Temperature in a Plasma Reactor International conference

T. Tsutsumi, K. Ishikawa, K. Takeda, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori

The 10th Asian-European International Conference On Plasma Surface Engineering 

Influences of wafer temperature on etch rates and profiles of organic films in H2/N2 plasma International conference

T. Tsutsumi, Y. Fukunaga, K. Takeda, K. Ishikawa, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori

The 10th Asian-European International Conference On Plasma Surface Engineering 

Investigation of Temperature Parameter on Si Substrate Temperature Measurement UsingSpectral-Domain Optical Low-Coherence Interferometry International conference

K. Hattori, T. Ohta, M. Ito, T. Tsutsumi, K. Takeda, M. Hori

7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma Nanotechnology and Science 

Analysis of Temporal Changes on Substrate Temperature: Heat Fluxes during Plasma Processes and Influence of Chamber Parts International conference

T. Tsutsumi, Y. Fukunaga, K. Ishikawa, K. Takeda, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori

7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma Nanotechnology and Science 

Etching Process with System of Control of Wafer Temperatures measured by Non-contact Fourier Domain Low Coherence Interferometry International conference

Y. Fukunaga, T. Tsutsumi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma Nanotechnology and Science 

有機膜エッチングにおける側壁保護作用の基板温度依存性

福永 裕介, 堤 隆嘉, 竹田 圭吾, 石川 健治, 近藤 博基, 関根 誠, 堀 勝

第62回応用物理学会春季学術講演会 

プラズマプロセス中の基板温度制御のための熱流束モデルの解析

堤 隆嘉, 福永 裕介, 石川 健治, 竹田 圭吾, 近藤 博基, 太田 貴之, 伊藤 昌文, 関根 誠, 堀 勝

第62回応用物理学会春季学術講演会 

高速・高精度基板温度制御によるエッチング形状

堤 隆嘉, 福永 祐介, 石川 健治, 竹田 圭吾, 近藤 博基, 太田 貴之, 伊藤 昌文, 関根 誠, 堀 勝

応用物理学会SC東海地区学術講演会 2014 

高速・高精度基板温度センサとパルス放電による基板温度制御

堤 隆嘉, 福永 裕介, 石川 健治, 竹田 圭吾, 近藤 博基, 太田 貴之, 伊藤 昌文, 関根 誠, 堀 勝

第75回応用物理学会秋季学術講演会 

基板温度制御による有機Low-k膜のエッチング形状制御

福永 裕介, 堤 隆嘉, 竹田 圭吾, 石川 健治, 近藤 博基, 関根 誠, 堀 勝

第75回応用物理学会秋季学術講演会 

非接触基板温度計測システムを用いたプラズマプロセス中の基板温度および熱流速計測

堤 隆嘉, 竹田 圭吾, 石川 健治, 近藤 博基, 太田 貴之, 伊藤 昌文, 関根 誠, 堀 勝

第61回応用物理学会春季学術講演会 

Effect of Ambient Air Engulfment on Generation of Activated Species in 60 Hz Non-Equilibrium Atmospheric Pressure Ar Plasma Jet International conference

S. Liang, T. Tsutsumi, A. Ando, K. Sun, K. Takeda, H. Kondo, K. Ishikawa, H. Kano, M. Sekine, M. Hori

7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 

Measurement of Heat Fluxes of Si Substrate from Plasma by Using Frequency Low Coherence Interferometer International conference

T. Tsutsumi, K. Ishikawa, K. Takeda, T. Ohta, M. Ito, H. Kondo, M. Sekine, M. Hori

6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 

Accuracy of substrate temperature measurements using optical low coherence interferometry International conference

T. Ohta, H. Kato, T. Tsutsumi, K. Takeda, M. Hori, M. Ito

8th International Conference on Reactive Plasmas 31st Symposium on Plasma Processing